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An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of
electronic circuit An electronic circuit is composed of individual electronic components, such as resistors, transistors, capacitors, inductors and diodes, connected by conductive wires or traces through which electric current can flow. It is a type of electrical ...
s on one small flat piece (or "chip") of
semiconductor A semiconductor is a material which has an electrical resistivity and conductivity, electrical conductivity value falling between that of a electrical conductor, conductor, such as copper, and an insulator (electricity), insulator, such as glas ...
material, usually
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
.
Large numbers Large numbers are numbers significantly larger than those typically used in everyday life (for instance in simple counting or in monetary transactions), appearing frequently in fields such as mathematics, cosmology, cryptography, and statistical m ...
of tiny
MOSFET The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
s (metal–oxide–semiconductor
field-effect transistors The field-effect transistor (FET) is a type of transistor that uses an electric field to control the flow of Electric current, current in a semiconductor. FETs (JFETs or MOSFETs) are devices with three terminals: ''source'', ''gate'', and ''dra ...
) integrate into a small chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete
electronic component An electronic component is any basic discrete device or physical entity in an electronic system used to affect electrons or their associated fields. Electronic components are mostly industrial products, available in a singular form and are not ...
s. The IC's
mass production Mass production, also known as flow production or continuous production, is the production of substantial amounts of standardized products in a constant flow, including and especially on assembly lines. Together with job production and batch ...
capability, reliability, and building-block approach to
integrated circuit design Integrated circuit design, or IC design, is a sub-field of electronics engineering, encompassing the particular logic and circuit design techniques required to design integrated circuits, or ICs. ICs consist of miniaturized electronic component ...
has ensured the rapid adoption of standardized ICs in place of designs using discrete
transistor upright=1.4, gate (G), body (B), source (S) and drain (D) terminals. The gate is separated from the body by an insulating layer (pink). A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch e ...
s. ICs are now used in virtually all electronic equipment and have revolutionized the world of
electronics The field of electronics is a branch of physics and electrical engineering that deals with the emission, behaviour and effects of electrons using electronic devices. Electronics uses active devices to control electron flow by amplification ...
.
Computer A computer is a machine that can be programmed to Execution (computing), carry out sequences of arithmetic or logical operations (computation) automatically. Modern digital electronic computers can perform generic sets of operations known as C ...
s,
mobile phone A mobile phone, cellular phone, cell phone, cellphone, handphone, hand phone or pocket phone, sometimes shortened to simply mobile, cell, or just phone, is a portable telephone that can make and receive calls over a radio frequency link whil ...
s and other
home appliance A home appliance, also referred to as a domestic appliance, an electric appliance or a household appliance, is a machine which assists in household functions such as cooking, cleaning and food preservation. Appliances are divided into three ty ...
s are now inextricable parts of the structure of modern societies, made possible by the small size and low cost of ICs such as modern computer processors and
microcontrollers A microcontroller (MCU for ''microcontroller unit'', often also MC, UC, or μC) is a small computer on a single VLSI integrated circuit (IC) chip. A microcontroller contains one or more CPUs ( processor cores) along with memory and programmabl ...
.
Very-large-scale integration Very large-scale integration (VLSI) is the process of creating an integrated circuit (IC) by combining millions or billions of MOS transistors onto a single chip. VLSI began in the 1970s when MOS integrated circuit (Metal Oxide Semiconductor) c ...
was made practical by technological advancements in
metal–oxide–silicon The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
(MOS)
semiconductor device fabrication Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuit (IC) chips such as modern computer processors, microcontrollers, and memory chips such as NAND flash and DRAM that are pres ...
. Since their origins in the 1960s, the size, speed, and capacity of chips have progressed enormously, driven by technical advances that fit more and more MOS transistors on chips of the same size – a modern chip may have many billions of MOS transistors in an area the size of a human fingernail. These advances, roughly following
Moore's law Moore's law is the observation that the number of transistors in a dense integrated circuit (IC) doubles about every two years. Moore's law is an observation and projection of a historical trend. Rather than a law of physics, it is an empir ...
, make the computer chips of today possess millions of times the capacity and thousands of times the speed of the computer chips of the early 1970s. ICs have two main advantages over
discrete circuit An electronic circuit is composed of individual electronic components, such as resistors, transistors, capacitors, inductors and diodes, connected by conductive wires or traces through which electric current can flow. It is a type of electrical ...
s: cost and performance. The cost is low because the chips, with all their components, are printed as a unit by
photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
rather than being constructed one transistor at a time. Furthermore, packaged ICs use much less material than discrete circuits. Performance is high because the IC's components switch quickly and consume comparatively little power because of their small size and proximity. The main disadvantage of ICs is the high cost of designing them and fabricating the required
photomask A photomask is an opaque plate with holes or transparencies that allow light to shine through in a defined pattern. They are commonly used in photolithography and the production of integrated circuits (ICs or "chips") in particular. Masks are used ...
s. This high initial cost means ICs are only commercially viable when high production volumes are anticipated.


Terminology

An ''integrated circuit'' is defined as:
A circuit in which all or some of the circuit elements are inseparably associated and electrically interconnected so that it is considered to be indivisible for the purposes of construction and commerce.
Circuits meeting this definition can be constructed using many different technologies, including
thin-film transistor A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is thin relative to the plane of the device. TFTs are grown on a supporting (but non-conducting) substrate. A common substrate is glass, becaus ...
s, thick-film technologies, or
hybrid integrated circuit A hybrid integrated circuit (HIC), hybrid microcircuit, hybrid circuit or simply hybrid is a miniaturized electronic circuit constructed of individual devices, such as semiconductor devices (e.g. transistors, diodes or monolithic ICs) and pa ...
s. However, in general usage ''integrated circuit'' has come to refer to the single-piece circuit construction originally known as a ''monolithic integrated circuit'', often built on a single piece of silicon.


History

An early attempt at combining several components in one device (like modern ICs) was the
Loewe 3NF The Loewe 3NF was an early attempt to combine several functions in one electronic device. Produced by the German Loewe-Audion GmbH as early as 1926, the device consisted of three triode valves (tubes) in a single glass envelope together with t ...
vacuum tube from the 1920s. Unlike ICs, it was designed with the purpose of
tax avoidance Tax avoidance is the legal usage of the tax regime in a single territory to one's own advantage to reduce the amount of tax that is payable by means that are within the law. A tax shelter is one type of tax avoidance, and tax havens are jurisdict ...
, as in Germany, radio receivers had a tax that was levied depending on how many tube holders a radio receiver had. It allowed radio receivers to have a single tube holder. Early concepts of an integrated circuit go back to 1949, when German engineer
Werner Jacobi Werner Jacobi (March 31, 1904 – probably May 3, 1985) was a German physicist and inventor. Life and work Jacobi studied mechanical engineering at the Technical University of Munich and then physics at the Ludwig Maximilian University of Mu ...
( Siemens AG) filed a patent for an integrated-circuit-like semiconductor amplifying device showing five
transistor upright=1.4, gate (G), body (B), source (S) and drain (D) terminals. The gate is separated from the body by an insulating layer (pink). A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch e ...
s on a common substrate in a three-stage
amplifier An amplifier, electronic amplifier or (informally) amp is an electronic device that can increase the magnitude of a signal (a time-varying voltage or current). It may increase the power significantly, or its main effect may be to boost the v ...
arrangement. Jacobi disclosed small and cheap
hearing aid A hearing aid is a device designed to improve hearing by making sound audible to a person with hearing loss. Hearing aids are classified as medical devices in most countries, and regulated by the respective regulations. Small audio amplifiers su ...
s as typical industrial applications of his patent. An immediate commercial use of his patent has not been reported. Another early proponent of the concept was
Geoffrey Dummer Geoffrey William Arnold Dummer, MBE (1945), C. Eng., IEE Premium Award, FIEEE, MIEE, USA Medal of Freedom with Bronze Palm (25 February 1909 – 9 September 2002) was an English electronics engineer and consultant, who is credited as be ...
(1909–2002), a radar scientist working for the
Royal Radar Establishment The Royal Radar Establishment was a research centre in Malvern, Worcestershire in the United Kingdom. It was formed in 1953 as the Radar Research Establishment by the merger of the Air Ministry's Telecommunications Research Establishment (TRE) a ...
of the British
Ministry of Defence {{unsourced, date=February 2021 A ministry of defence or defense (see spelling differences), also known as a department of defence or defense, is an often-used name for the part of a government responsible for matters of defence, found in states ...
. Dummer presented the idea to the public at the Symposium on Progress in Quality Electronic Components in Washington, D.C. on 7 May 1952. He gave many symposia publicly to propagate his ideas and unsuccessfully attempted to build such a circuit in 1956. Between 1953 and 1957,
Sidney Darlington Sidney Darlington (July 18, 1906 – October 31, 1997) was an American electrical engineer and inventor of a transistor configuration in 1953, the Darlington pair. He advanced the state of network theory, developing the insertion-loss synth ...
and Yasuo Tarui (
Electrotechnical Laboratory The , or AIST, is a Japanese research facility headquartered in Tokyo, and most of the workforce is located in Tsukuba Science City, Ibaraki, and in several cities throughout Japan. The institute is managed to integrate scientific and engineeri ...
) proposed similar chip designs where several transistors could share a common active area, but there was no
electrical isolation Galvanic isolation is a principle of isolating functional sections of electrical systems to prevent current flow; no direct conduction path is permitted.John Huntington ''Show Networks and Control Systems: Formerly Control Systems for Live E ...
to separate them from each other. The monolithic integrated circuit chip was enabled by the inventions of the
planar process The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which silicon integrated circuit chips a ...
by
Jean Hoerni Jean Amédée Hoerni (September 26, 1924 – January 12, 1997) was a Swiss-American engineer. He was a silicon transistor pioneer, and a member of the " traitorous eight". He developed the planar process, an important technology for reliably fa ...
and
p–n junction isolation p–n junction isolation is a method used to electrically isolate electronic components, such as transistors, on an integrated circuit (IC) by surrounding the components with reverse biased p–n junctions. Introduction By surrounding a transis ...
by
Kurt Lehovec Kurt Lehovec (June 12, 1918 – February 17, 2012) was one of the pioneers of the integrated circuit. While also pioneering the photo-voltaic effect, light-emitting diodes and History of the battery#Invention, lithium batteries, he innovated ...
. Hoerni's invention was built on
Mohamed M. Atalla Mohamed M. Atalla ( ar, محمد عطاالله; August 4, 1924 – December 30, 2009) was an Egyptian-American engineer, physicist, cryptographer, inventor and entrepreneur. He was a semiconductor pioneer who made important contributions to ...
's work on surface passivation, as well as Fuller and Ditzenberger's work on the diffusion of boron and phosphorus impurities into silicon,
Carl Frosch Carl John Frosch (September 6, 1908 – May 18, 1984)Carl J Frosch (1908-1984)
Find A Grave was a ...
and Lincoln Derick's work on surface protection, and Chih-Tang Sah's work on diffusion masking by the oxide.


First integrated circuits

A precursor idea to the IC was to create small ceramic substrates (so-called ''micromodules''), each containing a single miniaturized component. Components could then be integrated and wired into a bidimensional or tridimensional compact grid. This idea, which seemed very promising in 1957, was proposed to the US Army by
Jack Kilby Jack St. Clair Kilby (November 8, 1923 – June 20, 2005) was an American electrical engineer who took part (along with Robert Noyce of Fairchild) in the realization of the first integrated circuit while working at Texas Instruments (TI) in 1 ...
and led to the short-lived Micromodule Program (similar to 1951's Project Tinkertoy). However, as the project was gaining momentum, Kilby came up with a new, revolutionary design: the IC. Newly employed by
Texas Instruments Texas Instruments Incorporated (TI) is an American technology company headquartered in Dallas, Texas, that designs and manufactures semiconductors and various integrated circuits, which it sells to electronics designers and manufacturers globall ...
, Kilby recorded his initial ideas concerning the integrated circuit in July 1958, successfully demonstrating the first working example of an integrated circuit on 12 September 1958.''The Chip that Jack Built''
(c. 2008), (HTML), Texas Instruments, Retrieved 29 May 2008.
In his patent application of 6 February 1959, Kilby described his new device as "a body of semiconductor material … wherein all the components of the electronic circuit are completely integrated". The first customer for the new invention was the
US Air Force The United States Air Force (USAF) is the air service branch of the United States Armed Forces, and is one of the eight uniformed services of the United States. Originally created on 1 August 1907, as a part of the United States Army Signal ...
. Kilby won the 2000
Nobel Prize The Nobel Prizes ( ; sv, Nobelpriset ; no, Nobelprisen ) are five separate prizes that, according to Alfred Nobel's will of 1895, are awarded to "those who, during the preceding year, have conferred the greatest benefit to humankind." Alfr ...
in physics for his part in the invention of the integrated circuit. However, Kilby's invention was a
hybrid integrated circuit A hybrid integrated circuit (HIC), hybrid microcircuit, hybrid circuit or simply hybrid is a miniaturized electronic circuit constructed of individual devices, such as semiconductor devices (e.g. transistors, diodes or monolithic ICs) and pa ...
(hybrid IC), rather than a monolithic integrated circuit (monolithic IC) chip. Kilby's IC had external wire connections, which made it difficult to mass-produce. Half a year after Kilby,
Robert Noyce Robert Norton Noyce (December 12, 1927 – June 3, 1990), nicknamed "the Mayor of Silicon Valley", was an American physicist and entrepreneur who co-founded Fairchild Semiconductor in 1957 and Intel Corporation in 1968. He is also credited wit ...
at
Fairchild Semiconductor Fairchild Semiconductor International, Inc. was an American semiconductor company based in San Jose, California. Founded in 1957 as a division of Fairchild Camera and Instrument, it became a pioneer in the manufacturing of transistors and of int ...
invented the first true monolithic IC chip. It was a new variety of integrated circuit, more practical than Kilby's implementation. Noyce's design was made of
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
, whereas Kilby's chip was made of
germanium Germanium is a chemical element with the symbol Ge and atomic number 32. It is lustrous, hard-brittle, grayish-white and similar in appearance to silicon. It is a metalloid in the carbon group that is chemically similar to its group neighbors s ...
. Noyce's monolithic IC put all components on a chip of silicon and connected them with copper lines. Noyce's monolithic IC was fabricated using the
planar process The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which silicon integrated circuit chips a ...
, developed in early 1959 by his colleague
Jean Hoerni Jean Amédée Hoerni (September 26, 1924 – January 12, 1997) was a Swiss-American engineer. He was a silicon transistor pioneer, and a member of the " traitorous eight". He developed the planar process, an important technology for reliably fa ...
. Modern IC chips are based on Noyce's monolithic IC, rather than Kilby's hybrid IC. NASA's Apollo Program was the largest single consumer of integrated circuits between 1961 and 1965.Hall, Eldon C. (1996)
"Journey to the Moon: The History of the Apollo Guidance Computer"
American Institute of Aeronautics and Astronautics. pp. 18–19.


TTL integrated circuits

Transistor–transistor logic Transistor–transistor logic (TTL) is a logic family built from bipolar junction transistors. Its name signifies that transistors perform both the logic function (the first "transistor") and the amplifying function (the second "transistor"), as opp ...
(TTL) was developed by
James L. Buie James L. Buie (1920 – September 25, 1988) was an American scientist and inventor working for TRW Inc who developed transistor–transistor logic, a form of integrated circuit technology that became widely used early in the integrated circuit i ...
in the early 1960s at
TRW Inc. TRW Inc., was an American corporation involved in a variety of businesses, mainly aerospace, electronics, automotive, and credit reporting.http://www.fundinguniverse.com/company-histories/TRW-Inc-Company-History.html TRW Inc. It was a pionee ...
TTL became the dominant integrated circuit technology during the 1970s to early 1980s. Dozens of TTL integrated circuits were a standard method of construction for the
processors A central processing unit (CPU), also called a central processor, main processor or just processor, is the electronic circuitry that executes instructions comprising a computer program. The CPU performs basic arithmetic, logic, controlling, ...
of
minicomputer A minicomputer, or colloquially mini, is a class of smaller general purpose computers that developed in the mid-1960s and sold at a much lower price than mainframe and mid-size computers from IBM and its direct competitors. In a 1970 survey, ...
s and
mainframe computer A mainframe computer, informally called a mainframe or big iron, is a computer used primarily by large organizations for critical applications like bulk data processing for tasks such as censuses, industry and consumer statistics, enterpris ...
s.
Computer A computer is a machine that can be programmed to Execution (computing), carry out sequences of arithmetic or logical operations (computation) automatically. Modern digital electronic computers can perform generic sets of operations known as C ...
s such as
IBM 360 The IBM System/360 (S/360) is a family of mainframe computer systems that was announced by IBM on April 7, 1964, and delivered between 1965 and 1978. It was the first family of computers designed to cover both commercial and scientific applica ...
mainframes,
PDP-11 The PDP-11 is a series of 16-bit minicomputers sold by Digital Equipment Corporation (DEC) from 1970 into the 1990s, one of a set of products in the Programmed Data Processor (PDP) series. In total, around 600,000 PDP-11s of all models were sold, ...
minicomputers and the desktop
Datapoint 2200 The Datapoint 2200 was a mass-produced programmable computer terminal usable as a computer, designed by Computer Terminal Corporation (CTC) founders Phil Ray and Gus Roche and announced by CTC in June 1970 (with units shipping in 1971). It was ...
were built from bipolar integrated circuits, either TTL or the even faster
emitter-coupled logic In electronics, emitter-coupled logic (ECL) is a high-speed integrated circuit bipolar transistor logic family. ECL uses an overdriven bipolar junction transistor (BJT) differential amplifier with single-ended input and limited emitter current to ...
(ECL).


MOS integrated circuits

Nearly all modern IC chips are
metal–oxide–semiconductor The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
(MOS) integrated circuits, built from
MOSFET The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
s (metal–oxide–silicon field-effect transistors). The MOSFET (also known as the MOS transistor), which was invented by
Mohamed M. Atalla Mohamed M. Atalla ( ar, محمد عطاالله; August 4, 1924 – December 30, 2009) was an Egyptian-American engineer, physicist, cryptographer, inventor and entrepreneur. He was a semiconductor pioneer who made important contributions to ...
and
Dawon Kahng Dawon Kahng ( ko, 강대원; May 4, 1931 – May 13, 1992) was a Korean-American electrical engineer and inventor, known for his work in solid-state electronics. He is best known for inventing the MOSFET (metal–oxide–semiconductor field-effe ...
at Bell Labs in 1959, made it possible to build high-density integrated circuits. In contrast to
bipolar transistor A bipolar junction transistor (BJT) is a type of transistor that uses both electrons and electron holes as charge carriers. In contrast, a unipolar transistor, such as a field-effect transistor, uses only one kind of charge carrier. A bipolar t ...
s which required a number of steps for the
p–n junction isolation p–n junction isolation is a method used to electrically isolate electronic components, such as transistors, on an integrated circuit (IC) by surrounding the components with reverse biased p–n junctions. Introduction By surrounding a transis ...
of transistors on a chip, MOSFETs required no such steps but could be easily isolated from each other. Its advantage for integrated circuits was pointed out by Dawon Kahng in 1961. The
list of IEEE milestones The following timeline tables list the discoveries and inventions in the history of electrical and electronic engineering. History of discoveries timeline History of associated inventions timeline List of IEEE Milestones The following li ...
includes the first integrated circuit by Kilby in 1958, Hoerni's planar process and Noyce's planar IC in 1959, and the MOSFET by Atalla and Kahng in 1959. The earliest experimental MOS IC to be fabricated was a 16-transistor chip built by Fred Heiman and Steven Hofstein at
RCA The RCA Corporation was a major American electronics company, which was founded as the Radio Corporation of America in 1919. It was initially a patent trust owned by General Electric (GE), Westinghouse, AT&T Corporation and United Fruit Comp ...
in 1962.
General Microelectronics General Micro-electronics (GMe) was an American semiconductor company in the 1960s. It was formed by three former members of Fairchild Semiconductor, and is thus one of the "Fairchildren". It was acquired in 1966 by Philco-Ford and became their Mic ...
later introduced the first commercial MOS integrated circuit in 1964, a 120-transistor
shift register A shift register is a type of digital circuit using a cascade of flip-flops where the output of one flip-flop is connected to the input of the next. They share a single clock signal, which causes the data stored in the system to shift from one loc ...
developed by Robert Norman. By 1964, MOS chips had reached higher transistor density and lower manufacturing costs than bipolar chips. MOS chips further increased in complexity at a rate predicted by
Moore's law Moore's law is the observation that the number of transistors in a dense integrated circuit (IC) doubles about every two years. Moore's law is an observation and projection of a historical trend. Rather than a law of physics, it is an empir ...
, leading to
large-scale integration An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of tiny ...
(LSI) with hundreds of
transistor upright=1.4, gate (G), body (B), source (S) and drain (D) terminals. The gate is separated from the body by an insulating layer (pink). A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch e ...
s on a single MOS chip by the late 1960s. Following the development of the
self-aligned gate In semiconductor electronics fabrication technology, a self-aligned gate is a transistor manufacturing approach whereby the gate electrode of a MOSFET (metal–oxide–semiconductor field-effect transistor) is used as a mask for the doping of th ...
(silicon-gate) MOSFET by Robert Kerwin, Donald Klein and John Sarace at Bell Labs in 1967, the first
silicon-gate In Semiconductor device fabrication, semiconductor electronics fabrication technology, a self-aligned gate is a transistor manufacturing approach whereby the gate (transistor), gate electrode of a MOSFET (metal–oxide–semiconductor field-effec ...
MOS IC technology with
self-aligned gate In semiconductor electronics fabrication technology, a self-aligned gate is a transistor manufacturing approach whereby the gate electrode of a MOSFET (metal–oxide–semiconductor field-effect transistor) is used as a mask for the doping of th ...
s, the basis of all modern
CMOS Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
integrated circuits, was developed at Fairchild Semiconductor by
Federico Faggin Federico Faggin (, ; born 1 December 1941) is an Italian physicist, engineer, inventor and entrepreneur. He is best known for designing the first commercial microprocessor, the Intel 4004. He led the 4004 (MCS-4) project and the design group d ...
in 1968. The application of MOS LSI chips to
computing Computing is any goal-oriented activity requiring, benefiting from, or creating computing machinery. It includes the study and experimentation of algorithmic processes, and development of both hardware and software. Computing has scientific, e ...
was the basis for the first
microprocessor A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
s, as engineers began recognizing that a complete
computer processor In computing and computer science, a processor or processing unit is an electrical component (digital circuit) that performs operations on an external data source, usually memory or some other data stream. It typically takes the form of a micropr ...
could be contained on a single MOS LSI chip. This led to the inventions of the microprocessor and the
microcontroller A microcontroller (MCU for ''microcontroller unit'', often also MC, UC, or μC) is a small computer on a single VLSI integrated circuit (IC) chip. A microcontroller contains one or more CPUs (processor cores) along with memory and programmable i ...
by the early 1970s. During the early 1970s, MOS integrated circuit technology enabled the
very large-scale integration Very large-scale integration (VLSI) is the process of creating an integrated circuit (IC) by combining millions or billions of MOS transistors onto a single chip. VLSI began in the 1970s when MOS integrated circuit (Metal Oxide Semiconductor) c ...
(VLSI) of more than 10,000 transistors on a single chip. At first, MOS-based computers only made sense when high density was required, such as
aerospace Aerospace is a term used to collectively refer to the atmosphere and outer space. Aerospace activity is very diverse, with a multitude of commercial, industrial and military applications. Aerospace engineering consists of aeronautics and astrona ...
and
pocket calculator An electronic calculator is typically a portable electronic device used to perform calculations, ranging from basic arithmetic to complex mathematics. The first solid-state electronic calculator was created in the early 1960s. Pocket-sized d ...
s. Computers built entirely from TTL, such as the 1970
Datapoint 2200 The Datapoint 2200 was a mass-produced programmable computer terminal usable as a computer, designed by Computer Terminal Corporation (CTC) founders Phil Ray and Gus Roche and announced by CTC in June 1970 (with units shipping in 1971). It was ...
, were much faster and more powerful than single-chip MOS microprocessors such as the 1972
Intel 8008 The Intel 8008 ("''eight-thousand-eight''" or "''eighty-oh-eight''") is an early byte-oriented microprocessor designed by Computer Terminal Corporation (CTC), implemented and manufactured by Intel, and introduced in April 1972. It is an 8-bit CP ...
until the early 1980s.Ken Shirriff
"The Texas Instruments TMX 1795: the (almost) first, forgotten microprocessor"
2015.
Advances in IC technology, primarily smaller features and larger chips, have allowed the number of
MOS transistor The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
s in an integrated circuit to double every two years, a trend known as Moore's law. Moore originally stated it would double every year, but he went on to change the claim to every two years in 1975. This increased capacity has been used to decrease cost and increase functionality. In general, as the feature size shrinks, almost every aspect of an IC's operation improves. The cost per transistor and the switching power consumption per transistor goes down, while the
memory capacity Computer data storage is a technology consisting of computer components and recording media that are used to retain digital data. It is a core function and fundamental component of computers. The central processing unit (CPU) of a computer ...
and
speed In everyday use and in kinematics, the speed (commonly referred to as ''v'') of an object is the magnitude of the change of its position over time or the magnitude of the change of its position per unit of time; it is thus a scalar quanti ...
go up, through the relationships defined by
Dennard scaling Dennard scaling, also known as MOSFET scaling, is a scaling law which states roughly that, as transistors get smaller, their power density stays constant, so that the power use stays in proportion with area; both voltage and current scale (downward) ...
( MOSFET scaling). Because speed, capacity, and power consumption gains are apparent to the end user, there is fierce competition among the manufacturers to use finer geometries. Over the years, transistor sizes have decreased from tens of
micron The micrometre ( international spelling as used by the International Bureau of Weights and Measures; SI symbol: μm) or micrometer (American spelling), also commonly known as a micron, is a unit of length in the International System of Unit ...
s in the early 1970s to 10
nanometer 330px, Different lengths as in respect to the molecular scale. The nanometre (international spelling as used by the International Bureau of Weights and Measures; SI symbol: nm) or nanometer (American and British English spelling differences#-re ...
s in 2017 with a corresponding million-fold increase in transistors per unit area. As of 2016, typical chip areas range from a few square
millimeter 330px, Different lengths as in respect to the electromagnetic spectrum, measured by the metre and its derived scales. The microwave is between 1 meter to 1 millimeter. The millimetre (American and British English spelling differences#-re, -er, ...
s to around 600 mm2, with up to 25 million
transistor upright=1.4, gate (G), body (B), source (S) and drain (D) terminals. The gate is separated from the body by an insulating layer (pink). A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch e ...
s per mm2.. 15,300,000,000 transistors in 610 mm2. The expected shrinking of feature sizes and the needed progress in related areas was forecast for many years by the
International Technology Roadmap for Semiconductors The International Technology Roadmap for Semiconductors (ITRS) is a set of documents produced by a group of semiconductor industry experts. These experts are representative of the sponsoring organisations which include the Semiconductor Industry A ...
(ITRS). The final ITRS was issued in 2016, and it is being replaced by the International Roadmap for Devices and Systems. Initially, ICs were strictly electronic devices. The success of ICs has led to the integration of other technologies, in an attempt to obtain the same advantages of small size and low cost. These technologies include mechanical devices, optics, and sensors. *
Charge-coupled device A charge-coupled device (CCD) is an integrated circuit containing an array of linked, or coupled, capacitors. Under the control of an external circuit, each capacitor can transfer its electric charge to a neighboring capacitor. CCD sensors are a ...
s, and the closely related
active-pixel sensor An active-pixel sensor (APS) is an image sensor where each pixel sensor unit cell has a photodetector (typically a pinned photodiode) and one or more active transistors. In a metal–oxide–semiconductor (MOS) active-pixel sensor, MOS field-effec ...
s, are chips that are sensitive to
light Light or visible light is electromagnetic radiation that can be perceived by the human eye. Visible light is usually defined as having wavelengths in the range of 400–700 nanometres (nm), corresponding to frequencies of 750–420 tera ...
. They have largely replaced
photographic film Photographic film is a strip or sheet of transparent film base coated on one side with a gelatin photographic emulsion, emulsion containing microscopically small light-sensitive silver halide crystals. The sizes and other characteristics of th ...
in scientific, medical, and consumer applications. Billions of these devices are now produced each year for applications such as cellphones, tablets, and digital cameras. This sub-field of ICs won the Nobel Prize in 2009.. * Very small mechanical devices driven by electricity can be integrated onto chips, a technology known as
microelectromechanical systems Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, ...
. These devices were developed in the late 1980s and are used in a variety of commercial and military applications. Examples include
DLP projector Digital Light Processing (DLP) is a set of chipsets based on optical micro-electro-mechanical technology that uses a digital micromirror device. It was originally developed in 1987 by Larry Hornbeck of Texas Instruments. While the DLP imaging ...
s,
inkjet printer Inkjet printing is a type of computer printing that recreates a digital image by propelling droplets of ink onto paper and plastic substrates. Inkjet printers were the most commonly used type of printer in 2008, and range from small inexpensi ...
s, and
accelerometer An accelerometer is a tool that measures proper acceleration. Proper acceleration is the acceleration (the rate of change of velocity) of a body in its own instantaneous rest frame; this is different from coordinate acceleration, which is accele ...
s and
MEMS gyroscope A vibrating structure gyroscope, defined by the IEEE as a Coriolis vibratory gyroscope (CVG), is a gyroscope that uses a vibrating structure to determine the rate of rotation. A vibrating structure gyroscope functions much like the halteres of f ...
s used to deploy automobile
airbag An airbag is a vehicle occupant-restraint system using a bag designed to inflate extremely quickly, then quickly deflate during a collision. It consists of the airbag cushion, a flexible fabric bag, an inflation module, and an impact sensor. Th ...
s. * Since the early 2000s, the integration of optical functionality (
optical computing Optical computing or photonic computing uses light waves produced by lasers or incoherent sources for data processing, data storage or data communication for computing. For decades, photons have shown promise to enable a higher bandwidth than the ...
) into silicon chips has been actively pursued in both academic research and in industry resulting in the successful commercialization of silicon based integrated optical transceivers combining optical devices (modulators, detectors, routing) with CMOS based electronics. Photonic integrated circuits that use light are also being developed, using the emerging field of physics known as
photonics Photonics is a branch of optics that involves the application of generation, detection, and manipulation of light in form of photons through emission, transmission, modulation, signal processing, switching, amplification, and sensing. Though ...
. * Integrated circuits are also being developed for
sensor A sensor is a device that produces an output signal for the purpose of sensing a physical phenomenon. In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends ...
applications in
medical implants An implant is a medical device manufactured to replace a missing biological structure, support a damaged biological structure, or enhance an existing biological structure. Medical implants are man-made devices, in contrast to a transplant, whi ...
or other bioelectronic devices. Special sealing techniques have to be applied in such biogenic environments to avoid
corrosion Corrosion is a natural process that converts a refined metal into a more chemically stable oxide. It is the gradual deterioration of materials (usually a metal) by chemical or electrochemical reaction with their environment. Corrosion engine ...
or
biodegradation Biodegradation is the breakdown of organic matter by microorganisms, such as bacteria and fungi. It is generally assumed to be a natural process, which differentiates it from composting. Composting is a human-driven process in which biodegrada ...
of the exposed semiconductor materials. , the vast majority of all transistors are
MOSFET The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
s fabricated in a single layer on one side of a chip of silicon in a flat two-dimensional
planar process The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which silicon integrated circuit chips a ...
. Researchers have produced prototypes of several promising alternatives, such as: * various approaches to stacking several layers of transistors to make a
three-dimensional integrated circuit A three-dimensional integrated circuit (3D IC) is a MOS (metal-oxide semiconductor) integrated circuit (IC) manufactured by stacking as many as 16 or more ICs and interconnecting them vertically using, for instance, through-silicon vias (TSVs) or ...
(3DIC), such as
through-silicon via In electronic engineering, a through-silicon via (TSV) or through-chip via is a vertical electrical connection (via) that passes completely through a silicon wafer or die. TSVs are high-performance interconnect techniques used as an alternative ...
, "monolithic 3D", stacked wire bonding, and other methodologies. * transistors built from other materials: graphene transistors, molybdenite transistors,
carbon nanotube field-effect transistor A carbon nanotube field-effect transistor (CNTFET) is a field-effect transistor that utilizes a single carbon nanotube or an array of carbon nanotubes as the channel material instead of bulk silicon in the traditional MOSFET structure. First demons ...
,
gallium nitride Gallium nitride () is a binary III/ V direct bandgap semiconductor commonly used in blue light-emitting diodes since the 1990s. The compound is a very hard material that has a Wurtzite crystal structure. Its wide band gap of 3.4 eV affords it ...
transistor, transistor-like nanowire electronic devices,
organic field-effect transistor An organic field-effect transistor (OFET) is a field-effect transistor using an organic semiconductor in its channel. OFETs can be prepared either by vacuum evaporation of small molecules, by solution-casting of polymers or small molecules, or ...
, etc. * fabricating transistors over the entire surface of a small sphere of silicon. * modifications to the substrate, typically to make " flexible transistors" for a
flexible display A flexible display or rollable display is an electronic visual display which is flexible in nature, as opposed to the traditional flat screen displays used in most electronic devices. In recent years there has been a growing interest from nume ...
or other
flexible electronics Flexible electronics, also known as ''flex circuits'', is a technology for assembling electronic circuits by mounting electronic devices on flexible plastic substrates, such as polyimide, PEEK or transparent conductive polyester film. Additi ...
, possibly leading to a roll-away computer. As it becomes more difficult to manufacture ever smaller transistors, companies are using
multi-chip module A multi-chip module (MCM) is generically an electronic assembly (such as a package with a number of conductor terminals or "pins") where multiple integrated circuits (ICs or "chips"), semiconductor dies and/or other discrete components are int ...
s,
three-dimensional integrated circuit A three-dimensional integrated circuit (3D IC) is a MOS (metal-oxide semiconductor) integrated circuit (IC) manufactured by stacking as many as 16 or more ICs and interconnecting them vertically using, for instance, through-silicon vias (TSVs) or ...
s,
package on package Package on a package (PoP) is an integrated circuit packaging method to vertically combine discrete logic and memory ball grid array (BGA) packages. Two or more packages are installed atop each other, i.e. stacked, with a standard interface to rout ...
,
High Bandwidth Memory High Bandwidth Memory (HBM) is a high-speed computer memory interface for 3D-stacked synchronous dynamic random-access memory (SDRAM) initially from Samsung, AMD and SK Hynix. It is used in conjunction with high-performance graphics accelerator ...
and
through-silicon via In electronic engineering, a through-silicon via (TSV) or through-chip via is a vertical electrical connection (via) that passes completely through a silicon wafer or die. TSVs are high-performance interconnect techniques used as an alternative ...
s with die stacking to increase performance and reduce size, without having to reduce the size of the transistors. Such techniques are collectively known as advanced packaging. Advanced packaging is mainly divided into 2.5D and 3D packaging. 2.5D describes approaches such as multi-chip modules while 3D describes approaches where dies are stacked in one way or another, such as package on package and high bandwidth memory. All approaches involve 2 or more dies in a single package. Alternatively, approaches such as 3D NAND stack multiple layers on a single die.


Design

The cost of
designing A design is a plan or specification for the construction of an object or system or for the implementation of an activity or process or the result of that plan or specification in the form of a prototype, product, or process. The verb ''to design'' ...
and developing a complex integrated circuit is quite high, normally in the multiple tens of millions of dollars. Therefore, it only makes economic sense to produce integrated circuit products with high production volume, so the
non-recurring engineering Non-recurring engineering (NRE) cost refers to the one-time cost to research, design, develop and test a new product or product enhancement. When budgeting for a new product, NRE must be considered to analyze if a new product will be profitable. ...
(NRE) costs are spread across typically millions of production units. Modern semiconductor chips have billions of components, and are too complex to be designed by hand. Software tools to help the designer are essential. Electronic design automation (EDA), also referred to as electronic
computer-aided design Computer-aided design (CAD) is the use of computers (or ) to aid in the creation, modification, analysis, or optimization of a design. This software is used to increase the productivity of the designer, improve the quality of design, improve c ...
(ECAD), is a category of
software tools A programming tool or software development tool is a computer program that software developers use to create, debug, maintain, or otherwise support other programs and applications. The term usually refers to relatively simple programs, that can ...
for designing electronic systems, including integrated circuits. The tools work together in a design flow that engineers use to design and analyze entire semiconductor chips.


Types

Integrated circuits can be broadly classified into
analog Analog or analogue may refer to: Computing and electronics * Analog signal, in which information is encoded in a continuous variable ** Analog device, an apparatus that operates on analog signals *** Analog electronics, circuits which use analog ...
, digital and mixed signal, consisting of analog and digital signaling on the same IC. Digital integrated circuits can contain billions of
logic gate A logic gate is an idealized or physical device implementing a Boolean function, a logical operation performed on one or more binary inputs that produces a single binary output. Depending on the context, the term may refer to an ideal logic gate, ...
s,
flip-flops Flip-flops are a type of light sandal, typically worn as a form of casual footwear. They consist of a flat sole held loosely on the foot by a Y-shaped strap known as a toe thong that passes between the first and second toes and around both side ...
,
multiplexer In electronics, a multiplexer (or mux; spelled sometimes as multiplexor), also known as a data selector, is a device that selects between several analog or digital input signals and forwards the selected input to a single output line. The sel ...
s, and other circuits in a few square millimeters. The small size of these circuits allows high speed, low power dissipation, and reduced
manufacturing cost Manufacturing cost is the sum of costs of all resources consumed in the process of making a product. The manufacturing cost is classified into three categories: direct materials cost, direct labor cost and manufacturing overhead. It is a factor in ...
compared with board-level integration. These digital ICs, typically
microprocessor A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
s, DSPs, and
microcontroller A microcontroller (MCU for ''microcontroller unit'', often also MC, UC, or μC) is a small computer on a single VLSI integrated circuit (IC) chip. A microcontroller contains one or more CPUs (processor cores) along with memory and programmable i ...
s, use
boolean algebra In mathematics and mathematical logic, Boolean algebra is a branch of algebra. It differs from elementary algebra in two ways. First, the values of the variables are the truth values ''true'' and ''false'', usually denoted 1 and 0, whereas in e ...
to process "one" and "zero" signals. Among the most advanced integrated circuits are the
microprocessor A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
s or " cores", used in personal computers, cell-phones,
microwave oven A microwave oven (commonly referred to as a microwave) is an electric oven that heats and cooks food by exposing it to electromagnetic radiation in the microwave frequency range. This induces polar molecules in the food to rotate and produce t ...
s, etc. Several cores may be integrated together in a single IC or chip. Digital memory chips and
application-specific integrated circuit An application-specific integrated circuit (ASIC ) is an integrated circuit (IC) chip customized for a particular use, rather than intended for general-purpose use, such as a chip designed to run in a digital voice recorder or a high-efficie ...
s (ASICs) are examples of other families of integrated circuits. In the 1980s, programmable logic devices were developed. These devices contain circuits whose logical function and connectivity can be programmed by the user, rather than being fixed by the integrated circuit manufacturer. This allows a chip to be programmed to do various LSI-type functions such as
logic gate A logic gate is an idealized or physical device implementing a Boolean function, a logical operation performed on one or more binary inputs that produces a single binary output. Depending on the context, the term may refer to an ideal logic gate, ...
s, adder (electronics), adders and processor register, registers. Programmability comes in various forms – devices that can be Programmable read-only memory, programmed only once, devices that can be erased and then re-programmed EPROM, using UV light, devices that can be (re)programmed using flash memory, and field-programmable gate arrays (FPGAs) which can be programmed at any time, including during operation. Current FPGAs can (as of 2016) implement the equivalent of millions of gates and operate at Clock rate, frequencies up to 1 Hertz, GHz. Analog ICs, such as
sensor A sensor is a device that produces an output signal for the purpose of sensing a physical phenomenon. In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends ...
s, power network design (IC), power management circuits, and operational amplifiers (op-amps), process continuous signals, and perform analog functions such as Amplifier, amplification, active filtering, demodulation, and Frequency mixer, mixing. ICs can combine analog and digital circuits on a chip to create functions such as analog-to-digital converters and digital-to-analog converters. Such mixed-signal circuits offer smaller size and lower cost, but must account for signal interference. Prior to the late 1990s, radios could not be fabricated in the same low-cost
CMOS Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
processes as microprocessors. But since 1998, radio chips have been developed using RF CMOS processes. Examples include Intel's Digital Enhanced Cordless Telecommunications, DECT cordless phone, or 802.11 (Wi-Fi) chips created by Atheros and other companies. Modern :electronic component distributors, electronic component distributors often further sub-categorize integrated circuits: * Digital integrated circuit, Digital ICs are categorized as logic ICs (such as microprocessors and microcontrollers), memory chips (such as MOS memory and floating-gate memory), interface ICs (logic level, level shifters, serializer/deserializer, etc.), power management ICs, and Programmable logic device, programmable devices. * Analog integrated circuit, Analog ICs are categorized as linear integrated circuits and RF circuits (radio frequency circuits). * Mixed-signal integrated circuits are categorized as data acquisition ICs (including A/D converters, D/A converters, digital potentiometers), Clock generator, clock/timing ICs, switched capacitor (SC) circuits, and RF CMOS circuits. * Three-dimensional integrated circuits (3D ICs) are categorized into
through-silicon via In electronic engineering, a through-silicon via (TSV) or through-chip via is a vertical electrical connection (via) that passes completely through a silicon wafer or die. TSVs are high-performance interconnect techniques used as an alternative ...
(TSV) ICs and Cu-Cu connection ICs.


Manufacturing


Fabrication

The
semiconductor A semiconductor is a material which has an electrical resistivity and conductivity, electrical conductivity value falling between that of a electrical conductor, conductor, such as copper, and an insulator (electricity), insulator, such as glas ...
s of the periodic table of the chemical elements were identified as the most likely materials for a ''Solid-state electronics, solid-state vacuum tube''. Starting with copper(I) oxide, copper oxide, proceeding to
germanium Germanium is a chemical element with the symbol Ge and atomic number 32. It is lustrous, hard-brittle, grayish-white and similar in appearance to silicon. It is a metalloid in the carbon group that is chemically similar to its group neighbors s ...
, then
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
, the materials were systematically studied in the 1940s and 1950s. Today, monocrystalline silicon is the main Substrate (printing), substrate used for ICs although some III-V compound semiconductor, compounds of the periodic table such as gallium arsenide are used for specialized applications like Light-emitting diode, LEDs, lasers, solar cells and the highest-speed integrated circuits. It took decades to perfect methods of creating crystals with minimal Crystal defects, defects in semiconducting materials' crystal structure. Semiconductor ICs are fabricated in a
planar process The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which silicon integrated circuit chips a ...
which includes three key process steps
photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
, deposition (such as chemical vapor deposition), and Etching (microfabrication), etching. The main process steps are supplemented by doping and cleaning. More recent or high-performance ICs may instead use multigate device, multi-gate FinFET or GAAFET transistors instead of planar ones, starting at the 22 nm node (Intel) or 16/14 nm nodes. Monocrystalline silicon, Mono-crystal silicon wafer (electronics), wafers are used in most applications (or for special applications, other semiconductors such as gallium arsenide are used). The wafer need not be entirely silicon. Photolithography is used to mark different areas of the substrate to be Doping (semiconductor), doped or to have polysilicon, insulators or metal (typically aluminium or copper) tracks deposited on them. Dopants are impurities intentionally introduced to a semiconductor to modulate its electronic properties. Doping is the process of adding dopants to a semiconductor material. * Integrated circuits are composed of many overlapping layers, each defined by photolithography, and normally shown in different colors. Some layers mark where various dopants are diffused into the substrate (called diffusion layers), some define where additional ions are implanted (implant layers), some define the conductors (doped polysilicon or metal layers), and some define the connections between the conducting layers (via or contact layers). All components are constructed from a specific combination of these layers. * In a self-aligned
CMOS Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
process, a
transistor upright=1.4, gate (G), body (B), source (S) and drain (D) terminals. The gate is separated from the body by an insulating layer (pink). A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch e ...
is formed wherever the gate layer (polysilicon or metal) CMOS#Example: NAND gate in physical layout, crosses a diffusion layer.Carver Mead, Mead, Carver A.; Lynn Conway, Conway, Lynn (1980) ''Introduction to VLSI Systems'' Reading, Mass.: Addison-Wesley: ISBN 2-201-04358-0 * capacitor, Capacitive structures, in form very much like the Parallel-plate capacitor, parallel conducting plates of a traditional electrical capacitor, are formed according to the area of the "plates", with insulating material between the plates. Capacitors of a wide range of sizes are common on ICs. * Meandering stripes of varying lengths are sometimes used to form on-chip resistors, though most logic circuits do not need any resistors. The ratio of the length of the resistive structure to its width, combined with its sheet resistivity, determines the resistance. * More rarely, inductor, inductive structures can be built as tiny on-chip coils, or simulated by gyrators. Since a CMOS device only draws current on the ''State transition function, transition'' between boolean algebra (logic), logic State (computer science), states, CMOS devices consume much less current than bipolar junction transistor devices. A random-access memory is the most regular type of integrated circuit; the highest density devices are thus memories; but even a
microprocessor A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
will have memory on the chip. (See the regular array structure at the bottom of the first image.) Although the structures are intricate – with widths which have been shrinking for decades – the layers remain much thinner than the device widths. The layers of material are fabricated much like a photographic process, although light waves in the visible spectrum cannot be used to "expose" a layer of material, as they would be too large for the features. Thus photons of higher frequencies (typically ultraviolet) are used to create the patterns for each layer. Because each feature is so small, electron microscopes are essential tools for a Industrial processes, process engineer who might be debugging a fabrication process. Each device is tested before packaging using automated test equipment (ATE), in a process known as wafer testing, or wafer probing. The wafer is then cut into rectangular blocks, each of which is called a ''die (integrated circuit), die''. Each good die (plural ''dice'', ''dies'', or ''die'') is then connected into a package using aluminium (or gold) Wire bonding, bond wires which are Thermosonic bonding, thermosonically bonded to ''pads'', usually found around the edge of the die. Thermosonic bonding was first introduced by A. Coucoulas which provided a reliable means of forming these vital electrical connections to the outside world. After packaging, the devices go through final testing on the same or similar ATE used during wafer probing. Industrial CT scanning can also be used. Test cost can account for over 25% of the cost of fabrication on lower-cost products, but can be negligible on low-yielding, larger, or higher-cost devices. , a Semiconductor fabrication plant, fabrication facility (commonly known as a ''semiconductor fab'') can cost over US$12 billion to construct. The cost of a fabrication facility rises over time because of increased complexity of new products; this is known as Rock's law. Such a facility features: * The Wafer (electronics), wafers up to 300 mm in diameter (wider than a common Plate (dishware), dinner plate). * , 5 nm transistors. * Copper interconnects where copper wiring replaces aluminum for interconnects. * Low-κ dielectric Insulator (electricity), insulators. * Silicon on insulator (SOI). * Strained silicon in a process used by IBM known as Strained silicon directly on insulator (SSDOI). * Multigate devices such as tri-gate transistors. ICs can be manufactured either in-house by integrated device manufacturers (IDMs) or using the foundry model. IDMs are vertically integrated companies (like Intel and Samsung) that design, manufacture and sell their own ICs, and may offer design and/or manufacturing (foundry) services to other companies (the latter often to fabless company, fabless companies). In the foundry model, fabless companies (like Nvidia) only design and sell ICs and outsource all manufacturing to pure play#pure play foundries, pure play foundries such as TSMC. These foundries may offer IC design services.


Packaging

The earliest integrated circuits were packaged in ceramic Flatpack (electronics), flat packs, which continued to be used by the military for their reliability and small size for many years. Commercial circuit packaging quickly moved to the dual in-line package (DIP), first in ceramic and later in plastic, which is commonly cresol-formaldehyde-novolac. In the 1980s pin counts of VLSI circuits exceeded the practical limit for DIP packaging, leading to pin grid array (PGA) and leadless chip carrier (LCC) packages. Surface-mount technology, Surface mount packaging appeared in the early 1980s and became popular in the late 1980s, using finer lead pitch with leads formed as either gull-wing or J-lead, as exemplified by the Small Outline Integrated Circuit, small-outline integrated circuit (SOIC) package – a carrier which occupies an area about 30–50% less than an equivalent DIP and is typically 70% thinner. This package has "gull wing" leads protruding from the two long sides and a lead spacing of 0.050 inches. In the late 1990s, PQFP, plastic quad flat pack (PQFP) and Thin Small Outline Package, thin small-outline package (TSOP) packages became the most common for high pin count devices, though PGA packages are still used for high-end
microprocessor A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
s. Ball grid array (BGA) packages have existed since the 1970s. Flip chip, Flip-chip Ball Grid Array packages, which allow for a much higher pin count than other package types, were developed in the 1990s. In an FCBGA package, the die is mounted upside-down (flipped) and connects to the package balls via a package substrate that is similar to a printed-circuit board rather than by wires. FCBGA packages allow an array of Input/output, input-output signals (called Area-I/O) to be distributed over the entire die rather than being confined to the die periphery. BGA devices have the advantage of not needing a dedicated socket but are much harder to replace in case of device failure. Intel transitioned away from PGA to land grid array (LGA) and BGA beginning in 2004, with the last PGA socket released in 2014 for mobile platforms. , AMD uses PGA packages on mainstream desktop processors, BGA packages on mobile processors, and high-end desktop and server microprocessors use LGA packages. Electrical signals leaving the die must pass through the material electrically connecting the die to the package, through the conductive signal trace, traces (paths) in the package, through the leads connecting the package to the conductive traces on the printed circuit board. The materials and structures used in the path these electrical signals must travel have very different electrical properties, compared to those that travel to different parts of the same die. As a result, they require special design techniques to ensure the signals are not corrupted, and much more electric power than signals confined to the die itself. When multiple dies are put in one package, the result is a system in package, abbreviated . A
multi-chip module A multi-chip module (MCM) is generically an electronic assembly (such as a package with a number of conductor terminals or "pins") where multiple integrated circuits (ICs or "chips"), semiconductor dies and/or other discrete components are int ...
(), is created by combining multiple dies on a small substrate often made of ceramic. The distinction between a large MCM and a small printed circuit board is sometimes fuzzy. Packaged integrated circuits are usually large enough to include identifying information. Four common sections are the manufacturer's name or logo, the part number, a part production batch number and serial number, and a four-digit date-code to identify when the chip was manufactured. Extremely small surface-mount technology parts often bear only a number used in a manufacturer's lookup table to find the integrated circuit's characteristics. The manufacturing date is commonly represented as a two-digit year followed by a two-digit week code, such that a part bearing the code 8341 was manufactured in week 41 of 1983, or approximately in October 1983.


Intellectual property

The possibility of copying by photographing each layer of an integrated circuit and preparing photomasks for its production on the basis of the photographs obtained is a reason for the introduction of legislation for the protection of layout designs. The US Semiconductor Chip Protection Act of 1984 established intellectual property protection for photomasks used to produce integrated circuits. A diplomatic conference held at Washington, D.C. in 1989 adopted a Treaty on Intellectual Property in Respect of Integrated Circuits, also called the Washington Treaty or IPIC Treaty. The treaty is currently not in force, but was partially integrated into the TRIPS agreement. There are several United States patents connected to the integrated circuit, which include patents by Jack Kilby, J.S. Kilby , , and by R.F. Stewart . National laws protecting IC layout designs have been adopted in a number of countries, including Japan, the European Economic Community, EC, the UK, Australia, and Korea. The UK enacted the Copyright, Designs and Patents Act, 1988, c. 48, § 213, after it initially took the position that its copyright law fully protected chip topographies. See British Leyland Motor Corp. v. Armstrong Patents Co. Criticisms of inadequacy of the UK copyright approach as perceived by the US semiconductor industry, chip industry are summarized in further chip rights developments. Australia passed the Circuit Layouts Act of 1989 as a ''sui generis'' form of chip protection. Korea passed the ''Act Concerning the Layout-Design of Semiconductor Integrated Circuits'' in 1992.


Generations

In the early days of simple integrated circuits, the technology's large scale limited each chip to only a few transistors, and the low degree of integration meant the design process was relatively simple. First pass yield, Manufacturing yields were also quite low by today's standards. As
metal–oxide–semiconductor The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
(MOS) technology progressed, millions and then billions of
MOS transistor The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
s could be placed on one chip, and good designs required thorough planning, giving rise to the field of electronic design automation, or EDA. Some SSI and MSI chips, like discrete transistors, are still mass-produced, both to maintain old equipment and build new devices that require only a few gates. The 7400-series integrated circuits, 7400 series of Transistor–transistor logic, TTL chips, for example, has become a de facto standard and remains in production.


Small-scale integration (SSI)

The first integrated circuits contained only a few transistors. Early digital circuits containing tens of transistors provided a few logic gates, and early linear ICs such as the Plessey SL201 or the Philips TAA320 had as few as two transistors. The number of transistors in an integrated circuit has increased dramatically since then. The term "large scale integration" (LSI) was first used by IBM scientist Rolf Landauer when describing the theoretical concept; that term gave rise to the terms "small-scale integration" (SSI), "medium-scale integration" (MSI), "very-large-scale integration" (VLSI), and "ultra-large-scale integration" (ULSI). The early integrated circuits were SSI. SSI circuits were crucial to early
aerospace Aerospace is a term used to collectively refer to the atmosphere and outer space. Aerospace activity is very diverse, with a multitude of commercial, industrial and military applications. Aerospace engineering consists of aeronautics and astrona ...
projects, and aerospace projects helped inspire development of the technology. Both the LGM-30 Minuteman, Minuteman missile and Apollo program needed lightweight digital computers for their inertial guidance systems. Although the Apollo Guidance Computer led and motivated integrated-circuit technology, it was the Minuteman missile that forced it into mass-production. The Minuteman missile program and various other United States Navy programs accounted for the total $4 million integrated circuit market in 1962, and by 1968, U.S. Government spending on Budget of NASA, space and Military budget of the United States, defense still accounted for 37% of the $312 million total production. The demand by the U.S. Government supported the nascent integrated circuit market until costs fell enough to allow IC firms to penetrate the Industry (manufacturing), industrial market and eventually the consumer market. The average price per integrated circuit dropped from $50.00 in 1962 to $2.33 in 1968. Integrated circuits began to appear in consumer products by the turn of the 1970s decade. A typical application was Frequency modulation, FM inter-carrier sound processing in television receivers. The first application MOSFET, MOS chips were small-scale integration (SSI) chips. Following
Mohamed M. Atalla Mohamed M. Atalla ( ar, محمد عطاالله; August 4, 1924 – December 30, 2009) was an Egyptian-American engineer, physicist, cryptographer, inventor and entrepreneur. He was a semiconductor pioneer who made important contributions to ...
's proposal of the MOS integrated circuit chip in 1960, the earliest experimental MOS chip to be fabricated was a 16-transistor chip built by Fred Heiman and Steven Hofstein at
RCA The RCA Corporation was a major American electronics company, which was founded as the Radio Corporation of America in 1919. It was initially a patent trust owned by General Electric (GE), Westinghouse, AT&T Corporation and United Fruit Comp ...
in 1962. The first practical application of MOS SSI chips was for NASA satellites.


Medium-scale integration (MSI)

The next step in the development of integrated circuits introduced devices which contained hundreds of transistors on each chip, called "medium-scale integration" (MSI). MOSFET scaling technology made it possible to build high-density chips. By 1964, MOS chips had reached higher transistor density and lower manufacturing costs than bipolar chips. In 1964, Frank Wanlass demonstrated a single-chip 16-bit
shift register A shift register is a type of digital circuit using a cascade of flip-flops where the output of one flip-flop is connected to the input of the next. They share a single clock signal, which causes the data stored in the system to shift from one loc ...
he designed, with a then-incredible 120
MOS transistor The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
s on a single chip. The same year,
General Microelectronics General Micro-electronics (GMe) was an American semiconductor company in the 1960s. It was formed by three former members of Fairchild Semiconductor, and is thus one of the "Fairchildren". It was acquired in 1966 by Philco-Ford and became their Mic ...
introduced the first commercial MOS integrated circuit chip, consisting of 120 PMOS logic, p-channel MOS transistors. It was a 20-bit
shift register A shift register is a type of digital circuit using a cascade of flip-flops where the output of one flip-flop is connected to the input of the next. They share a single clock signal, which causes the data stored in the system to shift from one loc ...
, developed by Robert Norman and Frank Wanlass. MOS chips further increased in complexity at a rate predicted by
Moore's law Moore's law is the observation that the number of transistors in a dense integrated circuit (IC) doubles about every two years. Moore's law is an observation and projection of a historical trend. Rather than a law of physics, it is an empir ...
, leading to chips with hundreds of
MOSFET The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
s on a chip by the late 1960s.


Large-scale integration (LSI)

Further development, driven by the same MOSFET scaling technology and economic factors, led to "large-scale integration" (LSI) by the mid-1970s, with tens of thousands of transistors per chip. The masks used to process and manufacture SSI, MSI and early LSI and VLSI devices (such as the microprocessors of the early 1970s) were mostly created by hand, often using Rubylith-tape or similar. For large or complex ICs (such as Computer memory, memories or Processor (computing), processors), this was often done by specially hired professionals in charge of circuit layout, placed under the supervision of a team of engineers, who would also, along with the circuit designers, inspect and Functional verification, verify the correctness and completeness of each mask. Integrated circuits such as 1K-bit RAMs, calculator chips, and the first microprocessors, that began to be manufactured in moderate quantities in the early 1970s, had under 4,000 transistors. True LSI circuits, approaching 10,000 transistors, began to be produced around 1974, for computer main memories and second-generation microprocessors.


Very-large-scale integration (VLSI)

"Very-large-scale integration" (VLSI) is a development started with hundreds of thousands of transistors in the early 1980s, and, as of 2016, transistor counts continue to grow beyond ten billion transistors per chip. Multiple developments were required to achieve this increased density. Manufacturers moved to smaller
MOSFET The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
design rules and cleanroom, cleaner fabrication facilities. The path of process improvements was summarized by the
International Technology Roadmap for Semiconductors The International Technology Roadmap for Semiconductors (ITRS) is a set of documents produced by a group of semiconductor industry experts. These experts are representative of the sponsoring organisations which include the Semiconductor Industry A ...
(ITRS), which has since been succeeded by the International Roadmap for Devices and Systems (IRDS). Electronic design automation, Electronic design tools improved, making it practical to finish designs in a reasonable time. The more energy-efficient
CMOS Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
replaced NMOS logic, NMOS and PMOS logic, PMOS, avoiding a prohibitive increase in Energy consumption, power consumption. The complexity and density of modern VLSI devices made it no longer feasible to check the masks or do the original design by hand. Instead, engineers use tools to perform most functional verification work. In 1986, one-megabit random-access memory (RAM) chips were introduced, containing more than one million transistors. Microprocessor chips passed the million-transistor mark in 1989, and the billion-transistor mark in 2005. The trend continues largely unabated, with chips introduced in 2007 containing tens of billions of memory transistors.


ULSI, WSI, SoC and 3D-IC

To reflect further growth of the complexity, the term ''ULSI'' that stands for "ultra-large-scale integration" was proposed for chips of more than 1 million transistors. Wafer-scale integration (WSI) is a means of building very large integrated circuits that uses an entire silicon wafer to produce a single "super-chip". Through a combination of large size and reduced packaging, WSI could lead to dramatically reduced costs for some systems, notably massively parallel supercomputers. The name is taken from the term Very-Large-Scale Integration, the current state of the art when WSI was being developed.Benj Edward
(14 Nov 2022) Hungry for AI? New supercomputer contains 16 dinner-plate-size chips
"Exascale Cerebras Andromeda cluster packs more cores than 1,954 Nvidia A100 GPUs".
A system-on-a-chip (SoC or SOC) is an integrated circuit in which all the components needed for a computer or other system are included on a single chip. The design of such a device can be complex and costly, and whilst performance benefits can be had from integrating all needed components on one die, the cost of licensing and developing a one-die machine still outweigh having separate devices. With appropriate licensing, these drawbacks are offset by lower manufacturing and assembly costs and by a greatly reduced power budget: because signals among the components are kept on-die, much less power is required (see #Packaging, Packaging). Further, signal sources and destinations are Locality of reference, physically closer on die, reducing the length of wiring and therefore Latency (engineering), latency, Data transmission, transmission power costs and waste heat from communication between modules on the same chip. This has led to an exploration of so-called Network on a chip, Network-on-Chip (NoC) devices, which apply system-on-chip design methodologies to digital communication networks as opposed to traditional Bus (computing), bus architectures. A
three-dimensional integrated circuit A three-dimensional integrated circuit (3D IC) is a MOS (metal-oxide semiconductor) integrated circuit (IC) manufactured by stacking as many as 16 or more ICs and interconnecting them vertically using, for instance, through-silicon vias (TSVs) or ...
(3D-IC) has two or more layers of active electronic components that are integrated both vertically and horizontally into a single circuit. Communication between layers uses on-die signaling, so power consumption is much lower than in equivalent separate circuits. Judicious use of short vertical wires can substantially reduce overall wire length for faster operation.


Silicon labeling and graffiti

To allow identification during production, most silicon chips will have a serial number in one corner. It is also common to add the manufacturer's logo. Ever since ICs were created, some chip designers have used the silicon surface area for surreptitious, non-functional images or words. These are sometimes referred to as chip art, silicon art, silicon graffiti or silicon doodling.


ICs and IC families

* The 555 timer IC * The Operational amplifier * 7400-series integrated circuits * 4000-series integrated circuits, the CMOS counterpart to the 7400 series (see also: HCMOS, 74HC00 series) * Intel 4004, generally regarded as the first commercially available
microprocessor A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
, which led to the famous Intel 8080, 8080 CPU and then the IBM PC's Intel 8088, 8088, 80286, Intel i486, 486 etc. * The MOS Technology 6502 and Zilog Z80 microprocessors, used in many home computers of the early 1980s * The Motorola 6800 series of computer-related chips, leading to the 68000 and 88000 series (used in some Apple computers and in the 1980s Commodore Amiga series) * The List of LM-series integrated circuits, LM-series of analog integrated circuits


See also

* Central processing unit * Chipset * CHIPS and Science Act * Integrated injection logic * Ion implantation *Microelectronics * Monolithic microwave integrated circuit * Multi-threshold CMOS * Silicon-germanium * Sound chip * SPICE * Chip carrier *Dark silicon *Integrated passive devices *High-temperature operating life *Thermal simulations for integrated circuits *Heat generation in integrated circuits


References


Further reading

* * * * * * *


External links

*
The first monolithic integrated circuits


including access to most of the datasheets for the parts.
The History of the Integrated Circuit

IC Die Photography
– A gallery of integrated circuit die photographs {{Authority control Integrated circuits, 1949 in computing 20th-century inventions American inventions Computer-related introductions in 1949 Digital electronics Discovery and invention controversies German inventions Semiconductor devices