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Veeco is a global capital equipment supplier, headquartered in the U.S., that designs and builds processing systems used in
semiconductor A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. ...
and
compound semiconductor Semiconductor materials are nominally small band gap insulators. The defining property of a semiconductor material is that it can be compromised by doping it with impurities that alter its electronic properties in a controllable way. Because of ...
manufacturing,
data storage Data storage is the recording (storing) of information (data) in a storage medium. Handwriting, phonographic recording, magnetic tape, and optical discs are all examples of storage media. Biological molecules such as RNA and DNA are conside ...
and scientific markets for applications such as advanced packaging,
photonics Photonics is a branch of optics that involves the application of generation, detection, and manipulation of light in form of photons through emission, transmission, modulation, signal processing, switching, amplification, and sensing. Though ...
,
power electronics Power electronics is the application of electronics to the control and conversion of electric power. The first high-power electronic devices were made using mercury-arc valves. In modern systems, the conversion is performed with semiconducto ...
and display technologies. Veeco's processing system capabilities include laser annealing,
photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
, ion beam etch and deposition,
metal organic chemical vapor deposition Metalorganic vapour-phase epitaxy (MOVPE), also known as organometallic vapour-phase epitaxy (OMVPE) or metalorganic chemical vapour deposition (MOCVD), is a chemical vapour deposition method used to produce single- or polycrystalline thin films. ...
(MOCVD), wet wafer processing,
molecular beam epitaxy Molecular-beam epitaxy (MBE) is an epitaxy method for thin-film deposition of single crystals. MBE is widely used in the manufacture of semiconductor devices, including transistors, and it is considered one of the fundamental tools for the devel ...
(MBE),
atomic layer deposition Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called precursors (also ...
(ALD),
physical vapor deposition Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polym ...
(PVD), dicing and lapping, and gas and vapor delivery. These technologies are used to enable artificial intelligence, virtual and augmented reality, high performance computing, autonomous vehicles, 5G wireless communication networks and cloud storage.


History

Veeco was incorporated in 1945 by two scientists, Frank Raible and Al Nerken, who created the helium leak detector. The company's name "Veeco" stood for Vacuum Electronic Equipment Company. In the 1960s, the original Veeco merged with
Lambda Lambda (}, ''lám(b)da'') is the 11th letter of the Greek alphabet, representing the voiced alveolar lateral approximant . In the system of Greek numerals, lambda has a value of 30. Lambda is derived from the Phoenician Lamed . Lambda gave rise ...
, a manufacturer of power supplies, and in the late 1980s, was purchased by British company Unitech. In 1990, Edward H. Braun, then COO of Veeco, and a group of senior company executives purchased Veeco's instrument business from Unitech in a management buyout. The company again used the Veeco Instruments trade name and completed an
initial public offering An initial public offering (IPO) or stock launch is a public offering in which shares of a company are sold to institutional investors and usually also to retail (individual) investors. An IPO is typically underwritten by one or more investment ...
on the Nasdaq National Market in 1994 (NASDAQ: VECO). The IPO netted the company $27.5 million. Since going public in 1994, Veeco has completed more than a dozen acquisitions. The company purchased Ion Tech Inc. in 1999 and entered the optical coating market. In 2001, Veeco purchased Applied EPI, its present-day Molecular Beam Epitaxy group that currently maintains a leadership position in MBE technology worldwide. In 2003, Veeco purchased Emcore, paving the way for its unique metal organic chemical vapor deposition technologies in the advanced LED,
Vertical-cavity surface-emitting laser The vertical-cavity surface-emitting laser, or VCSEL , is a type of semiconductor laser diode with laser beam emission perpendicular from the top surface, contrary to conventional edge-emitting semiconductor lasers (also ''in-plane'' lasers) which ...
(VCSEL) and photonics markets. From 2007 to 2018, Veeco invested heavily in ALD research, publishing numerous papers on the topic. In July 2007, Braun, then 68, became chairman of the board of Veeco, with John R. Peeler, 52, joining the company as
chief executive officer A chief executive officer (CEO), also known as a central executive officer (CEO), chief administrator officer (CAO) or just chief executive (CE), is one of a number of corporate executives charged with the management of an organization especially ...
. Peeler was formerly president of
JDSU JDS Uniphase Corporation (JDSU) was an American company that designed and manufactured products for optical communications networks, communications test and measurement equipment, lasers, optical solutions for authentication and decorative applica ...
's Communications Test and Measurement Division In 2008, Veeco settled a patent litigation it had brought against Asylum Research Corporation in 2003. In October 2010, Veeco announced the sale of its metrology business to Bruker Corporation in a cash deal for $229.4 million. In May 2012, John Peeler became chairman of the board of Veeco. In 2014, Veeco purchased Solid State Equipment Co., expanding its portfolio of solvent-based wet etch and clean technologies for semiconductor and compound semiconductor markets. On May 26, 2017, Veeco acquired front-end semiconductor process control equipment manufacturer Ultratech to expand into the advanced packaging market. This added to the portfolio advanced packaging lithography, laser spike annealing and 3D wafer inspection technology used in high volume manufacturing of logic and memory devices. Via the Ultratech purchase, Veeco also acquired Cambridge Nanotech, a Boston-based innovator in atomic layer deposition technology. In October 2018, Bill Miller was named CEO. Miller previously served as president and has led several growth initiatives within Veeco's business units and operations teams worldwide. In May 2020, changes were made to governance to bring more gender diversity to the board of directors. John Peeler, chairman and former CEO, retired from the board. Richard D’Amore, general partner of North Bridge Venture Partners and previously lead independent director, was appointed as chairman; and Mary Jane Raymond, chief financial officer and treasurer of II-VI Inc., was appointed to the Audit Committee. In 2020, Veeco succeeded in strengthening its profitability by optimizing R&D and extending core technologies into semiconductor and compound semiconductor markets. In 2021, Veeco shipped its first LSA101 Laser Spike Annealing System from its facility in San Jose, California facility to a leading semiconductor manufacturer.


Finances

For the fiscal year 2021, Veeco reported annual revenue of $583 million, 28% growth over 2020, driven by semiconductor and data storage performance.  This growth came with profitability driving $87 million in non-GAAP operating income and $1.43 or 66% growth in diluted non-GAAP EPS. Veeco had cash flow from operations of $68 million, a 58% increase over 2020.


Markets

Veeco specializes in thin film process equipment for major technology market sectors, including: * Semiconductor * Compound semiconductor * Data storage * Scientific * Advanced packaging * MEMS and RF filters Veeco systems are used for advanced materials deposition processes, cleaning and surface preparation, as well as the removal of critical materials. High tech manufacturers that purchase Veeco systems produce devices in high volumes. They also use them to develop next-generation products with the intent of making them more efficient, more cost effective and more advanced.


Products

''Front end of line (
FEOL The front-end-of-line (FEOL) is the first portion of IC fabrication where the individual components (transistors, capacitors, resistors, etc.) are patterned in the semiconductor. FEOL generally covers everything up to (but not including) the ...
) semiconductor systems include:'' * Laser spike annealing systems for precision doping of materials at a controlled temperature * Ion beam etch tools used in spin torque transfer magnetic random access memory ("STT-MRAM") applications. STT-MRAM has many benefits over traditional random access memory such as its non-volatility, speed, endurance and power consumption. *
Atomic layer deposition Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called precursors (also ...
(ALD) tools for semiconductor, solar and medical devices applications. Veeco is one of the key players in the global ALD market. ''Advanced packaging systems include:'' * Lithography tools used for copper pillar,
fan-out wafer-level packaging Fan-out wafer-level packaging (also known as wafer-level fan-out packaging, fan-out WLP, FOWL packaging, FO-WLP, FOWLP, etc.) is an integrated circuit packaging technology, and an enhancement of standard wafer-level packaging (WLP) solutions. In c ...
(FOWLP)
through-silicon via In electronic engineering, a through-silicon via (TSV) or through-chip via is a vertical electrical connection (via) that passes completely through a silicon wafer or die. TSVs are high-performance interconnect techniques used as an alternative ...
(TSV) and silicon
interposer An interposer is an electrical interface routing between one socket or connection to another. The purpose of an interposer is to spread a connection to a wider pitch or to reroute a connection to a different connection. Interposer comes from t ...
applications * Wet etch tools for under-bump metallization and
redistribution layer A redistribution layer (RDL) is an extra metal layer on an integrated circuit that makes its IO pads available in other locations of the chip, for better access to the pads where necessary. When an integrated circuit is manufactured, it usually h ...
applications * Wet-solvent-based surface preparation tools for
photoresist A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronic industry. T ...
and dry film removal, flux cleaning, particle removal and TSV clean applications ''Systems used in the manufacturing of MEMS devices and RF filters include:'' * Wet etch tools for etching thin films on substrates and sometimes the substrates themselves. * Single-wafer wet clean systems that use a soak-and-spray approach for metal lift-off. This is used in MEMS and compound semiconductor applications. This tool was part of the SSEC acquisition. * MBE and ion beam etch tools used to perform
ion beam lithography Ion-beam lithography is the practice of scanning a focused beam of ions in a patterned fashion across a surface in order to create very small structures such as integrated circuits or other nanostructures. Details Ion-beam lithography has been fo ...
in the manufacture of electroacoustic filters such as bulk acoustic wave ("BAW") and
surface acoustic wave A surface acoustic wave (SAW) is an acoustic wave traveling along the surface of a material exhibiting elasticity, with an amplitude that typically decays exponentially with depth into the material, such that they are confined to a depth of abou ...
("SAW") RF filters. ''Systems used for compound semiconductor applications:'' Veeco's MOCVD tools are used for the deposition of III-V compound semiconductor materials like indium phosphide (InP), gallium arsenide (GaAs) and gallium nitride (GaN) in a single crystal layer to form a thin film. It is used for depositing highly uniform arsenide and phosphide ("As/P") films to create amber and red output colors in
LEDs A light-emitting diode (LED) is a semiconductor device that emits light when current flows through it. Electrons in the semiconductor recombine with electron holes, releasing energy in the form of photons. The color of the light (cor ...
. Emerging applications for MOCVD include mini-LEDs, and micro-LEDS used in LED-backlit displays. It is also expected to enable VCSELs used for facial recognition applications, as well as GaN-based RF and power semiconductor devices. ''Systems used for advanced materials research and industrial applications'' Veeco MBE systems are used by scientific research organizations and universities as part of materials science discovery. * At the Nanolab at Eindhoven University of Technology, a Veeco MBE reactor is used to grow epitaxial layers for GaAs-based materials. * At Tufts University, the Veeco GEN Xplore enables the growth of small bandgap materials. https://engineering.tufts.edu/epitaxycore/capabilities/molecular-beam-epitaxy MBE, wet etch and clean systems are also used to manufacture high power lasers and
infrared sensors Infrared (IR), sometimes called infrared light, is electromagnetic radiation (EMR) with wavelengths longer than those of visible light. It is therefore invisible to the human eye. IR is generally understood to encompass wavelengths from around ...
. IBD, IBE, PVD, and lapping and dicing tools are used in data storage applications such as
hard disk drive A hard disk drive (HDD), hard disk, hard drive, or fixed disk is an electro-mechanical data storage device that stores and retrieves digital data using magnetic storage with one or more rigid rapidly rotating platters coated with magnet ...
s. IBD tools deposit thin layers of advanced materials on various substrates to alter how light is reflected and transmitted.


Technology breakthroughs

Veeco has invested in ALD research and supports an ALD science research team, which has published numerous papers on the topic between 2007 and 2018. For solar cell applications, in 2010, Veeco MOCVD developed a tool that increased cell growth rates resulting in higher throughput without compromising performance.


Facilities

Headquartered in Plainview, New York, Veeco has 14 locations in 10 countries including: * Somerset, NJ * Horsham, PA * Waltham, MA * San Jose, CA * St. Paul, MN * Munich, Germany * Shanghai, China * Tokyo, Japan * Seoul, Korea * Hsinchu, Taiwan * Bangkok, Thailand * Laguna, Philippines * Singapore * Penang, Malaysia


References


External links

* {{Authority control Technology companies established in 1945 Companies listed on the Nasdaq 1945 establishments in New York (state) 1994 initial public offerings