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Atomic Layer Deposition
Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called precursors (also called "reactants"). These precursors react with the surface of a material one at a time in a sequential, self-limiting, manner. A thin film is slowly deposited through repeated exposure to separate precursors. ALD is a key process in fabricating semiconductor devices, and part of the set of tools for synthesising nanomaterials. Introduction During atomic layer deposition a film is grown on a substrate by exposing its surface to alternate gaseous species (typically referred to as precursors or reactants). In contrast to chemical vapor deposition, the precursors are never present simultaneously in the reactor, but they are inserted as a series of sequential, non-overlapping pulses. In each of these pulses the precursor molecules react ...
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Atomic Layer Epitaxy
Atomic layer epitaxy (ALE), more generally known as atomic layer deposition (ALD), is a specialized form of thin film growth ( epitaxy) that typically deposit alternating monolayers of two elements onto a substrate. The crystal lattice structure achieved is thin, uniform, and aligned with the structure of the substrate. The reactants are brought to the substrate as alternating pulses with "dead" times in between. ALE makes use of the fact that the incoming material is bound strongly until all sites available for chemisorption are occupied. The dead times are used to flush the excess material. It is mostly used in semiconductor fabrication to grow thin films of thickness in the nanometer scale. Technique This technique was invented in 1974 and patented the same year (patent published in 1976) by Dr. Tuomo Suntola at the Instrumentarium company, Finland. Dr. Suntola's purpose was to grow thin films of Zinc sulfide to fabricate electroluminescent flat panel displays. The main t ...
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Schematic Illustration Of Atomic Layer Deposition
A schematic, or schematic diagram, is a designed representation of the elements of a system using abstract, graphic symbols rather than realistic pictures. A schematic usually omits all details that are not relevant to the key information the schematic is intended to convey, and may include oversimplified elements in order to make this essential meaning easier to grasp, as well as additional organization of the information. For example, a subway map intended for passengers may represent a subway station with a dot. The dot is not intended to resemble the actual station at all but aims to give the viewer information without unnecessary visual clutter. A schematic diagram of a chemical process uses symbols in place of detailed representations of the vessels, piping, valves, pumps, and other equipment that compose the system, thus emphasizing the functions of the individual elements and the interconnections among them and suppresses their physical details. In an electronic circuit d ...
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Tuomo Suntola
Tuomo Suntola (born 1943) is a Finnish physicist, inventor, and technology leader. He is best known for his pioneering research in materials science, developing the thin film growth technique called atomic layer deposition. Early life Suntola was born in Tampere, Pirkanmaa, in 1943, during Continuation War. He showed interest in technology early on, building wooden replicas of second world war aircraft. In his teens his interests expanded and he progressed to radios and amplifiers. Education and career In 1971, Tuomo Suntola earned his PhD in semiconductor physics from the Helsinki University of Technology. After completing his PhD, Suntola made his first industrial development while working at VTT Technical Research Centre of Finland, a thin film humidity sensor "Humicap" for Vaisala Oy, a Finnish company specialized in meteorological instruments. In 1974 Suntola started the development of thin film electroluminescent displays in the Finnish company Instrumentarium Oy. He i ...
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American Vacuum Society
AVS: Science and Technology of Materials, Interfaces, and ProcessingAIP: A Federation of the Physical Sciences
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(formerly American Vacuum Society) is a not-for-profit founded in 1953 focused on disciplines related to materials, interfaces, and processing. AVS has approximately 4500 members worldwide from , ...
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University Of Helsinki
The University of Helsinki ( fi, Helsingin yliopisto, sv, Helsingfors universitet, abbreviated UH) is a public research university located in Helsinki, Finland since 1829, but founded in the city of Turku (in Swedish ''Åbo'') in 1640 as the Royal Academy of Åbo, at that time part of the Swedish Empire. It is the oldest and largest university in Finland with the widest range of disciplines available. In 2020, around 31,600 students were enrolled in the degree programs of the university spread across 11 faculties and 11 research institutes. As of 1 August 2005, the university complies with the harmonized structure of the Europe-wide Bologna Process and offers bachelor, master, licenciate, and doctoral degrees. Admission to degree programmes is usually determined by entrance examinations, in the case of bachelor's degrees, and by prior degree results, in the case of master and postgraduate degrees. Entrance is particularly selective (circa 15% of the yearly applicants are adm ...
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Chemical Vapor Deposition
Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber. Microfabrication processes widely use CVD to deposit materials in various forms, including: monocrystalline, polycrystalline, amorphous, and epitaxial. These materials include: silicon (dioxide, carbide, nitride, oxynitride), carbon (fiber, nanofibers, nanotubes, diamond and graphene), fluorocarbons, filaments, tungsten, titanium nitride and various high-κ dielectrics. The term ''chemical vapour deposition'' was coined 1960 by ''John M. Blocher, Jr.'' who intended to differentia ...
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Millennium Technology Prize
The Millennium Technology Prize ( fi, Millennium-teknologiapalkinto) is one of the world's largest technology prizes. It is awarded once every two years by Technology Academy Finland, an independent foundation established by Finnish industries, academic institutions, and the state of Finland. The patron of the prize is the President of Finland. The Millennium Technology Prize is Finland's tribute to innovations for a better life. The aims of the prize are to promote technological research and Finland as a high-tech Nordic welfare state. The prize was inaugurated in 2004. The Prize The idea of the prize came originally from the Finnish academician Pekka Jauho, with American real estate investor and philanthropist Arthur J Collingsworth encouraging its establishment.Millenn ...
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Semiconductor Equipment And Materials International
SEMI is an industry association comprising companies involved in the electronics design and manufacturing supply chain. They provide equipment, materials and services for the manufacture of semiconductors, photovoltaic panels, LED and flat panel displays, micro-electromechanical systems (MEMS), printed and flexible electronics, and related micro and nano-technologies. SEMI is headquartered in Milpitas, California, and has offices in Bangalore; Berlin; Brussels; Hsinchu; Seoul; Shanghai; Singapore; Tokyo; and Washington, D.C. Its main activities include conferences and trade shows, development of industry standards, market research reporting, and industry advocacy. The president and chief executive officer of the organization is Ajit Manocha. Global advocacy SEMI Global Advocacy represents the interests of the semiconductor industry's design, manufacturing and supply chain businesses worldwide. SEMI promotes its positions on public issues via press releases, position paper ...
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ASM International
ASM International is a Dutch headquartered multinational corporation that specializes in design, manufacturing, sales and service of semiconductor wafer processing equipment for the fabrication of semiconductor devices. ASM's products are used by semiconductor manufacturers in front-end wafer processing in their semiconductor fabrication plants. ASM’s technologies include atomic layer deposition, epitaxy, chemical vapor deposition and diffusion. The company was founded by Arthur del Prado (1931-2016) as ‘Advanced Semiconductor Materials’ in 1964. From 2008 until 2020, son of Arthur del Prado, Chuck del Prado was CEO. ASM pioneered important aspects of many established wafer-processing technologies used in industry, including lithography, deposition, ion implantation, single-wafer epitaxy, and in recent years atomic layer deposition. Semiconductor equipment companies ASML, ASM Pacific Technology and Besi are former divisions of ASM. ASM International headquarter ...
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Neste
Neste Oyj (international name: Neste Corporation; former names Neste Oil Corporation and Fortum Oil and Gas Oy) is an oil refining and marketing company located in Espoo, Finland. It produces, refines and markets oil products, provides engineering services, and licenses production technologies. Neste has operations in 14 countries. Neste shares are listed on the NASDAQ OMX Helsinki Stock Exchange. As of 2022, the Prime Minister's Office of Finland is the largest shareholder in the company, owning 35.91% of shares. In 2021, Neste was the third largest company in Finland in terms of revenue. The name "Neste" means "liquid" in Finnish. History 1948–1997 (Neste) Neste was founded in 1948 as the State petrol company of Finland with the purpose to ensure the availability of refined fuels in Finland. The company's headquarters was established in Espoo. At the time, there was no oil industry or related expertise in Finland, and the company had to start operations fro ...
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Heterogeneous Catalyst
In chemistry, heterogeneous catalysis is catalysis where the phase of catalysts differs from that of the reactants or products. The process contrasts with homogeneous catalysis where the reactants, products and catalyst exist in the same phase. Phase distinguishes between not only solid, liquid, and gas components, but also immiscible mixtures (e.g. oil and water), or anywhere an interface is present. Heterogeneous catalysis typically involves solid phase catalysts and gas phase reactants. In this case, there is a cycle of molecular adsorption, reaction, and desorption occurring at the catalyst surface. Thermodynamics, mass transfer, and heat transfer influence the rate (kinetics) of reaction. Heterogeneous catalysis is very important because it enables faster, large-scale production and the selective product formation. Approximately 35% of the world's GDP is influenced by catalysis. The production of 90% of chemicals (by volume) is assisted by solid catalysts. The chemical an ...
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Photovoltaic Device
A photovoltaic system, also PV system or solar power system, is an electric power system designed to supply usable solar power by means of photovoltaics. It consists of an arrangement of several components, including solar panels to absorb and convert sunlight into electricity, a solar inverter to convert the output from direct to alternating current, as well as mounting, cabling, and other electrical accessories to set up a working system. It may also use a solar tracking system to improve the system's overall performance and include an integrated battery. PV systems convert light directly into electricity, and are not to be confused with other solar technologies, such as concentrated solar power or solar thermal, used for heating and cooling. A solar array only encompasses the ensemble of solar panels, the visible part of the PV system, and does not include all the other hardware, often summarized as balance of system (BOS). PV systems range from small, rooftop-mounte ...
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