![MOSFET Structure](https://upload.wikimedia.org/wikipedia/commons/1/1c/MOSFET_Structure.svg)
The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of
field-effect transistor
The field-effect transistor (FET) is a type of transistor that uses an electric field to control the flow of current in a semiconductor. FETs (JFETs or MOSFETs) are devices with three terminals: ''source'', ''gate'', and ''drain''. FETs contro ...
(FET), most commonly fabricated by the
controlled oxidation of
silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
. It has an insulated gate, the voltage of which determines the conductivity of the device. This ability to change conductivity with the amount of applied voltage can be used for amplifying or switching electronic
signals
In signal processing, a signal is a function that conveys information about a phenomenon. Any quantity that can vary over space or time can be used as a signal to share messages between observers. The ''IEEE Transactions on Signal Processing'' ...
. A metal-insulator-semiconductor field-effect transistor (MISFET) is a term almost synonymous with MOSFET. Another synonym is IGFET for insulated-gate field-effect transistor.
The basic principle of the
field-effect transistor
The field-effect transistor (FET) is a type of transistor that uses an electric field to control the flow of current in a semiconductor. FETs (JFETs or MOSFETs) are devices with three terminals: ''source'', ''gate'', and ''drain''. FETs contro ...
was first patented by
Julius Edgar Lilienfeld
Julius Edgar Lilienfeld (April 18, 1882 – August 28, 1963) was an Austro-Hungarian, and later American (where he moved in 1921) physicist and electrical engineer, who was credited with the first patent on the field-effect (FET) (1925). Be ...
in 1925.
[Lilienfeld, Julius Edgar (1926-10-08) "Method and apparatus for controlling electric currents" ]
upright=1.6, Two power MOSFETs in
_surface-mount_technology">surface-mount_packages._Operating_as_switches,_each_of_these_components_can_sustain_a_blocking_voltage_of_120
_surface-mount_technology">surface-mount_packages._Operating_as_switches,_each_of_these_components_can_sustain_a_blocking_voltage_of_120volts">V_in_the_''off''_state,_and_can_conduct_a_continuous_current_of_30
_surface-mount_technology">surface-mount_packages._Operating_as_switches,_each_of_these_components_can_sustain_a_blocking_voltage_of_120volts">V_in_the_''off''_state,_and_can_conduct_a_continuous_current_of_30 amperes">A_in_the_''on''_state,_dissipating_up_to_about_100 watt.html" ;"title="amperes.html" ;"title="volts.html" ;"title="surface-mount_technology.html" ;"title="D2PAK surface-mount technology">surface-mount packages. Operating as switches, each of these components can sustain a blocking voltage of 120volts">V in the ''off'' state, and can conduct a continuous current of 30 amperes">A in the ''on'' state, dissipating up to about 100 watt">W and controlling a load of over 2000 W. A matchstick is pictured for scale.
The main advantage of a MOSFET is that it requires almost no input current to control the load current, when compared with bipolar transistors (bipolar junction transistors/BJTs). In an ''enhancement mode'' MOSFET, voltage applied to the gate terminal increases the conductivity of the device. In ''depletion mode'' transistors, voltage applied at the gate reduces the conductivity.
The "metal" in the name MOSFET is sometimes a
misnomer
A misnomer is a name that is incorrectly or unsuitably applied. Misnomers often arise because something was named long before its correct nature was known, or because an earlier form of something has been replaced by a later form to which the name ...
, because the gate material can be a layer of
polysilicon
Polycrystalline silicon, or multicrystalline silicon, also called polysilicon, poly-Si, or mc-Si, is a high purity, polycrystalline form of silicon, used as a raw material by the solar photovoltaic and electronics industry.
Polysilicon is produce ...
(polycrystalline silicon). Similarly, "oxide" in the name can also be a misnomer, as different dielectric materials are used with the aim of obtaining strong channels with smaller applied voltages.
The MOSFET is by far the most common transistor in
digital circuits, as billions may be included in a memory chip or microprocessor. Since MOSFETs can be made with either p-type or n-type semiconductors, complementary pairs of MOS transistors can be used to make switching circuits with very low power consumption, in the form of
CMOS logic
Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
.
file:MOSFET functioning body.svg, upright=1.6, A cross-section through an nMOSFET when the gate voltage ''V''
GS is below the threshold for making a conductive channel; there is little or no conduction between the terminals drain and source; the switch is off. When the gate is more positive, it attracts electrons, inducing an ''n''-type conductive channel in the substrate below the oxide, which allows electrons to flow between the ''n''-doped terminals; the switch is on.
file:Threshold formation nowatermark.gif, upright=1.6, Simulation of formation of inversion channel (electron density) and attainment of threshold voltage (IV) in a nanowire MOSFET. Note:
threshold voltage
The threshold voltage, commonly abbreviated as Vth or VGS(th), of a field-effect transistor (FET) is the minimum gate-to-source voltage (VGS) that is needed to create a conducting path between the source and drain terminals. It is an important s ...
for this device lies around 0.45 V
History
The basic principle of this kind of
transistor
upright=1.4, gate (G), body (B), source (S) and drain (D) terminals. The gate is separated from the body by an insulating layer (pink).
A transistor is a semiconductor device used to Electronic amplifier, amplify or electronic switch, switch e ...
was first patented by
Julius Edgar Lilienfeld
Julius Edgar Lilienfeld (April 18, 1882 – August 28, 1963) was an Austro-Hungarian, and later American (where he moved in 1921) physicist and electrical engineer, who was credited with the first patent on the field-effect (FET) (1925). Be ...
in 1925.
[
The structure resembling the MOS transistor was proposed by Bell scientists ]William Shockley
William Bradford Shockley Jr. (February 13, 1910 – August 12, 1989) was an American physicist and inventor. He was the manager of a research group at Bell Labs that included John Bardeen and Walter Brattain. The three scientists were jointly ...
, John Bardeen
John Bardeen (; May 23, 1908 – January 30, 1991) was an American physicist and engineer. He is the only person to be awarded the Nobel Prize in Physics twice: first in 1956 with William Shockley and Walter Brattain for the invention of the tran ...
and Walter Houser Brattain
Walter Houser Brattain (; February 10, 1902 – October 13, 1987) was an American physicist at Bell Labs who, along with fellow scientists John Bardeen and William Shockley, invented the point-contact transistor in December 1947. They shared t ...
, during their investigation that led to discovery of the transistor effect. The structure failed to show the anticipated effects, due to the problem of surface state: traps on the semiconductor surface that hold electrons immobile. In 1955 Carl Frosch and L. Derick accidentally grew a layer of silicon dioxide over the silicon wafer. Further research showed that silicon dioxide could prevent dopants from diffusing into the silicon wafer. Building on this work Mohamed M. Atalla
Mohamed M. Atalla ( ar, محمد عطاالله; August 4, 1924 – December 30, 2009) was an Egyptian-American engineer, physicist, cryptographer, inventor and entrepreneur. He was a semiconductor pioneer who made important contributions to ...
showed that silicon dioxide is very effective in solving the problem of one important class of surface states.
Following this Atalla and Dawon Kahng
Dawon Kahng ( ko, 강대원; May 4, 1931 – May 13, 1992) was a Korean-American electrical engineer and inventor, known for his work in solid-state electronics. He is best known for inventing the MOSFET (metal–oxide–semiconductor field-effe ...
demonstrated a device that had the structure of a modern MOS transistor. The principles behind the device were the same as the ones that were tried by Bardeen, Shockley and Brattain in their unsuccessful attempt to build a surface field-effect device.
The device was about 100 times slower than contemporary bipolar transistors and was initially seen as inferior. Nevertheless Kahng pointed out several advantages of the device, notably ease of fabrication and its application in integrated circuit
An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of tiny ...
s.
Composition
upright=1.2, Photomicrograph of two metal-gate MOSFETs in a test pattern. Probe pads for two gates and three source/drain nodes are labeled.
Usually the semiconductor
A semiconductor is a material which has an electrical resistivity and conductivity, electrical conductivity value falling between that of a electrical conductor, conductor, such as copper, and an insulator (electricity), insulator, such as glas ...
of choice is silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
. Recently, some chip manufacturers, most notably IBM and Intel
Intel Corporation is an American multinational corporation and technology company headquartered in Santa Clara, California. It is the world's largest semiconductor chip manufacturer by revenue, and is one of the developers of the x86 seri ...
, have started using an alloy
An alloy is a mixture of chemical elements of which at least one is a metal. Unlike chemical compounds with metallic bases, an alloy will retain all the properties of a metal in the resulting material, such as electrical conductivity, ductility, ...
of silicon and germanium ( SiGe) in MOSFET channels. Unfortunately, many semiconductors with better electrical properties than silicon, such as gallium arsenide
Gallium arsenide (GaAs) is a III-V direct band gap semiconductor with a Zincblende (crystal structure), zinc blende crystal structure.
Gallium arsenide is used in the manufacture of devices such as microwave frequency integrated circuits, monoli ...
, do not form good semiconductor-to-insulator interfaces, and thus are not suitable for MOSFETs. Research continues on creating insulators with acceptable electrical characteristics on other semiconductor materials.
To overcome the increase in power consumption due to gate current leakage, a high-κ dielectric The term high-κ dielectric refers to a material with a high dielectric constant (κ, kappa), as compared to silicon dioxide. High-κ dielectrics are used in semiconductor manufacturing processes where they are usually used to replace a silicon dio ...
is used instead of silicon dioxide for the gate insulator, while polysilicon is replaced by metal gates (e.g. Intel
Intel Corporation is an American multinational corporation and technology company headquartered in Santa Clara, California. It is the world's largest semiconductor chip manufacturer by revenue, and is one of the developers of the x86 seri ...
, 2009)
The gate is separated from the channel by a thin insulating layer, traditionally of silicon dioxide and later of silicon oxynitride
Silicon oxynitride is a ceramic material with the chemical formula SiOxNy. While in amorphous forms its composition can continuously vary between SiO2 (silica) and Si3N4 (silicon nitride), the only known intermediate crystalline phase is Si2N2O. It ...
. Some companies have started to introduce a high-κ dielectric and metal gate combination in the 45 nanometer
Per the International Technology Roadmap for Semiconductors, the 45 nm process is a MOSFET technology node referring to the average half-pitch of a memory cell manufactured at around the 2007–2008 time frame.
Matsushita and Intel started mas ...
node.
When a voltage is applied between the gate and body terminals, the electric field generated penetrates through the oxide and creates an ''inversion layer'' or ''channel'' at the semiconductor-insulator interface. The inversion layer provides a channel through which current can pass between source and drain terminals. Varying the voltage between the gate and body modulates the conductivity
Conductivity may refer to:
*Electrical conductivity, a measure of a material's ability to conduct an electric current
**Conductivity (electrolytic), the electrical conductivity of an electrolyte in solution
**Ionic conductivity (solid state), elec ...
of this layer and thereby controls the current flow between drain and source. This is known as enhancement mode.
Operation
upright=1.2, Metal-oxide-semiconductor structure on p-type silicon
Metal-oxide-semiconductor structure
The traditional metal-oxide-semiconductor (MOS) structure is obtained by growing a layer of silicon dioxide
Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...
() on top of a silicon substrate, commonly by thermal oxidation
In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react with it. The rat ...
and depositing a layer of metal or polycrystalline silicon
Polycrystalline silicon, or multicrystalline silicon, also called polysilicon, poly-Si, or mc-Si, is a high purity, polycrystalline form of silicon, used as a raw material by the solar photovoltaic and electronics industry.
Polysilicon is produ ...
(the latter is commonly used). As the silicon dioxide is a dielectric
In electromagnetism, a dielectric (or dielectric medium) is an electrical insulator that can be polarised by an applied electric field. When a dielectric material is placed in an electric field, electric charges do not flow through the mate ...
material, its structure is equivalent to a planar capacitor
A capacitor is a device that stores electrical energy in an electric field by virtue of accumulating electric charges on two close surfaces insulated from each other. It is a passive electronic component with two terminals.
The effect of ...
, with one of the electrodes replaced by a semiconductor.
When a voltage is applied across a MOS structure, it modifies the distribution of charges in the semiconductor. If we consider a p-type semiconductor (with the density of acceptors, ''p'' the density of holes; ''p = N''A in neutral bulk), a positive voltage, , from gate to body (see figure) creates a depletion layer
In semiconductor physics, the depletion region, also called depletion layer, depletion zone, junction region, space charge region or space charge layer, is an insulating region within a conductive, doped semiconductor material where the mobile ...
by forcing the positively charged holes away from the gate-insulator/semiconductor interface, leaving exposed a carrier-free region of immobile, negatively charged acceptor ions (see doping (semiconductor)
In semiconductor production, doping is the intentional introduction of impurities into an intrinsic semiconductor for the purpose of modulating its electrical, optical and structural properties. The doped material is referred to as an extrinsic se ...
). If is high enough, a high concentration of negative charge carriers forms in an ''inversion layer'' located in a thin layer next to the interface between the semiconductor and the insulator.
Conventionally, the gate voltage at which the volume density of electrons in the inversion layer is the same as the volume density of holes in the body is called the threshold voltage
The threshold voltage, commonly abbreviated as Vth or VGS(th), of a field-effect transistor (FET) is the minimum gate-to-source voltage (VGS) that is needed to create a conducting path between the source and drain terminals. It is an important s ...
. When the voltage between transistor gate and source (''V''GS) exceeds the threshold voltage (''V''th), the difference is known as overdrive voltage.
This structure with p-type body is the basis of the n-type MOSFET, which requires the addition of n-type source and drain regions.
MOS capacitors and band diagrams
The MOS capacitor structure is the heart of the MOSFET. Consider a MOS capacitor where the silicon base is of p-type. If a positive voltage is applied at the gate, holes which are at the surface of the p-type substrate will be repelled by the electric field generated by the voltage applied. At first, the holes will simply be repelled and what will remain on the surface will be immobile (negative) atoms of the acceptor type, which creates a depletion region on the surface. Remember that a hole is created by an acceptor atom, e.g. Boron, which has one less electron than Silicon. One might ask how can holes be repelled if they are actually non-entities? The answer is that what really happens is not that a hole is repelled, but electrons are attracted by the positive field, and fill these holes, creating a depletion region where no charge carriers exist because the electron is now fixed onto the atom and immobile.
As the voltage at the gate increases, there will be a point at which the surface above the depletion region will be converted from p-type into n-type, as electrons from the bulk area will start to get attracted by the larger electric field. This is known as ''inversion''. The threshold voltage at which this conversion happens is one of the most important parameters in a MOSFET.
In the case of a p-type bulk, inversion happens when the intrinsic energy level at the surface becomes smaller than the Fermi level
The Fermi level of a solid-state body is the thermodynamic work required to add one electron to the body. It is a thermodynamic quantity usually denoted by ''µ'' or ''E''F
for brevity. The Fermi level does not include the work required to remove ...
at the surface. One can see this from a band diagram. Remember that the Fermi level defines the type of semiconductor in discussion. If the Fermi level is equal to the Intrinsic level, the semiconductor is of intrinsic, or pure type. If the Fermi level lies closer to the conduction band (valence band) then the semiconductor type will be of n-type (p-type). Therefore, when the gate voltage is increased in a positive sense (for the given example), this will "bend" the intrinsic energy level band so that it will curve downwards towards the valence band. If the Fermi level lies closer to the valence band (for p-type), there will be a point when the Intrinsic level will start to cross the Fermi level and when the voltage reaches the threshold voltage, the intrinsic level does cross the Fermi level, and that is what is known as inversion. At that point, the surface of the semiconductor is inverted from p-type into n-type. Remember that as said above, if the Fermi level lies above the Intrinsic level, the semiconductor is of n-type, therefore at Inversion, when the Intrinsic level reaches and crosses the Fermi level (which lies closer to the valence band), the semiconductor type changes at the surface as dictated by the relative positions of the Fermi and Intrinsic energy levels.
Structure and channel formation
upright=1.5, ''Channel formation in nMOS MOSFET shown as band diagram'': Top panels: An applied gate voltage bends bands, depleting holes from surface (left). The charge inducing the bending is balanced by a layer of negative acceptor-ion charge (right). Bottom panel: A larger applied voltage further depletes holes but conduction band lowers enough in energy to populate a conducting channel
file:Illustration of C-V measurement.gif, upright=1.5, C–V profile for a bulk MOSFET with different oxide thickness. The leftmost part of the curve corresponds to accumulation. The valley in the middle corresponds to depletion. The curve on the right corresponds to inversion
A MOSFET is based on the modulation of charge concentration by a MOS capacitance between a ''body'' electrode and a ''gate'' electrode located above the body and insulated from all other device regions by a gate dielectric layer. If dielectrics other than an oxide are employed, the device may be referred to as a metal-insulator-semiconductor FET (MISFET). Compared to the MOS capacitor, the MOSFET includes two additional terminals (''source'' and ''drain''), each connected to individual highly doped regions that are separated by the body region. These regions can be either p or n type, but they must both be of the same type, and of opposite type to the body region. The source and drain (unlike the body) are highly doped as signified by a "+" sign after the type of doping.
If the MOSFET is an n-channel or nMOS FET, then the source and drain are ''n+'' regions and the body is a ''p'' region. If the MOSFET is a p-channel or pMOS FET, then the source and drain are ''p+'' regions and the body is a ''n'' region. The source is so named because it is the source of the charge carriers (electrons for n-channel, holes for p-channel) that flow through the channel; similarly, the drain is where the charge carriers leave the channel.
The occupancy of the energy bands in a semiconductor is set by the position of the Fermi level
The Fermi level of a solid-state body is the thermodynamic work required to add one electron to the body. It is a thermodynamic quantity usually denoted by ''µ'' or ''E''F
for brevity. The Fermi level does not include the work required to remove ...
relative to the semiconductor energy-band edges.
With sufficient gate voltage, the valence band edge is driven far from the Fermi level, and holes from the body are driven away from the gate.
At larger gate bias still, near the semiconductor surface the conduction band edge is brought close to the Fermi level, populating the surface with electrons in an ''inversion layer'' or ''n-channel'' at the interface between the p region and the oxide. This conducting channel extends between the source and the drain, and current is conducted through it when a voltage is applied between the two electrodes. Increasing the voltage on the gate leads to a higher electron density in the inversion layer and therefore increases the current flow between the source and drain. For gate voltages below the threshold value, the channel is lightly populated, and only a very small subthreshold conduction, subthreshold leakage current can flow between the source and the drain.
When a negative gate-source voltage (positive source-gate) is applied, it creates a ''p-channel'' at the surface of the n region, analogous to the n-channel case, but with opposite polarities of charges and voltages. When a voltage less negative than the threshold value (a negative voltage for the p-channel) is applied between gate and source, the channel disappears and only a very small subthreshold current can flow between the source and the drain. The device may comprise a silicon on insulator
In semiconductor manufacturing, silicon on insulator (SOI) technology is fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to reduce parasitic capacitance within the device, thereby improving perfo ...
device in which a buried oxide is formed below a thin semiconductor layer. If the channel region between the gate dielectric and the buried oxide region is very thin, the channel is referred to as an ultrathin channel region with the source and drain regions formed on either side in or above the thin semiconductor layer. Other semiconductor materials may be employed. When the source and drain regions are formed above the channel in whole or in part, they are referred to as raised source/drain regions.
Modes of operation
file:MOSFET functioning.svg, upright=2, Source tied to the body to ensure no body bias:
top left: Subthreshold, top right: Ohmic mode, bottom left: Active mode at onset of pinch-off, bottom right: Active mode well into pinch-off – channel length modulation evident
file:mosfet n-ch circuit.svg, upright=1.2, Example application of an n-channel MOSFET. When the switch is pushed, the LED lights up.[ 090507 brunningsoftware.co.uk]
The operation of a MOSFET can be separated into three different modes, depending on the voltages at the terminals. In the following discussion, a simplified algebraic model is used. Modern MOSFET characteristics are more complex than the algebraic model presented here.[For example, see . The most recent version of the ]BSIM
BSIM (Berkeley Short-channel IGFET Model) refers to a family of MOSFET transistor models for integrated circuit design. It also refers to the BSIM group located in the Department of Electrical Engineering and Computer Sciences (EECS) at the Univer ...
model is described in
For an ''enhancement-mode, n-channel MOSFET'', the three operational modes are:
; Cutoff, subthreshold, and weak-inversion mode
When ''V''GS < ''V''th:
where is gate-to-source bias and is the threshold voltage
The threshold voltage, commonly abbreviated as Vth or VGS(th), of a field-effect transistor (FET) is the minimum gate-to-source voltage (VGS) that is needed to create a conducting path between the source and drain terminals. It is an important s ...
of the device.
According to the basic threshold model, the transistor is turned off, and there is no conduction between drain and source. A more accurate model considers the effect of thermal energy on the Fermi–Dirac distribution Fermi–Dirac may refer to:
* Fermi–Dirac statistics
Fermi–Dirac statistics (F–D statistics) is a type of quantum statistics that applies to the physics of a system consisting of many non-interacting, identical particles that obey the Pa ...
of electron energies which allow some of the more energetic electrons at the source to enter the channel and flow to the drain. This results in a subthreshold current that is an exponential function of gate-source voltage. While the current between drain and source should ideally be zero when the transistor is being used as a turned-off switch, there is a weak-inversion current, sometimes called subthreshold leakage.
In weak inversion where the source is tied to bulk, the current varies exponentially with as given approximately by:[
][
]
:
where = current at , the thermal voltage and the slope factor ''n'' is given by:
:
with = capacitance of the depletion layer and = capacitance of the oxide layer. This equation is generally used, but is only an adequate approximation for the source tied to the bulk. For the source not tied to the bulk, the subthreshold equation for drain current in saturation is
:
In a long-channel device, there is no drain voltage dependence of the current once , but as channel length is reduced drain-induced barrier lowering
Drain-induced barrier lowering (DIBL) is a short-channel effect in MOSFETs referring originally to a reduction of threshold voltage of the transistor at higher drain voltages.
In a classic planar field-effect transistor with a long channel, the bo ...
introduces drain voltage dependence that depends in a complex way upon the device geometry (for example, the channel doping, the junction doping and so on). Frequently, threshold voltage ''V''th for this mode is defined as the gate voltage at which a selected value of current ''I''D0 occurs, for example, ''I''D0 = 1μA, which may not be the same ''V''th-value used in the equations for the following modes.
Some micropower analog circuits are designed to take advantage of subthreshold conduction. By working in the weak-inversion region, the MOSFETs in these circuits deliver the highest possible transconductance-to-current ratio, namely: , almost that of a bipolar transistor.
The subthreshold '' I–V curve'' depends exponentially upon threshold voltage, introducing a strong dependence on any manufacturing variation that affects threshold voltage; for example: variations in oxide thickness, junction depth, or body doping that change the degree of drain-induced barrier lowering. The resulting sensitivity to fabricational variations complicates optimization for leakage and performance.
file:IvsV mosfet.svg, upright=1.2, MOSFET drain current vs. drain-to-source voltage for several values of ; the boundary between ''linear'' (''Ohmic'') and ''saturation'' (''active'') modes is indicated by the upward curving parabola
file:Mosfet linear.svg, upright=1.2, Cross section of a MOSFET operating in the linear (Ohmic) region; strong inversion region present even near drain
file:Mosfet saturation.svg, upright=1.2, Cross section of a MOSFET operating in the saturation (active) region; channel exhibits channel pinching near drain
; Triode mode or linear region (also known as the ohmic mode)
When ''V''GS > ''V''th and ''V''DS < ''V''GS − ''V''th:
The transistor is turned on, and a channel has been created which allows current between the drain and the source. The MOSFET operates like a resistor, controlled by the gate voltage relative to both the source and drain voltages. The current from drain to source is modeled as:
:
where is the charge-carrier effective mobility, is the gate width, is the gate length and is the gate oxide capacitance per unit area. The transition from the exponential subthreshold region to the triode region is not as sharp as the equations suggest.
; Saturation or active mode
When ''VGS > V''th and ''VDS'' ≥ (V''GS – V''th):
The switch is turned on, and a channel has been created, which allows current between the drain and source. Since the drain voltage is higher than the source voltage, the electrons spread out, and conduction is not through a narrow channel but through a broader, two- or three-dimensional current distribution extending away from the interface and deeper in the substrate. The onset of this region is also known as channel length modulation, pinch-off to indicate the lack of channel region near the drain. Although the channel does not extend the full length of the device, the electric field between the drain and the channel is very high, and conduction continues. The drain current is now weakly dependent upon drain voltage and controlled primarily by the gate-source voltage, and modeled approximately as:
:
The additional factor involving λ, the channel-length modulation parameter, models current dependence on drain voltage due to the Early effect
The Early effect, named after its discoverer James M. Early, is the variation in the effective width of the base in a bipolar junction transistor (BJT) due to a variation in the applied base-to-collector voltage. A greater reverse bias across ...
, or channel length modulation
Channel length modulation (CLM) is an effect in field effect transistors, a shortening of the length of the inverted channel region with increase in drain bias for large drain biases. The result of CLM is an increase in current with drain bias an ...
. According to this equation, a key design parameter, the MOSFET transconductance is:
:
where the combination ''V''ov = ''V''GS − ''V''th is called the overdrive voltage, and where ''V''DSsat = ''V''GS − ''V''th accounts for a small discontinuity in which would otherwise appear at the transition between the triode and saturation regions.
Another key design parameter is the MOSFET output resistance ''rout'' given by:
: .
''r''out is the inverse of ''g''DS where . ''I''D is the expression in saturation region.
If λ is taken as zero, an infinite output resistance of the device results that leads to unrealistic circuit predictions, particularly in analog circuits.
As the channel length becomes very short, these equations become quite inaccurate. New physical effects arise. For example, carrier transport in the active mode may become limited by velocity saturation Saturation velocity is the maximum velocity a charge carrier in a semiconductor, generally an electron, attains in the presence of very high electric fields. When this happens, the semiconductor is said to be in a state of velocity saturation. C ...
. When velocity saturation dominates, the saturation drain current is more nearly linear than quadratic in ''V''GS. At even shorter lengths, carriers transport with near zero scattering, known as quasi-ballistic transport
In mesoscopic physics, ballistic conduction (ballistic transport) is the unimpeded flow (or transport) of charge carriers (usually electrons), or energy-carrying particles, over relatively long distances in a material. In general, the resistivity ...
. In the ballistic regime, the carriers travel at an injection velocity that may exceed the saturation velocity and approaches the Fermi velocity at high inversion charge density. In addition, drain-induced barrier lowering increases off-state (cutoff) current and requires an increase in threshold voltage to compensate, which in turn reduces the saturation current.
Body effect
upright=1.2, Band diagram showing body effect. ''V''SB splits Fermi levels Fn for electrons and Fp for holes, requiring larger ''V''GB to populate the conduction band in an nMOS MOSFET
The occupancy of the energy bands in a semiconductor is set by the position of the Fermi level#"Fermi level" in semiconductor physics, Fermi level relative to the semiconductor energy-band edges. Application of a source-to-substrate reverse bias of the source-body pn-junction introduces a split between the Fermi levels for electrons and holes, moving the Fermi level for the channel further from the band edge, lowering the occupancy of the channel. The effect is to increase the gate voltage necessary to establish the channel, as seen in the figure. This change in channel strength by application of reverse bias is called the 'body effect'.
Simply put, using an nMOS example, the gate-to-body bias ''V''GB positions the conduction-band energy levels, while the source-to-body bias VSB positions the electron Fermi level near the interface, deciding occupancy of these levels near the interface, and hence the strength of the inversion layer or channel.
The body effect upon the channel can be described using a modification of the threshold voltage, approximated by the following equation:
:
where ''V''TB is the threshold voltage with substrate bias present, and ''V''T0 is the zero-''V''SB value of threshold voltage, is the body effect parameter, and 2''φ''B is the approximate potential drop between surface and bulk across the depletion layer when and gate bias is sufficient to ensure that a channel is present.[
For a uniformly doped p-type substrate with bulk acceptor doping of ''NA'' per unit volume,
:
with ''ni'' the intrinsic mobile carrier density per unit volume in the bulk. See, for example, ] As this equation shows, a reverse bias causes an increase in threshold voltage ''V''TB and therefore demands a larger gate voltage before the channel populates.
The body can be operated as a second gate, and is sometimes referred to as the "back gate"; the body effect is sometimes called the "back-gate effect".
Circuit symbols
A variety of symbols are used for the MOSFET. The basic design is generally a line for the channel with the source and drain leaving it at right angles and then bending back at right angles into the same direction as the channel. Sometimes three line segments are used for enhancement mode and a solid line for depletion mode (see depletion and enhancement modes
In field-effect transistors (FETs), depletion mode and enhancement mode are two major transistor types, corresponding to whether the transistor is in an on state or an off state at zero gate–source voltage.
Enhancement-mode MOSFETs (metal–o ...
). Another line is drawn parallel to the channel for the gate.
The ''bulk'' or ''body'' connection, if shown, is shown connected to the back of the channel with an arrow indicating pMOS or nMOS. Arrows always point from P to N, so an NMOS (N-channel in P-well or P-substrate) has the arrow pointing in (from the bulk to the channel). If the bulk is connected to the source (as is generally the case with discrete devices) it is sometimes angled to meet up with the source leaving the transistor. If the bulk is not shown (as is often the case in IC design as they are generally common bulk) an inversion symbol is sometimes used to indicate PMOS, alternatively an arrow on the source may be used in the same way as for bipolar transistors (out for nMOS, in for pMOS).
Comparison of enhancement-mode and depletion-mode MOSFET symbols, along with JFET
The junction-gate field-effect transistor (JFET) is one of the simplest types of field-effect transistor. JFETs are three-terminal semiconductor devices that can be used as electronically controlled switches or resistors, or to build amplifier ...
symbols. The orientation of the symbols, (most significantly the position of source relative to drain) is such that more positive voltages appear higher on the page than less positive voltages, implying conventional current
An electric current is a stream of charged particles, such as electrons or ions, moving through an electrical conductor or space. It is measured as the net rate of flow of electric charge through a surface or into a control volume. The moving par ...
flowing "down" the page:
In schematics where G, S, D are not labeled, the detailed features of the symbol indicate which terminal is source and which is drain. For enhancement-mode and depletion-mode MOSFET symbols (in columns two and five), the source terminal is the one connected to the triangle. Additionally, in this diagram, the gate is shown as an "L" shape, whose input leg is closer to S than D, also indicating which is which. However, these symbols are often drawn with a "T" shaped gate (as elsewhere on this page), so it is the triangle which must be relied upon to indicate the source terminal.
For the symbols in which the bulk, or body, terminal is shown, it is here shown internally connected to the source (i.e., the black triangles in the diagrams in columns 2 and 5). This is a typical configuration, but by no means the only important configuration. In general, the MOSFET is a four-terminal device, and in integrated circuits many of the MOSFETs share a body connection, not necessarily connected to the source terminals of all the transistors.
Applications
Digital integrated circuit
An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of tiny ...
s such as microprocessor
A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
s and memory devices contain thousands to millions of integrated MOSFET transistors on each device, providing the basic switching functions required to implement logic gate
A logic gate is an idealized or physical device implementing a Boolean function, a logical operation performed on one or more binary inputs that produces a single binary output. Depending on the context, the term may refer to an ideal logic gate, ...
s and data storage. Discrete devices are widely used in applications such as switch mode power supplies, variable-frequency drive
A variable-frequency drive (VFD) is a type of motor drive used in electro-mechanical drive systems to control AC motor speed and torque by varying motor input frequency and, depending on topology, to control associated voltage or current variat ...
s and other power electronics
Power electronics is the application of electronics to the control and conversion of electric power.
The first high-power electronic devices were made using mercury-arc valves. In modern systems, the conversion is performed with semiconducto ...
applications where each device may be switching thousands of watts. Radio-frequency amplifiers up to the UHF spectrum use MOSFET transistors as analog signal and power amplifiers. Radio systems also use MOSFETs as oscillators, or mixers to convert frequencies. MOSFET devices are also applied in audio-frequency power amplifiers for public address systems, sound reinforcement
A sound reinforcement system is the combination of microphones, signal processors, amplifiers, and loudspeakers in enclosures all controlled by a mixing console that makes live or pre-recorded sounds louder and may also distribute those sound ...
and home and automobile sound systems
MOS integrated circuits
Following the development of clean room
A cleanroom or clean room is an engineered space, which maintains a very low concentration of airborne particulates. It is well isolated, well-controlled from contamination, and actively cleansed. Such rooms are commonly needed for scientif ...
s to reduce contamination to levels never before thought necessary, and of photolithography
In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
and the planar process
The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which silicon integrated circuit chips a ...
to allow circuits to be made in very few steps, the Si–SiO2 system possessed the technical attractions of low cost of production (on a per circuit basis) and ease of integration. Largely because of these two factors, the MOSFET has become the most widely used type of transistor in IET __NOTOC__
IET can refer to:
Organizations
* Institute of Educational Technology, part of the Open University
* Institution of Engineering and Technology, a UK-based professional engineering institution
** Institute of Engineers and Technicians, wh ...
.
General Microelectronics introduced the first commercial MOS integrated circuit in 1964.
Additionally, the method of coupling two complementary MOSFETS (P-channel and N-channel) into one high/low switch, known as CMOS, means that digital circuits dissipate very little power except when actually switched.
The earliest microprocessors starting in 1970 were all ''MOS microprocessors''; i.e., fabricated entirely from PMOS logic
PMOS or pMOS logic (from p-channel metal–oxide–semiconductor) is a family of digital circuits based on p-channel, enhancement mode metal–oxide–semiconductor field-effect transistors (MOSFETs). In the late 1960s and early 1970s, PMOS log ...
or fabricated entirely from NMOS logic
N-type metal-oxide-semiconductor logic uses n-type (-) MOSFETs (metal-oxide-semiconductor field-effect transistors) to implement logic gates and other digital circuits. These nMOS transistors operate by creating an inversion layer in a p-type ...
. In the 1970s, ''MOS microprocessors'' were often contrasted with ''CMOS microprocessors'' and ''bipolar bit-slice processors''.
CMOS circuits
The MOSFET is used in digital complementary metal-oxide-semiconductor (CMOS
Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
) logic, which uses p- and n-channel MOSFETs as building blocks. Overheating is a major concern in integrated circuit
An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of tiny ...
s since ever more transistors are packed into ever smaller chips. CMOS logic reduces power consumption because no current flows (ideally), and thus no power
Power most often refers to:
* Power (physics), meaning "rate of doing work"
** Engine power, the power put out by an engine
** Electric power
* Power (social and political), the ability to influence people or events
** Abusive power
Power may a ...
is consumed, except when the inputs to logic gate
A logic gate is an idealized or physical device implementing a Boolean function, a logical operation performed on one or more binary inputs that produces a single binary output. Depending on the context, the term may refer to an ideal logic gate, ...
s are being switched. CMOS accomplishes this current reduction by complementing every nMOSFET with a pMOSFET and connecting both gates and both drains together. A high voltage on the gates will cause the nMOSFET to conduct and the pMOSFET not to conduct and a low voltage on the gates causes the reverse. During the switching time as the voltage goes from one state to another, both MOSFETs will conduct briefly. This arrangement greatly reduces power consumption and heat generation.
Digital
The growth of digital technologies like the microprocessor
A microprocessor is a computer processor where the data processing logic and control is included on a single integrated circuit, or a small number of integrated circuits. The microprocessor contains the arithmetic, logic, and control circu ...
has provided the motivation to advance MOSFET technology faster than any other type of silicon-based transistor. A big advantage of MOSFETs for digital switching is that the oxide layer between the gate and the channel prevents DC current from flowing through the gate, further reducing power consumption and giving a very large input impedance. The insulating oxide between the gate and channel effectively isolates a MOSFET in one logic stage from earlier and later stages, which allows a single MOSFET output to drive a considerable number of MOSFET inputs. Bipolar transistor-based logic (such as TTL
TTL may refer to:
Photography
* Through-the-lens metering, a camera feature
* Zenit TTL, an SLR film camera named for its TTL metering capability
Technology
* Time to live, a computer data lifespan-limiting mechanism
* Transistor–transistor lo ...
) does not have such a high fanout capacity. This isolation also makes it easier for the designers to ignore to some extent loading effects between logic stages independently. That extent is defined by the operating frequency: as frequencies increase, the input impedance of the MOSFETs decreases.
Analog
The MOSFET's advantages in digital circuits do not translate into supremacy in all analog circuit
Analogue electronics ( en-US, analog electronics) are electronic systems with a continuously variable signal, in contrast to digital electronics where signals usually take only two levels. The term "analogue" describes the proportional relati ...
s. The two types of circuit draw upon different features of transistor behavior. Digital circuits switch, spending most of their time either fully on or fully off. The transition from one to the other is only of concern with regards to speed and charge required. Analog circuits depend on operation in the transition region where small changes to ''V'' can modulate the output (drain) current. The JFET and bipolar junction transistor
A bipolar junction transistor (BJT) is a type of transistor that uses both electrons and electron holes as charge carriers. In contrast, a unipolar transistor, such as a field-effect transistor, uses only one kind of charge carrier. A bipolar ...
(BJT) are preferred for accurate matching (of adjacent devices in integrated circuits), higher transconductance Transconductance (for transfer conductance), also infrequently called mutual conductance, is the electrical characteristic relating the current through the output of a device to the voltage across the input of a device. Conductance is the reciproca ...
and certain temperature characteristics which simplify keeping performance predictable as circuit temperature varies.
Nevertheless, MOSFETs are widely used in many types of analog circuits because of their own advantages (zero gate current, high and adjustable output impedance and improved robustness vs. BJTs which can be permanently degraded by even lightly breaking down the emitter-base). The characteristics and performance of many analog circuits can be scaled up or down by changing the sizes (length and width) of the MOSFETs used. By comparison, in bipolar transistors follow a different scaling law
In statistics, a power law is a functional relationship between two quantities, where a relative change in one quantity results in a proportional relative change in the other quantity, independent of the initial size of those quantities: one qua ...
. MOSFETs' ideal characteristics regarding gate current (zero) and drain-source offset voltage (zero) also make them nearly ideal switch elements, and also make switched capacitor A switched capacitor (SC) is an electronic circuit that implements a function by moving charges into and out of capacitors when electronic switches are opened and closed. Usually, non-overlapping clock signals are used to control the switches, so ...
analog circuits practical. In their linear region, MOSFETs can be used as precision resistors, which can have a much higher controlled resistance than BJTs. In high power circuits, MOSFETs sometimes have the advantage of not suffering from thermal runaway
Thermal runaway describes a process that is accelerated by increased temperature, in turn releasing energy that further increases temperature. Thermal runaway occurs in situations where an increase in temperature changes the conditions in a way t ...
as BJTs do. This means that complete analog circuits can be made on a silicon chip in a much smaller space and with simpler fabrication techniques. MOSFETS are ideally suited to switch inductive loads because of tolerance to inductive kickback.
Some ICs combine analog and digital MOSFET circuitry on a single mixed-signal integrated circuit
A mixed-signal integrated circuit is any integrated circuit that has both analog circuits and digital circuits on a single semiconductor die.[silicon on insulator
In semiconductor manufacturing, silicon on insulator (SOI) technology is fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to reduce parasitic capacitance within the device, thereby improving perfo ...]
(SOI). Since MOSFETs require more space to handle a given amount of power than a BJT, fabrication processes can incorporate BJTs and MOSFETs into a single device. Mixed-transistor devices are called bi-FETs (bipolar FETs) if they contain just one BJT-FET and BiCMOS
Bipolar CMOS (BiCMOS) is a semiconductor technology that integrates two semiconductor technologies, those of the bipolar junction transistor and the CMOS (complementary metal-oxide-semiconductor) logic gate, into a single integrated circuit. In ...
(bipolar-CMOS) if they contain complementary BJT-FETs. Such devices have the advantages of both insulated gates and higher current density.
Analog switches
MOSFET analog switches use the MOSFET to pass analog signals when on, and as a high impedance when off. Signals flow in both directions across a MOSFET switch. In this application, the drain and source of a MOSFET exchange places depending on the relative voltages of the source/drain electrodes. The source is the more negative side for an N-MOS or the more positive side for a P-MOS. All of these switches are limited on what signals they can pass or stop by their gate-source, gate-drain and source–drain voltages; exceeding the voltage, current, or power limits will potentially damage the switch.
Single-type
This analog switch uses a four-terminal simple MOSFET of either P or N type.
In the case of an n-type switch, the body is connected to the most negative supply (usually GND) and the gate is used as the switch control. Whenever the gate voltage exceeds the source voltage by at least a threshold voltage, the MOSFET conducts. The higher the voltage, the more the MOSFET can conduct. An N-MOS switch passes all voltages less than ''V'' − ''V''. When the switch is conducting, it typically operates in the linear (or ohmic) mode of operation, since the source and drain voltages will typically be nearly equal.
In the case of a P-MOS, the body is connected to the most positive voltage, and the gate is brought to a lower potential to turn the switch on. The P-MOS switch passes all voltages higher than ''V'' − ''V'' (threshold voltage ''V'' is negative in the case of enhancement-mode P-MOS).
Dual-type (CMOS)
This "complementary" or CMOS type of switch uses one P-MOS and one N-MOS FET to counteract the limitations of the single-type switch. The FETs have their drains and sources connected in parallel, the body of the P-MOS is connected to the high potential (''V''DD) and the body of the N-MOS is connected to the low potential (''gnd''). To turn the switch on, the gate of the P-MOS is driven to the low potential and the gate of the N-MOS is driven to the high potential. For voltages between ''V''DD − ''V''tn and ''gnd'' − ''V''tp, both FETs conduct the signal; for voltages less than ''gnd'' − ''V''tp, the N-MOS conducts alone; and for voltages greater than ''V''DD − ''V''tn, the P-MOS conducts alone.
The voltage limits for this switch are the gate-source, gate-drain and source-drain voltage limits for both FETs. Also, the P-MOS is typically two to three times wider than the N-MOS, so the switch will be balanced for speed in the two directions.
Tri-state circuitry sometimes incorporates a CMOS MOSFET switch on its output to provide for a low-ohmic, full-range output when on, and a high-ohmic, mid-level signal when off.
Construction
Gate material
The primary criterion for the gate material is that it is a good conductor. Highly doped polycrystalline silicon
Polycrystalline silicon, or multicrystalline silicon, also called polysilicon, poly-Si, or mc-Si, is a high purity, polycrystalline form of silicon, used as a raw material by the solar photovoltaic and electronics industry.
Polysilicon is produ ...
is an acceptable but certainly not ideal conductor, and also suffers from some more technical deficiencies in its role as the standard gate material. Nevertheless, there are several reasons favoring use of polysilicon:
# The threshold voltage
The threshold voltage, commonly abbreviated as Vth or VGS(th), of a field-effect transistor (FET) is the minimum gate-to-source voltage (VGS) that is needed to create a conducting path between the source and drain terminals. It is an important s ...
(and consequently the drain to source on-current) is modified by the work function
In solid-state physics, the work function (sometimes spelt workfunction) is the minimum thermodynamic work (i.e., energy) needed to remove an electron from a solid to a point in the vacuum immediately outside the solid surface. Here "immediately" m ...
difference between the gate material and channel material. Because polysilicon is a semiconductor, its work function can be modulated by adjusting the type and level of doping. Furthermore, because polysilicon has the same bandgap
In solid-state physics, a band gap, also called an energy gap, is an energy range in a solid where no electronic states can exist. In graphs of the electronic band structure of solids, the band gap generally refers to the energy difference (in ...
as the underlying silicon channel, it is quite straightforward to tune the work function to achieve low threshold voltages for both NMOS and PMOS devices. By contrast, the work functions of metals are not easily modulated, so tuning the work function
In solid-state physics, the work function (sometimes spelt workfunction) is the minimum thermodynamic work (i.e., energy) needed to remove an electron from a solid to a point in the vacuum immediately outside the solid surface. Here "immediately" m ...
to obtain low threshold voltage
The threshold voltage, commonly abbreviated as Vth or VGS(th), of a field-effect transistor (FET) is the minimum gate-to-source voltage (VGS) that is needed to create a conducting path between the source and drain terminals. It is an important s ...
s (LVT) becomes a significant challenge. Additionally, obtaining low-threshold devices on both PMOS and NMOS devices sometimes requires the use of different metals for each device type.
# The silicon-SiO2 interface has been well studied and is known to have relatively few defects. By contrast many metal-insulator interfaces contain significant levels of defects which can lead to Fermi level pinning
Enrico Fermi (; 29 September 1901 – 28 November 1954) was an Italian (later naturalized American) physicist and the creator of the world's first nuclear reactor, the Chicago Pile-1. He has been called the "architect of the nuclear age" and t ...
, charging, or other phenomena that ultimately degrade device performance.
# In the MOSFET IC fabrication process, it is preferable to deposit the gate material prior to certain high-temperature steps in order to make better-performing transistors. Such high temperature steps would melt some metals, limiting the types of metal that can be used in a metal-gate-based process.
While polysilicon gates have been the de facto standard for the last twenty years, they do have some disadvantages which have led to their likely future replacement by metal gates. These disadvantages include:
* Polysilicon is not a great conductor (approximately 1000 times more resistive than metals) which reduces the signal propagation speed through the material. The resistivity can be lowered by increasing the level of doping, but even highly doped polysilicon is not as conductive as most metals. To improve conductivity further, sometimes a high-temperature metal such as tungsten
Tungsten, or wolfram, is a chemical element with the symbol W and atomic number 74. Tungsten is a rare metal found naturally on Earth almost exclusively as compounds with other elements. It was identified as a new element in 1781 and first isolat ...
, titanium
Titanium is a chemical element with the symbol Ti and atomic number 22. Found in nature only as an oxide, it can be reduced to produce a lustrous transition metal with a silver color, low density, and high strength, resistant to corrosion in ...
, cobalt
Cobalt is a chemical element with the symbol Co and atomic number 27. As with nickel, cobalt is found in the Earth's crust only in a chemically combined form, save for small deposits found in alloys of natural meteoric iron. The free element, pr ...
, and more recently nickel
Nickel is a chemical element with symbol Ni and atomic number 28. It is a silvery-white lustrous metal with a slight golden tinge. Nickel is a hard and ductile transition metal. Pure nickel is chemically reactive but large pieces are slow to ...
is alloyed with the top layers of the polysilicon. Such a blended material is called silicide
A silicide is a type of chemical compound that combines silicon and a (usually) more electropositive element.
Silicon is more electropositive than carbon. Silicides are structurally closer to borides than to carbides.
Similar to borides and carb ...
. The silicide-polysilicon combination has better electrical properties than polysilicon alone and still does not melt in subsequent processing. Also the threshold voltage is not significantly higher than with polysilicon alone, because the silicide material is not near the channel. The process in which silicide is formed on both the gate electrode and the source and drain regions is sometimes called salicide
The term salicide refers to a technology used in the microelectronics industry used to form electrical contacts between the semiconductor device and the supporting interconnect structure. The salicide process involves the reaction of a metal th ...
, self-aligned silicide.
* When the transistors are extremely scaled down, it is necessary to make the gate dielectric layer very thin, around 1 nm in state-of-the-art technologies. A phenomenon observed here is the so-called poly depletion, where a depletion layer is formed in the gate polysilicon layer next to the gate dielectric when the transistor is in the inversion. To avoid this problem, a metal gate is desired. A variety of metal gates such as tantalum
Tantalum is a chemical element with the symbol Ta and atomic number 73. Previously known as ''tantalium'', it is named after Tantalus, a villain in Greek mythology. Tantalum is a very hard, ductile, lustrous, blue-gray transition metal that is ...
, tungsten, tantalum nitride
Tantalum nitride (TaN) is a chemical compound, a nitride of tantalum. There are multiple phases of compounds, stoichimetrically from Ta2N to Ta3N5, including TaN.
As a thin film TaN find use as a diffusion barrier and insulating layer between cop ...
, and titanium nitride
Titanium nitride (TiN; sometimes known as Tinite) is an extremely hard ceramic material, often used as a physical vapor deposition (PVD) coating on titanium alloys, steel, carbide, and aluminium components to improve the substrate's surface prope ...
are used, usually in conjunction with high-κ dielectric The term high-κ dielectric refers to a material with a high dielectric constant (κ, kappa), as compared to silicon dioxide. High-κ dielectrics are used in semiconductor manufacturing processes where they are usually used to replace a silicon dio ...
s. An alternative is to use fully silicided polysilicon gates, a process known as FUSI.
Present high performance CPUs use metal gate technology, together with high-κ dielectric The term high-κ dielectric refers to a material with a high dielectric constant (κ, kappa), as compared to silicon dioxide. High-κ dielectrics are used in semiconductor manufacturing processes where they are usually used to replace a silicon dio ...
s, a combination known as ''high-κ, metal gate'' (HKMG). The disadvantages of metal gates are overcome by a few techniques:
# The threshold voltage is tuned by including a thin "work function metal" layer between the high-κ dielectric and the main metal. This layer is thin enough that the total work function of the gate is influenced by both the main metal and thin metal work functions (either due to alloying during annealing, or simply due to the incomplete screening by the thin metal). The threshold voltage thus can be tuned by the thickness of the thin metal layer.
# High-κ dielectrics are now well studied, and their defects are understood.
# HKMG processes exist that do not require the metals to experience high temperature anneals; other processes select metals that can survive the annealing step.
Insulator
As devices are made smaller, insulating layers are made thinner, often through steps of thermal oxidation
In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react with it. The rat ...
or localised oxidation of silicon (LOCOS
LOCOS, short for LOCal Oxidation of Silicon, is a microfabrication process where silicon dioxide is formed in selected areas on a silicon wafer having the Si-SiO2 interface at a lower point than the rest of the silicon surface. As of 2008 it was ...
). For nano-scaled devices, at some point tunneling of carriers through the insulator from the channel to the gate electrode takes place. To reduce the resulting leakage current, the insulator can be made thinner by choosing a material with a higher dielectric constant. To see how thickness and dielectric constant are related, note that Gauss's law
In physics and electromagnetism, Gauss's law, also known as Gauss's flux theorem, (or sometimes simply called Gauss's theorem) is a law relating the distribution of electric charge to the resulting electric field. In its integral form, it sta ...
connects field to charge as:
:
with ''Q'' = charge density, κ = dielectric constant, ε0 = permittivity of empty space and ''E'' = electric field. From this law it appears the same charge can be maintained in the channel at a lower field provided κ is increased. The voltage on the gate is given by:
:
with ''V''G = gate voltage, ''V''ch = voltage at channel side of insulator, and ''t''ins = insulator thickness. This equation shows the gate voltage will not increase when the insulator thickness increases, provided κ increases to keep ''t''ins / κ = constant (see the article on high-κ dielectrics for more detail, and the section in this article on gate-oxide leakage).
The insulator in a MOSFET is a dielectric which can in any event be silicon oxide, formed by LOCOS
LOCOS, short for LOCal Oxidation of Silicon, is a microfabrication process where silicon dioxide is formed in selected areas on a silicon wafer having the Si-SiO2 interface at a lower point than the rest of the silicon surface. As of 2008 it was ...
but many other dielectric materials are employed. The generic term for the dielectric is gate dielectric since the dielectric lies directly below the gate electrode and above the channel of the MOSFET.
Junction design
The source-to-body and drain-to-body junctions are the object of much attention because of three major factors: their design affects the current-voltage (''I-V'') characteristics of the device, lowering output resistance, and also the speed of the device through the loading effect of the junction capacitance
Capacitance is the capability of a material object or device to store electric charge. It is measured by the change in charge in response to a difference in electric potential, expressed as the ratio of those quantities. Commonly recognized are ...
s, and finally, the component of stand-by power dissipation due to junction leakage.
upright=1.2, MOSFET showing shallow junction extensions, raised source and drain and halo implant. Raised source and drain separated from gate by oxide spacers
The drain induced barrier lowering of the threshold voltage and channel length modulation
Channel length modulation (CLM) is an effect in field effect transistors, a shortening of the length of the inverted channel region with increase in drain bias for large drain biases. The result of CLM is an increase in current with drain bias an ...
effects upon ''I-V'' curves are reduced by using shallow junction extensions. In addition, ''halo'' doping can be used, that is, the addition of very thin heavily doped regions of the same doping type as the body tight against the junction walls to limit the extent of depletion region
In semiconductor physics, the depletion region, also called depletion layer, depletion zone, junction region, space charge region or space charge layer, is an insulating region within a conductive, doped semiconductor material where the mobile ...
s.
The capacitive effects are limited by using raised source and drain geometries that make most of the contact area border thick dielectric instead of silicon.
These various features of junction design are shown (with artistic license
Artistic license (alongside more contextually-specific derivative terms such as poetic license, historical license, dramatic license, and narrative license) refers to deviation from fact or form for artistic purposes. It can include the alterat ...
) in the figure.
Scaling
upright=1.2, Trend of Intel CPU transistor gate length
upright=1.2, MOSFET version of gain-boosted current mirror; M1 and M2 are in active mode, while M3 and M4 are in Ohmic mode, and act like resistors. The operational amplifier provides feedback that maintains a high output resistance.
Over the past decades, the MOSFET (as used for digital logic) has continually been scaled down in size; typical MOSFET channel lengths were once several micrometre
The micrometre ( international spelling as used by the International Bureau of Weights and Measures; SI symbol: μm) or micrometer (American spelling), also commonly known as a micron, is a unit of length in the International System of Unit ...
s, but modern integrated circuits are incorporating MOSFETs with channel lengths of tens of nanometers. Robert Dennard
Robert Heath Dennard (born September 5, 1932) is an American electrical engineer and inventor.
Biography
Dennard was born in Terrell, Texas, U.S. He received his B.S. and M.S. degrees in Electrical Engineering from Southern Methodist University, ...
's work on scaling theory was pivotal in recognising that this ongoing reduction was possible. Intel began production of a process featuring a 32 nm feature size (with the channel being even shorter) in late 2009. The semiconductor industry maintains a "roadmap", the ITRS, which sets the pace for MOSFET development. Historically, the difficulties with decreasing the size of the MOSFET have been associated with the semiconductor device fabrication process, the need to use very low voltages, and with poorer electrical performance necessitating circuit redesign and innovation (small MOSFETs exhibit higher leakage currents and lower output resistance).
Smaller MOSFETs are desirable for several reasons. The main reason to make transistors smaller is to pack more and more devices in a given chip area. This results in a chip with the same functionality in a smaller area, or chips with more functionality in the same area. Since fabrication costs for a semiconductor wafer
In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The wafer serv ...
are relatively fixed, the cost per integrated circuits is mainly related to the number of chips that can be produced per wafer. Hence, smaller ICs allow more chips per wafer, reducing the price per chip. In fact, over the past 30 years the number of transistors per chip has been doubled every 2–3 years once a new technology node is introduced. For example, the number of MOSFETs in a microprocessor fabricated in a 45 nm technology can well be twice as many as in a 65 nm
The 65 nm process is an advanced lithographic node used in volume CMOS ( MOSFET) semiconductor fabrication. Printed linewidths (i.e. transistor gate lengths) can reach as low as 25 nm on a nominally 65 nm process, while the pitc ...
chip. This doubling of transistor density was first observed by Gordon Moore
Gordon Earle Moore (born January 3, 1929) is an American businessman, engineer, and the co-founder and chairman emeritus of Intel Corporation. He is also the original proponent of Moore's law.
As of March 2021, Moore's net worth is rep ...
in 1965 and is commonly referred to as Moore's law
Moore's law is the observation that the number of transistors in a dense integrated circuit (IC) doubles about every two years. Moore's law is an observation and projection of a historical trend. Rather than a law of physics, it is an empir ...
. It is also expected that smaller transistors switch faster. For example, one approach to size reduction is a scaling of the MOSFET that requires all device dimensions to reduce proportionally. The main device dimensions are the channel length, channel width, and oxide thickness. When they are scaled down by equal factors, the transistor channel resistance does not change, while gate capacitance is cut by that factor. Hence, the RC delay
The RC time constant, also called tau, the time constant (in seconds) of an RC circuit, is equal to the product of the circuit resistance (in ohms) and the circuit capacitance (in farads), i.e.
: \tau = RC econds
It is the time required to ...
of the transistor scales with a similar factor. While this has been traditionally the case for the older technologies, for the state-of-the-art MOSFETs reduction of the transistor dimensions does not necessarily translate to higher chip speed because the delay due to interconnections is more significant.
Producing MOSFETs with channel lengths much smaller than a micrometre
The micrometre ( international spelling as used by the International Bureau of Weights and Measures; SI symbol: μm) or micrometer (American spelling), also commonly known as a micron, is a unit of length in the International System of Unit ...
is a challenge, and the difficulties of semiconductor device fabrication are always a limiting factor in advancing integrated circuit technology. Though processes such as ALD have improved fabrication for small components, the small size of the MOSFET (less than a few tens of nanometers) has created operational problems:
; Higher subthreshold conduction: As MOSFET geometries shrink, the voltage that can be applied to the gate must be reduced to maintain reliability. To maintain performance, the threshold voltage of the MOSFET has to be reduced as well. As threshold voltage is reduced, the transistor cannot be switched from complete turn-off to complete turn-on with the limited voltage swing available; the circuit design is a compromise between strong current in the ''on'' case and low current in the ''off'' case, and the application determines whether to favor one over the other. Subthreshold leakage (including subthreshold conduction, gate-oxide leakage and reverse-biased junction leakage), which was ignored in the past, now can consume upwards of half of the total power consumption of modern high-performance VLSI chips.
; Increased gate-oxide leakage: The gate oxide, which serves as insulator between the gate and channel, should be made as thin as possible to increase the channel conductivity and performance when the transistor is on and to reduce subthreshold leakage when the transistor is off. However, with current gate oxides with a thickness of around 1.2 nm (which in silicon is ~5 atom
Every atom is composed of a nucleus and one or more electrons bound to the nucleus. The nucleus is made of one or more protons and a number of neutrons. Only the most common variety of hydrogen has no neutrons.
Every solid, liquid, gas, and ...
s thick) the quantum mechanical
Quantum mechanics is a fundamental theory in physics that provides a description of the physical properties of nature at the scale of atoms and subatomic particles. It is the foundation of all quantum physics including quantum chemistry, qua ...
phenomenon of electron tunneling
Quantum tunnelling, also known as tunneling ( US) is a quantum mechanical phenomenon whereby a wavefunction can propagate through a potential barrier.
The transmission through the barrier can be finite and depends exponentially on the barrier h ...
occurs between the gate and channel, leading to increased power consumption. Silicon dioxide
Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...
has traditionally been used as the gate insulator. Silicon dioxide however has a modest dielectric constant. Increasing the dielectric constant of the gate dielectric allows a thicker layer while maintaining a high capacitance (capacitance is proportional to dielectric constant and inversely proportional to dielectric thickness). All else equal, a higher dielectric thickness reduces the quantum tunneling
In physics, a quantum (plural quanta) is the minimum amount of any physical entity (physical property) involved in an interaction. The fundamental notion that a physical property can be "quantized" is referred to as "the hypothesis of quantizati ...
current through the dielectric between the gate and the channel. Insulators that have a larger dielectric constant
The relative permittivity (in older texts, dielectric constant) is the permittivity of a material expressed as a ratio with the electric permittivity of a vacuum. A dielectric is an insulating material, and the dielectric constant of an insulat ...
than silicon dioxide (referred to as high-κ dielectric The term high-κ dielectric refers to a material with a high dielectric constant (κ, kappa), as compared to silicon dioxide. High-κ dielectrics are used in semiconductor manufacturing processes where they are usually used to replace a silicon dio ...
s), such as group IVb metal silicates e.g. hafnium
Hafnium is a chemical element with the symbol Hf and atomic number 72. A lustrous, silvery gray, tetravalent transition metal, hafnium chemically resembles zirconium and is found in many zirconium minerals. Its existence was predicted by Dmitri M ...
and zirconium
Zirconium is a chemical element with the symbol Zr and atomic number 40. The name ''zirconium'' is taken from the name of the mineral zircon, the most important source of zirconium. The word is related to Persian '' zargun'' (zircon; ''zar-gun'', ...
silicates and oxides are being used to reduce the gate leakage from the 45 nanometer technology node onwards. On the other hand, the barrier height of the new gate insulator is an important consideration; the difference in conduction band
In solid-state physics, the valence band and conduction band are the bands closest to the Fermi level, and thus determine the electrical conductivity of the solid. In nonmetals, the valence band is the highest range of electron energies in w ...
energy between the semiconductor and the dielectric (and the corresponding difference in valence band
In solid-state physics, the valence band and conduction band are the bands closest to the Fermi level, and thus determine the electrical conductivity of the solid. In nonmetals, the valence band is the highest range of electron energies in w ...
energy) also affects leakage current level. For the traditional gate oxide, silicon dioxide, the former barrier is approximately 8 eV. For many alternative dielectrics the value is significantly lower, tending to increase the tunneling current, somewhat negating the advantage of higher dielectric constant. The maximum gate-source voltage is determined by the strength of the electric field able to be sustained by the gate dielectric before significant leakage occurs. As the insulating dielectric is made thinner, the electric field strength within it goes up for a fixed voltage. This necessitates using lower voltages with the thinner dielectric.
; Increased junction leakage: To make devices smaller, junction design has become more complex, leading to higher doping levels, shallower junctions, "halo" doping and so forth, all to decrease drain-induced barrier lowering (see the section on junction design). To keep these complex junctions in place, the annealing steps formerly used to remove damage and electrically active defects must be curtailed increasing junction leakage. Heavier doping is also associated with thinner depletion layers and more recombination centers that result in increased leakage current, even without lattice damage.
; Drain-induced barrier lowering
Drain-induced barrier lowering (DIBL) is a short-channel effect in MOSFETs referring originally to a reduction of threshold voltage of the transistor at higher drain voltages.
In a classic planar field-effect transistor with a long channel, the bo ...
(DIBL) and ''V''T roll off: Because of the short-channel effect In electronics, short-channel effects occur in MOSFETs in which the channel length is comparable to the depletion layer widths of the source and drain junctions. These effects include, in particular, drain-induced barrier lowering, velocity satur ...
, channel formation is not entirely done by the gate, but now the drain and source also affect the channel formation. As the channel length decreases, the depletion regions of the source and drain come closer together and make the threshold voltage (''V''T) a function of the length of the channel. This is called ''V''T roll-off. ''V''T also becomes function of drain to source voltage ''V''DS. As we increase the ''V''DS, the depletion regions increase in size, and a considerable amount of charge is depleted by the ''V''DS. The gate voltage required to form the channel is then lowered, and thus, the ''V''T decreases with an increase in ''V''DS. This effect is called drain induced barrier lowering (DIBL).
; Lower output resistance: For analog operation, good gain requires a high MOSFET output impedance, which is to say, the MOSFET current should vary only slightly with the applied drain-to-source voltage. As devices are made smaller, the influence of the drain competes more successfully with that of the gate due to the growing proximity of these two electrodes, increasing the sensitivity of the MOSFET current to the drain voltage. To counteract the resulting decrease in output resistance, circuits are made more complex, either by requiring more devices, for example the cascode
The cascode is a two-stage amplifier that consists of a common-emitter stage feeding into a common-base stage.
Compared to a single amplifier stage, this combination may have one or more of the following characteristics: higher input–output ...
and cascade amplifier
Cascade, Cascades or Cascading may refer to:
Science and technology Science
*Cascade waterfalls, or series of waterfalls
* Cascade, the CRISPR-associated complex for antiviral defense (a protein complex)
* Cascade (grape), a type of fruit
* Bioch ...
s, or by feedback circuitry using operational amplifiers
An operational amplifier (often op amp or opamp) is a DC-coupled high-gain electronic voltage amplifier with a differential input and, usually, a single-ended output. In this configuration, an op amp produces an output potential (relative to c ...
, for example a circuit like that in the adjacent figure.
; Lower transconductance: The transconductance Transconductance (for transfer conductance), also infrequently called mutual conductance, is the electrical characteristic relating the current through the output of a device to the voltage across the input of a device. Conductance is the reciproca ...
of the MOSFET decides its gain and is proportional to hole or electron mobility
In solid-state physics, the electron mobility characterises how quickly an electron can move through a metal or semiconductor when pulled by an electric field. There is an analogous quantity for holes, called hole mobility. The term carrier mobili ...
(depending on device type), at least for low drain voltages. As MOSFET size is reduced, the fields in the channel increase and the dopant impurity levels increase. Both changes reduce the carrier mobility, and hence the transconductance. As channel lengths are reduced without proportional reduction in drain voltage, raising the electric field in the channel, the result is velocity saturation of the carriers, limiting the current and the transconductance.
; Interconnect capacitance: Traditionally, switching time was roughly proportional to the gate capacitance of gates. However, with transistors becoming smaller and more transistors being placed on the chip, interconnect capacitance (the capacitance of the metal-layer connections between different parts of the chip) is becoming a large percentage of capacitance. Signals have to travel through the interconnect, which leads to increased delay and lower performance.
; Heat production: The ever-increasing density of MOSFETs on an integrated circuit creates problems of substantial localized heat generation that can impair circuit operation. Circuits operate more slowly at high temperatures, and have reduced reliability and shorter lifetimes. Heat sinks and other cooling devices and methods are now required for many integrated circuits including microprocessors. Power MOSFET
A power MOSFET is a specific type of metal–oxide–semiconductor field-effect transistor (MOSFET) designed to handle significant power levels. Compared to the other power semiconductor devices, such as an insulated-gate bipolar transistor (IG ...
s are at risk of thermal runaway
Thermal runaway describes a process that is accelerated by increased temperature, in turn releasing energy that further increases temperature. Thermal runaway occurs in situations where an increase in temperature changes the conditions in a way t ...
. As their on-state resistance rises with temperature, if the load is approximately a constant-current load then the power loss rises correspondingly, generating further heat. When the heatsink
A heat sink (also commonly spelled heatsink) is a passive heat exchanger that transfers the heat generated by an electronic or a mechanical device to a fluid medium, often air or a liquid coolant, where it is dissipated away from the device, the ...
is not able to keep the temperature low enough, the junction temperature may rise quickly and uncontrollably, resulting in destruction of the device.
; Process variations: With MOSFETs becoming smaller, the number of atoms in the silicon that produce many of the transistor's properties is becoming fewer, with the result that control of dopant numbers and placement is more erratic. During chip manufacturing, random process variations affect all transistor dimensions: length, width, junction depths, oxide thickness ''etc.'', and become a greater percentage of overall transistor size as the transistor shrinks. The transistor characteristics become less certain, more statistical. The random nature of manufacture means we do not know which particular example MOSFETs actually will end up in a particular instance of the circuit. This uncertainty forces a less optimal design because the design must work for a great variety of possible component MOSFETs. See process variation
Natural process variation, sometimes just called process variation, is the statistical description of natural fluctuations in process outputs.
Equations
The following equations are used for an ''x''-bar-control chart:
:\bar x = \sum_^n x_i/ ...
, design for manufacturability
Design for manufacturability (also sometimes known as design for manufacturing or DFM) is the general engineering practice of designing products in such a way that they are easy to manufacture. The concept exists in almost all engineering discipli ...
, reliability engineering
Reliability engineering is a sub-discipline of systems engineering that emphasizes the ability of equipment to function without failure. Reliability describes the ability of a system or component to function under stated conditions for a specifie ...
, and statistical process control
Statistical process control (SPC) or statistical quality control (SQC) is the application of statistical methods to monitor and control the quality of a production process. This helps to ensure that the process operates efficiently, producing m ...
.
; Modeling challenges: Modern ICs are computer-simulated with the goal of obtaining working circuits from the very first manufactured lot. As devices are miniaturized, the complexity of the processing makes it difficult to predict exactly what the final devices look like, and modeling of physical processes becomes more challenging as well. In addition, microscopic variations in structure due simply to the probabilistic nature of atomic processes require statistical (not just deterministic) predictions. These factors combine to make adequate simulation and "right the first time" manufacture difficult.
Other types
Dual-gate
upright=1.2, A ">FinFET
The dual-gate MOSFET has a tetrode
A tetrode is a vacuum tube (called ''valve'' in British English) having four active electrodes. The four electrodes in order from the centre are: a thermionic cathode, first and second grids and a plate (called ''anode'' in British English). Th ...
configuration, where both gates control the current in the device. It is commonly used for small-signal devices in radio frequency applications where biasing the drain-side gate at constant potential reduces the gain loss caused by Miller effect In electronics, the Miller effect accounts for the increase in the equivalent input capacitance of an inverting voltage amplifier due to amplification of the effect of capacitance between the input and output terminals. The virtually increased inpu ...
, replacing two separate transistors in cascode
The cascode is a two-stage amplifier that consists of a common-emitter stage feeding into a common-base stage.
Compared to a single amplifier stage, this combination may have one or more of the following characteristics: higher input–output ...
configuration. Other common uses in RF circuits include gain control and mixing (frequency conversion). The ''tetrode'' description, though accurate, does not replicate the vacuum-tube tetrode. Vacuum-tube tetrodes, using a screen grid, exhibit much lower grid-plate capacitance and much higher output impedance and voltage gains than triode vacuum tubes. These improvements are commonly an order of magnitude (10 times) or considerably more. Tetrode transistors (whether bipolar junction or field-effect) do not exhibit improvements of such a great degree.
The FinFET
A fin field-effect transistor (FinFET) is a multigate device, a MOSFET (metal-oxide-semiconductor field-effect transistor) built on a substrate where the gate is placed on two, three, or four sides of the channel or wrapped around the channel, f ...
is a double-gate silicon-on-insulator device, one of a number of geometries being introduced to mitigate the effects of short channels and reduce drain-induced barrier lowering. The ''fin'' refers to the narrow channel between source and drain. A thin insulating oxide layer on either side of the fin separates it from the gate. SOI FinFETs with a thick oxide on top of the fin are called ''double-gate'' and those with a thin oxide on top as well as on the sides are called ''triple-gate'' FinFETs.
Depletion-mode
There are ''depletion-mode'' MOSFET devices, which are less commonly used than the standard ''enhancement-mode'' devices already described. These are MOSFET devices that are doped so that a channel exists even with zero voltage from gate to source. To control the channel, a negative voltage is applied to the gate (for an n-channel device), depleting the channel, which reduces the current flow through the device. In essence, the depletion-mode device is equivalent to a normally closed
In electrical engineering, a switch is an electrical component that can disconnect or connect the conducting path in an electrical circuit, interrupting the electric current or diverting it from one conductor to another. The most common type of ...
(on) switch, while the enhancement-mode device is equivalent to a normally open
In electrical engineering, a switch is an electrical component that can disconnect or connect the conducting path in an electrical circuit, interrupting the electric current or diverting it from one conductor to another. The most common type of ...
(off) switch.
Due to their low noise figure Noise figure (NF) and noise factor (''F'') are figures of merit that indicate degradation of the signal-to-noise ratio (SNR) that is caused by components in a signal chain. These figures of merit are used to evaluate the performance of an amplifier ...
in the RF region, and better gain
Gain or GAIN may refer to:
Science and technology
* Gain (electronics), an electronics and signal processing term
* Antenna gain
* Gain (laser), the amplification involved in laser emission
* Gain (projection screens)
* Information gain in de ...
, these devices are often preferred to bipolars in RF front-ends such as in TV sets.
Depletion-mode MOSFET families include BF960 by Siemens
Siemens AG ( ) is a German multinational conglomerate corporation and the largest industrial manufacturing company in Europe headquartered in Munich with branch offices abroad.
The principal divisions of the corporation are ''Industry'', '' ...
and Telefunken
Telefunken was a German radio and television apparatus company, founded in Berlin in 1903, as a joint venture of Siemens & Halske and the ''Allgemeine Elektrizitäts-Gesellschaft'' (AEG) ('General electricity company').
The name "Telefunken" app ...
, and the BF980 in the 1980s by Philips
Koninklijke Philips N.V. (), commonly shortened to Philips, is a Dutch multinational conglomerate corporation that was founded in Eindhoven in 1891. Since 1997, it has been mostly headquartered in Amsterdam, though the Benelux headquarters i ...
(later to become NXP Semiconductors
NXP Semiconductors N.V. (NXP) is a Dutch semiconductor designer and manufacturer with headquarters in Eindhoven, Netherlands. The company employs approximately 31,000 people in more than 30 countries. NXP reported revenue of $11.06 billion in 2 ...
), whose derivatives are still used in AGC and RF mixer front-ends.
Metal-insulator-semiconductor field-effect transistor (MISFET)
Metal-insulator-semiconductor field-effect-transistor,[
] or ''MISFET'', is a more general term than ''MOSFET'' and a synonym to ''insulated-gate field-effect transistor'' (IGFET). All MOSFETs are MISFETs, but not all MISFETs are MOSFETs.
The gate dielectric insulator in a MISFET is silicon dioxide
Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...
in a MOSFET, but other materials can also be employed. The gate dielectric
A gate dielectric is a dielectric used between the gate and substrate of a field-effect transistor (such as a MOSFET). In state-of-the-art processes, the gate dielectric is subject to many constraints, including:
* Electrically clean interface to ...
lies directly below the gate electrode
The field-effect transistor (FET) is a type of transistor that uses an electric field to control the flow of current in a semiconductor. FETs (JFETs or MOSFETs) are devices with three terminals: ''source'', ''gate'', and ''drain''. FETs control ...
and above the channel
Channel, channels, channeling, etc., may refer to:
Geography
* Channel (geography), in physical geography, a landform consisting of the outline (banks) of the path of a narrow body of water.
Australia
* Channel Country, region of outback Austral ...
of the MISFET. The term ''metal'' is historically used for the gate material, even though now it is usually highly doped polysilicon
Polycrystalline silicon, or multicrystalline silicon, also called polysilicon, poly-Si, or mc-Si, is a high purity, polycrystalline form of silicon, used as a raw material by the solar photovoltaic and electronics industry.
Polysilicon is produce ...
or some other non-metal
In chemistry, a nonmetal is a chemical element that generally lacks a predominance of metallic properties; they range from colorless gases (like hydrogen) to shiny solids (like carbon, as graphite). The electrons in nonmetals behave different ...
.
Insulator types may be:
* Silicon dioxide, in MOSFETs
* Organic insulators (e.g., undoped trans-polyacetylene
Polyacetylene (IUPAC name: polyethyne) usually refers to an organic polymer with the repeating unit . The name refers to its conceptual construction from polymerization of acetylene to give a chain with repeating olefin groups. This compound i ...
; cyanoethyl pullulan
Pullulan is a polysaccharide polymer consisting of maltotriose units, also known as α-1,4- ;α-1,6- glucan'. Three glucose units in maltotriose are connected by an α-1,4 glycosidic bond, whereas consecutive maltotriose units are connected to e ...
, CEP), for organic-based FETs.[
]
NMOS logic
For devices of equal current driving capability, n-channel MOSFETs can be made smaller than p-channel MOSFETs, due to p-channel charge carriers (holes
A hole is an opening in or through a particular medium, usually a solid body. Holes occur through natural and artificial processes, and may be useful for various purposes, or may represent a problem needing to be addressed in many fields of en ...
) having lower mobility
Mobility may refer to:
Social sciences and humanities
* Economic mobility, ability of individuals or families to improve their economic status
* Geographic mobility, the measure of how populations and goods move over time
* Mobilities, a contemp ...
than do n-channel charge carriers (electrons
The electron ( or ) is a subatomic particle with a negative one elementary electric charge. Electrons belong to the first generation of the lepton particle family,
and are generally thought to be elementary particles because they have no ...
), and producing only one type of MOSFET on a silicon substrate is cheaper and technically simpler. These were the driving principles in the design of NMOS logic
N-type metal-oxide-semiconductor logic uses n-type (-) MOSFETs (metal-oxide-semiconductor field-effect transistors) to implement logic gates and other digital circuits. These nMOS transistors operate by creating an inversion layer in a p-type ...
which uses n-channel MOSFETs exclusively. However, neglecting leakage current
In electronics, leakage is the gradual transfer of electrical energy across a boundary normally viewed as insulating, such as the spontaneous discharge of a charged capacitor, magnetic coupling of a transformer with other components, or flow of cu ...
, unlike CMOS logic, NMOS logic consumes power even when no switching is taking place. With advances in technology, CMOS logic displaced NMOS logic in the mid-1980s to become the preferred process for digital chips.
Power MOSFET
upright=1.2, Cross section of a power MOSFET, with square cells. A typical transistor is constituted of several thousand cells
Power MOSFET
A power MOSFET is a specific type of metal–oxide–semiconductor field-effect transistor (MOSFET) designed to handle significant power levels. Compared to the other power semiconductor devices, such as an insulated-gate bipolar transistor (IG ...
s have a different structure. As with most power devices, the structure is vertical and not planar. Using a vertical structure, it is possible for the transistor to sustain both high blocking voltage and high current. The voltage rating of the transistor is a function of the doping and thickness of the N-epitaxial
Epitaxy refers to a type of crystal growth or material deposition in which new crystalline layers are formed with one or more well-defined orientations with respect to the crystalline seed layer. The deposited crystalline film is called an epit ...
layer (see cross section), while the current rating is a function of the channel width (the wider the channel, the higher the current). In a planar structure, the current and breakdown voltage ratings are both a function of the channel dimensions (respectively width and length of the channel), resulting in inefficient use of the "silicon estate". With the vertical structure, the component area is roughly proportional to the current it can sustain, and the component thickness (actually the N-epitaxial layer thickness) is proportional to the breakdown voltage.
Power MOSFETs with lateral structure are mainly used in high-end audio amplifiers and high-power PA systems. Their advantage is a better behaviour in the saturated region (corresponding to the linear region of a bipolar transistor) than the vertical MOSFETs. Vertical MOSFETs are designed for switching applications.
Double-diffused metal-oxide-semiconductor (DMOS)
There are ''LDMOS
LDMOS (laterally-diffused metal-oxide semiconductor) is a planar double-diffused MOSFET (metal–oxide–semiconductor field-effect transistor) used in amplifiers, including microwave power amplifiers, RF power amplifiers and audio power amplif ...
'' (lateral double-diffused metal oxide semiconductor) and ''VDMOS'' (vertical double-diffused metal oxide semiconductor). Most power MOSFETs are made using this technology.
Radiation-hardened-by-design (RHBD)
Semiconductor sub-micrometer and nanometer electronic circuits are the primary concern for operating within the normal tolerance in harsh radiation
In physics, radiation is the emission or transmission of energy in the form of waves or particles through space or through a material medium. This includes:
* ''electromagnetic radiation'', such as radio waves, microwaves, infrared, visi ...
environments like outer space
Outer space, commonly shortened to space, is the expanse that exists beyond Earth and its atmosphere and between celestial bodies. Outer space is not completely empty—it is a near-perfect vacuum containing a low density of particles, pred ...
. One of the design approaches for making a radiation-hardened-by-design (RHBD) device is enclosed-layout-transistor (ELT). Normally, the gate of the MOSFET surrounds the drain, which is placed in the center of the ELT. The source of the MOSFET surrounds the gate. Another RHBD MOSFET is called H-Gate. Both of these transistors have very low leakage currents with respect to radiation. However, they are large in size and take up more space on silicon than a standard MOSFET. In older STI (shallow trench isolation) designs, radiation strikes near the silicon oxide region cause the channel inversion at the corners of the standard MOSFET due to accumulation of radiation induced trapped charges. If the charges are large enough, the accumulated charges affect STI surface edges along the channel near the channel interface (gate) of the standard MOSFET. This causes a device channel inversion to occur along the channel edges, creating an off-state leakage path. Subsequently, the device turns on; this process severely degrades the reliability of circuits. The ELT offers many advantages, including an improvement of reliability
Reliability, reliable, or unreliable may refer to:
Science, technology, and mathematics Computing
* Data reliability (disambiguation), a property of some disk arrays in computer storage
* High availability
* Reliability (computer networking), a ...
by reducing unwanted surface inversion at the gate edges which occurs in the standard MOSFET. Since the gate edges are enclosed in ELT, there is no gate oxide edge (STI at gate interface), and thus the transistor off-state leakage is reduced very much. Low-power microelectronic circuits including computers, communication devices, and monitoring systems in space shuttles and satellites are very different from what is used on earth. They are radiation (high-speed atomic particles like proton
A proton is a stable subatomic particle, symbol , H+, or 1H+ with a positive electric charge of +1 ''e'' elementary charge. Its mass is slightly less than that of a neutron and 1,836 times the mass of an electron (the proton–electron mass ...
and neutron
The neutron is a subatomic particle, symbol or , which has a neutral (not positive or negative) charge, and a mass slightly greater than that of a proton. Protons and neutrons constitute the nuclei of atoms. Since protons and neutrons beh ...
, solar flare
A solar flare is an intense localized eruption of electromagnetic radiation in the Sun's atmosphere. Flares occur in active regions and are often, but not always, accompanied by coronal mass ejections, solar particle events, and other solar phe ...
magnetic energy dissipation in Earth's space, energetic cosmic rays
Cosmic rays are high-energy particles or clusters of particles (primarily represented by protons or atomic nuclei) that move through space at nearly the speed of light. They originate from the Sun, from outside of the Solar System in our own ...
like X-ray
An X-ray, or, much less commonly, X-radiation, is a penetrating form of high-energy electromagnetic radiation. Most X-rays have a wavelength ranging from 10 picometers to 10 nanometers, corresponding to frequencies in the range 30&nb ...
, gamma ray
A gamma ray, also known as gamma radiation (symbol γ or \gamma), is a penetrating form of electromagnetic radiation arising from the radioactive decay of atomic nuclei. It consists of the shortest wavelength electromagnetic waves, typically ...
etc.) tolerant circuits. These special electronics are designed by applying different techniques using RHBD MOSFETs to ensure safe space journeys and safe space-walks of astronauts.
See also
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References
External links
How Semiconductors and Transistors Work (MOSFETs)
WeCanFigureThisOut.org
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* A Flash slide showing the fabricating process of a MOSFET in detail
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{{Authority control
Transistor types