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Extreme Ultraviolet Lithography
Extreme ultraviolet lithography (also known as EUV or EUVL) is an optical Photolithography, lithography technology used in steppers, machines that make integrated circuits (ICs) for computers and other electronic devices. It uses a range of extreme ultraviolet (EUV) wavelengths, roughly spanning a 2% Full width at half maximum, FWHM bandwidth about 13.5Nanometre, nm, to produce a pattern by exposing reflective photomask to UV light which gets reflected onto a substrate covered by photoresist. It is widely applied in semiconductor device fabrication process. As of 2022, ASML Holding is the only company who produces and sells EUV systems for chip production, targeting 5 nm and 3 nm. At the 2019 International Electron Devices Meeting (IEDM), TSMC reported use of EUV for 5 nm in contact, via, metal line, and cut layers, where the cuts can be applied to fins, gates or metal lines. At IEDM 2020, TSMC reported their 5 nm minimum metal pitch to be reduced 30% from ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Photolithography
In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer (electronics), wafer, to protect selected areas of it during subsequent etching, Chemical vapor deposition, deposition, or Ion implantation, implantation operations. Typically, ultraviolet light is used to transfer a geometry, geometric design from an photomask, optical mask to a photosensitivity, light-sensitive chemical (photoresist) coated on the substrate. The photoresist either breaks down or hardens where it is exposed to light. The patterned film is then created by removing the softer parts of the coating with appropriate solvents. Conventional photoresists typically consists of three components: resin, sensitizer, and solvent. Photolithography processes can be classified according to the type of light used, such as ultraviolet, deep ultrav ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Canon Inc
is a Japanese multinational corporation headquartered in Ōta, Tokyo, Japan, specializing in optical, imaging, and industrial products, such as lenses, cameras, medical equipment, Image scanner, scanners, Printer (computing), printers, and semiconductor manufacturing equipment.Corporate Profile " ''Canon''. Retrieved on 13 January 2009. Canon has a primary listing on the Tokyo Stock Exchange and is a constituent of the TOPIX Core30 and Nikkei 225 index. It has a secondary listing on the New York Stock Exchange. Name The company was originally named ''Seikikōgaku kenkyūsho'' (Jpn. , ''Precision Optical Industry Co. Ltd.''). In 1934 it produced the ''Kwanon'', a prototype for Japan's first-ever 35 mm camera with a focal-plane-based shutter. ...[...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
AGC Inc
AGC may refer to: Organizations In business * AGC Inc. (formerly Asahi Glass Co.), a glass manufacturer * Associated General Contractors of America, an association of commercial construction contractors * Australian Guarantee Corporation, a financial company Military * Army Geospatial Center, part of the US Army Corps of Engineers * Adjutant General's Corps, in the British Army * Amphibious Force, Flagship a World War 2 ship. Religious organizations * Apostolic Generation Church, a non-denominational church located in Jakarta, Indonesia * Associated Gospel Churches of Canada, a Canadian evangelical Christian denomination Other organizations * Assyrian General Conference, a political organization in Iraq * Autodefensas Gaitanistas de Colombia (aka The Gulf Clan), a drug cartel and paramilitary group in Colombia Science and technology * Apollo Guidance Computer, for the Apollo program * Atypical Glandular Cells, in the Bethesda system for reporting Pap smear results * Automa ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Bragg Diffraction
In physics and chemistry , Bragg's law, Wulff–Bragg's condition or Laue–Bragg interference, a special case of Laue diffraction, gives the angles for coherent scattering of waves from a crystal lattice. It encompasses the superposition of wave fronts scattered by lattice planes, leading to a strict relation between wavelength and scattering angle, or else to the wavevector transfer with respect to the crystal lattice. Such law had initially been formulated for X-rays upon crystals. However, It applies to all sorts of quantum beams, including neutron and electron waves at atomic distances, as well as visible light at artificial periodic microscale lattices. History Bragg diffraction (also referred to as the Bragg formulation of X-ray diffraction) was first proposed by Lawrence Bragg and his father, William Henry Bragg, in 1913 in response to their discovery that crystalline solids produced surprising patterns of reflected X-rays (in contrast to that of, say, a liquid). ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic table: carbon is above it; and germanium, tin, lead, and flerovium are below it. It is relatively unreactive. Because of its high chemical affinity for oxygen, it was not until 1823 that Jöns Jakob Berzelius was first able to prepare it and characterize it in pure form. Its oxides form a family of anions known as silicates. Its melting and boiling points of 1414 °C and 3265 °C, respectively, are the second highest among all the metalloids and nonmetals, being surpassed only by boron. Silicon is the eighth most common element in the universe by mass, but very rarely occurs as the pure element in the Earth's crust. It is widely distributed in space in cosmic dusts, planetoids, and planets as various forms of silicon ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Molybdenum
Molybdenum is a chemical element with the symbol Mo and atomic number 42 which is located in period 5 and group 6. The name is from Neo-Latin ''molybdaenum'', which is based on Ancient Greek ', meaning lead, since its ores were confused with lead ores. Molybdenum minerals have been known throughout history, but the element was discovered (in the sense of differentiating it as a new entity from the mineral salts of other metals) in 1778 by Carl Wilhelm Scheele. The metal was first isolated in 1781 by Peter Jacob Hjelm. Molybdenum does not occur naturally as a free metal on Earth; it is found only in various oxidation states in minerals. The free element, a silvery metal with a grey cast, has the sixth-highest melting point of any element. It readily forms hard, stable carbides in alloys, and for this reason most of the world production of the element (about 80%) is used in steel alloys, including high-strength alloys and superalloys. Most molybdenum compounds have low so ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Photomask
A photomask is an opaque plate with holes or transparencies that allow light to shine through in a defined pattern. They are commonly used in photolithography and the production of integrated circuits (ICs or "chips") in particular. Masks are used to produce a pattern on a substrate, normally a thin slice of silicon known as a wafer in the case of chip manufacturing. Several masks are used in turn, each one reproducing a layer of the completed design, and together they are known as a mask set. Previously, photomasks used to be produced manually by using rubylith and mylar. As complexity continued to grow, manual processing of any sort became difficult. This was solved with the introduction of the optical pattern generator which automated the process of producing the initial large-scale pattern, and the step-and-repeat cameras that automated the copying of the pattern into a multiple-IC mask. The intermediate masks are known as reticles, and were initially copied to production ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
China
China, officially the People's Republic of China (PRC), is a country in East Asia. It is the world's List of countries and dependencies by population, most populous country, with a Population of China, population exceeding 1.4 billion, slightly ahead of India. China spans the equivalent of five time zones and Borders of China, borders fourteen countries by land, the List of countries and territories by land borders, most of any country in the world, tied with Russia. Covering an area of approximately , it is the world's third List of countries and dependencies by area, largest country by total land area. The country consists of 22 provinces of China, provinces, five autonomous regions of China, autonomous regions, four direct-administered municipalities of China, municipalities, and two special administrative regions of China, Special Administrative Regions (Hong Kong and Macau). The national capital is Beijing, and the List of cities in China by population, most populous cit ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
United States
The United States of America (U.S.A. or USA), commonly known as the United States (U.S. or US) or America, is a country primarily located in North America. It consists of 50 U.S. state, states, a Washington, D.C., federal district, five major unincorporated territories, nine United States Minor Outlying Islands, Minor Outlying Islands, and 326 Indian reservations. The United States is also in Compact of Free Association, free association with three Oceania, Pacific Island Sovereign state, sovereign states: the Federated States of Micronesia, the Marshall Islands, and the Palau, Republic of Palau. It is the world's List of countries and dependencies by area, third-largest country by both land and total area. It shares land borders Canada–United States border, with Canada to its north and Mexico–United States border, with Mexico to its south and has maritime borders with the Bahamas, Cuba, Russia, and other nations. With a population of over 333 million, it is the List of ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Carl Zeiss AG
Carl Zeiss AG (), branded as ZEISS, is a German manufacturer of optical systems and optoelectronics, founded in Jena, Germany in 1846 by optician Carl Zeiss. Together with Ernst Abbe (joined 1866) and Otto Schott (joined 1884) he laid the foundation for today's multi-national company. The current company emerged from a reunification of Carl Zeiss companies in East and West Germany with a consolidation phase in the 1990s. ZEISS is active in four business segments with approximately equal revenue (Industrial Quality and Research, Medical Technology, Consumer Markets and Semiconductor Manufacturing Technology) in almost 50 countries, has 30 production sites and around 25 development sites worldwide. Carl Zeiss AG is the holding of all subsidiaries within Zeiss Group, of which Carl Zeiss Meditec AG is the only one that is traded at the stock market. Carl Zeiss AG is owned by the foundation Carl-Zeiss-Stiftung. The Zeiss Group has its headquarters in southern Germany, in the ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Wafer (electronics)
In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The wafer serves as the substrate for microelectronic devices built in and upon the wafer. It undergoes many microfabrication processes, such as doping, ion implantation, etching, thin-film deposition of various materials, and photolithographic patterning. Finally, the individual microcircuits are separated by wafer dicing and packaged as an integrated circuit. History In the semiconductor or silicon wafer industry, the term wafer appeared in the 1950s to describe a thin round slice of semiconductor material, typically germanium or silicon. Round shape comes from single-crystal ingots usually produced using the Czochralski method. Silicon wafers were first introduced in the 1940s. By 1960, silicon wafers were being manufactured in the U.S. by c ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
MIT Technology Review
''MIT Technology Review'' is a bimonthly magazine wholly owned by the Massachusetts Institute of Technology, and editorially independent of the university. It was founded in 1899 as ''The Technology Review'', and was re-launched without "The" in its name on April 23, 1998 under then publisher R. Bruce Journey. In September 2005, it was changed, under its then editor-in-chief and publisher, Jason Pontin, to a form resembling the historical magazine. Before the 1998 re-launch, the editor stated that "nothing will be left of the old magazine except the name." It was therefore necessary to distinguish between the modern and the historical ''Technology Review''. The historical magazine had been published by the MIT Alumni Association, was more closely aligned with the interests of MIT alumni, and had a more intellectual tone and much smaller public circulation. The magazine, billed from 1998 to 2005 as "MIT's Magazine of Innovation," and from 2005 onwards as simply "published by MIT" ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
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