Amorphous silicon (a-Si) is the non-
crystalline
A crystal or crystalline solid is a solid material whose constituents (such as atoms, molecules, or ions) are arranged in a highly ordered microscopic structure, forming a crystal lattice that extends in all directions. In addition, macrosc ...
form of
silicon
Silicon is a chemical element; it has symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic lustre, and is a tetravalent metalloid (sometimes considered a non-metal) and semiconductor. It is a membe ...
used for solar cells and
thin-film transistor
A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is made by thin film deposition. TFTs are grown on a supporting (but non-conducting) substrate, such as glass. This differs from the convention ...
s in
LCDs.
Used as
semiconductor material
A semiconductor is a material with electrical conductivity between that of a Electrical conductor, conductor and an Insulator (electricity), insulator. Its conductivity can be modified by adding impurities ("doping (semiconductor), doping") to ...
for a-Si solar cells, or thin-film silicon solar cells, it is deposited in
thin film
A thin film is a layer of materials ranging from fractions of a nanometer ( monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many ...
s onto a variety of flexible substrates, such as glass, metal and plastic. Amorphous silicon cells generally feature low efficiency.
As a second-generation
thin-film solar cell
Thin-film solar cells are a type of solar cell made by depositing one or more thin layers (thin films or TFs) of photovoltaic material onto a substrate, such as glass, plastic or metal. Thin-film solar cells are typically a few nanometers (nan ...
technology, amorphous silicon was once expected to become a major contributor in the
fast-growing worldwide photovoltaic market, but has since lost its significance due to strong competition from conventional
crystalline silicon
Crystalline silicon or (c-Si) is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semicon ...
cells and other thin-film technologies such as
CdTe and
CIGS. Amorphous silicon is a preferred material for the
thin film transistor
A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is made by thin film deposition. TFTs are grown on a supporting (but non-conducting) substrate, such as glass. This differs from the convention ...
(TFT) elements of
liquid crystal displays
A liquid-crystal display (LCD) is a flat-panel display or other Electro-optic modulator, electronically modulated optical device that uses the light-modulating properties of liquid crystals combined with polarizers to display information. Liq ...
(LCDs) and for x-ray imagers.
Amorphous silicon differs from other
allotropic variations, such as
monocrystalline silicon—a single crystal, and
polycrystalline silicon, that consists of small grains, also known as
crystallite
A crystallite is a small or even microscopic crystal which forms, for example, during the cooling of many materials. Crystallites are also referred to as grains.
Bacillite is a type of crystallite. It is rodlike with parallel Wikt:longulite ...
s.
Description
Silicon is a fourfold coordinated atom that is normally
tetrahedrally bonded to four neighboring silicon atoms. In crystalline silicon (c-Si) this tetrahedral structure continues over a large range, thus forming a well-ordered crystal lattice.
In amorphous silicon this long range order is not present. Rather, the atoms form a continuous random network. Moreover, not all the atoms within amorphous silicon are fourfold coordinated. Due to the disordered nature of the material some atoms have a
dangling bond
In chemistry, a dangling bond is an unsatisfied Valence (chemistry), valence on an immobilized atom. An atom with a dangling bond is also referred to as an immobilized free radical or an immobilized radical, a reference to its structural and chemi ...
. Physically, these dangling bonds represent defects in the continuous random network and may cause anomalous electrical behavior.
The material can be
passivated by hydrogen, which bonds to the dangling bonds and can reduce the dangling bond density by several orders of magnitude. Hydrogenated amorphous silicon (a-Si:H) has a sufficiently low amount of defects to be used within devices such as solar
photovoltaic
Photovoltaics (PV) is the conversion of light into electricity using semiconducting materials that exhibit the photovoltaic effect, a phenomenon studied in physics, photochemistry, and electrochemistry. The photovoltaic effect is commercially ...
cells, particularly in the
protocrystalline growth regime. However, hydrogenation is associated with light-induced degradation of the material, termed the
Staebler–Wronski effect.
Amorphous silicon and carbon
Amorphous
alloy
An alloy is a mixture of chemical elements of which in most cases at least one is a metal, metallic element, although it is also sometimes used for mixtures of elements; herein only metallic alloys are described. Metallic alloys often have prop ...
s of silicon and carbon (amorphous silicon
carbide
In chemistry, a carbide usually describes a compound composed of carbon and a metal. In metallurgy, carbiding or carburizing is the process for producing carbide coatings on a metal piece.
Interstitial / Metallic carbides
The carbides of th ...
, also hydrogenated, a-Si
1−xC
x:H) are an interesting variant. Introduction of carbon atoms adds extra degrees of freedom for control of the properties of the material. The film could also be made
transparent to visible light.
Increasing the concentration of carbon in the alloy widens the electronic gap between conduction and valence bands (also called "optical gap" and
bandgap
In solid-state physics and solid-state chemistry, a band gap, also called a bandgap or energy gap, is an energy range in a solid where no electronic states exist. In graphs of the electronic band structure of solids, the band gap refers to the ...
). This increases the light efficiency of solar cells made with amorphous silicon carbide layers. On the other hand, the electronic properties as a
semiconductor
A semiconductor is a material with electrical conductivity between that of a conductor and an insulator. Its conductivity can be modified by adding impurities (" doping") to its crystal structure. When two regions with different doping level ...
(mainly
electron mobility
In solid-state physics, the electron mobility characterizes how quickly an electron can move through a metal or semiconductor when pushed or pulled by an electric field. There is an analogous quantity for Electron hole, holes, called hole mobilit ...
), are adversely affected by the increasing content of carbon in the alloy, presumably due to the increased disorder in the atomic network.
Several studies are found in the scientific literature, mainly investigating the effects of deposition parameters on electronic quality, but practical applications of amorphous silicon carbide in commercial devices are still lacking.
Properties
The density of ion implanted amorphous Si has been calculated as 4.90×10
22 atom/cm
3 (2.285 g/cm
3) at 300 K. This was done using thin (5 micron) strips of amorphous silicon. This density is 1.8±0.1% less dense than crystalline Si at 300 K. Silicon is one of the few elements that expands upon cooling and has a lower density as a solid than as a liquid.
Hydrogenated amorphous silicon
Unhydrogenated a-Si has a very high defect density which leads to undesirable semiconductor properties such as poor photoconductivity and prevents doping which is critical to engineering semiconductor properties. By introducing hydrogen during the fabrication of amorphous silicon,
photoconductivity
Photoconductivity is an optical and electrical phenomenon in which a material becomes more electrically conductive due to the absorption of electromagnetic radiation such as visible light, ultraviolet light, infrared light, or gamma radiation.
...
is significantly improved and doping is made possible. Hydrogenated amorphous silicon, a-Si:H, was first fabricated in 1969 by Robert Carnegie Chittick, Alexander and Sterling by deposition using a silane gas (SiH
4) precursor. The resulting material showed a lower defect density and increased conductivity due to impurities. Interest in a-Si:H came when (in 1975),
LeComber and
Spear
A spear is a polearm consisting of a shaft, usually of wood, with a pointed head. The head may be simply the sharpened end of the shaft itself, as is the case with Fire hardening, fire hardened spears, or it may be made of a more durable materia ...
discovered the ability for substitutional doping of a-Si:H using phosphine (n-type) or diborane (p-type).
The role of hydrogen in reducing defects was verified by Paul's group at Harvard who found a hydrogen concentration of about 10 atomic % through IR vibration, which for Si-H bonds has a frequency of about 2000 cm
−1. Starting in the 1970s, a-Si:H was developed in solar cells by
David E. Carlson and C. R. Wronski at RCA Laboratories. Conversion efficiency steadily climbed to about 13.6% in 2015.
Deposition processes
Applications
While a-Si suffers from lower electronic performance compared to c-Si, it is much more flexible in its applications. For example, a-Si layers can be made thinner than c-Si, which may produce savings on silicon material cost.
One further advantage is that a-Si can be deposited at very low temperatures, e.g., as low as 75 degrees Celsius. This allows deposition on not only glass, but on
plastic
Plastics are a wide range of synthetic polymers, synthetic or Semisynthesis, semisynthetic materials composed primarily of Polymer, polymers. Their defining characteristic, Plasticity (physics), plasticity, allows them to be Injection moulding ...
or even on paper substrates as well, making it a candidate for a
roll-to-roll processing technique. Once deposited, a-Si can be
doped in a fashion similar to c-Si, to form
p-type or
n-type layers and ultimately to form electronic devices.
Another advantage is that a-Si can be deposited over large areas by
PECVD. The design of the PECVD system has great impact on the production cost of such panel, therefore most equipment suppliers put their focus on the design of PECVD for higher throughput, that leads to lower
manufacturing cost
Manufacturing cost is the sum of costs of all resources consumed in the process of making a product. The manufacturing cost is classified into three categories: direct materials cost, direct labor cost and manufacturing overhead. It is a factor ...
particularly when the
silane
Silane (Silicane) is an inorganic compound with chemical formula . It is a colorless, pyrophoric gas with a sharp, repulsive, pungent smell, somewhat similar to that of acetic acid. Silane is of practical interest as a precursor to elemental ...
is
recycled
Recycling is the process of converting waste materials into new materials and objects. This concept often includes the recovery of energy from waste materials. The recyclability of a material depends on its ability to reacquire the propert ...
.
Arrays of small (under 1 mm by 1 mm) a-Si photodiodes on glass are used as visible-light
image sensor An image sensor or imager is a sensor that detects and conveys information used to form an image. It does so by converting the variable attenuation of light waves (as they refraction, pass through or reflection (physics), reflect off objects) into s ...
s in some
flat panel detectors for
fluoroscopy
Fluoroscopy (), informally referred to as "fluoro", is an imaging technique that uses X-rays to obtain real-time moving images of the interior of an object. In its primary application of medical imaging, a fluoroscope () allows a surgeon to see t ...
and
radiography
Radiography is an imaging technology, imaging technique using X-rays, gamma rays, or similar ionizing radiation and non-ionizing radiation to view the internal form of an object. Applications of radiography include medical ("diagnostic" radiog ...
.
Photovoltaics
Hydrogenated amorphous silicon (a-Si:H) has been used as a
photovoltaic
Photovoltaics (PV) is the conversion of light into electricity using semiconducting materials that exhibit the photovoltaic effect, a phenomenon studied in physics, photochemistry, and electrochemistry. The photovoltaic effect is commercially ...
solar cell
A solar cell, also known as a photovoltaic cell (PV cell), is an electronic device that converts the energy of light directly into electricity by means of the photovoltaic effect. material for devices which require very little power, such as pocket
calculator
An electronic calculator is typically a portable electronic device used to perform calculations, ranging from basic arithmetic to complex mathematics.
The first solid-state electronic calculator was created in the early 1960s. Pocket-si ...
s, because their lower performance compared to conventional
crystalline silicon
Crystalline silicon or (c-Si) is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semicon ...
(c-Si) solar cells is more than offset by their simplified and lower cost of deposition onto a substrate. Moreover, the vastly higher shunt resistance of the p-i-n device means that acceptable performance is achieved even at very low light levels. The first
solar-powered calculators were already available in the late 1970s, such as the Royal ''Solar 1'', Sharp ''EL-8026'', and Teal ''Photon''.
More recently, improvements in a-Si:H construction techniques have made them more attractive for large-area solar cell use as well. Here their lower inherent efficiency is made up, at least partially, by their thinness – higher efficiencies can be reached by stacking several thin-film cells on top of each other, each one tuned to work well at a specific frequency of light. This approach is not applicable to c-Si cells, which are thick as a result of its
indirect band-gap and are therefore largely opaque, blocking light from reaching other layers in a stack.
The source of the low efficiency of amorphous silicon photovoltaics is due largely to the low
hole mobility of the material.
This low hole mobility has been attributed to many physical aspects of the material, including the presence of
dangling bonds (silicon with 3 bonds),
floating bonds (silicon with 5 bonds),
as well as bond reconfigurations.
While much work has been done to control these sources of low mobility, evidence suggests that the multitude of interacting defects may lead to the mobility being inherently limited, as reducing one type of defect leads to formation others.
The main advantage of a-Si:H in large scale production is not efficiency, but cost. a-Si:H cells use only a fraction of the silicon needed for typical c-Si cells, and the cost of the silicon has historically been a significant contributor to cell cost.
However, the higher costs of manufacture due to the multi-layer construction have, to date, made a-Si:H unattractive except in roles where their thinness or flexibility are an advantage.
Typically, amorphous silicon thin-film cells use a
p-i-n structure. The placement of the p-type layer on top is also due to the lower hole mobility, allowing the holes to traverse a shorter average distance for collection to the top contact. Typical panel structure includes front side glass,
TCO, thin-film silicon, back contact,
polyvinyl butyral (PVB) and back side glass. Uni-Solar, a division of
Energy Conversion Devices
Energy Conversion Devices, Inc. (ECD) was an American photovoltaics manufacturer of thin-film solar cells made of amorphous silicon used in flexible laminates and in building-integrated photovoltaics. The company was also a manufacturer of Nicke ...
produced a version of flexible backings, used in roll-on roofing products. However, the world's largest manufacturer of amorphous silicon photovoltaics had to file for bankruptcy in 2012, as it could not compete with the rapidly declining prices of conventional
solar panel
A solar panel is a device that converts sunlight into electricity by using photovoltaic (PV) cells. PV cells are made of materials that produce excited electrons when exposed to light. These electrons flow through a circuit and produce direct ...
s.
Microcrystalline and micromorphous silicon
Microcrystalline silicon (also called nanocrystalline silicon) is amorphous silicon, but also contains small crystals. It absorbs a broader spectrum of light and is
flexible.
Micromorphous silicon
module technology combines two different types of silicon, amorphous and microcrystalline silicon, in a top and a bottom
photovoltaic cell
A solar cell, also known as a photovoltaic cell (PV cell), is an electronic device that converts the energy of light directly into electricity by means of the photovoltaic effect. . Sharp produces cells using this system in order to more efficiently capture blue light, increasing the efficiency of the cells during the time where there is no direct sunlight falling on them.
Protocrystalline silicon is often used to optimize the open circuit voltage of a-Si photovoltaics.
Large-scale production
Xunlight Corporation, which has received over $40 million of institutional investments, has completed the installation of its first 25 MW wide-web,
roll-to-roll
In the field of electronic devices, roll-to-roll processing, also known as web processing, reel-to-reel processing or R2R, is the process of creating electronic devices on a roll of flexible plastic, metal foil, or flexible glass. In other fields ...
photovoltaic manufacturing equipment for the production of thin-film silicon PV modules.
Anwell Technologies has also completed the installation of its first 40 MW a-Si thin film solar panel manufacturing facility in Henan with its in-house designed multi-substrate-multi-chamber PECVD equipment.
Photovoltaic thermal hybrid solar collectors
Photovoltaic thermal hybrid solar collectors (PVT), are systems that convert
solar radiation
Sunlight is the portion of the electromagnetic radiation which is emitted by the Sun (i.e. solar radiation) and received by the Earth, in particular the visible light perceptible to the human eye as well as invisible infrared (typically p ...
into
electrical energy
Electrical energy is the energy transferred as electric charges move between points with different electric potential, that is, as they move across a voltage, potential difference. As electric potential is lost or gained, work is done changing the ...
and
thermal energy
The term "thermal energy" is often used ambiguously in physics and engineering. It can denote several different physical concepts, including:
* Internal energy: The energy contained within a body of matter or radiation, excluding the potential en ...
. These systems combine a solar cell, which converts
electromagnetic radiation
In physics, electromagnetic radiation (EMR) is a self-propagating wave of the electromagnetic field that carries momentum and radiant energy through space. It encompasses a broad spectrum, classified by frequency or its inverse, wavelength ...
(
photon
A photon () is an elementary particle that is a quantum of the electromagnetic field, including electromagnetic radiation such as light and radio waves, and the force carrier for the electromagnetic force. Photons are massless particles that can ...
s) into electricity, with a
solar thermal collector
A solar thermal collector collects heat by Absorption (optics), absorbing sunlight. The term "solar collector" commonly refers to a device for solar hot water panel, solar hot water heating, but may refer to large power generating installations ...
, which captures the remaining energy and removes waste heat from the solar PV module. Solar cells suffer from a drop in efficiency with the rise in temperature due to increased
resistance. Most such systems can be engineered to carry heat away from the solar cells thereby cooling the cells and thus improving their efficiency by lowering resistance. Although this is an effective method, it causes the thermal component to under-perform compared to a
solar thermal
Solar thermal energy (STE) is a form of energy and a technology for harnessing solar energy to generate thermal energy for use in Industrial sector, industry, and in the residential and commercial sectors. Solar thermal collectors are classified ...
collector. Recent research showed that a-Si:H PV with low temperature coefficients allow the PVT to be operated at high temperatures, creating a more symbiotic PVT system and improving performance of the a-Si:H PV by about 10%.
Thin-film-transistor liquid-crystal display
Amorphous silicon has become the material of choice for the active layer in
thin-film transistor
A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is made by thin film deposition. TFTs are grown on a supporting (but non-conducting) substrate, such as glass. This differs from the convention ...
s (TFTs), which are most widely used in
large-area electronics applications, mainly for
liquid-crystal display
A liquid-crystal display (LCD) is a flat-panel display or other Electro-optic modulator, electronically modulated optical device that uses the light-modulating properties of liquid crystals combined with polarizers to display information. Liq ...
s (LCDs).
Thin-film-transistor liquid-crystal display (TFT-LCD) show a similar circuit layout process to that of semiconductor products. However, rather than fabricating the transistors from silicon, that is formed into a crystalline silicon
wafer, they are made from a thin film of amorphous silicon that is deposited on a
glass
Glass is an amorphous (non-crystalline solid, non-crystalline) solid. Because it is often transparency and translucency, transparent and chemically inert, glass has found widespread practical, technological, and decorative use in window pane ...
panel. The silicon layer for TFT-LCDs is typically deposited using the
PECVD process. Transistors take up only a small fraction of the area of each pixel and the rest of the silicon film is etched away to allow light to easily pass through it.
Polycrystalline silicon is sometimes used in displays requiring higher TFT performance. Examples include small high-resolution displays such as those found in projectors or viewfinders. Amorphous silicon-based TFTs are by far the most common, due to their lower production cost, whereas polycrystalline silicon TFTs are more costly and much more difficult to produce.
See also
*
Atomic layer deposition
Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called wiktionary:precu ...
(ALD)
*
Chemical-mechanical planarization (CMP)
*
Chemical vapor deposition
Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films.
In typical CVD, the wafer (electro ...
(CVD)
*
Crystalline silicon
Crystalline silicon or (c-Si) is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semicon ...
*
Ion implantation
Ion implantation is a low-temperature process by which ions of one element are accelerated into a solid target, thereby changing the target's physical, chemical, or electrical properties. Ion implantation is used in semiconductor device fabrica ...
*
Nanoparticle
A nanoparticle or ultrafine particle is a particle of matter 1 to 100 nanometres (nm) in diameter. The term is sometimes used for larger particles, up to 500 nm, or fibers and tubes that are less than 100 nm in only two directions. At ...
*
Physical vapor deposition
Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polym ...
(PVD)
*
Protocrystalline
*
Rapid thermal processing
Rapid thermal processing (RTP) is a semiconductor manufacturing process which heats silicon wafers to temperatures exceeding 1,000°C for not more than a few seconds. During cooling wafer temperatures must be brought down slowly to prevent disloc ...
(RTP)
References
{{Reflist
External links
Amorphous Silicon Devices group at the University of Waterloo, Ontario, Canada
Allotropes of silicon
Silicon, Amorphous
Amorphous solids
Thin-film cells