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Multiple Patterning
Multiple patterning (or multi-patterning) is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density. It is expected to be necessary for the 10 nm and 7 nm node semiconductor processes and beyond. The premise is that a single lithographic exposure may not be enough to provide sufficient resolution. Hence additional exposures would be needed, or else positioning patterns using etched feature sidewalls (using spacers) would be necessary. Even with single exposure having sufficient resolution, extra masks have been implemented for better patterning quality such as by Intel for line-cutting at its 45nm node or TSMC at its 28nm node. Even for electron-beam lithography, single exposure appears insufficient at ~10 nm half-pitch, hence requiring double patterning. Double patterning lithography was first demonstrated in 1983 by D.C. Flanders and N.N. Efremow. Since then several double patterning techn ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Photolithography
In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate. The photoresist either breaks down or hardens where it is exposed to light. The patterned film is then created by removing the softer parts of the coating with appropriate solvents. Conventional photoresists typically consists of three components: resin, sensitizer, and solvent. Photolithography processes can be classified according to the type of light used, such as ultraviolet, deep ultraviolet, extreme ultraviolet, or X-ray. The wavelength of light used determines the minimum feature si ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Different Orientation Illuminations
Different may refer to: Music * ''Different'' (Thomas Anders album), 1989 * ''Different'' (Kate Ryan album), 2002 * "Different" (Band-Maid song), 2020 * "Different" (Robbie Williams song), 2012 * "Different", a song by Acceptance from the 2005 album '' Phantoms'' * "Different", a song by Burna Boy from the 2019 album ''African Giant'' * "Different", a song by Cass Elliot from the soundtrack of the 1970 film '' Pufnstuf'' * "Different", a song by Dreamscape from the 2007 album '' 5th Season'' * "Different", a song by Egypt Central from the 2005 album Egypt Central * "Different", a song by Future and Juice Wrld from the 2018 mixtape ''Wrld on Drugs'' * "Different", a 2006 song by Jamie Shaw * "Different", a 2017 song by Micah Tyler * "Different", a song by No Malice from the 2013 album ''Hear Ye Him'' * "Different", a song by Pendulum from the 2008 album ''In Silico'' * "Different", a song by Winner from the 2014 album '' 2014 S/S'' * "Different", a song by Ximena Sariñana from ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Immersion Lithography
Immersion lithography is a photolithography resolution enhancement technique for manufacturing integrated circuits (ICs) that replaces the usual air gap between the final lens and the wafer surface with a liquid medium that has a refractive index greater than one. The resolution is increased by a factor equal to the refractive index of the liquid. Current immersion lithography tools use highly purified water for this liquid, achieving feature sizes below 45 nanometers. ASML and Nikon are currently the only manufacturers of immersion lithography systems. History The idea for immersion lithography was patented in 1984 by Takanashi et al. It was also proposed by Taiwanese engineer Burn J. Lin and realized in the 1980s. In 2004, IBM's director of silicon technology, Ghavam Shahidi, announced that IBM planned to commercialize lithography based on light filtered through water. Immersion lithography is now being extended to sub-20nm nodes through the use of multiple patterning. Back ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Hardmask
A hardmask is a material used in semiconductor processing as an etch mask instead of a polymer or other organic "soft" resist material. Hardmasks are necessary when the material being etched is itself an organic polymer. Anything used to etch this material will also etch the photoresist being used to define its patterning since that is also an organic polymer. This arises, for instance, in the patterning of low-κ dielectric insulation layers used in VLSI fabrication. Polymers tend to be etched easily by oxygen, fluorine, chlorine and other reactive gases used in plasma etching. Use of a hardmask involves an additional deposition process, and hence additional cost. First, the hardmask material is deposited and etched into the required pattern using a standard photoresist process. Following that the underlying material can be etched through the hardmask. Finally the hardmask is removed with a further etching process. Hardmask materials can be metal or dielectric. Silicon b ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Spacer Patterning
Spacer may refer to: Arts and entertainment * "Spacer", a song by Sheila and B. Devotion from the 1980 album '' King of the World'' * ''Spacer'' (album), 2011 jazz album by Jason Adasiewicz * Spacers, a fictional sociocultural group in Isaac Asimov's ''Robot'' series of novels and short stories Science and technology Biology and medicine * Asthma spacer, medical equipment * Orthodontic spacer * Spacer DNA, in genetics * Spacer in joint replacement Other uses in science and technology * Spacer, an element in HTML web design * Spacers and standoffs, unthreaded pieces of rigid tubing, often used in electronic equipment * Rebar spacer, in concrete construction Oil and gas industry * Spacer, a viscous fluid used to remove drilling fluids ahead of cement slurry. The spacer is made up with specific fluid attributes, such as viscosity and density that are designed to prohibit the interaction between the mud and cement slurry. Other uses * Spacer (self-storage), an Australian onl ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Spacer Patterning
Spacer may refer to: Arts and entertainment * "Spacer", a song by Sheila and B. Devotion from the 1980 album '' King of the World'' * ''Spacer'' (album), 2011 jazz album by Jason Adasiewicz * Spacers, a fictional sociocultural group in Isaac Asimov's ''Robot'' series of novels and short stories Science and technology Biology and medicine * Asthma spacer, medical equipment * Orthodontic spacer * Spacer DNA, in genetics * Spacer in joint replacement Other uses in science and technology * Spacer, an element in HTML web design * Spacers and standoffs, unthreaded pieces of rigid tubing, often used in electronic equipment * Rebar spacer, in concrete construction Oil and gas industry * Spacer, a viscous fluid used to remove drilling fluids ahead of cement slurry. The spacer is made up with specific fluid attributes, such as viscosity and density that are designed to prohibit the interaction between the mud and cement slurry. Other uses * Spacer (self-storage), an Australian onl ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Pitch Splitting
Pitch may refer to: Acoustic frequency * Pitch (music), the perceived frequency of sound including "definite pitch" and "indefinite pitch" ** Absolute pitch or "perfect pitch" ** Pitch class, a set of all pitches that are a whole number of octaves apart ** Relative pitch, the ability to identify a given musical interval between two notes * Pitch accent, a form of accentuation in speech Business * Sales pitch, a line of talk that attempts to persuade someone or something ** Pitch (filmmaking), a proposal for a film ** Elevator pitch, a very short sales presentation, allegedly short enough to be made during an elevator ride Measurement Movement about the transverse axis * Pitch angle (or pitch rotation), one of the angular degrees of freedom of any stiff body (for example a vehicle), describing rotation about the side-to-side axis ** Pitch (aviation), one of the aircraft principal axes of rotation (nose-up or nose-down angle measured from horizontal axis) ** Pitch (ship motion), ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Trench Doubling
A trench is a type of excavation or in the ground that is generally deeper than it is wide (as opposed to a wider gully, or ditch), and narrow compared with its length (as opposed to a simple hole or pit). In geology, trenches result from erosion by rivers or by geological movement of tectonic plates. In civil engineering, trenches are often created to install underground utilities such as gas, water, power and communication lines. In construction, trenches are dug for foundations of buildings, retaining walls and dams, and for cut-and-cover construction of tunnels. In archaeology, the "trench method" is used for searching and excavating ancient ruins or to dig into strata of sedimented material. In geotechnical engineering, trenches serve for locating faults and investigating deep soil properties. In trench warfare, soldiers occupy trenches to protect them against weapons fire. Trenches are dug by use of manual tools such as shovels and pickaxes, or by heavy equipment such a ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Cut Overlay Issues
Cut may refer to: Common uses * The act of cutting, the separation of an object into two through acutely-directed force ** A type of wound ** Cut (archaeology), a hole dug in the past ** Cut (clothing), the style or shape of a garment ** Cut (earthmoving), an excavation to make way for a transport route ** Cut (etiquette), a snub or slight such as failure to greet an acquaintance ** Cut (gems) ** Cut of meat ** Cutting agent, a diluent used to dilute illicit drugs Geography * Cut, Alba, Romania * Cut, Texas, an unincorporated community in Houston County, Texas * Cut, a village in Dumbrava Roșie, Neamț County, Romania * Cut River (Mackinac County, Michigan) * Cut River (Roscommon County, Michigan) * Cutral Có Airport, Argentina (IATA code CUT) * Cuts, Oise, France Computing and mathematics * Cut (logic programming) * cut (Unix), a command line utility * Cut, copy, and paste, a set of editing procedures * Control Unit Terminal, a kind of IBM display terminal for mainframe ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Illuminations For Multipitch Pattern
Illuminations may refer to: Shows and festivals * IllumiNations: Reflections of Earth, a nightly fireworks show currently at Epcot at Walt Disney World Resort *''IllumiNations'', original nightly firework show at Epcot at Walt Disney World Resort before Reflections of Earth was created *Illuminations (festival), a secular autumn festival of electric lights held in several English cities **Blackpool Illuminations, an annual lights festival in the British seaside resort of Blackpool *Disney Illuminations, a nightly firework show at Disneyland Paris Music and video * ''Illuminations'' (Alice Coltrane and Carlos Santana album) or the title song, 1974 * ''Illuminations'' (Buffy Sainte-Marie album), 1969 * ''Illuminations'' (Erik Friedlander album), 2015 * ''Illuminations'' (Josh Groban album), 2010 * ''Illuminations'' (McCoy Tyner album) or the title song, 2004 * ''Illuminations'' (Wishbone Ash album), 1996 * ''Illuminations'' (EP), by Little Boots, 2009 * ''Illuminations'' (video), by ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
SRAF OPC Hotspot
The Rhodesian Air Force (RhAF) was an air force based in Harare, Salisbury (now Harare) which represented several entities under various names between 1935 and 1980: originally serving the British self-governing colony of Southern Rhodesia, it was the air arm of the Federation of Rhodesia and Nyasaland between 1953 and 31 December 1963; of Southern Rhodesia once again from 1 January 1964; and of the list of states with limited recognition, unrecognised nation of Rhodesia following its Rhodesia's Unilateral Declaration of Independence, Unilateral Declaration of Independence from Britain on 11 November 1965. Named the Royal Rhodesian Air Force (RRAF) from 1954, the "Royal" prefix was dropped in 1970 when Rhodesia declared itself a republic – the official abbreviation changed appropriately. When the internationally recognised country of Zimbabwe came into being in 1980, the RhAF became the Air Force of Zimbabwe. History Formed in 1935 under the name Southern Rhodesia Staff Cor ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
