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HARMST
HARMST is an acronym for ''h''igh ''a''spect ''r''atio ''m''icrostructure ''t''echnology, which describes fabrication technologies, used to create high- aspect-ratio microstructures with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching. See also * LIGA Liga (Spanish and Portuguese: ''League'') or LIGA may refer to: Sports Basketball * Liga ACB, men's professional basketball league in Spain * Liga Femenina de Baloncesto, women's professional basketball league in Spain Football Latin Ame ... * Micromechanical systems — high aspect ratio (HAR) micromachining References Materials science Microtechnology {{engineering-stub ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Aspect Ratio
The aspect ratio of a geometry, geometric shape is the ratio of its sizes in different dimensions. For example, the aspect ratio of a rectangle is the ratio of its longer side to its shorter side—the ratio of width to height, when the rectangle is oriented as a "landscape format, landscape". The aspect ratio is most often expressed as two integer numbers separated by a colon (x:y), less commonly as a simple or decimal Fraction (mathematics), fraction. The values x and y do not represent actual widths and heights but, rather, the proportion between width and height. As an example, 8:5, 16:10, 1.6:1, and 1.6 are all ways of representing the same aspect ratio. In objects of more than two dimensions, such as hyperrectangles, the aspect ratio can still be defined as the ratio of the longest side to the shortest side. Applications and uses The term is most commonly used with reference to: * Graphic / image ** Aspect ratio (image), Image aspect ratio ** Display aspect ratio ** Pape ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
LIGA
Liga (Spanish and Portuguese: ''League'') or LIGA may refer to: Sports Basketball * Liga ACB, men's professional basketball league in Spain * Liga Femenina de Baloncesto, women's professional basketball league in Spain Football Latin America * Liga Deportiva Alajuelense, football club from Costa Rica commonly known as "La Liga" * Liga Deportiva Universitaria, Ecuadorian professional football club based in Quito * Liga MX, highest professional division of the Mexican football league system Romania * Liga I, highest professional division of the Romanian football league system * Liga Elitelor, a system of youth Romanian football leagues covering the under-17 and under-19 age groups Portugal * Liga Portugal, highest professional division of the Portuguese football league system * Liga Portugal 2, second highest professional division of the Portuguese football league system * Liga 3 (Portugal), third highest professional division of the Portuguese football league ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Advanced Silicon Etch
Advanced Silicon Etching (ASE) is a deep reactive-ion etching (DRIE) technique to etch deep and high aspect ratio structures in silicon. ASE was created bSurface Technology Systems Plc(STS) in 1994 in the UK. STS has continued to develop this process with faster etch rates. STS developed and first implemented the switched process, originally invented by Dr. Larmer in Bosch, Stuttgart. ASE consists in combining the faster etch rates achieved in an isotropic Si etch (usually making use of an SF6 plasma) with a deposition or passivation process (usually utilising a C4F8 plasma condensation process) by alternating the two process steps. This approach achieves the fastest etch rates while maintaining the ability to etch anisotropically, typically vertically in Microelectromechanical Systems (microelectromechanical systems MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Deep Reactive Ion Etching
Deep reactive-ion etching (DRIE) is a special subclass of reactive-ion etching (RIE). It enables highly anisotropic etch process used to create deep penetration, steep-sided holes and trenches in wafers/substrates, typically with high aspect ratios. It was developed for microelectromechanical systems (MEMS), which require these features, but is also used to excavate trenches for high-density capacitors for DRAM and more recently for creating through-silicon vias ( TSVs) in advanced 3D wafer level packaging technology. In DRIE, the substrate is placed inside a reactor, and several gases are introduced. A plasma is struck in the gas mixture which breaks the gas molecules into ions. The ions are accelerated towards, and react with the surface of the material being etched, forming another gaseous element. This is known as the chemical part of the reactive ion etching. There is also a physical part, if ions have enough energy, they can knock atoms out of the material to be etched with ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Microelectromechanical Systems
MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2. They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as microsensors). Because of the large surface area to volume ratio of MEMS, forces produced by ambient electromagnetism (e.g., electrostatic charges and magnetic moments), and fluid dynamics (e.g., surface tension and viscosity) are more important design considerations than with larger scale mechanical devices. MEMS technology is distinguished from molecular nanotechnol ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Materials Science
Materials science is an interdisciplinary field of researching and discovering materials. Materials engineering is an engineering field of finding uses for materials in other fields and industries. The intellectual origins of materials science stem from the Age of Enlightenment, when researchers began to use analytical thinking from chemistry, physics, and engineering to understand ancient, phenomenological observations in metallurgy and mineralogy. Materials science still incorporates elements of physics, chemistry, and engineering. As such, the field was long considered by academic institutions as a sub-field of these related fields. Beginning in the 1940s, materials science began to be more widely recognized as a specific and distinct field of science and engineering, and major technical universities around the world created dedicated schools for its study. Materials scientists emphasize understanding how the history of a material (''processing'') influences its struc ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
