HARMST is an acronym for ''h''igh ''a''spect ''r''atio ''m''icrostructure ''t''echnology, which describes fabrication technologies,
used to create high-
aspect-ratio microstructures with heights between tens of micrometers up to a centimeter, and
aspect ratios greater than 10:1. Examples include the
LIGA fabrication process,
advanced silicon etch, and
deep reactive ion etching.
See also
*
LIGA
*
Micromechanical systems — high aspect ratio (HAR) micromachining
References
Materials science
Microtechnology
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