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Foturan
Foturan (notation of the manufacturer: FOTURAN) is a photosensitive glass by SCHOTT Corporation developed in 1984. It is a technical glass-ceramic which can be structured without photoresist when it is exposed to shortwave radiation such as ultraviolet light and subsequently etched. In February 2016, Schott announced the introduction of Foturan II at Photonics West. Foturan II is characterized by higher homogeneity of the photosensitivity which allows finer microstructures. Composition and Properties Foturan is a lithium aluminosilicate glass system doped with small amounts of silver oxides and cerium oxides. Processing Foturan can be structured via UV-exposure, tempering and etching: Crystal nucleation grow in Foturan when exposed to UV and heat treated afterwards. The crystalized areas react much faster to hydrofluoric acid than the surrounding vitreous material, resulting in very fine microstructures, tight tolerance and high aspect ratio. Exposure If Fotura ...
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Foturan (photosensitive Glass) - Group-shot Of Processing Steps Of Demonstrator
Foturan (notation of the manufacturer: FOTURAN) is a photosensitive glass by SCHOTT Corporation developed in 1984. It is a technical glass-ceramic which can be structured without photoresist when it is exposed to shortwave radiation such as ultraviolet light and subsequently etched. In February 2016, Schott announced the introduction of Foturan II at Photonics West. Foturan II is characterized by higher homogeneity of the photosensitivity which allows finer microstructures. Composition and Properties Foturan is a lithium aluminosilicate glass system doped with small amounts of silver oxides and cerium oxides. Processing Foturan can be structured via UV-exposure, tempering and etching: Crystal nucleation grow in Foturan when exposed to UV and heat treated afterwards. The crystalized areas react much faster to hydrofluoric acid than the surrounding vitreous material, resulting in very fine microstructures, tight tolerance and high aspect ratio. Exposure If Fotu ...
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Photosensitive Glass
Photosensitive glass, also known as photostructurable glass (PSG) or photomachinable glass, is a crystal-clear glass that belongs to the lithium-silicate family of glasses, in which an image of a mask can be captured by microscopic metallic particles in the glass when it is exposed to short wave radiations such as ultraviolet light. Photosensitive glass was first discovered by S. Donald Stookey in 1937.Paul, p. 333Encyclopædia Britannica, pp. 194–209Maluf, pp. 62–63 History Photosensitive glass was invented in November 1937 by Dr. Donald Stookey of the Corning Glass Works. It was announced publicly ten years later on June 1, 1947. It was patented in 1950 by Stookey as U.S. Pat. No. 2,515,937 and U.S. Pat. Nos. 2,515,943 with gold microscopic particles and marketed under the trade name PhotoCor. Exposure process When the glass is exposed to UV light in the wavelength range 280–320 nm, a latent image is formed. The glass remains transparent at this stage, but its ...
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Microstructures
Microstructure is the very small scale structure of a material, defined as the structure of a prepared surface of material as revealed by an optical microscope above 25× magnification. The microstructure of a material (such as metals, polymers, ceramics or composites) can strongly influence physical properties such as strength, toughness, ductility, hardness, corrosion resistance, high/low temperature behaviour or wear resistance. These properties in turn govern the application of these materials in industrial practice. Microstructure at scales smaller than can be viewed with optical microscopes is often called nanostructure, while the structure in which individual atoms are arranged is known as crystal structure. The nanostructure of biological specimens is referred to as ultrastructure. A microstructure’s influence on the mechanical and physical properties of a material is primarily governed by the different defects present or absent of the structure. These defects can ta ...
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Glass
Glass is a non-crystalline, often transparent, amorphous solid that has widespread practical, technological, and decorative use in, for example, window panes, tableware, and optics. Glass is most often formed by rapid cooling (quenching) of the molten form; some glasses such as volcanic glass are naturally occurring. The most familiar, and historically the oldest, types of manufactured glass are "silicate glasses" based on the chemical compound silica (silicon dioxide, or quartz), the primary constituent of sand. Soda–lime glass, containing around 70% silica, accounts for around 90% of manufactured glass. The term ''glass'', in popular usage, is often used to refer only to this type of material, although silica-free glasses often have desirable properties for applications in modern communications technology. Some objects, such as drinking glasses and eyeglasses, are so commonly made of silicate-based glass that they are simply called by the name of the material. Despite bei ...
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Hydrofluoric Acid
Hydrofluoric acid is a Solution (chemistry), solution of hydrogen fluoride (HF) in water. Solutions of HF are colourless, acidic and highly Corrosive substance, corrosive. It is used to make most fluorine-containing compounds; examples include the commonly used pharmaceutical antidepressant medication fluoxetine (Prozac) and the material polytetrafluoroethylene, PTFE (Teflon). Elemental fluorine is produced from it. It is commonly used to Etching (microfabrication), etch glass and silicon wafers. Uses Production of organofluorine compounds The principal use of hydrofluoric acid is in organofluorine chemistry. Many organofluorine compounds are prepared using HF as the fluorine source, including Polytetrafluoroethylene, Teflon, fluoropolymers, fluorocarbons, and refrigeration, refrigerants such as freon. Many pharmaceuticals contain fluorine. Production of inorganic fluorides Most high-volume inorganic fluoride compounds are prepared from hydrofluoric acid. Foremost are Na3AlF6 ...
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Crystal
A crystal or crystalline solid is a solid material whose constituents (such as atoms, molecules, or ions) are arranged in a highly ordered microscopic structure, forming a crystal lattice that extends in all directions. In addition, macroscopic single crystals are usually identifiable by their geometrical shape, consisting of flat faces with specific, characteristic orientations. The scientific study of crystals and crystal formation is known as crystallography. The process of crystal formation via mechanisms of crystal growth is called crystallization or solidification. The word ''crystal'' derives from the Ancient Greek word (), meaning both "ice" and "rock crystal", from (), "icy cold, frost". Examples of large crystals include snowflakes, diamonds, and table salt. Most inorganic solids are not crystals but polycrystals, i.e. many microscopic crystals fused together into a single solid. Polycrystals include most metals, rocks, ceramics, and ice. A third category of ...
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Nucleation
In thermodynamics, nucleation is the first step in the formation of either a new thermodynamic phase or structure via self-assembly or self-organization within a substance or mixture. Nucleation is typically defined to be the process that determines how long an observer has to wait before the new phase or self-organized structure appears. For example, if a volume of water is cooled (at atmospheric pressure) below 0°C, it will tend to freeze into ice, but volumes of water cooled only a few degrees below 0°C often stay completely free of ice for long periods (supercooling). At these conditions, nucleation of ice is either slow or does not occur at all. However, at lower temperatures nucleation is fast, and ice crystals appear after little or no delay. Nucleation is a common mechanism which generates first-order phase transitions, and it is the start of the process of forming a new thermodynamic phase. In contrast, new phases at continuous phase transitions start to form immedi ...
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Etching (microfabrication)
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride. Orientation-Dependent Etching * KOH pellets dissolved in water (self-heating) * Etch Rate > >> ** KOH has a slower etching orientation for the planes ** You cannot use this KOH photoresist as a etching mask, because the oxide attacks too slowly, so this resist will not survive * Photoresist can be used a etching mask, and the best photoresist for etching is nitride * For example, the etch rate of Si in KOH Depends on Crystallographic Plane * At low temperatur ...
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Ultra-violet
Ultraviolet (UV) is a form of electromagnetic radiation with wavelength from 10 nm (with a corresponding frequency around 30  PHz) to 400 nm (750  THz), shorter than that of visible light, but longer than X-rays. UV radiation is present in sunlight, and constitutes about 10% of the total electromagnetic radiation output from the Sun. It is also produced by electric arcs and specialized lights, such as mercury-vapor lamps, tanning lamps, and black lights. Although long-wavelength ultraviolet is not considered an ionizing radiation because its photons lack the energy to ionize atoms, it can cause chemical reactions and causes many substances to glow or fluoresce. Consequently, the chemical and biological effects of UV are greater than simple heating effects, and many practical applications of UV radiation derive from its interactions with organic molecules. Short-wave ultraviolet light damages DNA and sterilizes surfaces with which it comes into contact. For huma ...
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Cerium
Cerium is a chemical element with the symbol Ce and atomic number 58. Cerium is a soft, ductile, and silvery-white metal that tarnishes when exposed to air. Cerium is the second element in the lanthanide series, and while it often shows the +3 oxidation state characteristic of the series, it also has a stable +4 state that does not oxidize water. It is also considered one of the rare-earth elements. Cerium has no known biological role in humans but is not particularly toxic, except with intense or continued exposure. Despite always occurring in combination with the other rare-earth elements in minerals such as those of the monazite and bastnäsite groups, cerium is easy to extract from its ores, as it can be distinguished among the lanthanides by its unique ability to be oxidized to the +4 state in aqueous solution. It is the most common of the lanthanides, followed by neodymium, lanthanum, and praseodymium. It is the 25th-most abundant element, making up 66  ppm of the Ear ...
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Silver
Silver is a chemical element with the Symbol (chemistry), symbol Ag (from the Latin ', derived from the Proto-Indo-European wikt:Reconstruction:Proto-Indo-European/h₂erǵ-, ''h₂erǵ'': "shiny" or "white") and atomic number 47. A soft, white, lustrous transition metal, it exhibits the highest electrical conductivity, thermal conductivity, and reflectivity of any metal. The metal is found in the Earth's crust in the pure, free elemental form ("native silver"), as an alloy with gold and other metals, and in minerals such as argentite and chlorargyrite. Most silver is produced as a byproduct of copper, gold, lead, and zinc Refining (metallurgy), refining. Silver has long been valued as a precious metal. Silver metal is used in many bullion coins, sometimes bimetallism, alongside gold: while it is more abundant than gold, it is much less abundant as a native metal. Its purity is typically measured on a per-mille basis; a 94%-pure alloy is described as "0.940 fine". As one of th ...
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Aluminosilicate
Aluminosilicate minerals ( IMA symbol: Als) are minerals composed of aluminium, silicon, and oxygen, plus countercations. They are a major component of kaolin and other clay minerals. Andalusite, kyanite, and sillimanite are naturally occurring aluminosilicate minerals that have the composition Al2 Si O5. The triple point of the three polymorphs is located at a temperature of and a pressure of . These three minerals are commonly used as index minerals in metamorphic rocks. Naturally occurring microporous, hydrous aluminosilicate minerals are referred to as zeolites. Feldspar is a common tectosilicate aluminosilicate mineral made of potassium, sodium, and calcium cations surrounded by a negatively charged network of silicon, aluminium and oxygen atoms. The catalyst silica-alumina is an amorphous substance which is not an aluminosilicate compound. Aluminosilicate glasses There exist a wide variety of glass types. The characteristics of these different types depend on t ...
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