Topic summaryKLA-Tencor Expand Summary Extracted from the Wikipedia article KLA Corporation. References^^ 2020.^ 2020.^ 2022.{{}}: CS1 maint: periodical has ISBN ()^ 2022.^ 2022.^ 2019.^ 2019.^ 2022.^ 2022.^ 2022.^ 2022.^ 2022.^ 2022.^ 2022.^ 2022.^ 2022.^ 2019.^ 2020.^ 2019.^ 2019.(subscription required)^ 2022.^ 2022.^ 2022.^^ 2022.^.^ 2022.^ 2022.^.^.^ 2022.^ 2020. Wikipedia source