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Dopant Activation
Dopant activation is the process of obtaining the desired electronic contribution from impurity species in a semiconductor host. The term is often restricted to the application of thermal energy following the ion implantation of dopants. In the most common industrial example, rapid thermal processing is applied to silicon following the ion implantation of dopants such as phosphorus, arsenic and boron. Vacancies generated at elevated temperature (1200 °C) facilitate the movement of these species from interstitial to substitutional lattice sites while amorphization damage from the implantation process recrystallizes. A relatively rapid process, peak temperature is often maintained for less than one second to minimize unwanted chemical diffusion Diffusion is the net movement of anything (for example, atoms, ions, molecules, energy) generally from a region of higher concentration to a region of lower concentration. Diffusion is driven by a gradient in Gibbs free ener ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Dopant
A dopant (also called a doping agent) is a small amount of a substance added to a material to alter its physical properties, such as electrical or optics, optical properties. The amount of dopant is typically very low compared to the material being doped. When doped into crystalline substances, the dopant's atoms get incorporated into the crystal lattice of the substance. The crystalline materials are frequently either crystals of a semiconductor such as silicon and germanium for use in solid-state electronics, or transparency and translucency, transparent crystals for use in the production of various laser types; however, in some cases of the latter, noncrystalline substances such as glass can also be doped with impurities. In solid-state electronics using the proper types and amounts of dopants in semiconductors is what produces the p-type semiconductors and n-type semiconductors that are essential for making transistors and diodes. Transparent crystals Lasing media The p ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Semiconductor
A semiconductor is a material with electrical conductivity between that of a conductor and an insulator. Its conductivity can be modified by adding impurities (" doping") to its crystal structure. When two regions with different doping levels are present in the same crystal, they form a semiconductor junction. The behavior of charge carriers, which include electrons, ions, and electron holes, at these junctions is the basis of diodes, transistors, and most modern electronics. Some examples of semiconductors are silicon, germanium, gallium arsenide, and elements near the so-called " metalloid staircase" on the periodic table. After silicon, gallium arsenide is the second-most common semiconductor and is used in laser diodes, solar cells, microwave-frequency integrated circuits, and others. Silicon is a critical element for fabricating most electronic circuits. Semiconductor devices can display a range of different useful properties, such as passing current more easil ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Rapid Thermal Processing
Rapid thermal processing (RTP) is a semiconductor manufacturing process which heats silicon wafers to temperatures exceeding 1,000°C for not more than a few seconds. During cooling wafer temperatures must be brought down slowly to prevent dislocations and wafer breakage due to thermal shock. Such rapid heating rates are often attained by high intensity lamps or lasers. These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition. Temperature control One of the key challenges in rapid thermal processing is accurate measurement and control of the wafer temperature. Monitoring the ambient with a thermocouple has only recently become feasible, in that the high temperature ramp rates prevent the wafer from coming to thermal equilibrium with the process chamber. One temperature control strategy involves ''in situ'' pyrometry to effect real time control. Used for ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Crystallographic Defect
A crystallographic defect is an interruption of the regular patterns of arrangement of atoms or molecules in Crystal, crystalline solids. The positions and orientations of particles, which are repeating at fixed distances determined by the Crystal structure#unit cell, unit cell parameters in crystals, exhibit a periodic crystal structure, but this is usually imperfect.Ehrhart, P. (1991Properties and interactions of atomic defects in metals and alloys, volume 25 of Landolt-Börnstein, New Series III, chapter 2, p. 88, Springer, Berlin Several types of defects are often characterized: point defects, line defects, planar defects, bulk defects. Topological homotopy establishes a mathematical method of characterization. Point defects Point defects are defects that occur only at or around a single lattice point. They are not extended in space in any dimension. Strict limits for how small a point defect is are generally not defined explicitly. However, these defects typically involve at ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Amorphous Solid
In condensed matter physics and materials science, an amorphous solid (or non-crystalline solid) is a solid that lacks the long-range order that is a characteristic of a crystal. The terms "glass" and "glassy solid" are sometimes used synonymously with amorphous solid; however, these terms refer specifically to amorphous materials that undergo a glass transition. Examples of amorphous solids include glasses, metallic glasses, and certain types of plastics and polymers. Etymology The term "Amorphous" comes from the Greek language, Greek ''a'' ("without"), and ''morphé'' ("shape, form"). Structure Amorphous materials have an internal structure of molecular-scale structural blocks that can be similar to the basic structural units in the crystalline phase of the same compound. Unlike in crystalline materials, however, no long-range regularity exists: amorphous materials cannot be described by the repetition of a finite unit cell. Statistical measures, such as the atomic density ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Recrystallization (chemistry)
Recrystallization is a broad class of List of purification methods in chemistry , chemical purification techniques characterized by the dissolution of an impure sample in a solvent or solvent mixture, followed by some change in conditions that encourages the formation of pure isolate as solid crystals. Recrystallization as a purification technique is driven by spontaneous process , spontaneous processes of molecular self-assembly , self-assembly that leverage the highly ordered (i.e. low-entropy) and periodic characteristics of a crystal's molecular structure to produce purification. Basic principles The driving force of this purification emerges from the difference in molecular interactions between the isolate and the impurities: if a molecule of the desired isolate interacts with any isolate crystal present, it is likely the molecule Deposition (chemistry) , deposits on the crystal's ordered surface and contributes to the crystal's growth; if a molecule of the impurity inter ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Diffusion
Diffusion is the net movement of anything (for example, atoms, ions, molecules, energy) generally from a region of higher concentration to a region of lower concentration. Diffusion is driven by a gradient in Gibbs free energy or chemical potential. It is possible to diffuse "uphill" from a region of lower concentration to a region of higher concentration, as in spinodal decomposition. Diffusion is a stochastic process due to the inherent randomness of the diffusing entity and can be used to model many real-life stochastic scenarios. Therefore, diffusion and the corresponding mathematical models are used in several fields beyond physics, such as statistics, probability theory, information theory, neural networks, finance, and marketing. The concept of diffusion is widely used in many fields, including physics (Molecular diffusion, particle diffusion), chemistry, biology, sociology, economics, statistics, data science, and finance (diffusion of people, ideas, data and price v ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
