Krishna Saraswat is a professor in

Stanford Department of Electrical Engineering Stanford Department of Electrical Engineering, also known as EE; Double E, is one of nine engineering departments that comprise Stanford University School of Engineering. History F.A.C. Perrine, in 1893, made an acknowledgement of gifts to Stanf ...

in the

United States The United States of America (U.S.A. or USA), commonly known as the United States (U.S. or US) or America, is a country primarily located in North America. It consists of 50 states, a federal district, five major unincorporated territorie ...

. He is an

ISI Highly Cited Researcher The Institute for Scientific Information (ISI) was an academic publishing service, founded by Eugene Garfield in Philadelphia in 1956. ISI offered scientometric and bibliographic database services. Its specialty was citation indexing and analysis, ...

in engineering, placing him in the top 250 worldwide in engineering research, and a recipient of IEEE's Andrew S. Grove Award for "seminal contributions to silicon process technology".

Education and positions

Saraswat received his B.E. degree in electronics in 1968 from

Birla Institute of Technology and Science, Pilani Birla Institute of Technology & Science, Pilani (BITS Pilani) is a Deemed university in Pilani, Jhunjhunu, India. It focuses primarily on higher education and research in engineering and sciences. After expansion to a campus in Dubai, it has b ...

(BITS) and his M.S. (1968) and Ph.D. (1974) in electrical engineering from

Stanford University Stanford University, officially Leland Stanford Junior University, is a private research university in Stanford, California. The campus occupies , among the largest in the United States, and enrolls over 17,000 students. Stanford is consider ...

. Saraswat stayed at Stanford as a researcher and was appointed professor of electrical engineering in 1983. He also has an honorary appointment of an adjunct professor at the Birla Institute of Technology and Science, Pilani, India, since January 2004 and a visiting professor during the summer of 2007 at IIT Bombay, India. He is Stanford's Rickey/Nielsen Professor in the School of Engineering, and courtesy professor of materials science and engineering.

Career

Saraswat has worked on modeling of CVD of silicon, conduction in polysilicon, diffusion in silicides, contact resistance, interconnect delay, and oxidation effects in silicon. He pioneered the technologies for aluminum/titanium layered interconnects, which became an industry standard, as well as CVD of MOS gates with alternative materials such as tungsten, WSi2, and SiGe. Saraswat worked on microwave transistors in graduate school, and his thesis was on high voltage MOS devices and circuits. During the late 1980s he focused on single wafer manufacturing and developed equipment and simulators for it. Jointly with Texas Instruments a microfactory for single wafer manufacturing was demonstrated in 1993. Since the mid 1990s, Saraswat has worked on technology for scaling MOS technology to sub-10 nm regime and pioneered several new concepts of 3-D ICs with multiple layers of heterogeneous devices. His present research focuses on new materials, particularly SiGe,

germanium Germanium is a chemical element with the symbol Ge and atomic number 32. It is lustrous, hard-brittle, grayish-white and similar in appearance to silicon. It is a metalloid in the carbon group that is chemically similar to its group neighbors s ...

, and

III-V Semiconductor materials are nominally small band gap insulators. The defining property of a semiconductor material is that it can be compromised by doping it with impurities that alter its electronic properties in a controllable way. Because of t ...

compounds, to replace

silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...

nanoelectronics Nanoelectronics refers to the use of nanotechnology in electronic components. The term covers a diverse set of devices and materials, with the common characteristic that they are so small that inter-atomic interactions and quantum mechanical pr ...

scales further. As of July 2019, Krishna Saraswat has been granted approximately 15 patents.

Awards and honors

* 2013; 1989 - Elected Fellow of the

IEEE The Institute of Electrical and Electronics Engineers (IEEE) is a 501(c)(3) professional association for electronic engineering and electrical engineering (and associated disciplines) with its corporate office in New York City and its operation ...

('89) and Life Fellow ('13) * 2012 -

Semiconductor Industry Association The Semiconductor Industry Association (SIA) is a trade association and lobbying group founded in 1977 that represents the United States semiconductor industry. It is located in Washington, D.C. One of the main achievements of the SIA was the cr ...

(SIA) University Researcher of the Year Award * 2012 - Alum of the Year Award

References

External links

Stanford profile, Krishna Saraswat

Google Scholar, Krishna Saraswat
{{DEFAULTSORT:Saraswat, Krishna Stanford University alumni American Hindus Stanford University School of Engineering faculty Stanford University Department of Electrical Engineering faculty Living people 1947 births American academics of Indian descent Fellow Members of the IEEE