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Extreme ultraviolet radiation (EUV or XUV) or high-
energy In physics, energy (from Ancient Greek: ἐνέργεια, ''enérgeia'', “activity”) is the quantitative property that is transferred to a body or to a physical system, recognizable in the performance of work and in the form of heat a ...
ultraviolet Ultraviolet (UV) is a form of electromagnetic radiation with wavelength from 10 nanometer, nm (with a corresponding frequency around 30 Hertz, PHz) to 400 nm (750 Hertz, THz), shorter than that of visible light, but longer than ...
radiation is
electromagnetic radiation In physics, electromagnetic radiation (EMR) consists of waves of the electromagnetic field, electromagnetic (EM) field, which propagate through space and carry momentum and electromagnetic radiant energy. It includes radio waves, microwaves, inf ...
in the part of the
electromagnetic spectrum The electromagnetic spectrum is the range of frequencies (the spectrum) of electromagnetic radiation and their respective wavelengths and photon energies. The electromagnetic spectrum covers electromagnetic waves with frequencies ranging from ...
spanning
wavelength In physics, the wavelength is the spatial period of a periodic wave—the distance over which the wave's shape repeats. It is the distance between consecutive corresponding points of the same phase on the wave, such as two adjacent crests, tro ...
s from 124  nm down to 10 nm, and therefore (by the Planck–Einstein equation) having
photon A photon () is an elementary particle that is a quantum of the electromagnetic field, including electromagnetic radiation such as light and radio waves, and the force carrier for the electromagnetic force. Photons are massless, so they always ...
s with energies from 10  eV up to 124 eV. EUV is naturally generated by the
solar corona A corona ( coronas or coronae) is the outermost layer of a star's atmosphere. It consists of plasma. The Sun's corona lies above the chromosphere and extends millions of kilometres into outer space. It is most easily seen during a total solar e ...
and artificially by
plasma Plasma or plasm may refer to: Science * Plasma (physics), one of the four fundamental states of matter * Plasma (mineral), a green translucent silica mineral * Quark–gluon plasma, a state of matter in quantum chromodynamics Biology * Blood pla ...
, high harmonic generation sources and
synchrotron light Synchrotron radiation (also known as magnetobremsstrahlung radiation) is the electromagnetic radiation emitted when relativistic charged particles are subject to an acceleration perpendicular to their velocity (). It is produced artificially in ...
sources. Since UVC extends to 100 nm, there is some overlap in the terms. The main uses of extreme ultraviolet radiation are
photoelectron spectroscopy Photoemission spectroscopy (PES), also known as photoelectron spectroscopy, refers to energy measurement of electrons emitted from solids, gases or liquids by the photoelectric effect, in order to determine the binding energies of electrons in th ...
, solar imaging, and
lithography Lithography () is a planographic method of printing originally based on the immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by the German a ...
. In
air The atmosphere of Earth is the layer of gases, known collectively as air, retained by Earth's gravity that surrounds the planet and forms its planetary atmosphere. The atmosphere of Earth protects life on Earth by creating pressure allowing f ...
, EUV is the most highly absorbed component of the electromagnetic spectrum, requiring high vacuum for transmission.


EUV generation

Neutral atoms or
condensed matter Condensed matter physics is the field of physics that deals with the macroscopic and microscopic physical properties of matter, especially the solid and liquid phases which arise from electromagnetic forces between atoms. More generally, the su ...
cannot emit EUV radiation.
Ionization Ionization, or Ionisation is the process by which an atom or a molecule acquires a negative or positive charge by gaining or losing electrons, often in conjunction with other chemical changes. The resulting electrically charged atom or molecule i ...
must take place first. EUV light can only be emitted by electrons which are bound to multicharged positive ions; for example, to remove an electron from a +3 charged carbon ion (three electrons already removed) requires about 65  eV. Such electrons are more tightly bound than typical
valence electrons In chemistry and physics, a valence electron is an electron in the outer shell associated with an atom, and that can participate in the formation of a chemical bond if the outer shell is not closed. In a single covalent bond, a shared pair forms ...
. The existence of multicharged positive ions is only possible in a hot dense
plasma Plasma or plasm may refer to: Science * Plasma (physics), one of the four fundamental states of matter * Plasma (mineral), a green translucent silica mineral * Quark–gluon plasma, a state of matter in quantum chromodynamics Biology * Blood pla ...
. Alternatively, the free electrons and ions may be generated temporarily and instantaneously by the intense
electric field An electric field (sometimes E-field) is the physical field that surrounds electrically charged particles and exerts force on all other charged particles in the field, either attracting or repelling them. It also refers to the physical field fo ...
of a very-high-harmonic laser beam. The electrons accelerate as they return to the parent ion, releasing higher energy photons at diminished intensities, which may be in the EUV range. If the released photons constitute
ionizing radiation Ionizing radiation (or ionising radiation), including nuclear radiation, consists of subatomic particles or electromagnetic waves that have sufficient energy to ionize atoms or molecules by detaching electrons from them. Some particles can travel ...
, they will also ionize the atoms of the
harmonic A harmonic is a wave with a frequency that is a positive integer multiple of the ''fundamental frequency'', the frequency of the original periodic signal, such as a sinusoidal wave. The original signal is also called the ''1st harmonic'', the ...
-generating medium, depleting the sources of higher-harmonic generation. The freed electrons escape since the electric field of the EUV light is not intense enough to drive the electrons to higher harmonics, while the parent ions are no longer as easily ionized as the originally neutral atoms. Hence, the processes of EUV generation and absorption (ionization) strongly compete against each other. However, in 2011, Shambhu Ghimire et al. first observed high-harmonic generation in bulk crystals of
zinc oxide Zinc oxide is an inorganic compound with the formula . It is a white powder that is insoluble in water. ZnO is used as an additive in numerous materials and products including cosmetics, food supplements, rubbers, plastics, ceramics, glass, cemen ...
. It draws interest to invest the possibility and mechanism of HHG in solid state. EUV radiation can be emitted in
silicon dioxide Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...
or
sapphire Sapphire is a precious gemstone, a variety of the mineral corundum, consisting of aluminium oxide () with trace amounts of elements such as iron, titanium, chromium, vanadium, or magnesium. The name sapphire is derived via the Latin "sapphir ...
.


Direct tunable generation of EUV

EUV light can also be emitted by free electrons orbiting a
synchrotron A synchrotron is a particular type of cyclic particle accelerator, descended from the cyclotron, in which the accelerating particle beam travels around a fixed closed-loop path. The magnetic field which bends the particle beam into its closed p ...
. Continuously tunable
narrowband Narrowband signals are signals that occupy a narrow range of frequencies or that have a small fractional bandwidth. In the audio spectrum, narrowband sounds are sounds that occupy a narrow range of frequencies. In telephony, narrowband is usua ...
EUV light can be generated by four wave mixing in gas cells of
krypton Krypton (from grc, κρυπτός, translit=kryptos 'the hidden one') is a chemical element with the symbol Kr and atomic number 36. It is a colorless, odorless, tasteless noble gas that occurs in trace amounts in the atmosphere and is often ...
and
hydrogen Hydrogen is the chemical element with the symbol H and atomic number 1. Hydrogen is the lightest element. At standard conditions hydrogen is a gas of diatomic molecules having the formula . It is colorless, odorless, tasteless, non-toxic, an ...
to wavelengths as low as 110 nm. In windowless gas chambers fixed four wave mixing has been seen as low as 75 nm.


EUV absorption in matter

When an EUV photon is absorbed,
photoelectrons The photoelectric effect is the emission of electrons when electromagnetic radiation, such as light, hits a material. Electrons emitted in this manner are called photoelectrons. The phenomenon is studied in condensed matter physics, and solid st ...
and
secondary electrons Secondary electrons are electrons generated as ionization products. They are called 'secondary' because they are generated by other radiation (the ''primary'' radiation). This radiation can be in the form of ions, electrons, or photons with suffici ...
are generated by
ionization Ionization, or Ionisation is the process by which an atom or a molecule acquires a negative or positive charge by gaining or losing electrons, often in conjunction with other chemical changes. The resulting electrically charged atom or molecule i ...
, much like what happens when
X-ray An X-ray, or, much less commonly, X-radiation, is a penetrating form of high-energy electromagnetic radiation. Most X-rays have a wavelength ranging from 10  picometers to 10  nanometers, corresponding to frequencies in the range 30&nb ...
s or electron beams are absorbed by matter. The response of matter to EUV radiation can be captured in the following equations: ''Point of absorption:'' EUV photon energy = 92 eV, = Electron binding energy + photoelectron initial kinetic energy ''Within 3
mean free path In physics, mean free path is the average distance over which a moving particle (such as an atom, a molecule, or a photon) travels before substantially changing its direction or energy (or, in a specific context, other properties), typically as a ...
s of photoelectron (1–2 nm):'' Reduction of photoelectron kinetic energy = ionization potential + secondary electron kinetic energy; ''Within 3 mean free paths of secondary electron (~30 nm):'' # Reduction of secondary electron kinetic energy = ionization potential + tertiary electron kinetic energy # mNth generation electron slows down aside from ionization by heating (
phonon In physics, a phonon is a collective excitation in a periodic, Elasticity (physics), elastic arrangement of atoms or molecules in condensed matter physics, condensed matter, specifically in solids and some liquids. A type of quasiparticle, a phon ...
generation) # Final generation electron kinetic energy ~ 0 eV => dissociative electron attachment + heat, where the
ionization potential Ionization, or Ionisation is the process by which an atom or a molecule acquires a negative or positive charge by gaining or losing electrons, often in conjunction with other chemical changes. The resulting electrically charged atom or molecule i ...
is typically 7–9 eV for organic materials and 4–5 eV for metals. The photoelectron subsequently causes the emission of secondary electrons through the process of
impact ionization Impact ionization is the process in a material by which one energetic charge carrier can lose energy by the creation of other charge carriers. For example, in semiconductors, an electron (or Electron hole, hole) with enough kinetic energy can kno ...
. Sometimes, an Auger transition is also possible, resulting in the emission of two electrons with the absorption of a single photon. Strictly speaking, photoelectrons, Auger electrons and secondary electrons are all accompanied by positively charged holes (ions which can be neutralized by pulling electrons from nearby molecules) in order to preserve charge neutrality. An electron-hole pair is often referred to as an
exciton An exciton is a bound state of an electron and an electron hole which are attracted to each other by the electrostatic Coulomb force. It is an electrically neutral quasiparticle that exists in insulators, semiconductors and some liquids. The ...
. For highly energetic electrons, the electron-hole separation can be quite large and the binding energy is correspondingly low, but at lower energy, the electron and hole can be closer to each other. The exciton itself diffuses quite a large distance (>10 nm). As the name implies, an exciton is an excited state; only when it disappears as the electron and hole recombine, can stable chemical reaction products form. Since the photon absorption depth exceeds the electron escape depth, as the released electrons eventually slow down, they dissipate their energy ultimately as heat. EUV wavelengths are absorbed much more strongly than longer wavelengths, since their corresponding photon energies exceed the bandgaps of all materials. Consequently, their heating efficiency is significantly higher, and has been marked by lower thermal ablation thresholds in dielectric materials.


Solar minima/maxima

Certain wavelengths of EUV vary by as much as a factor of 50 between
solar minima Solar minimum is the regular period of least solar activity in the Sun's 11-year solar cycle. During solar minimum, sunspot and solar flare activity diminishes, and often does not occur for days at a time. On average, the solar cycle takes abou ...
and maxima, which may contribute to stratospheric warming and
ozone Ozone (), or trioxygen, is an inorganic molecule with the chemical formula . It is a pale blue gas with a distinctively pungent smell. It is an allotrope of oxygen that is much less stable than the diatomic allotrope , breaking down in the lo ...
production. These may in turn affect atmospheric circulation and climate patterns over short and long term solar cycles.


EUV damage

Like other forms of
ionizing radiation Ionizing radiation (or ionising radiation), including nuclear radiation, consists of subatomic particles or electromagnetic waves that have sufficient energy to ionize atoms or molecules by detaching electrons from them. Some particles can travel ...
, EUV and electrons released directly or indirectly by the EUV radiation are a likely source of device damage. Damage may result from oxide desorption or trapped charge following ionization. Damage may also occur through indefinite positive charging by the
Malter effect The Malter effect is named after Louis Malter, who first described the effect. Following exposure to ionizing radiation (e.g., electrons, ions, X-rays, extreme ultraviolet, vacuum ultraviolet), secondary electron emission from the surface of a t ...
. If free electrons cannot return to neutralize the net positive charge, positive ion desorption is the only way to restore neutrality. However,
desorption Desorption is the physical process where a previously adsorbed substance is released from a surface. This happens when a molecule gains enough energy to overcome the activation barrier of the bounding energy that keeps it in the surface. There ...
essentially means the surface is degraded during exposure, and furthermore, the desorbed atoms contaminate any exposed optics. EUV damage has already been documented in the CCD radiation aging of the Extreme UV Imaging Telescope (EIT). Radiation damage is a well-known issue that has been studied in the process of plasma processing damage. A recent study at the University of Wisconsin Synchrotron indicated that wavelengths below 200 nm are capable of measurable surface charging. EUV radiation showed positive charging centimeters beyond the borders of exposure while VUV (Vacuum Ultraviolet) radiation showed positive charging within the borders of exposure. Studies using EUV femtosecond pulses at the Free Electron Laser in Hamburg (
FLASH Flash, flashes, or FLASH may refer to: Arts, entertainment, and media Fictional aliases * Flash (DC Comics character), several DC Comics superheroes with super speed: ** Flash (Barry Allen) ** Flash (Jay Garrick) ** Wally West, the first Kid ...
) indicated thermal melting-induced damage thresholds below 100 mJ/cm2. An earlier study showed that electrons produced by the 'soft' ionizing radiation could still penetrate ~100 nm below the surface, resulting in heating.


See also

*
Extreme Ultraviolet Explorer The Extreme Ultraviolet Explorer (EUVE or Explorer 67) was a NASA space telescope for ultraviolet astronomy. EUVE was a part of NASA's Explorer spacecraft series. Launched on 7 June 1992. With instruments for ultraviolet (UV) radiation between ...
* Extreme Ultraviolet Variability Experiment *
Extreme ultraviolet Imaging Telescope The Extreme ultraviolet Imaging Telescope (EIT) is an instrument on the SOHO spacecraft used to obtain high-resolution images of the solar corona in the ultraviolet range. The EIT instrument is sensitive to light of four different wavelengths: 1 ...
* High harmonic generation *
CHIPSat CHIPS (Cosmic Hot Interstellar Plasma Spectrometer, also Explorer 82 or UNEX-2) was a NASA Explorer program satellite. It was launched on 12 January 2003 from Vandenberg Air Force Base aboard a Delta II with the larger satellite ICESat, and h ...
*
Extreme ultraviolet lithography Extreme ultraviolet lithography (also known as EUV or EUVL) is an optical lithography technology used in steppers, machines that make integrated circuits (ICs) for computers and other electronic devices. It uses a range of extreme ultraviolet (EUV) ...
*
List of plasma physics articles This is a list of plasma physics topics. A * Ablation * Abradable coating * Abraham–Lorentz force * Absorption band * Accretion disk * Active galactic nucleus * Adiabatic invariant * ADITYA (tokamak) * Aeronomy * Afterglow plasma * Air ...


References


External links

*
Mediawiki Extension:EUV
{{DEFAULTSORT:Extreme Ultraviolet