Electron cyclotron resonance (ECR) is a phenomenon observed in
plasma physics
Plasma () is a state of matter characterized by the presence of a significant portion of charged particles in any combination of ions or electrons. It is the most abundant form of ordinary matter in the universe, mostly in stars (including th ...
,
condensed matter physics
Condensed matter physics is the field of physics that deals with the macroscopic and microscopic physical properties of matter, especially the solid and liquid State of matter, phases, that arise from electromagnetic forces between atoms and elec ...
, and
accelerator physics. It happens when the frequency of incident radiation coincides with the natural frequency of rotation of electrons in magnetic fields. A free
electron
The electron (, or in nuclear reactions) is a subatomic particle with a negative one elementary charge, elementary electric charge. It is a fundamental particle that comprises the ordinary matter that makes up the universe, along with up qua ...
in a static and uniform
magnetic field
A magnetic field (sometimes called B-field) is a physical field that describes the magnetic influence on moving electric charges, electric currents, and magnetic materials. A moving charge in a magnetic field experiences a force perpendicular ...
will move in a circle due to the
Lorentz force. The circular motion may be superimposed with a uniform axial motion, resulting in a
helix, or with a uniform motion perpendicular to the field (e.g., in the presence of an electrical or gravitational field) resulting in a
cycloid
In geometry, a cycloid is the curve traced by a point on a circle as it Rolling, rolls along a Line (geometry), straight line without slipping. A cycloid is a specific form of trochoid and is an example of a roulette (curve), roulette, a curve g ...
. The
angular frequency
In physics, angular frequency (symbol ''ω''), also called angular speed and angular rate, is a scalar measure of the angle rate (the angle per unit time) or the temporal rate of change of the phase argument of a sinusoidal waveform or sine ...
(''ω'' = 2''π''
''f'' ) of this ''
cyclotron motion'' for a given magnetic field strength ''B'' is given (in
SI units) by
:
.
where
is the
elementary charge
The elementary charge, usually denoted by , is a fundamental physical constant, defined as the electric charge carried by a single proton (+1 ''e'') or, equivalently, the magnitude of the negative electric charge carried by a single electron, ...
and
is the mass of the electron. For the commonly used
microwave
Microwave is a form of electromagnetic radiation with wavelengths shorter than other radio waves but longer than infrared waves. Its wavelength ranges from about one meter to one millimeter, corresponding to frequency, frequencies between 300&n ...
frequency
2.45 GHz and the bare electron charge and mass, the resonance condition is met when ''B'' = .
For electrons moving at relativistic speeds ''v'', the formula needs to be adjusted according to the
special theory of relativity to:
:
where
* ''m''
e is the electron rest mass
*
.
In plasma physics
An ionized
plasma may be efficiently produced or heated by superimposing a static
magnetic field
A magnetic field (sometimes called B-field) is a physical field that describes the magnetic influence on moving electric charges, electric currents, and magnetic materials. A moving charge in a magnetic field experiences a force perpendicular ...
and a high-frequency
electromagnetic field
An electromagnetic field (also EM field) is a physical field, varying in space and time, that represents the electric and magnetic influences generated by and acting upon electric charges. The field at any point in space and time can be regarde ...
at the electron cyclotron
resonance
Resonance is a phenomenon that occurs when an object or system is subjected to an external force or vibration whose frequency matches a resonant frequency (or resonance frequency) of the system, defined as a frequency that generates a maximu ...
frequency. In the toroidal magnetic fields used in
magnetic fusion energy research, the magnetic field decreases with the major radius, so the location of the power deposition can be controlled within about a centimetre. Furthermore, the heating power can be rapidly modulated and is deposited directly into the electrons. These properties make electron cyclotron heating a very valuable research tool for energy transport studies. In addition to heating, electron cyclotron waves can be used to drive current. The inverse process of
electron cyclotron emission can be used as a
diagnostic of the radial electron temperature profile.
ECR ion sources
The use of electron cyclotron resonance for efficient plasma generation, especially to obtain large numbers of multiply charged ions, has been applied in diverse fields:
* advanced cancer treatment, where ECR
ion sources are crucial for
proton therapy,
* advanced
semiconductor manufacturing
Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as microprocessors, microcontrollers, and memories (such as Random-access memory, RAM and flash memory). It is a ...
, especially for high density
DRAM
Dram, DRAM, or drams may refer to:
Technology and engineering
* Dram (unit), a unit of mass and volume, and an informal name for a small amount of liquor, especially whisky or whiskey
* Dynamic random-access memory, a type of electronic semicondu ...
memories, through
plasma etching
Plasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (Plasma (physics), plasma) of an appropriate gas mixture being shot (in pulses) at a sample. The plasma source, ...
or other
plasma processing technologies,
*
electric propulsion devices for
spacecraft propulsion
Spacecraft propulsion is any method used to accelerate spacecraft and artificial satellites. In-space propulsion exclusively deals with propulsion systems used in the vacuum of space and should not be confused with space launch or atmospheric e ...
, where a broad range of devices (
HiPEP, some
ion thruster
An ion thruster, ion drive, or ion engine is a form of electric propulsion used for spacecraft propulsion. An ion thruster creates a cloud of positive ions from a neutral gas by ionizing it to extract some electrons from its atoms. The i ...
s, or
electrodeless plasma thrusters),
* for
particle accelerator
A particle accelerator is a machine that uses electromagnetic fields to propel electric charge, charged particles to very high speeds and energies to contain them in well-defined particle beam, beams. Small accelerators are used for fundamental ...
s, on-line mass separation and radioactive ion charge breeding,
* and, as a more mundane example, painting of plastic bumpers for cars.
The ECR ion source makes use of the electron cyclotron resonance to ionize a plasma. Microwaves are injected into a volume at the frequency corresponding to the electron cyclotron resonance, defined by the magnetic field applied to a region inside the volume. The volume contains a low pressure gas. The alternating electric field of the microwaves is set to be synchronous with the gyration period of the free electrons of the gas, and increases their perpendicular kinetic energy. Subsequently, when the energized free electrons collide with the gas in the volume they can cause ionization if their kinetic energy is larger than the ionization energy of the atoms or molecules. The ions produced correspond to the gas type used, which may be pure, a compound, or vapour of a solid or liquid material.
ECR ion sources are able to produce singly charged ions with high intensities (e.g.
H+ and
D+ ions of more than 100
mA (electrical) in DC mode using a 2.45 GHz ECR ion source).
For multiply charged ions, the ECR ion source has the advantages that it is able to confine the ions for long enough for multiple collisions and multiple ionization to take place, and the low gas pressure in the source avoids recombination. The VENUS ECR ion source at
Lawrence Berkeley National Laboratory
Lawrence Berkeley National Laboratory (LBNL, Berkeley Lab) is a Federally funded research and development centers, federally funded research and development center in the Berkeley Hills, hills of Berkeley, California, United States. Established i ...
has produced in intensity of 0.25 mA (electrical) of
Bi29+.
VENUS reveals the future of heavy-ion sources
CERN Courier, 6 May 2005
Some important industrial fields would not exist without the use of this fundamental technology, which makes electron cyclotron resonance ion and plasma sources one of the enabling technologies of today's world.
In condensed matter physics
Within a solid the mass in the cyclotron frequency equation above is replaced with the effective mass tensor . Cyclotron resonance is therefore a useful technique to measure effective mass and Fermi surface cross-section in solids. In a sufficiently high magnetic field at low temperature in a relatively pure material
:
where is the carrier scattering lifetime, is the Boltzmann constant
The Boltzmann constant ( or ) is the proportionality factor that relates the average relative thermal energy of particles in a ideal gas, gas with the thermodynamic temperature of the gas. It occurs in the definitions of the kelvin (K) and the ...
and is temperature. When these conditions are satisfied, an electron will complete its cyclotron orbit without engaging in a collision, at which point it is said to be in a well-defined Landau level.
See also
* Cyclotron
A cyclotron is a type of particle accelerator invented by Ernest Lawrence in 1929–1930 at the University of California, Berkeley, and patented in 1932. Lawrence, Ernest O. ''Method and apparatus for the acceleration of ions'', filed: Januar ...
* ARC-ECRIS
* Ion cyclotron resonance
* Synchrotron
* Gyrotron
* De Haas–van Alphen effect
References
Further reading
"Personal Reminiscences of Cyclotron Resonance"
G. Dresselhaus, Proceedings of ICPS-27 (2004). This paper describes the early history of cyclotron resonance in its heyday as a band structure determination technique.
{{DEFAULTSORT:Electron Cyclotron Resonance
Waves in plasmas
Condensed matter physics
Electric and magnetic fields in matter
Ion source
Particle accelerators