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Bio-MEMS is an abbreviation for
biomedical Biomedicine (also referred to as Western medicine, mainstream medicine or conventional medicine)
(or biological)
microelectromechanical systems Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, ...
. Bio-MEMS have considerable overlap, and is sometimes considered synonymous, with lab-on-a-chip (LOC) and micro total analysis systems (μTAS). Bio-MEMS is typically more focused on mechanical parts and
microfabrication Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" o ...
technologies made suitable for biological applications. On the other hand,
lab-on-a-chip A lab-on-a-chip (LOC) is a device that integrates one or several laboratory functions on a single integrated circuit (commonly called a "chip") of only millimeters to a few square centimeters to achieve automation and high-throughput screening. ...
is concerned with
miniaturization Miniaturization ( Br.Eng.: ''Miniaturisation'') is the trend to manufacture ever smaller mechanical, optical and electronic products and devices. Examples include miniaturization of mobile phones, computers and vehicle engine downsizing. In ele ...
and integration of laboratory processes and experiments into single (often
microfluidic Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
) chips. In this definition, lab-on-a-chip devices do not strictly have biological applications, although most do or are amenable to be adapted for biological purposes. Similarly, micro total analysis systems may not have biological applications in mind, and are usually dedicated to
chemical analysis Analytical chemistry studies and uses instruments and methods to separate, identify, and quantify matter. In practice, separation, identification or quantification may constitute the entire analysis or be combined with another method. Separati ...
. A broad definition for bio-MEMS can be used to refer to the science and technology of operating at the microscale for biological and biomedical applications, which may or may not include any electronic or mechanical functions. The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences,
medicine Medicine is the science and practice of caring for a patient, managing the diagnosis, prognosis, prevention, treatment, palliation of their injury or disease, and promoting their health. Medicine encompasses a variety of health care pract ...
,
surgery Surgery ''cheirourgikē'' (composed of χείρ, "hand", and ἔργον, "work"), via la, chirurgiae, meaning "hand work". is a medical specialty that uses operative manual and instrumental techniques on a person to investigate or treat a pat ...
,
electrical engineering Electrical engineering is an engineering discipline concerned with the study, design, and application of equipment, devices, and systems which use electricity, electronics, and electromagnetism. It emerged as an identifiable occupation in the l ...
,
mechanical engineering Mechanical engineering is the study of physical machines that may involve force and movement. It is an engineering branch that combines engineering physics and mathematics principles with materials science, to design, analyze, manufacture, and ...
,
optical engineering Optical engineering is the field of science and engineering encompassing the physical phenomena and technologies associated with the generation, transmission, manipulation, detection, and utilization of light. Optical engineers use optics to solve ...
,
chemical engineering Chemical engineering is an engineering field which deals with the study of operation and design of chemical plants as well as methods of improving production. Chemical engineers develop economical commercial processes to convert raw materials int ...
, and
biomedical engineering Biomedical engineering (BME) or medical engineering is the application of engineering principles and design concepts to medicine and biology for healthcare purposes (e.g., diagnostic or therapeutic). BME is also traditionally logical sciences ...
. Some of its major applications include
genomics Genomics is an interdisciplinary field of biology focusing on the structure, function, evolution, mapping, and editing of genomes. A genome is an organism's complete set of DNA, including all of its genes as well as its hierarchical, three-dim ...
,
proteomics Proteomics is the large-scale study of proteins. Proteins are vital parts of living organisms, with many functions such as the formation of structural fibers of muscle tissue, enzymatic digestion of food, or synthesis and replication of DNA. In ...
,
molecular diagnostics Molecular diagnostics is a collection of techniques used to analyze biological markers in the genome and proteome, and how their cells express their genes as proteins, applying molecular biology to medical testing. In medicine the technique is ...
, point-of-care diagnostics,
tissue engineering Tissue engineering is a biomedical engineering discipline that uses a combination of Cell (biology), cells, engineering, Materials science, materials methods, and suitable biochemistry, biochemical and physicochemical factors to restore, maintai ...
,
single cell analysis In the field of cellular biology, single-cell analysis is the study of genomics, transcriptomics, proteomics, metabolomics and cell–cell interactions at the single cell level. The concept of single-cell analysis originated in the ...
and implantable microdevices.


History

In 1967, S. B. Carter reported the use of shadow-evaporated
palladium Palladium is a chemical element with the symbol Pd and atomic number 46. It is a rare and lustrous silvery-white metal discovered in 1803 by the English chemist William Hyde Wollaston. He named it after the asteroid Pallas, which was itself na ...
islands for cell attachment. After this first bio-MEMS study, subsequent development in the field was slow for around 20 years. In 1985, Unipath Inc. commercialized
ClearBlue Clearblue is a brand of Swiss Precision Diagnostics that offers consumer home diagnostic products such as pregnancy tests, ovulation tests and fertility monitors. Product history Clearblue was introduced in 1985 with the launch of the first ...
, a
pregnancy test A pregnancy test is used to determine whether a female is pregnant or not. The two primary methods are testing for the female pregnancy hormone (human chorionic gonadotropin (hCG)) in blood or urine using a pregnancy test kit, and scanning with ...
still used today that can be considered the first
microfluidic Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
device containing paper and the first microfluidic product to market. In 1990, Andreas Manz and H. Michael Widmer from Ciba-Geigy (now
Novartis Novartis AG is a Swiss-American multinational pharmaceutical corporation based in Basel, Switzerland and Cambridge, Massachusetts, United States (global research).name="novartis.com">https://www.novartis.com/research-development/research-loc ...
), Switzerland first coined the term micro total analysis system (μTAS) in their seminal paper proposing the use of miniaturized total chemical analysis systems for chemical sensing. There have been three major motivating factors behind the concept of μTAS. Firstly,
drug discovery In the fields of medicine, biotechnology and pharmacology, drug discovery is the process by which new candidate medications are discovered. Historically, drugs were discovered by identifying the active ingredient from traditional remedies or by ...
in the last decades leading up to the 1990s had been limited due to the time and cost of running many chromatographic analyses in parallel on
macroscopic The macroscopic scale is the length scale on which objects or phenomena are large enough to be visible with the naked eye, without magnifying optical instruments. It is the opposite of microscopic. Overview When applied to physical phenomena an ...
equipment. Secondly, the Human Genome Project (HGP), which started in October 1990, created demand for improvements in
DNA sequencing DNA sequencing is the process of determining the nucleic acid sequence – the order of nucleotides in DNA. It includes any method or technology that is used to determine the order of the four bases: adenine, guanine, cytosine, and thymine. Th ...
capacity.
Capillary electrophoresis Capillary electrophoresis (CE) is a family of electrokinetic separation methods performed in submillimeter diameter capillaries and in micro- and nanofluidic channels. Very often, CE refers to capillary zone electrophoresis (CZE), but other electr ...
thus became a focus for chemical and DNA separation. Thirdly,
DARPA The Defense Advanced Research Projects Agency (DARPA) is a research and development agency of the United States Department of Defense responsible for the development of emerging technologies for use by the military. Originally known as the Adv ...
of the
US Department of Defense The United States Department of Defense (DoD, USDOD or DOD) is an executive branch department of the federal government charged with coordinating and supervising all agencies and functions of the government directly related to national secu ...
supported a series of microfluidic research programs in the 1990s after realizing there was a need to develop field-deployable microsystems for the detection of chemical and
biological agent A biological agent (also called bio-agent, biological threat agent, biological warfare agent, biological weapon, or bioweapon) is a bacterium, virus, protozoan, parasite, fungus, or toxin that can be used purposefully as a weapon in bioterroris ...
s that were potential
military A military, also known collectively as armed forces, is a heavily armed, highly organized force primarily intended for warfare. It is typically authorized and maintained by a sovereign state, with its members identifiable by their distinct ...
and
terrorist threats ''Terrorist Threats'' is the second and final studio album by American West Coast hip hop supergroup (music), supergroup Westside Connection. It was released on December 9, 2003 through Hoo-Bangin' Records, Hoo-Bangin'/Capitol Records. Hip hop pro ...
. Researchers started to use
photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
equipment for
microfabrication Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" o ...
of microeletromechanical systems (MEMS) as inherited from the
microelectronics Microelectronics is a subfield of electronics. As the name suggests, microelectronics relates to the study and manufacture (or microfabrication) of very small electronic designs and components. Usually, but not always, this means micrometre-sc ...
industry. At the time, the application of MEMS to biology was limited because this technology was optimized for
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
or
glass Glass is a non-crystalline, often transparent, amorphous solid that has widespread practical, technological, and decorative use in, for example, window panes, tableware, and optics. Glass is most often formed by rapid cooling (quenching) of ...
wafers and used solvent-based
photoresist A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronic industry. T ...
s that were not compatible with biological material. In 1993,
George M. Whitesides George McClelland Whitesides (born August 3, 1939) is an American chemist and professor of chemistry at Harvard University. He is best known for his work in the areas of nuclear magnetic resonance spectroscopy, organometallic chemistry, molecu ...
, a
Harvard Harvard University is a private Ivy League research university in Cambridge, Massachusetts. Founded in 1636 as Harvard College and named for its first benefactor, the Puritan clergyman John Harvard, it is the oldest institution of higher le ...
chemist, introduced inexpensive
PDMS PDMS may refer to: * Palm Desert Middle School, a middle school in Palm Desert, California * Plant Design Management System * Plasma desorption mass spectrometry * Point-Defence Missile System * Polydimethylsiloxane, a silicon-based organic polymer ...
-based microfabrication and this revolutionized the bio-MEMS field. Since then, the field of bio-MEMS has exploded. Selected major technical achievements during bio-MEMS development of the 1990s include: * In 1991, the first
oligonucleotide Oligonucleotides are short DNA or RNA molecules, oligomers, that have a wide range of applications in genetic testing, research, and forensics. Commonly made in the laboratory by solid-phase chemical synthesis, these small bits of nucleic acids c ...
chip was developed * In 1998, the first solid microneedles were developed for
drug delivery Drug delivery refers to approaches, formulations, manufacturing techniques, storage systems, and technologies involved in transporting a pharmaceutical compound to its target site to achieve a desired therapeutic effect. Principles related to d ...
* In 1998, the first continuous-flow
polymerase chain reaction The polymerase chain reaction (PCR) is a method widely used to rapidly make millions to billions of copies (complete or partial) of a specific DNA sample, allowing scientists to take a very small sample of DNA and amplify it (or a part of it) t ...
chip was developed * In 1999, the first demonstration of heterogeneous
laminar flow In fluid dynamics, laminar flow is characterized by fluid particles following smooth paths in layers, with each layer moving smoothly past the adjacent layers with little or no mixing. At low velocities, the fluid tends to flow without lateral mi ...
s for selective treatment of cells in microchannels Today,
hydrogel A hydrogel is a crosslinked hydrophilic polymer that does not dissolve in water. They are highly absorbent yet maintain well defined structures. These properties underpin several applications, especially in the biomedical area. Many hydrogels ar ...
s such as
agarose Agarose is a heteropolysaccharide, generally extracted from certain red seaweed. It is a linear polymer made up of the repeating unit of agarobiose, which is a disaccharide made up of D-galactose and 3,6-anhydro-L-galactopyranose. Agarose is o ...
, biocompatible
photoresist A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronic industry. T ...
s, and
self-assembly Self-assembly is a process in which a disordered system of pre-existing components forms an organized structure or pattern as a consequence of specific, local interactions among the components themselves, without external direction. When the ...
are key areas of research in improving bio-MEMS as replacements or complements to
PDMS PDMS may refer to: * Palm Desert Middle School, a middle school in Palm Desert, California * Plant Design Management System * Plasma desorption mass spectrometry * Point-Defence Missile System * Polydimethylsiloxane, a silicon-based organic polymer ...
.


Approaches


Materials


Silicon and glass

Conventional micromachining techniques such as wet etching, dry etching, deep reactive ion etching,
sputtering In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can ...
,
anodic bonding Anodic bonding is a wafer bonding process to seal glass to either silicon or metal without introducing an intermediate layer; it is commonly used to seal glass to silicon wafers in electronics and microfluidics. This bonding technique, also known as ...
, and
fusion bonding Fusion, or synthesis, is the process of combining two or more distinct entities into a new whole. Fusion may also refer to: Science and technology Physics *Nuclear fusion, multiple atomic nuclei combining to form one or more different atomic nuc ...
have been used in bio-MEMS to make flow channels,
flow sensor Flow measurement is the quantification of bulk fluid movement. Flow can be measured in a variety of ways. The common types of flowmeters with industrial applications are listed below: * a) Obstruction type (differential pressure or variable area) ...
s, chemical detectors, separation capillaries, mixers,
filters Filter, filtering or filters may refer to: Science and technology Computing * Filter (higher-order function), in functional programming * Filter (software), a computer program to process a data stream * Filter (video), a software component tha ...
,
pumps A pump is a device that moves fluids (liquids or gases), or sometimes slurries, by mechanical action, typically converted from electrical energy into hydraulic energy. Pumps can be classified into three major groups according to the method they u ...
and valves. However, there are some drawbacks to using silicon-based devices in biomedical applications such as their high cost and bioincompatibility. Due to being single-use only, larger than their
MEMS Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, ...
counterparts, and the requirement of
clean room A cleanroom or clean room is an engineered space, which maintains a very low concentration of airborne particulates. It is well isolated, well-controlled from contamination, and actively cleansed. Such rooms are commonly needed for scientif ...
facilities, high material and processing costs make
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
-based bio-MEMS less economically attractive. ‘’
In vivo Studies that are ''in vivo'' (Latin for "within the living"; often not italicized in English) are those in which the effects of various biological entities are tested on whole, living organisms or cells, usually animals, including humans, and ...
’’, silicon-based bio-MEMS can be readily functionalized to minimize
protein adsorption Adsorption (not to be mistaken for Absorption (chemistry), ''absorption'') is the accumulation and adhesion of molecules, atoms, ions, or larger particles to a surface, but without surface penetration occurring. The adsorption of larger biomolecules ...
, but the brittleness of silicon remains a major issue.


Plastics and polymers

Using
plastic Plastics are a wide range of synthetic or semi-synthetic materials that use polymers as a main ingredient. Their plasticity makes it possible for plastics to be moulded, extruded or pressed into solid objects of various shapes. This adaptab ...
s and
polymer A polymer (; Greek '' poly-'', "many" + ''-mer'', "part") is a substance or material consisting of very large molecules called macromolecules, composed of many repeating subunits. Due to their broad spectrum of properties, both synthetic a ...
s in bio-MEMS is attractive because they can be easily fabricated, compatible with micromachining and
rapid prototyping Rapid prototyping is a group of techniques used to quickly fabricate a scale model of a physical part or assembly using three-dimensional computer aided design (CAD) data. Construction of the part or assembly is usually done using 3D printin ...
methods, as well as have low cost. Many polymers are also optically transparent and can be integrated into systems that use optical detection techniques such as
fluorescence Fluorescence is the emission of light by a substance that has absorbed light or other electromagnetic radiation. It is a form of luminescence. In most cases, the emitted light has a longer wavelength, and therefore a lower photon energy, tha ...
, UV/Vis absorbance, or Raman method. Moreover, many polymers are biologically compatible, chemically inert to
solvent A solvent (s) (from the Latin '' solvō'', "loosen, untie, solve") is a substance that dissolves a solute, resulting in a solution. A solvent is usually a liquid but can also be a solid, a gas, or a supercritical fluid. Water is a solvent for ...
s, and electrically insulating for applications where strong
electrical field An electric field (sometimes E-field) is the physical field that surrounds electrically charged particles and exerts force on all other charged particles in the field, either attracting or repelling them. It also refers to the physical field fo ...
s are necessary such as electrophoretic separation.
Surface chemistry Surface science is the study of physical and chemical phenomena that occur at the interface of two phases, including solid–liquid interfaces, solid–gas interfaces, solid–vacuum interfaces, and liquid–gas interfaces. It includes the fiel ...
of
polymer A polymer (; Greek '' poly-'', "many" + ''-mer'', "part") is a substance or material consisting of very large molecules called macromolecules, composed of many repeating subunits. Due to their broad spectrum of properties, both synthetic a ...
s can also be modified for specific applications. Specifically, the surface of
PDMS PDMS may refer to: * Palm Desert Middle School, a middle school in Palm Desert, California * Plant Design Management System * Plasma desorption mass spectrometry * Point-Defence Missile System * Polydimethylsiloxane, a silicon-based organic polymer ...
s can be ion-irradiated with elements such as
magnesium Magnesium is a chemical element with the symbol Mg and atomic number 12. It is a shiny gray metal having a low density, low melting point and high chemical reactivity. Like the other alkaline earth metals (group 2 of the periodic ta ...
,
tantalum Tantalum is a chemical element with the symbol Ta and atomic number 73. Previously known as ''tantalium'', it is named after Tantalus, a villain in Greek mythology. Tantalum is a very hard, ductile, lustrous, blue-gray transition metal that is ...
, and
iron Iron () is a chemical element with symbol Fe (from la, ferrum) and atomic number 26. It is a metal that belongs to the first transition series and group 8 of the periodic table. It is, by mass, the most common element on Earth, right in f ...
to decrease surface
hydrophobicity In chemistry, hydrophobicity is the physical property of a molecule that is seemingly repelled from a mass of water (known as a hydrophobe). In contrast, hydrophiles are attracted to water. Hydrophobic molecules tend to be nonpolar and, th ...
, allowing for better cell adhesion in ‘’
in vivo Studies that are ''in vivo'' (Latin for "within the living"; often not italicized in English) are those in which the effects of various biological entities are tested on whole, living organisms or cells, usually animals, including humans, and ...
’’ applications. The most common polymers used in bio-MEMS include
PMMA PMMA may refer to: * para-Methoxymethamphetamine, a stimulant drug * Philippine Merchant Marine Academy The Philippine Merchant Marine Academy ( fil, Akademiya sa Bapor Pangkalakalan ng Pilipinas) also referred to by its acronym PMMA) is a ma ...
,
PDMS PDMS may refer to: * Palm Desert Middle School, a middle school in Palm Desert, California * Plant Design Management System * Plasma desorption mass spectrometry * Point-Defence Missile System * Polydimethylsiloxane, a silicon-based organic polymer ...

OSTEmer
and
SU-8 SU-8 is a commonly used epoxy-based negative photoresist. Negative refers to a photoresist whereby the parts exposed to UV become cross-linked, while the remainder of the film remains soluble and can be washed away during development. As shown ...
.


Biological materials

Microscale manipulation and patterning of biological materials such as
protein Proteins are large biomolecules and macromolecules that comprise one or more long chains of amino acid residues. Proteins perform a vast array of functions within organisms, including catalysing metabolic reactions, DNA replication, respo ...
s,
cells Cell most often refers to: * Cell (biology), the functional basic unit of life Cell may also refer to: Locations * Monastic cell, a small room, hut, or cave in which a religious recluse lives, alternatively the small precursor of a monastery w ...
and tissues have been used in the development of cell-based arrays,
microarray A microarray is a multiplex lab-on-a-chip. Its purpose is to simultaneously detect the expression of thousands of genes from a sample (e.g. from a tissue). It is a two-dimensional array on a solid substrate—usually a glass slide or silicon t ...
s,
microfabrication Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" o ...
based
tissue engineering Tissue engineering is a biomedical engineering discipline that uses a combination of Cell (biology), cells, engineering, Materials science, materials methods, and suitable biochemistry, biochemical and physicochemical factors to restore, maintai ...
, and
artificial organ An artificial organ is a human made organ device or tissue that is implanted or integrated into a human — interfacing with living tissue — to replace a natural organ, to duplicate or augment a specific function or functions so the patient m ...
s. Biological micropatterning can be used for high-throughput single cell analysis,Venkat Chokkalingam, Jurjen Tel, Florian Wimmers, Xin Liu, Sergey Semenov, Julian Thiele, Carl G. Figdor, Wilhelm T.S. Huck, Probing cellular heterogeneity in cytokine-secreting immune cells using droplet-based microfluidics, Lab on a Chip, 13, 4740-4744, 2013, DOI: 10.1039/C3LC50945A, http://pubs.rsc.org/en/content/articlelanding/2013/lc/c3lc50945a#!divAbstract precise control of cellular microenvironment, as well as controlled integration of
cells Cell most often refers to: * Cell (biology), the functional basic unit of life Cell may also refer to: Locations * Monastic cell, a small room, hut, or cave in which a religious recluse lives, alternatively the small precursor of a monastery w ...
into appropriate multi-cellular architectures to recapitulate ''in vivo'' conditions.
Photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
,
microcontact printing Microcontact printing (or μCP) is a form of soft lithography that uses the relief patterns on a master polydimethylsiloxane (PDMS) stamp or Urethane rubber micro stamp to form patterns of self-assembled monolayers (SAMs) of ink on the surface ...
, selective
microfluidic Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
delivery, and
self-assembled monolayer Self-assembled monolayers (SAM) of organic molecules are molecular assemblies formed spontaneously on surfaces by adsorption and are organized into more or less large ordered domains. In some cases molecules that form the monolayer do not interact ...
s are some methods used to pattern biological molecules onto surfaces. Cell micropatterning can be done using microcontact patterning of
extracellular matrix In biology, the extracellular matrix (ECM), also called intercellular matrix, is a three-dimensional network consisting of extracellular macromolecules and minerals, such as collagen, enzymes, glycoproteins and hydroxyapatite that provide stru ...
proteins, cellular
electrophoresis Electrophoresis, from Ancient Greek ἤλεκτρον (ḗlektron, "amber") and φόρησις (phórēsis, "the act of bearing"), is the motion of dispersed particles relative to a fluid under the influence of a spatially uniform electric fie ...
, optical tweezer arrays,
dielectrophoresis Dielectrophoresis (DEP) is a phenomenon in which a force is exerted on a dielectric particle when it is subjected to a non-uniform electric field. This force does not require the particle to be charged. All particles exhibit dielectrophoretic ac ...
, and electrochemically active surfaces.


Paper

Paper microfluidics (sometimes called lab on paper) is the use of paper substrates in
microfabrication Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" o ...
to manipulate fluid flow for different applications. Paper microfluidics have been applied in paper electrophoresis and
immunoassay An immunoassay (IA) is a biochemical test that measures the presence or concentration of a macromolecule or a small molecule in a solution through the use of an antibody (usually) or an antigen (sometimes). The molecule detected by the immunoass ...
s, the most notable being the commercialized pregnancy test, ClearBlue. Advantages of using paper for
microfluidics Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
and
electrophoresis Electrophoresis, from Ancient Greek ἤλεκτρον (ḗlektron, "amber") and φόρησις (phórēsis, "the act of bearing"), is the motion of dispersed particles relative to a fluid under the influence of a spatially uniform electric fie ...
in bio-MEMS include its low cost,
biodegradability Biodegradation is the breakdown of organic matter by microorganisms, such as bacteria and fungi. It is generally assumed to be a natural process, which differentiates it from composting. Composting is a human-driven process in which biodegradati ...
, and natural wicking action. A severe disadvantage of paper-based
microfluidics Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
is the dependency of the rate of wicking on environmental conditions such as temperature and relative humidity. Paper-based analytical devices are particularly attractive for point-of-care diagnostics in developing countries for both the low material cost and emphasis on colorimetric assays which allow medical professionals to easily interpret the results by eye. Compared to traditional microfluidic channels, paper microchannels are accessible for sample introduction (especially
forensic Forensic science, also known as criminalistics, is the application of science to Criminal law, criminal and Civil law (legal system), civil laws, mainly—on the criminal side—during criminal investigation, as governed by the legal standard ...
-style samples such as body fluids and soil), as well as its natural filtering properties that exclude cell debris, dirt, and other impurities in samples. Paper-based replicas have demonstrated the same effectiveness in performing common
microfluidic Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
operations such as
hydrodynamic focusing Hydrodynamic focusing is a technique used to provide more accurate results when using flow cytometers or Coulter counters for determining the size of bacteria or cells. Technique Measuring particles Cells are counted as they are forced to pas ...
, size-based molecular extraction, micro-mixing, and dilution; the common 96- and 384-well
microplate A microplate, also known as a microtiter plate (''Microtiter'' is a registered trademark in the United States, therefore it should not be used generically without attribution), microwell plate or multiwell, is a flat plate with multiple "wells" ...
s for automated liquid handling and analysis have been reproduced through photolithography on paper to achieve a slimmer profile and lower material cost while maintaining compatibility with conventional
microplate A microplate, also known as a microtiter plate (''Microtiter'' is a registered trademark in the United States, therefore it should not be used generically without attribution), microwell plate or multiwell, is a flat plate with multiple "wells" ...
readers. Techniques for
micropatterning Micropatterning is the art of miniaturisation of patterns. Especially used for electronics, it has recently become a standard in biomaterials engineering and for fundamental research on cellular biology by mean of soft lithography. It generally u ...
paper include
photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
,
laser cutting Laser cutting is a technology that uses a laser to vaporize materials, resulting in a cut edge. While typically used for industrial manufacturing applications, it is now used by schools, small businesses, architecture, and hobbyists. Laser cutt ...
, ink jet printing, plasma treatment, and wax patterning.


Electrokinetics

Electrokinetics have been exploited in bio-MEMS for separating mixtures of molecules and
cells Cell most often refers to: * Cell (biology), the functional basic unit of life Cell may also refer to: Locations * Monastic cell, a small room, hut, or cave in which a religious recluse lives, alternatively the small precursor of a monastery w ...
using electrical fields. In
electrophoresis Electrophoresis, from Ancient Greek ἤλεκτρον (ḗlektron, "amber") and φόρησις (phórēsis, "the act of bearing"), is the motion of dispersed particles relative to a fluid under the influence of a spatially uniform electric fie ...
, a charged species in a liquid moves under the influence of an applied
electric field An electric field (sometimes E-field) is the physical field that surrounds electrically charged particles and exerts force on all other charged particles in the field, either attracting or repelling them. It also refers to the physical field fo ...
.
Electrophoresis Electrophoresis, from Ancient Greek ἤλεκτρον (ḗlektron, "amber") and φόρησις (phórēsis, "the act of bearing"), is the motion of dispersed particles relative to a fluid under the influence of a spatially uniform electric fie ...
has been used to fractionate small
ion An ion () is an atom or molecule with a net electrical charge. The charge of an electron is considered to be negative by convention and this charge is equal and opposite to the charge of a proton, which is considered to be positive by conven ...
s, charged organic molecules,
protein Proteins are large biomolecules and macromolecules that comprise one or more long chains of amino acid residues. Proteins perform a vast array of functions within organisms, including catalysing metabolic reactions, DNA replication, respo ...
s, and DNA. Electrophoresis and microfluidics are highly synergistic because it is possible to use higher voltages in microchannels due to faster heat removal.
Isoelectric focusing Isoelectric focusing (IEF), also known as electrofocusing, is a technique for separating different molecules by differences in their isoelectric point (pI). It is a type of zone electrophoresis usually performed on proteins in a gel that takes ad ...
is the separation of proteins,
organelle In cell biology, an organelle is a specialized subunit, usually within a cell, that has a specific function. The name ''organelle'' comes from the idea that these structures are parts of cells, as organs are to the body, hence ''organelle,'' the ...
s, and cells with different
isoelectric point The isoelectric point (pI, pH(I), IEP), is the pH at which a molecule carries no net electrical charge or is electrically neutral in the statistical mean. The standard nomenclature to represent the isoelectric point is pH(I). However, pI is also u ...
s. Isoelectric focusing requires a pH gradient (usually generated with electrodes) perpendicular to the flow direction. Sorting and focusing of the species of interest is achieved because an electrophoretic force causes perpendicular migration until it flows along its respective isoelectric points. Dielectrophoresis is the motion of uncharged particles due to induced polarization from nonuniform electric fields. Dielectrophoresis can be used in bio-MEMS for dielectrophoresis traps, concentrating specific particles at specific points on surfaces, and diverting particles from one flow stream to another for dynamic concentration.


Microfluidics

Microfluidics refers to systems that manipulate small ( µL, nL, pL, fL) amounts of fluids on microfabricated substrates. Microfluidic approaches to bio-MEMS confer several advantages: * Flow in microchannels is laminar, which allows selective treatment of cells in microchannels, mathematical modelling of flow patterns and concentrations, as well as quantitative predictions of the biological environment of cells and biochemical reactions * Microfluidic features can be fabricated on the cellular scale or smaller, which enables investigation of (sub)cellular phenomena, seeding and sorting of single cells, and recapitulation of physiological parameters * Integration of
microelectronics Microelectronics is a subfield of electronics. As the name suggests, microelectronics relates to the study and manufacture (or microfabrication) of very small electronic designs and components. Usually, but not always, this means micrometre-sc ...
, micromechanics, and microoptics onto the same platform allows automation, automated device control, which reduces human error and operation costs * Microfluidic technology is relatively economical due to batch fabrication and high-throughput (parallelization and redundancy). This allows the production of disposable or single-use chips for improved ease of use and reduced probability of biological contamination, cross contamination, as well as
rapid prototyping Rapid prototyping is a group of techniques used to quickly fabricate a scale model of a physical part or assembly using three-dimensional computer aided design (CAD) data. Construction of the part or assembly is usually done using 3D printin ...
* Microfluidic devices consume much smaller amounts of reagents, can be made to require only a small amount of analytes for chemical detection, require less time for processes and reactions to complete, and produces less waste than conventional macrofluidic devices and experiments * Appropriate packaging of microfluidic devices can make them suitable for wearable applications, implant (medicine), implants, and portable applications in developing country, developing countries An interesting approach combining electrokinetic phenomena and microfluidics is digital microfluidics. In digital microfluidics, a substrate surface is micropatterning, micropatterned with electrodes and selectively activated. Manipulation of small fluid droplets occurs via electrowetting, which is the phenomenon where an electric field changes the wetting, wettability of an electrolyte droplet on a surface.


BioMEMs Flow Control

Lithographic methods for microfluidic device manufacturing are ineffective in forming the screw-type mechanisms used in macroscale valves. Therefore, microfluidic devices require alternative flow control techniques, a number of which are currently popular:


=Quake Valves

= One inexpensive method of producing valves with fast actuation times and variable flow restriction is multilayer soft lithography (MSL). Valves produced through this fabrication technique are called Quake valves, because they were first created in the lab of Stephen Quake at Stanford University. The basic scheme involves two perpendicular flow conduits separated by an impermeable elastomeric membrane at their intersection. Controlled air flow passes through one conduit while the process fluid passes through the other. A pressure gradient between the two conduits, which is tuned by changing the control air flow rate, causes the membrane to deform and obstruct flow in the process channel. In MSL, the channels for both the process fluid and the control fluid are cast out of an elastomeric mold, making it an entirely additive manufacturing process.


=Ice Valves

= Ice valves operate by transporting heat away from a single portion of a flow channel, causing the fluid to solidify and stop flow through that region. Thermoelectric cooling, Thermoelectric (TE) units are used to transport heat away from the plug. Because of the limited temperature difference that TE units can provide, multiple are often chained in series to produce subzero temperatures at the substrate-fluid interface, allowing for more rapid cooling. Current state of the art ice valve technology features short closing times (0.37 s at 10 μL/min) and also operates at high flow rates (1150 μL/min). Ice valves were first introduced in 1995 where pressurized liquid carbon dioxide was used as the cooling agent.


=Prefabricated Valves

= Prefabricated mechanical screw valves and solenoid valves require no advanced microfabrication processes and are easy to implement in soft substrate materials like
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. Screw valves, unlike Quake and ice valves, maintain their level of flow restriction without power input, and are thus ideal for situations where the valve position may remain mostly constant and actuation by a human operator is acceptable. Electromagnetic solenoid valves have similar actuation times compared to Quake valves, but have larger footprints and are not integrated into the device substrate. This is an issue when device dimensions are an issue, such as in implantable devices.


Micro-scale Mixing

Despite the fact that diffusion times are significantly shorter in microfluidic systems due to small length scales, there are still challenges to removing concentration gradients at the time scales required for microfluidic technologies.


=Sonication Mixing Elements

= Sonication is often employed to provide local mixing of streams through the generation of ultra-high energy acoustics. Microfluidic chips utilizing sonication mixing can have both Integrated circuit, integrated and externally located ultrasonic transducers. Sonication is also used widely for cell lysis and homogenization in both macro and microfluidic systems. The primary mechanism of Lysis, cell lysis by sonication is intense local heating and shear forces.


= Passive Mixing Elements

= In a passive mixing element, mixing is achieved by temporal and spatial redistribution of incoming
laminar flow In fluid dynamics, laminar flow is characterized by fluid particles following smooth paths in layers, with each layer moving smoothly past the adjacent layers with little or no mixing. At low velocities, the fluid tends to flow without lateral mi ...
through the use of parallel conduits of variable path length and or diameter. The net result of having a variety of parallel flow channels of varying length is that material initially at the edge of the laminar flow profile can be repeatedly redistributed to the opposite edge, thus drastically shortening the characteristic diffusion length scale.


Bio-MEMS as Miniaturized Biosensors

Biosensors are devices that consist of a biological recognition system, called the bioreceptor, and a transducer. The interaction of the analyte with the bioreceptor causes an effect that the transducer can convert into a measurement, such as an Signal (electrical engineering), electrical signal. The most common bioreceptors used in biosensing are based on antibody, antibody–antigen interactions, nucleic acid interactions, enzyme, enzymatic interactions, cellular interactions, and interactions using biomimetic materials. Common transducer techniques include mechanical detection, electrical detection, and optical detection.


Micromechanical sensors

Mechanical detection in bio-MEMS is achieved through micro- and nano-scale cantilevers for stress (mechanics), stress sensing and mass sensing, or micro- and nano-scale plates or membranes. In stress sensing, the biochemical reaction is performed selectively on one side of the cantilever to cause a change in Specific surface energy, surface free energy. This results in bending of the cantilever that is measurable either optically (laser reflection into a quadposition detector) or electrically (Piezoresistive effect, piezo-resistor at the fixed edge of the cantilever) due to a change in surface stress. In mass sensing, the cantilever vibrates at its resonance, resonant frequency as measured electrically or optically. When a biochemical reaction takes place and is captured on the cantilever, the mass of the cantilever changes, as does the resonant frequency. Analysis of this data can be slightly less straightforward, however, as adsorption of sample to the cantilever has also been found to change the Young's modulus of the cantilever. Changing cantilever stiffness will also change its resonant frequency, and thus the noise in the oscillation signal must be analyzed to determine whether the resonant frequency is also a function of changing elasticity. One common use for this technique is in detecting nucleotide mismatches in DNA because the variation in mass caused by the presence of an incorrect base is enough to change the resonant frequency of the cantilever and register a signal. Mass sensing is not as effective in fluids because the minimum detectable mass is much higher in Damping ratio, damped mediums. Suspended microchannel resistors are a special type of cantilever design that are able to work around this limitation using microfluidic channels inside the cantilever. These channels can move ‘’in situ’’ samples around on the cantilever, without submerging the cantilever, minimally impacting its oscillation. This technology is in its infancy, however, and it is still not able to be used beyond a few, limited applications. The advantage of using cantilever sensors is that there is no need for an optically detectable label on the analyte or bioreceptors.


Electrical and electrochemical sensors

Electrical and electrochemistry, electrochemical detection are easily adapted for portability and
miniaturization Miniaturization ( Br.Eng.: ''Miniaturisation'') is the trend to manufacture ever smaller mechanical, optical and electronic products and devices. Examples include miniaturization of mobile phones, computers and vehicle engine downsizing. In ele ...
, especially in comparison to optical detection. In Amperometry, amperometric biosensors, an enzyme-catalyzed redox reaction causes a redox electron electric current, current that is measured by a working electrode. Amperometric biosensors have been used in bio-MEMS for detection of glucose, galactose, lactose, urea, and cholesterol, as well as for applications in gas detection and Nucleic acid thermodynamics, DNA hybridization. In electric potential, potentiometric biosensors, measurements of electric potential at one electrode are made in reference to another electrode. Examples of potentiometric biosensors include ISFET, ion-sensitive field effect transistors (ISFET), Chemical field-effect transistors (chem-FET), and Light-addressable potentiometric sensor, light-addressable potentiometric sensors (LAPS). In Electrical resistance and conductance, conductometric biosensors, changes in electrical impedance between two electrodes are measured as a result of a biomolecular reaction. Conductive measurements are simple and easy to use because there is no need for a specific reference electrode, and have been used to detect biochemicals, toxins, nucleic acids, and bacteria, bacterial cells.


Optical sensors

A challenge in optical detection is the need for integrating detectors and photodiodes in a miniaturized portable format on the bio-MEMS. Optical detection includes
fluorescence Fluorescence is the emission of light by a substance that has absorbed light or other electromagnetic radiation. It is a form of luminescence. In most cases, the emitted light has a longer wavelength, and therefore a lower photon energy, tha ...
-based techniques, chemiluminescence-based techniques, and Surface plasmon resonance, surface plasmon resonance (SPR). Fluorescence-based optical techniques use markers that emit light at specific wavelengths and the presence or enhancement/reduction (e.g. Förster resonance energy transfer, fluorescence resonance energy transfer) in optical signal indicates a reaction has occurred. Fluorescence-based detection has been used in
microarray A microarray is a multiplex lab-on-a-chip. Its purpose is to simultaneously detect the expression of thousands of genes from a sample (e.g. from a tissue). It is a two-dimensional array on a solid substrate—usually a glass slide or silicon t ...
s and polymerase chain reaction, PCR on a chip devices. Chemiluminescence is light generation by energy release from a chemical reaction. Bioluminescence and electrochemiluminescence are subtypes of chemiluminescence. Surface plasmon resonance sensors can be thin-film refractometers or gratings that measure the resonance behaviour of surface plasmon on metal or dielectric surfaces. The resonance changes when biomolecules are captured or adsorbed on the sensor surface and depends on the concentration of the analyte as well as its properties. Surface plasmon resonance has been used in food safety, food quality and safety analysis, Medical diagnosis, medical diagnostics, and environmental monitoring.


Bio-MEMS for diagnostics


Genomic and proteomic microarrays

The goals of genomics, genomic and proteomics, proteomic microarrays are to make high-throughput genome analysis faster and cheaper, as well as identify activated genes and their sequences. There are many different types of biological entities used in microarrays, but in general the microarray consists of an ordered collection of microspots each containing a single defined molecular species that interacts with the analyte for simultaneous testing of thousands of parameters in a single experiment. Some applications of genomic and proteomic microarrays are neonatal screening, identifying disease risk, and predicting therapy efficacy for personalized medicine.


Oligonucleotide chips

Oligonucleotide chips are microarrays of
oligonucleotide Oligonucleotides are short DNA or RNA molecules, oligomers, that have a wide range of applications in genetic testing, research, and forensics. Commonly made in the laboratory by solid-phase chemical synthesis, these small bits of nucleic acids c ...
s. They can be used for detection of mutations and expression monitoring, and gene discovery and mapping. The main methods for creating an oligonucleotide microarray are by gel pads (Motorola), microelectrodes (Nanogen),
photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
(Affymetrix), and inkjet technology (Agilent). * Using gel pads, prefabricated oligonucleotides are attached to patches of activated polyacrylamide * Using microelectrodes, negatively charged DNA and molecular probes can be concentrated on energized electrodes for interaction * Using photolithography, a light exposure pattern is created on the substrate using a photomask or virtual photomask projected from a digital micromirror device. The light removes photoliabile protecting groups from the selected exposure areas. Following de-protection, nucleotides with a photolabile protecting group are exposed to the entire surface and the chemical coupling process only occurs where light was exposed in the previous step. This process can be repeated to synthesize oligonucleotides of relatively short lengths on the surface, nucleotide by nucleotide. * Using inkjet technology, nucleotides are printed onto a surface drop by drop to form oligonucleotides


cDNA microarray

cDNA microarrays are often used for large-scale screening and expression studies. In cDNA microarrays, mRNA from cells are collected and converted into cDNA by reverse transcription. Subsequently, cDNA molecules (each corresponding to one gene) are immobilized as ~100 µm diameter spots on a membrane, glass, or
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
chip by metallic pins. For detection, fluorescently-labelled single strand cDNA from cells hybridize to the molecules on the microarray and a differential comparison between a treated sample (labelled red, for example) and an untreated sample (labelled in another color such as green) is used for analysis. Red dots mean that the corresponding gene was expressed at a higher level in the treated sample. Conversely, green dots mean that the corresponding gene was expressed at a higher level in the untreated sample. Yellow dots, as a result of the overlap between red and green dots, mean that the corresponding gene was expressed at relatively the same level in both samples, whereas dark spots indicate no or negligible expression in either sample.


Peptide and protein microarrays

The motivation for using peptide microarray, peptide and protein microarrays is firstly because mRNA transcripts often correlate poorly with the actual amount of protein synthesized. Secondly, DNA microarrays cannot identify post-translational modification of proteins, which directly influences protein function. Thirdly, some bodily fluids such as urine lack mRNA. A protein microarray consists of a protein library immobilized on a substrate chip, usually glass, silicon, polystyrene, PVDF, or nitrocellulose. In general, there are three types of protein microarrays: functional, analytical or capture, and reverse-phase protein arrays. * Functional protein arrays display folded and active proteins and are used for screening molecular interactions, studying protein pathways, identifying targets for post-translational modification, and analyzing enzyme, enzymatic activities. * Analytical or capture protein arrays display antigens and antibody, antibodies to profile protein or antibody expression in serum. These arrays can be used for biomarker discovery, monitoring of protein quantities, monitoring activity states in signalling pathways, and profiling antibody repertories in diseases. * Reverse-phase protein arrays test replicates of cell lysates and serum (blood), serum samples with different antibodies to study the changes in expression of specific proteins and protein modifications during disease progression, as well as biomarker discovery. Protein microarrays have stringent production, storage, and experimental conditions due to the low stability and necessity of considering the native folding on the immobilized proteins. Peptides, on the other hand, are more chemically resistant and can retain partial aspects of protein function. As such, peptide microarrays have been used to complement protein microarrays in proteomics research and diagnostics. Protein microarrays usually use ''Escherichia coli'' to produce proteins of interest; whereas peptide microarrays use the SPOT technique (stepwise synthesis of peptides on cellulose) or photolithography to make peptides.


PCR chips

The polymerase chain reaction, polymerase chain reaction (PCR) is a fundamental molecular biology technique that enables the selective Amplification (molecular biology)#Gene duplication as amplification, amplification of DNA sequences, which is useful for expanded use of rare samples e.g.: stem cells, biopsies, circulating tumor cells. The reaction involves thermal cycler, thermal cycling of the DNA sequence and DNA polymerase through three different temperatures. Heating up and cooling down in conventional PCR devices are time-consuming and typical PCR reactions can take hours to complete. Other drawbacks of conventional PCR is the high consumption of expensive reagents, preference for amplifying short fragments, and the production of short chimeric molecules. PCR chips serve to miniaturize the reaction environment to achieve rapid heat transfer and fast mixing due to the larger surface-to-volume ratio and short diffusion distances. The advantages of PCR chips include shorter thermal-cycling time, more uniform temperature which enhances yield, and portability for point-of-care applications. Two challenges in microfluidic PCR chips are PCR inhibition and contamination due to the large surface-to-volume ratio increasing surface-reagent interactions. For example, silicon substrates have good thermal conductivity for rapid heating and cooling, but can poison the polymerase reaction. Silicon substrates are also opaque, prohibiting optical detection for qPCR, and electrically conductive, preventing electrophoretic transport through the channels. Meanwhile, glass is an ideal material for electrophoresis but also inhibits the reaction. Polymers, particularly
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, are optically transparent, not inhibitory, and can be used to coat an electrophoretic glass channel. Various other surface treatments also exist, including polyethylene glycol, bovine serum albumin, and silicon dioxide. There are stationary (chamber-based), dynamic (continuous flow-based), and microdroplet (Digital polymerase chain reaction, digital PCR) chip architectures. * Chamber-based architecture is the result of shrinking down of conventional PCR reactors, which is difficult to scale up. A four-layer glass-polydimethylsiloxane, PDMS device has been developed using this architecture integrating microvalves, microheaters, temperature sensors, 380-nL reaction chambers, and capillary electrophoresis channels for Reverse transcription polymerase chain reaction, reverse transcription polymerase chain reaction (RT-PCR) that has attomolar detection sensitivity. * Continuous flow-based architecture moves the sample through different temperature zones to achieve thermal cycler, thermal cycling. This approach uses less energy and has high throughput, but has large reagent consumption and gas bubbles can form inside the flow channels. * Digital PCR eliminates sample/reagent surface adsorption and contamination by carrying out PCR in microdroplets or microchambers. PCR in droplets also prevents recombination of homologous gene fragments so synthesis of short chimeric products is eliminated.


Point-of-care-diagnostic devices

The ability to perform medical diagnosis at the bedside or at the point-of-care is important in health care, especially in developing countries where access to centralized hospitals is limited and prohibitively expensive. To this end, point-of-care diagnostic bio-MEMS have been developed to take saliva, blood, or urine samples and in an integrated approach perform sample preconditioning, sample fractionation, signal amplification, analyte detection, data analysis, and result display. In particular, blood is a very common biological sample because it cycles through the body every few minutes and its contents can indicate many aspects of health.


Sample conditioning

In blood analysis, Leukocyte, white blood cells, platelets, bacteria, and blood plasma, plasma must be separated. Sieves, weirs, inertial confinement, and flow diversion devices are some approaches used in preparing blood plasma for cell-free analysis. Sieves can be microfabricated with high-aspect-ratio columns or posts, but are only suitable for low loading to avoid clogging with cells. Weirs are shallow mesa-like sections used to restrict flow to narrow slots between layers without posts. One advantage of using weirs is that the absence of posts allows more effective recycling of retenate for flow across the filter to wash off clogged cells. Magnetic beads are used to aid in analyte separation. These microscopic beads are functionalized with target molecules and moved through microfluidic channels using a varying magnetic field. This serves as a quick method of harvesting targets for analysis. After this process is complete, a strong, stationary magnetic field is applied to immobilize the target-bound beads and wash away unbound beads. The H-filter is a microfluidic device with two inlets and two outlets that takes advantage of
laminar flow In fluid dynamics, laminar flow is characterized by fluid particles following smooth paths in layers, with each layer moving smoothly past the adjacent layers with little or no mixing. At low velocities, the fluid tends to flow without lateral mi ...
and diffusion to separate components that diffuse across the interface between two inlet streams. By controlling the flow rate, diffusion distance, and residence time of the fluid in the filter, cells are excluded from the filtrate by virtue of their slower diffusion rate. The H-filter does not clog and can run indefinitely, but analytes are diluted by a factor of two. For cell analysis, cells can be studied intact or after cell lysis, lysis. A lytic buffer stream can be introduced alongside a stream containing cells and by diffusion induces lysis prior to further analysis. Cell analysis is typically done by flow cytometry and can be implemented into
microfluidics Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
with lower fluid velocities and lower throughput than their conventional macroscopic counterparts.


Sample fractionation

Microfluidic sample separation can be achieved by capillary electrophoresis or continuous-flow separation. In capillary electrophoresis, a long thin tube separates analytes by voltage as they migrate by electroosmosis, electro-osmotic flow. For continuous-flow separation, the general idea is to apply a field at an angle to the flow direction to deflect the sample flow path toward different channels. Examples of continuous-flow separation techniques include continuous-flow electrophoresis, isoelectric focusing, continuous-flow magnetic separations, and molecular sieve, molecular sieving.


Outstanding Challenges

*Most diagnostic devices on the market can only test for one disease. Moreover, most devices are binary output (yes/no) without nuanced information on the patient's condition. Thus, in addition to developing tests for more diseases, scientists are currently working to expand the complexity of these devices, in order to increase their utility. *It is difficult to manufacture MEMS diagnostic devices outside of the laboratory setting. Much of the research on these devices takes place in climate controlled laboratories, where the devices can be tested shortly after they are produced. However, as many of these devices are used to screen for tropical diseases, they must be robust enough to survive in hot, humid conditions. They must also be stored for long periods from the time of production to the time of use. *Funding is scarce for tropical disease research. In addition, there are many regulatory hurdles that must be cleared before a medical device is approved, which can cost tens of millions of dollars. Thus, companies focusing on tropical diseases must often combine their research objectives for tropical disease with research on other, more well-funded areas of medical research.


Bio-MEMS in tissue engineering


Cell culture

Conventional cell culture technology is unable to efficiently allow combinatorial testing of drug candidates, growth factors, neuropeptides, genes, and retroviruses in cell culture medium. Due to the need for cells to be fed periodically with fresh medium and passaged, even testing a few conditions requires a large number of cells and supplies, expensive and bulky Incubator (culture), incubators, large fluid volumes (~0.1 – 2 mL per sample), and tedious human labour. The requirement of human labour also limits the number and length between time points for experiments. Microfluidic cell cultures are potentially a vast improvement because they can be automated, as well as yield lower overall cost, higher throughput, and more quantitative descriptions of single-cell behaviour variability. By including gas exchange and temperature control systems on chip, microfluidic cell culturing can eliminate the need for incubators and Biosafety cabinet, tissue culture hoods. However, this type of continuous microfluidic cell culture operation presents its own unique challenges as well. Flow control is important when seeding cells into microchannels because flow needs to be stopped after the initial injection of cell suspension for cells to attach or become trapped in microwells, dielectrophoretic traps, micromagnetic traps, or Hydrodynamic trapping, hydrodynamic traps. Subsequently, flow needs to be resumed in a way that does not produce large forces that shear stress, shear the cells off the substrate. Dispensing fluids by Pipette, manual or Automated pipetting system, robotic pipetting can be replaced with micropumps and microvalves, where fluid metering is straightforward to determine as opposed to continuous flow systems by micromixers. A fully automated microfluidic cell culture system has been developed to study osteogenic differentiation of human embryonic stem cells. A handheld microfluidic cell culture incubator capable of heating and pumping cell culture solutions has also been developed. Due to the volume reduction in
microfluidic Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
cultures, the collected concentrations are higher for better signal-to-noise ratio measurements, but collection and detection is correspondingly more difficult. MEMS for In-situ Mechanical Characterization, ’’In situ’’ microscopy assays with microfluidic cell cultures may help in this regard, but have inherently lower throughput due to the microscope probe having only a small field of view. The Berkeley Lights Beacon platform has resolved the issue of collection and detection by performing
microfluidic Microfluidics refers to the behavior, precise control, and manipulation of fluids that are geometrically constrained to a small scale (typically sub-millimeter) at which surface forces dominate volumetric forces. It is a multidisciplinary field tha ...
culture on an array of Photoconductivity, photoconductors which can be Optoelectronics, optoelectrically activated to manipulate cells across the chip. This platform has been adopted by Amgen and
Novartis Novartis AG is a Swiss-American multinational pharmaceutical corporation based in Basel, Switzerland and Cambridge, Massachusetts, United States (global research).name="novartis.com">https://www.novartis.com/research-development/research-loc ...
for cell line development in the biopharmaceutical industry. Micropatterning, Micropatterned co-cultures have also contributed to bio-MEMS for
tissue engineering Tissue engineering is a biomedical engineering discipline that uses a combination of Cell (biology), cells, engineering, Materials science, materials methods, and suitable biochemistry, biochemical and physicochemical factors to restore, maintai ...
to recapitulate ''
in vivo Studies that are ''in vivo'' (Latin for "within the living"; often not italicized in English) are those in which the effects of various biological entities are tested on whole, living organisms or cells, usually animals, including humans, and ...
'' conditions and 3D natural structure. Specifically, hepatocytes have been patterned to co-culture at specific cell densities with fibroblasts to maintain liver-specific functions such as albumin secretion, urea synthesis, and Cytochrome P450, p450 detoxification. Similarly, integrating microfluidics with micropatterning, micropatterned co-cultures has enabled modelling of Organ (anatomy), organs where multiple vascularized tissues interface, such as the blood–brain barrier and the lungs. Organ-level lung functions have been reconstituted on Organ-on-a-chip, lung-on-a-chip devices where a porous membrane and the seeded epithelial cell layer are cyclically stretched by applied vacuum on adjacent microchannels to mimic inhalation.


Stem-cell engineering

The goal of stem cell engineering is to be able to control the differentiation and Stem cell#Self-renewal, self-renewal of pluripotency stem cells for cell therapy. Differentiation in stem cells is dependent on many factors, including soluble and biochemical factors, fluid shear stress, cell-Extracellular matrix, ECM interactions, cell-cell interactions, as well as embryoid body formation and organization. Bio-MEMS have been used to research how to optimize the culture and growth conditions of stem cells by controlling these factors. Assaying stem cells and their differentiated progeny is done with microarrays for studying how transcription factors and MicroRNA, miRNAs determine cell fate, how epigenetics, epigenetic modifications between stem cells and their daughter cells affect phenotypes, as well as measuring and sorting stem cells by their protein expression.


Biochemical factors

Microfluidics can leverage its microscopic volume and laminar flow characteristics for spatiotemporal control of biochemical factors delivered to stem cells. Microfluidic gradient generators have been used to study Dose–response relationship, dose-response relationships. Oxygen is an important biochemical factor to consider in differentiation via Hypoxia-inducible factors, hypoxia-induced transcription factors (HIFs) and related signaling pathways, most notably in the development of blood, Angiogenesis, vasculature, placental, and bone tissues. Conventional methods of studying oxygen effects relied on setting the entire incubator at a particular oxygen concentration, which limited analysis to pair-wise comparisons between normoxic and hypoxic conditions instead of the desired concentration-dependent characterization. Developed solutions include the use of continuous axial oxygen gradients and arrays of microfluidic cell culture chambers separated by thin
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membranes to gas-filled microchannels.


Fluid shear stress

Fluid shear stress is relevant in the stem cell differentiation of cardiovascular lineages as well as late embryogenesis and organogenesis such as left-right asymmetry during development. Macro-scale studies do not allow quantitative analysis of shear stress to differentiation because they are performed using Parallel-Plate Flow Chamber, parallel-plate flow chambers or rotating cone apparatuses in on-off scenarios only. Poiseuille flow in microfluidics allows shear stresses to be varied systematically using channel geometry and flow rate via micropumps, as demonstrated by using arrays of perfusion chambers for mesenchymal stem cells and fibroblast cell adhesion studies.


Cell–ECM interactions

Cell-extracellular matrix, ECM interactions induce changes in differentiation and self-renewal by the stiffness of the substrate via mechanotransduction, and different integrins interacting with ECM molecules. Micropatterning of extracellular matrix, ECM proteins by Micro-contact printing, micro-contact printing (μCP), inkjet printing, and mask spraying have been used in stem cell-extracellular matrix, ECM interaction studies. It has been found by using micro-contact printing to control cell attachment area that that switch in osteogenic / adipogenic lineage in human mesenchymal stem cells can be cell shape dependent. Microfabrication of microposts and measurement of their Deflection (engineering), deflection can determine traction forces exerted on cells.
Photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
can also be used to cross-link cell-seeded photo-polymerizable extracellular matrix, ECM for three-dimensional studies. Using extracellular matrix, ECM
microarray A microarray is a multiplex lab-on-a-chip. Its purpose is to simultaneously detect the expression of thousands of genes from a sample (e.g. from a tissue). It is a two-dimensional array on a solid substrate—usually a glass slide or silicon t ...
s to optimize combinatorial effects of collagen, laminin, and fibronectin on stem cells is more advantageous than conventional Microtiter plate, well plates due to its High-throughput screening, higher throughput and lower requirement of expensive reagents.


Cell–cell interactions

Cell fate determination, Cell fate is regulated by both interactions between stem cells and interactions between stem cells and membrane proteins. Manipulating cell seeding density is a common biological technique in controlling cell–cell interactions, but controlling local density is difficult and it is often difficult to decouple effects between soluble signals in the medium and physical cell–cell interactions. Micropatterning of cell adhesion proteins can be used in defining the spatial positions of different cells on a substrate to study human ESC proliferation. Seeding stem cells into polydimethylsiloxane, PDMS microwells and flipping them onto a substrate or another cell layer is a method of achieving precise spatial control. Gap junction communications has also been studied using microfluidics whereby negative pressure generated by fluid flow in side channels flanking a central channel traps pairs of cells that are in direct contact or separated by a small gap. However, in general, the non-zero motility and short cell cycle time of stem cells often disrupt the spatial organization imposed by these microtechnologies.


Embryoid body formation and organization

Embryoid body, Embryoid bodies are a common ''in vitro'' pluripotency test for stem cells and their size needs to be controlled to induce directed differentiation to specific lineages. High throughput formation of uniform sized embryoid bodies with microwells and microfluidics allows easy retrieval and more importantly, scale up for clinical contexts. Actively controlling embryoid body cell organization and architecture can also direct stem cell differentiation using microfluidic gradients of endoderm-, mesoderm- and ectoderm-inducing factors, as well as self-renewal factors.


Assisted reproductive technologies

Assisted reproductive technology, Assisted reproductive technologies help to treat infertility and genetic engineering, genetically improve livestock. However, the efficiency of these technologies in cryopreservation and the ''in vitro'' production of mammalian embryos is low. Microfluidics have been applied in these technologies to better mimic the ''in vivo'' microenvironment with patterned topographic and biochemical surfaces for controlled spatiotemporal cell adhesion, as well as minimization of dead volumes. Micropumps and microvalves can automate tedious fluid-dispensing procedures and various sensors can be integrated for real-time quality control. Bio-MEMS devices have been developed to evaluate sperm motility, perform sperm selection, as well as prevent polyspermy in in-vitro fertilization.


Bio-MEMS in medical implants and surgery


Implantable microelectrodes

The goal of implantable microelectrodes is to interface with the body's nervous system for recording and sending Bioelectromagnetism, bioelectrical signals to study disease, improve prosthesis, prostheses, and Monitoring (medicine), monitor clinical parameters. Microfabrication has led to the development of Michigan probes and the Utah array, Utah electrode array, which have increased electrodes per unit volume, while addressing problems of thick substrate (biology), substrates causing damage during implantation and triggering immune system, foreign-body reaction and electrode foreign-body giant cell, encapsulation via silicon and metals in the electrodes. Michigan probes have been used in large-scale recordings and network analysis of neuronal assemblies, and the Utah electrode array has been used as a brain–computer interface for the paralyzed. Extracellular microelectrodes have been patterned onto an inflatable helix-shaped plastic in cochlear implants to improve deeper insertion and better electrode-tissue contact for transduction of high-fidelity sounds. Integrating microelectronics onto thin, flexible substrates has led to the development of a cardiac patch that adheres to the curvilinear surface of the heart by surface tension alone for measuring cardiac electrophysiology, and electronic tattoos for measuring skin thermoregulation, temperature and bioelectromagnetism, bioelectricity. Wireless recording of electrophysiological signals is possible through addition of a Piezoelectricity, piezocrystal to a circuit of two recording electrodes and a single transistor on an implanted micro-device. An external transducer emits pulses of Ultrasound, ultrasonic energy} which impinge on the piezocrystal, and extracellular voltage changes are backscattered ultrasonically by the piezocrystal, allowing for measurement. A network of so-called "neural dust" motes can map signals throughout a region of the body where the micro-sensors are implanted.


Microtools for surgery

Bio-MEMS for surgery, surgical applications can improve existing functionality, add new capabilities for surgeons to develop new techniques and procedures, and improve surgical outcomes by lowering risk and providing real-time feedback during the operation. Micromachined surgical tools such as tiny forceps, microneedle arrays and tissue Debridement, debriders have been made possible by metal and ceramic materials, ceramic layer-by-layer microfabrication techniques for Invasiveness of surgical procedures, minimally invasive surgery and robotic surgery. Incorporation of sensors onto surgical tools also allows tactile feedback for the surgeon, identification of tissue (biology), tissue type via strain and density during cutting operations, and diagnostic catheterization to measure circulatory system, blood flows, pressures, thermoregulation, temperatures, oxygen content, and chemical concentrations.


Drug delivery

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. Microneedles of approximately 100μm can penetrate the skin barrier and deliver drugs to the underlying cells and interstitial fluid with reduced tissue damage, reduced pain, and no bleeding. Microneedles can also be integrated with microfluidics for automated drug loading or multiplexing. From the user standpoint, microneedles can be incorporated into a patch format for self-administration, and do not constitute a sharp waste Biological hazard, biohazard (if the material is
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ic). Drug delivery by microneedles include coating the surface with therapeutic agents, loading drugs into porous or hollow microneedles, or fabricating the microneedles with drug and coating matrix for maximum drug loading. Microneedles for interstitial fluid extraction, blood extraction, and gene delivery are also being developed. The efficiency of microneedle drug delivery remains a challenge because it is difficult to ascertain if the microneedles effectively penetrated the skin. Some drugs, such as diazepam, are poorly soluble and need to be aerosolized immediately prior to Insufflation (medicine), intranasal administration. Bio-MEMS technology using piezoelectricity, piezoelectric transducers to liquid reservoirs can be used in these circumstances to generate narrow size distribution of aerosols for better drug delivery. Implantable drug delivery systems have also been developed to administer therapeutic agents that have poor bioavailability or require localized release and exposure at a target site. Examples include a
PDMS PDMS may refer to: * Palm Desert Middle School, a middle school in Palm Desert, California * Plant Design Management System * Plasma desorption mass spectrometry * Point-Defence Missile System * Polydimethylsiloxane, a silicon-based organic polymer ...
microfluidic device implanted under the conjunctiva for drug delivery to the eye to treat Eye disease, ocular diseases and microchips with gold-capped drug reservoirs for osteoporosis. In implantable bio-MEMS for drug delivery, it is important to consider device rupture and dose dumping, Foreign-body giant cell, fibrous encapsulation of the device, and device explantation. Most drugs also need to be delivered in relatively large quantities (milliliters or even greater), which makes implantable bio-MEMS drug delivery challenging due to their limited drug-holding capacity.


References

{{Microtechnology Microtechnology Microfluidics Microelectronic and microelectromechanical systems Biomedical engineering