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Proximity Effect (electron Beam Lithography)
The proximity effect in electron beam lithography (EBL) is the phenomenon that the exposure dose distribution, and hence the developed pattern, is wider than the scanned pattern due to the interactions of the primary beam electrons with the resist and substrate. These cause the resist outside the scanned pattern to receive a non-zero dose. Important contributions to weak-resist polymer chain scission (for positive resists) or crosslinking (for negative resists) come from electron forward scattering and backscattering. The forward scattering process is due to electron-electron interactions which deflect the primary electrons by a typically small angle, thus statistically broadening the beam in the resist (and further in the substrate). The majority of the electrons do not stop in the resist but penetrate the substrate. These electrons can still contribute to resist exposure by scattering back into the resist and causing subsequent inelastic or exposing processes. This backscattering ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Electron Beam Lithography
Electron-beam lithography (often abbreviated as e-beam lithography, EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). The electron beam changes the solubility of the resist, enabling selective removal of either the exposed or non-exposed regions of the resist by immersing it in a solvent (developing). The purpose, as with photolithography, is to create very small structures in the resist that can subsequently be transferred to the substrate material, often by etching. The primary advantage of electron-beam lithography is that it can draw custom patterns (direct-write) with sub-10 nm resolution. This form of maskless lithography has high resolution and low throughput, limiting its usage to photomask fabrication, low-volume production of semiconductor devices, and research and development. Systems Electron-beam lithography systems used in commercial applications ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Electrons
The electron ( or ) is a subatomic particle with a negative one elementary electric charge. Electrons belong to the first generation of the lepton particle family, and are generally thought to be elementary particles because they have no known components or substructure. The electron's mass is approximately 1/1836 that of the proton. Quantum mechanical properties of the electron include an intrinsic angular momentum ( spin) of a half-integer value, expressed in units of the reduced Planck constant, . Being fermions, no two electrons can occupy the same quantum state, in accordance with the Pauli exclusion principle. Like all elementary particles, electrons exhibit properties of both particles and waves: They can collide with other particles and can be diffracted like light. The wave properties of electrons are easier to observe with experiments than those of other particles like neutrons and protons because electrons have a lower mass and hence a longer de Broglie wav ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Resist
A resist, used in many areas of manufacturing and art, is something that is added to parts of an object to create a pattern by protecting these parts from being affected by a subsequent stage in the process. Often the resist is then removed. For example in the resist dyeing of textiles, wax or a similar substance is added to places where the dye is not wanted. The wax will "resist" the dye, and after it is removed there will be a pattern in two colours. Batik, ''shibori'' and tie-dye are among many styles of resist dyeing. Wax or grease can also be used as a resist in pottery, to keep some areas free from a ceramic glaze; the wax burns away when the piece is fired. Song dynasty Jizhou ware used paper cut-outs and leaves as resists or stencils under glaze to create patterns. Other uses of resists in pottery work with slip or paints, and a whole range of modern materials used as resists. A range of similar techniques can be used in watercolour and other forms of painting. Whi ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Substrate (materials Science)
Substrate is a term used in materials science and engineering to describe the base material on which processing is conducted. This surface could be used to produce new film or layers of material such as deposited coatings. It could be the base to which paint, adhesives, or adhesive tape is bonded. A typical substrate might be rigid such as metal, concrete, or glass, onto which a coating might be deposited. Flexible substrates are also used. With all coating processes, the condition of the surface of the substrate can strongly affect the bond of subsequent layers. This can include cleanliness, smoothness, surface energy, moisture, etc. Some substrates are anisotropic with surface properties being different depending on the direction: examples include wood and paper products. Coatings Coating can be by a variety of processes: * Adhesives and Adhesive tapes * Coating and printing processes * Chemical vapor deposition and physical vapor deposition * Conversion coating :* A ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Nanometer
330px, Different lengths as in respect to the molecular scale. The nanometre (international spelling as used by the International Bureau of Weights and Measures; SI symbol: nm) or nanometer (American and British English spelling differences#-re, -er, American spelling) is a units of measurement, unit of length in the International System of Units (SI), equal to one billionth (short scale) of a metre () and to 1000 picometres. One nanometre can be expressed in scientific notation as , and as metres. History The nanometre was formerly known as the millimicrometre – or, more commonly, the millimicron for short – since it is of a micron (micrometre), and was often denoted by the symbol mμ or (more rarely and confusingly, since it logically should refer to a ''millionth'' of a micron) as μμ. Etymology The name combines the SI prefix ''nano-'' (from the Ancient Greek , ', "dwarf") with the parent unit name ''metre'' (from Greek , ', "unit of measurement"). ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Impact Ionization
Impact ionization is the process in a material by which one energetic charge carrier can lose energy by the creation of other charge carriers. For example, in semiconductors, an electron (or Electron hole, hole) with enough kinetic energy can knock a bound electron out of its bound state (in the valence band) and promote it to a state in the conduction band, creating an electron-hole pair. For carriers to have sufficient kinetic energy a sufficiently large electric field must be applied, in essence requiring a sufficiently large voltage but not necessarily a large current. If this occurs in a region of high electrical field then it can result in avalanche breakdown. This process is exploited in avalanche diodes, by which a small optical signal is amplifier, amplified before entering an external electronic circuit. In an avalanche photodiode the original charge carrier is created by the absorption of a photon. The impact ionization process is used in modern cosmic dust detectors ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Secondary Electrons
Secondary electrons are electrons generated as ionization products. They are called 'secondary' because they are generated by other radiation (the ''primary'' radiation). This radiation can be in the form of ions, electrons, or photons with sufficiently high energy, i.e. exceeding the ionization potential. Photoelectrons can be considered an example of secondary electrons where the primary radiation are photons; in some discussions photoelectrons with higher energy (>50 eV) are still considered "primary" while the electrons freed by the photoelectrons are "secondary". Applications Secondary electrons are also the main means of viewing images in the scanning electron microscope (SEM). The range of secondary electrons depends on the energy. Plotting the inelastic mean free path as a function of energy often shows characteristics of the "universal curve" familiar to electron spectroscopists and surface analysts. This distance is on the order of a few nanometers in metals and t ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Auger Electrons
The Auger effect or Auger−Meitner effect is a physical phenomenon in which the filling of an inner-shell vacancy of an atom is accompanied by the emission of an electron from the same atom. When a core electron is removed, leaving a vacancy, an electron from a higher energy level may fall into the vacancy, resulting in a release of energy. Although most often this energy is released in the form of an emitted photon, the energy can also be transferred to another electron, which is ejected from the atom; this second ejected electron is called an Auger electron. Effect The effect was first discovered by Lise Meitner in 1922; Pierre Victor Auger independently discovered the effect shortly after and is credited with the discovery in most of the scientific community. Upon ejection, the kinetic energy of the Auger electron corresponds to the difference between the energy of the initial electronic transition into the vacancy and the ionization energy for the electron shell from which t ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
X-rays
An X-ray, or, much less commonly, X-radiation, is a penetrating form of high-energy electromagnetic radiation. Most X-rays have a wavelength ranging from 10 Picometre, picometers to 10 Nanometre, nanometers, corresponding to frequency, frequencies in the range 30 Hertz, petahertz to 30 Hertz, exahertz ( to ) and energies in the range 145 electronvolt, eV to 124 keV. X-ray wavelengths are shorter than those of ultraviolet, UV rays and typically longer than those of gamma rays. In many languages, X-radiation is referred to as Röntgen radiation, after the German scientist Wilhelm Röntgen, Wilhelm Conrad Röntgen, who discovered it on November 8, 1895. He named it ''X-radiation'' to signify an unknown type of radiation.Novelline, Robert (1997). ''Squire's Fundamentals of Radiology''. Harvard University Press. 5th edition. . Spellings of ''X-ray(s)'' in English include the variants ''x-ray(s)'', ''xray(s)'', and ''X ray(s)''. The most familiar use of X-ra ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Electron Beam
Cathode rays or electron beam (e-beam) are streams of electrons observed in discharge tubes. If an evacuated glass tube is equipped with two electrodes and a voltage is applied, glass behind the positive electrode is observed to glow, due to electrons emitted from the cathode (the electrode connected to the negative terminal of the voltage supply). They were first observed in 1859 by German physicist Julius Plücker and Johann Wilhelm Hittorf, and were named in 1876 by Eugen Goldstein ''Kathodenstrahlen'', or cathode rays. In 1897, British physicist J. J. Thomson showed that cathode rays were composed of a previously unknown negatively charged particle, which was later named the ''electron''. Cathode-ray tubes (CRTs) use a focused beam of electrons deflected by electric or magnetic fields to render an image on a screen. Description Cathode rays are so named because they are emitted by the negative electrode, or cathode, in a vacuum tube. To release electrons into the tube, th ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
