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Thin-film Thickness Monitor
Thin-film thickness monitors, deposition rate controllers, and so on, are a family of instruments used in high and ultra-high vacuum systems. They can measure the thickness of a thin film, not only after it has been made, but while it is still being deposited, and some can control either the final thickness of the film, the rate at which it is deposited, or both. Not surprisingly, the devices which control some aspect of the process tend to be called controllers, and those that simply monitor the process tend to be called monitors. Most such instruments use a quartz crystal microbalance as the sensor. Optical measurements are sometimes used; this may be especially appropriate if the film being deposited is part of a thin film optical device. A thickness monitor measures how much material deposited on its sensor. Most deposition processes are at least somewhat directional. The sensor and the sample generally cannot be in the same direction from the deposition source (if they ...
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Ultra-high Vacuum
Ultra-high vacuum (UHV) is the vacuum regime characterised by pressures lower than about . UHV conditions are created by pumping the gas out of a UHV chamber. At these low pressures the mean free path of a gas molecule is greater than approximately 40 km, so the gas is in free molecular flow, and gas molecules will collide with the chamber walls many times before colliding with each other. Almost all molecular interactions therefore take place on various surfaces in the chamber. UHV conditions are integral to scientific research. Surface science experiments often require a chemically clean sample surface with the absence of any unwanted adsorbates. Surface analysis tools such as X-ray photoelectron spectroscopy and low energy ion scattering require UHV conditions for the transmission of electron or ion beams. For the same reason, beam pipes in particle accelerators such as the Large Hadron Collider are kept at UHV. Overview Maintaining UHV conditions requires the use of ...
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Vacuum
A vacuum is a space devoid of matter. The word is derived from the Latin adjective ''vacuus'' for "vacant" or "void". An approximation to such vacuum is a region with a gaseous pressure much less than atmospheric pressure. Physicists often discuss ideal test results that would occur in a ''perfect'' vacuum, which they sometimes simply call "vacuum" or free space, and use the term partial vacuum to refer to an actual imperfect vacuum as one might have in a laboratory or in space. In engineering and applied physics on the other hand, vacuum refers to any space in which the pressure is considerably lower than atmospheric pressure. The Latin term ''in vacuo'' is used to describe an object that is surrounded by a vacuum. The ''quality'' of a partial vacuum refers to how closely it approaches a perfect vacuum. Other things equal, lower gas pressure means higher-quality vacuum. For example, a typical vacuum cleaner produces enough suction to reduce air pressure by around 20%. But hig ...
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Thin Film
A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering. Advances in thin film deposition techniques during the 20th century have enabled a wide range of technological breakthroughs in areas such as magnetic recording media, electronic semiconductor devices, integrated passive devices, LEDs, optical coatings (such as antireflective coatings), hard coatings on cutting tools, and for both energy generation (e.g. thin-film solar cells) and storage ( thin-film batteries). It is also being ...
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Thin-film Deposition
A thin film is a layer of material ranging from fractions of a nanometer ( monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering. Advances in thin film deposition techniques during the 20th century have enabled a wide range of technological breakthroughs in areas such as magnetic recording media, electronic semiconductor devices, integrated passive devices, LEDs, optical coatings (such as antireflective coatings), hard coatings on cutting tools, and for both energy generation (e.g. thin-film solar cells) and storage ( thin-film batteries). It is also bei ...
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Quartz Crystal Microbalance
A quartz crystal microbalance (QCM) (also known as ''quartz microbalance'' (QMB), sometimes also as ''quartz crystal nanobalance'' (QCN)) measures a mass variation per unit area by measuring the change in frequency of a quartz crystal resonator. The resonance is disturbed by the addition or removal of a small mass due to oxide growth/decay or film deposition at the surface of the acoustic resonator. The QCM can be used under vacuum, in gas phase ("gas sensor", first use described by King) and more recently in liquid environments. It is useful for monitoring the rate of deposition in thin film deposition systems under vacuum. In liquid, it is highly effective at determining the affinity of molecules (proteins, in particular) to surfaces functionalized with recognition sites. Larger entities such as viruses or polymers are investigated as well. QCM has also been used to investigate interactions between biomolecules. Frequency measurements are easily made to high precision (discussed b ...
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Thin-film Optics
Thin-film optics is the branch of optics that deals with very thin structured layers of different materials. In order to exhibit thin-film optics, the thickness of the layers of material must be similar to the coherence length; for visible light it is most often observed between 200 and 1000 nm of thickness. Layers at this scale can have remarkable reflective properties due to light wave interference and the difference in refractive index between the layers, the air, and the substrate. These effects alter the way the optic reflects and transmits light. This effect, known as thin-film interference, is observable in soap bubbles and oil slicks. More general periodic structures, not limited to planar layers, exhibit structural coloration with more complex dependence on angle, and are known as photonic crystals. In manufacturing, thin film layers can be achieved through the deposition of one or more thin layers of material onto a substrate (usually glass). This is most oft ...
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Fizeau Interferometer
A Fizeau interferometerLawson, Peter R. "Principles of Long Baseline Stellar Interferometry." Course notes from the 1999 Michelson Summer School, held August 15–19, 1999. Edited by Peter R. Lawson. Published by National Aeronautics and Space Administration, Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, 2000. is an interferometric arrangement whereby two reflecting surfaces are placed facing each other. As seen in Fig 1, the rear-surface reflected light from the transparent first reflector is combined with front-surface reflected light from the second reflector to form interference fringes. The term Fizeau interferometer also refers to an interferometric arrangement used by Hippolyte Fizeau in a famous 1851 experiment that seemingly supported the partial ether-drag hypothesis of Augustin Jean Fresnel, but which ultimately played an instrumental role in bringing about a crisis in physics that led to Einstein's development of the theory of special ...
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Profilometer
A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Critical dimensions as step, curvature, flatness are computed from the surface topography. While the historical notion of a profilometer was a device similar to a phonograph that measures a surface as the surface is moved relative to the contact profilometer's stylus, this notion is changing with the emergence of numerous non-contact profilometry techniques. Non-scanning technologies are able to measure the surface topography within a single camera acquisition, XYZ scanning is no longer needed. As a consequence, dynamic changes of topography are measured in real-time. Contemporary profilometers are not only measuring static topography, but now also dynamic topography – such systems are described as time-resolved profilometers. Types Optical methodsJean M. Bennett, Lars Mattsson, Introduction to Surface Roughness and Scattering, Optical Society of America, Was ...
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Ellipsometry
Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry measures the change of Polarization (waves), polarization upon reflection or transmission and compares it to a model. It can be used to characterize Materials science, composition, Surface roughness, roughness, thickness (depth), Crystalline, crystalline nature, Doping (semiconductor), doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated. A spectroscopic ellipsometer can be found in most thin film analytical labs. Ellipsometry is also becoming more interesting to researchers in other disciplines such as biology and medicine. These areas pose new challenges to the technique, such as measurements on unstable liquid surfaces and microscopic imaging. Etymology The name "el ...
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Dual Polarisation Interferometry
Dual-polarization interferometry (DPI) is an analytical technique that probes molecular layers adsorbed to the surface of a waveguide using the evanescent wave of a laser beam. It is used to measure the conformational change in proteins, or other biomolecules, as they function (referred to as the conformation activity relationship). Instrumentation DPI focuses laser light into two waveguides. One of these functions as the "sensing" waveguide having an exposed surface while the second one functions to maintain a reference beam. A two-dimensional interference pattern is formed in the far field by combining the light passing through the two waveguides. The DPI technique rotates the polarization of the laser, to alternately excite two polarization modes of the waveguides. Measurement of the interferogram for both polarizations allows both the refractive index and the thickness of the adsorbed layer to be calculated. The polarization can be switched rapidly, allowing real-time measur ...
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Electron Microscope
An electron microscope is a microscope that uses a beam of accelerated electrons as a source of illumination. As the wavelength of an electron can be up to 100,000 times shorter than that of visible light photons, electron microscopes have a higher resolving power than light microscopes and can reveal the structure of smaller objects. A scanning transmission electron microscope has achieved better than 50  pm resolution in annular dark-field imaging mode and magnifications of up to about 10,000,000× whereas most light microscopes are limited by diffraction to about 200  nm resolution and useful magnifications below 2000×. Electron microscopes use shaped magnetic fields to form electron optical lens systems that are analogous to the glass lenses of an optical light microscope. Electron microscopes are used to investigate the ultrastructure of a wide range of biological and inorganic specimens including microorganisms, cells, large molecules, biopsy samples, ...
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Academic Press
Academic Press (AP) is an academic book publisher founded in 1941. It was acquired by Harcourt, Brace & World in 1969. Reed Elsevier bought Harcourt in 2000, and Academic Press is now an imprint of Elsevier. Academic Press publishes reference books, serials and online products in the subject areas of: * Communications engineering * Economics * Environmental science * Finance * Food science and nutrition * Geophysics * Life sciences * Mathematics and statistics * Neuroscience * Physical sciences * Psychology Well-known products include the ''Methods in Enzymology'' series and encyclopedias such as ''The International Encyclopedia of Public Health'' and the ''Encyclopedia of Neuroscience''. See also * Akademische Verlagsgesellschaft (AVG) — the German predecessor, founded in 1906 by Leo Jolowicz (1868–1940), the father of Walter Jolowicz Walter may refer to: People * Walter (name), both a surname and a given name * Little Walter, American blues harmonica player Marion Wa ...
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