MEMS Sensor Generations
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MEMS Sensor Generations
MEMS sensor generations represent the progress made in micro sensor technology and can be categorized as follows: ;1st Generation :MEMS sensor element mostly based on a silicon structure, sometimes combined with analog amplification on a micro chip. ;2nd Generation:MEMS sensor element combined with analog amplification and analog-to-digital converter on one micro chip. ;3rd Generation :Fusion of the sensor element with analog amplification, analog-to-digital converter and digital Digital usually refers to something using discrete digits, often binary digits. Technology and computing Hardware *Digital electronics, electronic circuits which operate using digital signals **Digital camera, which captures and stores digital i ... intelligence for linearization and temperature compensation on the same micro chip. ;4th Generation :Memory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation. References {{DEFAULTSORT: ...
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Sensor
A sensor is a device that produces an output signal for the purpose of sensing a physical phenomenon. In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends the information to other electronics, frequently a computer processor. Sensors are always used with other electronics. Sensors are used in everyday objects such as touch-sensitive elevator buttons (tactile sensor) and lamps which dim or brighten by touching the base, and in innumerable applications of which most people are never aware. With advances in micromachinery and easy-to-use microcontroller platforms, the uses of sensors have expanded beyond the traditional fields of temperature, pressure and flow measurement, for example into Attitude and heading reference system, MARG sensors. Analog sensors such as potentiometers and force-sensing resistors are still widely used. Their applications include manufacturing and machinery, airplane ...
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Microelectromechanical Systems
Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, particularly those with moving parts. They merge at the nanoscale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan and microsystem technology (MST) in Europe. MEMS are made up of components between 1 and 100 micrometers in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2. They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as microsensors). Because of the la ...
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Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic table: carbon is above it; and germanium, tin, lead, and flerovium are below it. It is relatively unreactive. Because of its high chemical affinity for oxygen, it was not until 1823 that Jöns Jakob Berzelius was first able to prepare it and characterize it in pure form. Its oxides form a family of anions known as silicates. Its melting and boiling points of 1414 °C and 3265 °C, respectively, are the second highest among all the metalloids and nonmetals, being surpassed only by boron. Silicon is the eighth most common element in the universe by mass, but very rarely occurs as the pure element in the Earth's crust. It is widely distributed in space in cosmic dusts, planetoids, and planets as various forms of silicon dioxide ( ...
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Analog Circuit
Analogue electronics ( en-US, analog electronics) are electronic systems with a continuously variable signal, in contrast to digital electronics where signals usually take only two levels. The term "analogue" describes the proportional relationship between a signal and a voltage or current that represents the signal. The word analogue is derived from the el, word ανάλογος (analogos) meaning "proportional". Analogue signals An analogue signal uses some attribute of the medium to convey the signal's information. For example, an aneroid barometer uses the angular position of a needle as the signal to convey the information of changes in atmospheric pressure. Electrical signals may represent information by changing their voltage, current, frequency, or total charge. Information is converted from some other physical form (such as sound, light, temperature, pressure, position) to an electrical signal by a transducer which converts one type of energy into another (e.g. ...
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Integrated Circuit
An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of tiny MOSFETs (metal–oxide–semiconductor field-effect transistors) integrate into a small chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete electronic components. The IC's mass production capability, reliability, and building-block approach to integrated circuit design has ensured the rapid adoption of standardized ICs in place of designs using discrete transistors. ICs are now used in virtually all electronic equipment and have revolutionized the world of electronics. Computers, mobile phones and other home appliances are now inextricable parts of the structure of modern societies, made possible by the small size and low cost of ICs such as modern computer ...
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Analog-to-digital Converter
In electronics, an analog-to-digital converter (ADC, A/D, or A-to-D) is a system that converts an analog signal, such as a sound picked up by a microphone or light entering a digital camera, into a digital signal. An ADC may also provide an isolated measurement such as an electronic device that converts an analog input voltage or current to a digital number representing the magnitude of the voltage or current. Typically the digital output is a two's complement binary number that is proportional to the input, but there are other possibilities. There are several ADC architectures. Due to the complexity and the need for precisely matched components, all but the most specialized ADCs are implemented as integrated circuits (ICs). These typically take the form of metal–oxide–semiconductor (MOS) mixed-signal integrated circuit chips that integrate both analog and digital circuits. A digital-to-analog converter (DAC) performs the reverse function; it converts a digital signa ...
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Digital Data
Digital data, in information theory and information systems, is information represented as a string of discrete symbols each of which can take on one of only a finite number of values from some alphabet, such as letters or digits. An example is a text document, which consists of a string of alphanumeric characters . The most common form of digital data in modern information systems is ''binary data'', which is represented by a string of binary digits (bits) each of which can have one of two values, either 0 or 1. Digital data can be contrasted with ''analog data'', which is represented by a value from a continuous range of real numbers. Analog data is transmitted by an analog signal, which not only takes on continuous values, but can vary continuously with time, a continuous real-valued function of time. An example is the air pressure variation in a sound wave. The word ''digital'' comes from the same source as the words digit and ''digitus'' (the Latin word for ''finger'' ...
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