MEMS sensor generations represent the progress made in micro

sensor A sensor is a device that produces an output signal for the purpose of sensing a physical phenomenon. In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends ...

technology and can be categorized as follows: ;1st Generation :

MEMS Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, ...

sensor element mostly based on a

silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...

structure, sometimes combined with

analog Analog or analogue may refer to: Computing and electronics * Analog signal, in which information is encoded in a continuous variable ** Analog device, an apparatus that operates on analog signals *** Analog electronics, circuits which use analog ...

amplification on a micro chip. ;2nd Generation:MEMS sensor element combined with analog amplification and

analog-to-digital converter In electronics, an analog-to-digital converter (ADC, A/D, or A-to-D) is a system that converts an analog signal, such as a sound picked up by a microphone or light entering a digital camera, into a digital signal. An ADC may also provide ...

on one micro chip. ;3rd Generation :Fusion of the sensor element with analog amplification, analog-to-digital converter and

digital Digital usually refers to something using discrete digits, often binary digits. Technology and computing Hardware *Digital electronics, electronic circuits which operate using digital signals **Digital camera, which captures and stores digital i ...

intelligence for linearization and temperature compensation on the same micro chip. ;4th Generation :Memory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation.

References

{{DEFAULTSORT:Mems Sensor Generations Microtechnology