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Multilayer Soft Lithography
Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer.Commercial PDMS stampscamold materials such as optical adhesivein a sequential process to create the bonded layers. See also * Soft lithography {{Nanolith Lithography (microfabrication) ...
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Elastomer
An elastomer is a polymer with viscoelasticity (i.e. both viscosity and elasticity) and with weak intermolecular forces, generally low Young's modulus and high failure strain compared with other materials. The term, a portmanteau of ''elastic polymer'', is often used interchangeably with rubber, although the latter is preferred when referring to vulcanisates. Each of the monomers which link to form the polymer is usually a compound of several elements among carbon, hydrogen, oxygen and silicon. Elastomers are amorphous polymers maintained above their glass transition temperature, so that considerable molecular reconformation is feasible without breaking of covalent bonds. At ambient temperatures, such rubbers are thus relatively compliant ( E ≈ 3 M Pa) and deformable. Their primary uses are for seals, adhesives and molded flexible parts. Application areas for different types of rubber are manifold and cover segments as diverse as tires, soles for shoes, and damping and ...
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Soft Lithography
In technology, soft lithography is a family of techniques for fabricating or replicating structures using "elastomeric stamps, molds, and conformable photomasks". It is called "soft" because it uses elastomeric materials, most notably PDMS. Soft lithography is generally used to construct features measured on the micrometer to nanometer scale. According to Rogers and Nuzzo (2005), development of soft lithography expanded rapidly from 1995 to 2005. Soft lithography tools are now commercially available. Types * PDMS stamp * Microcontact printing * Multilayer soft lithography Advantages Soft lithography has some unique advantages over other forms of lithography (such as photolithography and electron beam lithography). They include the following: *Lower cost than traditional photolithography in mass production *Well-suited for applications in biotechnology *Well-suited for applications in plastic electronics *Well-suited for applications involving large or nonplanar (nonflat) ...
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