Ultrapure water

Ultrapure water (UPW), high-purity water or highly purified water (HPW) is water that has been purified to stringent specifications. Ultrapure water is a term commonly used in manufacturing to emphasize the fact that the water is treated to the highest levels of purity for all contaminant types, including organic and inorganic compounds, dissolved and particulate matter, and dissolved gases, as well as volatile and non-volatile compounds, reactive and inert compounds, and hydrophilic and hydrophobic compounds. In contrast to deionized (DI) water, UPW has organic particles and dissolved gases removed in addition to ions.

Ultrapure water is typically prepared in three broadly-defined stages: pretreatment, primary treatment, and polishing/transport. While various industries use the term "ultrapure water", the exact definitions differ among industries. Standards for ultrapure water are defined by various groups for the power industry, semiconductor industry, and pharmaceutical industry. Water purity requirements of the semiconductor industry are generally the most stringent to prevent circuit faults at the nanometer scale.