Topic summary
Electron microprobe
Extracted from the Wikipedia article Electron probe microanalysis.
History
A second thread developed in France in the late 1940s. In 1948–1950, Raimond Castaing, supervised by André Guinier, built the first electron "microsonde électronique" (electron microprobe) at ONERA. This microprobe produced an electron beam diameter of 1-3 μm with a beam current of ~10 nanoamperes (nA) and used a Geiger counter to detect the X-rays produced from the sample. However, the Geiger counter could not distinguish X-rays produced from specific elements and in 1950, Castaing added a quartz crystal between the sample and the detector to permit wavelength discrimination. He also added an optical microscope to view the point of beam impact. The resulting microprobe was described in Castaing's 1951 PhD thesis, translated into English by Pol Duwez and David Wittry, in which he laid the foundations of the theory and application of quantitative analysis by electron microprobe, establishing the theoretical framework for the matrix corrections of absorption and fluorescence effects. Castaing is considered the father of electron microprobe analysis.