Monosilane
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Silane is an
inorganic compound In chemistry, an inorganic compound is typically a chemical compound that lacks carbon–hydrogen bonds, that is, a compound that is not an organic compound. The study of inorganic compounds is a subfield of chemistry known as '' inorganic chemist ...
with
chemical formula In chemistry, a chemical formula is a way of presenting information about the chemical proportions of atoms that constitute a particular chemical compound or molecule, using chemical element symbols, numbers, and sometimes also other symbols, ...
, . It is a colourless,
pyrophoric A substance is pyrophoric (from grc-gre, πυροφόρος, , 'fire-bearing') if it ignites spontaneously in air at or below (for gases) or within 5 minutes after coming into contact with air (for liquids and solids). Examples are organolith ...
, toxic gas with a sharp, repulsive smell, somewhat similar to that of
acetic acid Acetic acid , systematically named ethanoic acid , is an acidic, colourless liquid and organic compound with the chemical formula (also written as , , or ). Vinegar is at least 4% acetic acid by volume, making acetic acid the main component ...
. Silane is of practical interest as a precursor to elemental
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
. Silane with
alkyl group In organic chemistry, an alkyl group is an alkane missing one hydrogen. The term ''alkyl'' is intentionally unspecific to include many possible substitutions. An acyclic alkyl has the general formula of . A cycloalkyl is derived from a cycloalk ...
s are effective water repellents for mineral surfaces such as concrete and masonry. Silanes with both
organic Organic may refer to: * Organic, of or relating to an organism, a living entity * Organic, of or relating to an anatomical organ Chemistry * Organic matter, matter that has come from a once-living organism, is capable of decay or is the product ...
and
inorganic In chemistry, an inorganic compound is typically a chemical compound that lacks carbon–hydrogen bonds, that is, a compound that is not an organic compound. The study of inorganic compounds is a subfield of chemistry known as '' inorganic chemist ...
attachments are used as coupling agents.


Production


Commercial-scale routes

Silane can be produced by several routes. Typically, it arises from the reaction of hydrogen chloride with
magnesium silicide Magnesium silicide, Mg2Si, is an inorganic compound consisting of magnesium and silicon. As-grown Mg2Si usually forms black crystals; they are semiconductors with n-type conductivity and have potential applications in thermoelectric generators. Cr ...
: : Mg2Si + 4 HCl -> 2 MgCl2 + SiH4 It is also prepared from metallurgical-grade silicon in a two-step process. First, silicon is treated with
hydrogen chloride The compound hydrogen chloride has the chemical formula and as such is a hydrogen halide. At room temperature, it is a colourless gas, which forms white fumes of hydrochloric acid upon contact with atmospheric water vapor. Hydrogen chloride ga ...
at about 300 °C to produce
trichlorosilane Trichlorosilane is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to pr ...
, HSiCl3, along with
hydrogen Hydrogen is the chemical element with the symbol H and atomic number 1. Hydrogen is the lightest element. At standard conditions hydrogen is a gas of diatomic molecules having the formula . It is colorless, odorless, tasteless, non-toxic, an ...
gas, according to the
chemical equation A chemical equation is the symbolic representation of a chemical reaction in the form of symbols and chemical formulas. The reactant entities are given on the left-hand side and the product entities on the right-hand side with a plus sign between t ...
: Si + 3 HCl -> HSiCl3 + H2 The trichlorosilane is then converted to a mixture of silane and
silicon tetrachloride Silicon tetrachloride or tetrachlorosilane is the inorganic compound with the formula SiCl4. It is a colourless volatile liquid that fumes in air. It is used to produce high purity silicon and silica for commercial applications. Preparation Silic ...
: : 4 HSiCl3 -> SiH4 + 3 SiCl4 This
redistribution reaction In chemistry, redistribution usually refers to the exchange of anionic ligands bonded to metal and metalloid centers. The conversion does not involve redox, in contrast to disproportionation reactions. Some useful redistribution reactions are condu ...
requires a catalyst. The most commonly used catalysts for this process are
metal A metal (from Greek μέταλλον ''métallon'', "mine, quarry, metal") is a material that, when freshly prepared, polished, or fractured, shows a lustrous appearance, and conducts electricity and heat relatively well. Metals are typicall ...
halides In chemistry, a halide (rarely halogenide) is a binary chemical compound, of which one part is a halogen atom and the other part is an element or radical that is less electronegative (or more electropositive) than the halogen, to make a fluor ...
, particularly
aluminium chloride Aluminium chloride, also known as aluminium trichloride, is an inorganic compound with the formula . It forms hexahydrate with the formula , containing six water molecules of hydration. Both are colourless crystals, but samples are often contam ...
. This is referred to as a redistribution reaction, which is a double displacement involving the same central element. It may also be thought of as a
disproportionation In chemistry, disproportionation, sometimes called dismutation, is a redox reaction in which one compound of intermediate oxidation state converts to two compounds, one of higher and one of lower oxidation states. More generally, the term can b ...
reaction, even though there is no change in the oxidation number for silicon (Si has a nominal oxidation number IV in all three species). However, the utility of the oxidation number concept for a covalent molecule, even a polar covalent molecule, is ambiguous. The silicon atom could be rationalized as having the highest formal oxidation state and partial positive charge in and the lowest formal oxidation state in , since Cl is far more electronegative than is H. An alternative industrial process for the preparation of very high-purity silane, suitable for use in the production of semiconductor-grade silicon, starts with metallurgical-grade silicon, hydrogen, and
silicon tetrachloride Silicon tetrachloride or tetrachlorosilane is the inorganic compound with the formula SiCl4. It is a colourless volatile liquid that fumes in air. It is used to produce high purity silicon and silica for commercial applications. Preparation Silic ...
and involves a complex series of redistribution reactions (producing byproducts that are recycled in the process) and distillations. The reactions are summarized below: : Si + 2 H2 + 3 SiCl4 -> 4 SiHCl3 : 2 SiHCl3 -> SiH2Cl2 + SiCl4 : 2 SiH2Cl2 -> SiHCl3 + SiH3Cl : 2 SiH3Cl -> SiH4 + SiH2Cl2 The silane produced by this route can be thermally decomposed to produce high-purity silicon and hydrogen in a single pass. Still other industrial routes to silane involve reduction of
silicon tetrafluoride Silicon tetrafluoride or tetrafluorosilane is a chemical compound with the formula Si F4. This colorless gas is notable for having a narrow liquid range: its boiling point is only 4 °C above its melting point. It was first prepared in 1771 ...
() with
sodium hydride Sodium hydride is the chemical compound with the empirical formula Na H. This alkali metal hydride is primarily used as a strong yet combustible base in organic synthesis. NaH is a saline (salt-like) hydride, composed of Na+ and H− ions, in co ...
(NaH) or reduction of with
lithium aluminum hydride Lithium aluminium hydride, commonly abbreviated to LAH, is an inorganic compound with the chemical formula Li Al H4. It is a white solid, discovered by Finholt, Bond and Schlesinger in 1947. This compound is used as a reducing agent in organic sy ...
(). Another commercial production of silane involves reduction of
silicon dioxide Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...
() under Al and gas in a mixture of
NaCl Sodium chloride , commonly known as salt (although sea salt also contains other chemical salts), is an ionic compound with the chemical formula NaCl, representing a 1:1 ratio of sodium and chloride ions. With molar masses of 22.99 and 35.45 g ...
and
aluminum chloride Aluminium chloride, also known as aluminium trichloride, is an inorganic compound with the formula . It forms hexahydrate with the formula , containing six water molecules of hydration. Both are colourless crystals, but samples are often contam ...
() at high pressures: : 3 SiO2 + 6 H2 + 4 Al -> 3 SiH4 + 2 Al2O3


Laboratory-scale routes

In 1857, the German chemists
Heinrich Buff Heinrich may refer to: People * Heinrich (given name), a given name (including a list of people with the name) * Heinrich (surname), a surname (including a list of people with the name) *Hetty (given name), a given name (including a list of peo ...
and
Friedrich Woehler Friedrich may refer to: Names * Friedrich (surname), people with the surname ''Friedrich'' * Friedrich (given name), people with the given name ''Friedrich'' Other * Friedrich (board game), a board game about Frederick the Great and the Seven Year ...
discovered silane among the products formed by the action of
hydrochloric acid Hydrochloric acid, also known as muriatic acid, is an aqueous solution of hydrogen chloride. It is a colorless solution with a distinctive pungent smell. It is classified as a strong acid Acid strength is the tendency of an acid, symbol ...
on aluminum silicide, which they had previously prepared. They called the compound ''siliciuretted hydrogen''. For classroom demonstrations, silane can be produced by heating
sand Sand is a granular material composed of finely divided mineral particles. Sand has various compositions but is defined by its grain size. Sand grains are smaller than gravel and coarser than silt. Sand can also refer to a textural class of s ...
with
magnesium Magnesium is a chemical element with the symbol Mg and atomic number 12. It is a shiny gray metal having a low density, low melting point and high chemical reactivity. Like the other alkaline earth metals (group 2 of the periodic ta ...
powder to produce
magnesium silicide Magnesium silicide, Mg2Si, is an inorganic compound consisting of magnesium and silicon. As-grown Mg2Si usually forms black crystals; they are semiconductors with n-type conductivity and have potential applications in thermoelectric generators. Cr ...
(), then pouring the mixture into hydrochloric acid. The magnesium silicide reacts with the acid to produce silane gas, which
burns Burns may refer to: * Burn, an injury (plural) People: * Burns (surname), includes list of people and characters Business: * Burns London, a British guitar maker Places: ;In the United States * Burns, Colorado, unincorporated community in Eagle ...
on contact with air and produces tiny explosions.. This may be classified as a
heterogeneous Homogeneity and heterogeneity are concepts often used in the sciences and statistics relating to the uniformity of a substance or organism. A material or image that is homogeneous is uniform in composition or character (i.e. color, shape, siz ...
acid–base chemical reaction, since the isolated ion in the
antifluorite
structure can serve as a Brønsted–Lowry base capable of accepting four protons. It can be written as : 4 HCl + Mg2Si -> SiH4 + 2 MgCl2 In general, the alkaline-earth metals form silicides with the following
stoichiometries Stoichiometry refers to the relationship between the quantities of reactants and products before, during, and following chemical reactions. Stoichiometry is founded on the law of conservation of mass where the total mass of the reactants equals ...
: , , and . In all cases, these substances react with Brønsted–Lowry acids to produce some type of hydride of silicon that is dependent on the Si anion connectivity in the silicide. The possible products include and/or higher molecules in the homologous series , a polymeric silicon hydride, or a
silicic acid Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...
. Hence, with their zigzag chains of anions (containing two lone pairs of electrons on each Si anion that can accept protons) yield the polymeric hydride . Yet another small-scale route for the production of silane is from the action of
sodium amalgam Sodium amalgam, commonly denoted Na(Hg), is an alloy of mercury and sodium. The term amalgam is used for alloys, intermetallic compounds, and solutions (both solid solutions and liquid solutions) involving mercury as a major component. Sodium amal ...
on
dichlorosilane Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS ...
, , to yield monosilane along with some yellow polymerized silicon hydride .


Properties

Silane is the
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
analogue of
methane Methane ( , ) is a chemical compound with the chemical formula (one carbon atom bonded to four hydrogen atoms). It is a group-14 hydride, the simplest alkane, and the main constituent of natural gas. The relative abundance of methane on Eart ...
. Because of the greater electronegativity of hydrogen in comparison to silicon, this Si–H bond polarity is the opposite of that in the C–H bonds of methane. One consequence of this reversed polarity is the greater tendency of silane to form complexes with transition metals. A second consequence is that silane is
pyrophoric A substance is pyrophoric (from grc-gre, πυροφόρος, , 'fire-bearing') if it ignites spontaneously in air at or below (for gases) or within 5 minutes after coming into contact with air (for liquids and solids). Examples are organolith ...
 — it undergoes spontaneous combustion in air, without the need for external ignition. However, the difficulties in explaining the available (often contradictory) combustion data are ascribed to the fact that silane itself is stable and that the natural formation of larger silanes during production, as well as the sensitivity of combustion to impurities such as moisture and to the catalytic effects of container surfaces causes its pyrophoricity. Above 420 °C, silane decomposes into silicon and
hydrogen Hydrogen is the chemical element with the symbol H and atomic number 1. Hydrogen is the lightest element. At standard conditions hydrogen is a gas of diatomic molecules having the formula . It is colorless, odorless, tasteless, non-toxic, an ...
; it can therefore be used in the
chemical vapor deposition Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substra ...
of silicon. The Si–H
bond strength In chemistry, bond energy (''BE''), also called the mean bond enthalpy or average bond enthalpy is the measure of bond strength in a chemical bond. IUPAC defines bond energy as the average value of the gas-phase bond-dissociation energy (usually a ...
is around 384 kJ/mol, which is about 20% weaker than the H–H bond in H2. Consequently, compounds containing Si–H bonds are much more reactive than is H2. The strength of the Si–H bond is modestly affected by other substituents: the Si–H bond strengths are: SiHF3 419 kJ/mol, SiHCl3 382 kJ/mol, and SiHMe3 398 kJ/mol.


Applications

While diverse applications exist for organosilanes, silane itself has one dominant application, as a precursor to elemental silicon, particularly in the semiconductor industry. The higher silanes, such as di- and trisilane, are only of academic interest. About 300
metric ton The tonne ( or ; symbol: t) is a unit of mass equal to 1000 kilograms. It is a non-SI unit accepted for use with SI. It is also referred to as a metric ton to distinguish it from the non-metric units of the short ton (United States c ...
s per year of silane were consumed in the late 1990s. Low-cost
solar photovoltaic A photovoltaic system, also PV system or solar power system, is an electric power system designed to supply usable solar power by means of photovoltaics. It consists of an arrangement of several components, including solar panels to absorb and c ...
module manufacturing has led to substantial consumption of silane for depositing (PECVD) hydrogenated
amorphous silicon Amorphous silicon (a-Si) is the non-crystalline form of silicon used for solar cells and thin-film transistors in LCDs. Used as semiconductor material for a-Si solar cells, or thin-film silicon solar cells, it is deposited in thin films onto ...
(a-Si:H) on glass and other substrates like metal and plastic. The
PECVD Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creati ...
process is relatively inefficient at materials utilization with approximately 85% of the silane being wasted. To reduce that waste and the
ecological footprint The ecological footprint is a method promoted by the Global Footprint Network to measure human demand on natural capital, i.e. the quantity of nature it takes to support people or an economy. It tracks this demand through an ecological accounti ...
of a-Si:H-based solar cells further several recycling efforts have been developed.


Safety and precautions

A number of fatal industrial accidents produced by combustion and detonation of leaked silane in air have been reported. Due to weak bonds and hydrogen silane is a pyrophoric gas (capable of autoignition at temperatures below ). :SiH4 + 2 O2 -> SiO2 + 2 H2O\Delta H = -1517 \text = -47.23 \text :SiH4 + O2 -> SiO2 + 2 H2 :SiH4 + O2 -> SiH2O + H2O :2 SiH4 + O2 -> 2 SiH2O + 2H2 :SiH2O + O2 -> SiO2 + H2O For lean mixtures a two-stage reaction process has been proposed, which consists of a silane consumption process and a hydrogen oxidation process. The heat of condensation increases the burning velocity due to thermal feedback. Diluted silane mixtures with inert gases such as
nitrogen Nitrogen is the chemical element with the symbol N and atomic number 7. Nitrogen is a nonmetal and the lightest member of group 15 of the periodic table, often called the pnictogens. It is a common element in the universe, estimated at se ...
or
argon Argon is a chemical element with the symbol Ar and atomic number 18. It is in group 18 of the periodic table and is a noble gas. Argon is the third-most abundant gas in Earth's atmosphere, at 0.934% (9340 ppmv). It is more than twice as abu ...
are even more likely to ignite when leaked into open air, compared to pure silane: even a 1% mixture of silane in pure nitrogen easily ignites when exposed to air. In Japan, in order to reduce the danger of silane for amorphous silicon solar cell manufacturing, several companies began to dilute silane with
hydrogen Hydrogen is the chemical element with the symbol H and atomic number 1. Hydrogen is the lightest element. At standard conditions hydrogen is a gas of diatomic molecules having the formula . It is colorless, odorless, tasteless, non-toxic, an ...
gas. This resulted in a symbiotic benefit of making more stable
solar photovoltaic A photovoltaic system, also PV system or solar power system, is an electric power system designed to supply usable solar power by means of photovoltaics. It consists of an arrangement of several components, including solar panels to absorb and c ...
cells as it reduced the
Staebler–Wronski effect The Staebler–Wronski Effect (SWE) refers to light-induced metastability, metastable changes in the properties of hydrogenated amorphous silicon. The defect density of hydrogenated amorphous silicon (a-Si:H) increases with light exposure, causing ...
. Unlike methane, silane is fairly toxic: the lethal concentration in air for rats ( LC50) is 0.96% (9,600 ppm) over a 4-hour exposure. In addition, contact with eyes may form
silicic acid Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...
with resultant irritation. In regards to occupational exposure of silane to workers, the US
National Institute for Occupational Safety and Health The National Institute for Occupational Safety and Health (NIOSH, ) is the United States federal agency responsible for conducting research and making recommendations for the prevention of work-related injury and illness. NIOSH is part of the C ...
has set a
recommended exposure limit A recommended exposure limit (REL) is an occupational exposure limit that has been recommended by the United States National Institute for Occupational Safety and Health. The REL is a level that NIOSH believes would be protective of worker safety ...
of 5 ppm (7 mg/m3) over an eight-hour time-weighted average.


See also

*
Binary silicon-hydrogen compounds Silanes are saturated chemical compounds with the empirical formula SixHy. They are hydrosilanes, a class of compounds that includes compounds with Si-H and other Si-X bonds. All contain tetrahedral silicon and terminal hydrides. They only have ...
(sometimes called silanes) *
Silanization Silanization is the covering of a surface with organofunctional alkoxysilane molecules. Mineral components like glass and metal oxide surfaces can all be silanized, because they contain hydroxyl groups which attack and displace the alkoxy groups o ...
*
Magnesium silicide Magnesium silicide, Mg2Si, is an inorganic compound consisting of magnesium and silicon. As-grown Mg2Si usually forms black crystals; they are semiconductors with n-type conductivity and have potential applications in thermoelectric generators. Cr ...


References


Cited sources

*


External links


US Patent 2474087A, Preparation of silicon halides
{{Authority control Gases Industrial gases Silanes Foul-smelling chemicals