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Proton Beam Writing
Proton beam writing (or p-beam writing) is a direct-write lithography process that uses a focused beam of high-energy ( MeV) protons to pattern resist material at nanodimensions. The process, although similar in many ways to direct writing using electrons, nevertheless offers some interesting and unique advantages. Protons, which are approximately 1800 times more massive than electrons, have deeper penetration in materials and travel in an almost straight path. This feature allows the fabrication of three-dimensional, high-aspect-ratio structures with vertical, smooth sidewalls, and low line-edge roughness. Calculations have also indicated that p-beam writing exhibits minimal proximity effects (unwanted exposure due to secondary electrons), since the secondary electrons induced in proton–electron collisions have low energy. A further advantage stems from the ability of protons to displace atoms while traversing material, thereby increasing localized damage especially at the end of ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Lithography
Lithography () is a planographic method of printing originally based on the miscibility, immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by the German author and actor Alois Senefelder and was initially used mostly for sheet music, musical scores and maps.Meggs, Philip B. ''A History of Graphic Design''. (1998) John Wiley & Sons, Inc. p 146, .Carter, Rob, Ben Day, Philip Meggs. ''Typographic Design: Form and Communication'', Third Edition. (2002) John Wiley & Sons, Inc. p. 11. Lithography can be used to print text or images onto paper or other suitable material. A lithograph is something printed by lithography, but this term is only used for printmaking, fine art prints and some other, mostly older, types of printed matter, not for those made by modern commercial lithography. Traditionally, the image to be printed was drawn with a greasy substance, such as oil, fat, or wax on ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Proton
A proton is a stable subatomic particle, symbol , Hydron (chemistry), H+, or 1H+ with a positive electric charge of +1 ''e'' (elementary charge). Its mass is slightly less than the mass of a neutron and approximately times the mass of an electron (the proton-to-electron mass ratio). Protons and neutrons, each with a mass of approximately one Dalton (unit), dalton, are jointly referred to as ''nucleons'' (particles present in atomic nuclei). One or more protons are present in the Atomic nucleus, nucleus of every atom. They provide the attractive electrostatic central force which binds the atomic electrons. The number of protons in the nucleus is the defining property of an element, and is referred to as the atomic number (represented by the symbol ''Z''). Since each chemical element, element is identified by the number of protons in its nucleus, each element has its own atomic number, which determines the number of atomic electrons and consequently the chemical characteristi ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Electron
The electron (, or in nuclear reactions) is a subatomic particle with a negative one elementary charge, elementary electric charge. It is a fundamental particle that comprises the ordinary matter that makes up the universe, along with up quark, up and down quark, down quarks. Electrons are extremely lightweight particles that orbit the positively charged atomic nucleus, nucleus of atoms. Their negative charge is balanced by the positive charge of protons in the nucleus, giving atoms their overall electric charge#Charge neutrality, neutral charge. Ordinary matter is composed of atoms, each consisting of a positively charged nucleus surrounded by a number of orbiting electrons equal to the number of protons. The configuration and energy levels of these orbiting electrons determine the chemical properties of an atom. Electrons are bound to the nucleus to different degrees. The outermost or valence electron, valence electrons are the least tightly bound and are responsible for th ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Proton
A proton is a stable subatomic particle, symbol , Hydron (chemistry), H+, or 1H+ with a positive electric charge of +1 ''e'' (elementary charge). Its mass is slightly less than the mass of a neutron and approximately times the mass of an electron (the proton-to-electron mass ratio). Protons and neutrons, each with a mass of approximately one Dalton (unit), dalton, are jointly referred to as ''nucleons'' (particles present in atomic nuclei). One or more protons are present in the Atomic nucleus, nucleus of every atom. They provide the attractive electrostatic central force which binds the atomic electrons. The number of protons in the nucleus is the defining property of an element, and is referred to as the atomic number (represented by the symbol ''Z''). Since each chemical element, element is identified by the number of protons in its nucleus, each element has its own atomic number, which determines the number of atomic electrons and consequently the chemical characteristi ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Silicon
Silicon is a chemical element; it has symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic lustre, and is a tetravalent metalloid (sometimes considered a non-metal) and semiconductor. It is a member of group 14 in the periodic table: carbon is above it; and germanium, tin, lead, and flerovium are below it. It is relatively unreactive. Silicon is a significant element that is essential for several physiological and metabolic processes in plants. Silicon is widely regarded as the predominant semiconductor material due to its versatile applications in various electrical devices such as transistors, solar cells, integrated circuits, and others. These may be due to its significant band gap, expansive optical transmission range, extensive absorption spectrum, surface roughening, and effective anti-reflection coating. Because of its high chemical affinity for oxygen, it was not until 1823 that Jöns Jakob Berzelius was first able to p ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Chain Scissioning
A chain is a serial assembly of connected pieces, called links, typically made of metal, with an overall character similar to that of a rope in that it is flexible and curved in compression but linear, rigid, and load-bearing in tension. A chain may consist of two or more links. Chains can be classified by their design, which can be dictated by their use: * Those designed for lifting, such as when used with a hoist; for pulling; or for securing, such as with a bicycle lock, have links that are torus-shaped, which make the chain flexible in two dimensions (the fixed third dimension being a chain's length). Small chains serving as jewellery are a mostly decorative analogue of such types. * Those designed for transferring power in machines have links designed to mesh with the teeth of the sprockets of the machine, and are flexible in only one dimension. They are known as roller chains, though there are also non-roller chains such as block chains. Two distinct chains can be co ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Poly(methyl Methacrylate)
Poly(methyl methacrylate) (PMMA) is a synthetic polymer derived from methyl methacrylate. It is a transparent thermoplastic, used as an engineering plastic. PMMA is also known as acrylic, acrylic glass, as well as by the trade names and brands Crylux, Walcast, Hesalite, Plexiglas, Acrylite, Lucite, PerClax, and Perspex, among several others ( see below). This plastic is often used in sheet form as a lightweight or shatter-resistant alternative to glass. It can also be used as a casting resin, in inks and coatings, and for many other purposes. It is often technically classified as a type of glass, in that it is a non-crystalline vitreous substance—hence its occasional historic designation as ''acrylic glass''. History The first acrylic acid was created in 1843. Methacrylic acid, derived from acrylic acid, was formulated in 1865. The reaction between methacrylic acid and methanol results in the ester methyl methacrylate. It was developed in 1928 in several different la ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
SU-8
SU-8 is a commonly used epoxy-based negative photoresist. Negative refers to a photoresist whereby the parts exposed to UV become cross-linked, while the remainder of the film remains soluble and can be washed away during development. As shown in the structural diagram, SU-8 derives its name from the presence of 8 epoxy groups. This is a statistical average per moiety. It is these epoxies that cross-link to give the final structure. It can be made into a viscous polymer that can be spun or spread over a thickness ranging from below 1 micrometer up to above 300 micrometers, or Thick Film Dry Sheets (TFDS) for lamination up to above 1 millimetre thick. Up to 500 μm, the resist can be processed with standard contact lithography. Above 500 μm, absorption leads to increasing sidewall undercuts and poor curing at the substrate interface. It can be used to pattern high aspect ratio structures. An aspect ratio of (> 20) has been achieved with the solution formulat ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Secondary Electron
Secondary electrons are electrons generated as ionization products. They are called 'secondary' because they are generated by other radiation (the ''primary'' radiation). This radiation can be in the form of ions, electrons, or photons with sufficiently high energy, i.e. exceeding the ionization potential. Photoelectrons can be considered an example of secondary electrons where the primary radiation are photons; in some discussions photoelectrons with higher energy (>50 eV) are still considered "primary" while the electrons freed by the photoelectrons are "secondary". Applications Secondary electrons are also the main means of viewing images in the scanning electron microscope (SEM). The range of secondary electrons depends on the energy. Plotting the inelastic mean free path as a function of energy often shows characteristics of the "universal curve" familiar to electron spectroscopists and surface analysts. This distance is on the order of a few nanometers in metals and ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Electron-beam Lithography
Electron-beam lithography (often abbreviated as e-beam lithography or EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). The electron beam changes the solubility of the resist, enabling selective removal of either the exposed or non-exposed regions of the resist by immersing it in a solvent (developing). The purpose, as with photolithography, is to create very small structures in the resist that can subsequently be transferred to the substrate material, often by Etching (microfabrication), etching. The primary advantage of electron-beam lithography is that it can draw custom patterns (direct-write) with sub-10 Nanometre, nm resolution. This form of maskless lithography has high resolution but low throughput, limiting its usage to photomask fabrication, low-volume production of Semiconductor device, semiconductor devices, and research and development. Systems Electr ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Ion Beam Lithography
Ion-beam lithography is the practice of scanning a focused beam of ions in a patterned fashion across a surface in order to create very small structures such as integrated circuits or other nanostructures. Details Ion-beam lithography has been found to be useful for transferring high-fidelity patterns on three-dimensional surfaces. Ion-beam lithography offers higher resolution patterning than UV, X-ray, or electron beam lithography because these heavier particles have more momentum. This gives the ion beam a smaller wavelength than even an e-beam and therefore almost no diffraction. The momentum also reduces scattering in the target and in any residual gas. There is also a reduced potential radiation effect to sensitive underlying structures compared to x-ray and e-beam lithography. Ion-beam lithography, or ion-projection lithography, is similar to Electron beam lithography, but uses much heavier charged particles, ions. In addition to diffraction being negligible, ions move i ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
