Reactive-ion Etching
Reactive-ion etching (RIE) is an etching (microfabrication), etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than Isotropic etching, wet etching. RIE uses chemical reaction, chemically reactive plasma (physics), plasma to remove material deposited on wafer (electronics), wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High-energy ions from the plasma attack the wafer surface and react with it. Equipment A typical (parallel plate) RIE system consists of a cylindrical vacuum chamber, with a wafer (electronics), wafer platter situated in the bottom portion of the chamber. The wafer platter is electrically isolated from the rest of the chamber. Gas enters through small inlets in the top of the chamber, and exits to the vacuum pump system through the bottom. The types and amount of gas used vary depending upon the etch process; for instance, sulfur hexafluoride is commonly used for ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Reactive Ion Etcher
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Reactive may refer to: *Generally, capable of having a reaction (other) *An adjective abbreviation denoting a bowling ball coverstock made of reactive resin *Reactivity (chemistry) *Reactive mind *Reactive programming See also *Reactance (other) *Reactivity (other) Reactivity may refer to: * Reactivity (chemistry), the rate at which a chemical substance tends to undergo a chemical reaction * Reactive programming, a property of an execution model whereby changes are automatically propagated through a dataflo ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Magnetic Field
A magnetic field (sometimes called B-field) is a physical field that describes the magnetic influence on moving electric charges, electric currents, and magnetic materials. A moving charge in a magnetic field experiences a force perpendicular to its own velocity and to the magnetic field. A permanent magnet's magnetic field pulls on ferromagnetic materials such as iron, and attracts or repels other magnets. In addition, a nonuniform magnetic field exerts minuscule forces on "nonmagnetic" materials by three other magnetic effects: paramagnetism, diamagnetism, and antiferromagnetism, although these forces are usually so small they can only be detected by laboratory equipment. Magnetic fields surround magnetized materials, electric currents, and electric fields varying in time. Since both strength and direction of a magnetic field may vary with location, it is described mathematically by a function (mathematics), function assigning a Euclidean vector, vector to each point of space, ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Chemical Milling
Chemical milling or industrial etching is the subtractive manufacturing process of using baths of temperature-regulated etching chemicals to remove material to create an object with the desired shape. Other names for chemical etching include photo etching, chemical etching, photo chemical etching and photochemical machining. It is mostly used on metals, though other materials are increasingly important. It was developed from armor-decorating and printing etching processes developed during the Renaissance as alternatives to engraving on metal. The process essentially involves bathing the cutting areas in a corrosive chemical known as an etchant, which reacts with the material in the area to be cut and causes the solid material to be dissolved; inert substances known as maskants are used to protect specific areas of the material as resists. History Organic chemicals such as lactic acid and citric acid have been used to etch metals and create products as early as 400 BCE, w ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Isotropic
In physics and geometry, isotropy () is uniformity in all orientations. Precise definitions depend on the subject area. Exceptions, or inequalities, are frequently indicated by the prefix ' or ', hence '' anisotropy''. ''Anisotropy'' is also used to describe situations where properties vary systematically, dependent on direction. Isotropic radiation has the same intensity regardless of the direction of measurement, and an isotropic field exerts the same action regardless of how the test particle is oriented. Mathematics Within mathematics, ''isotropy'' has a few different meanings: ; Isotropic manifolds: A manifold is isotropic if the geometry on the manifold is the same regardless of direction. A similar concept is homogeneity. ; Isotropic quadratic form: A quadratic form ''q'' is said to be isotropic if there is a non-zero vector ''v'' such that ; such a ''v'' is an isotropic vector or null vector. In complex geometry, a line through the origin in the direction of an ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Anisotropic
Anisotropy () is the structural property of non-uniformity in different directions, as opposed to isotropy. An anisotropic object or pattern has properties that differ according to direction of measurement. For example, many materials exhibit very different physical property, physical or list of materials properties#Mechanical properties, mechanical properties when measured along different axes, e.g. absorbance, refractive index, electrical resistivity and conductivity, conductivity, and tensile strength. An example of anisotropy is light coming through a polarizer. Another is wood, which is easier to split along its wood grain, grain than across it because of the directional non-uniformity of the grain (the grain is the same in one direction, not all directions). Fields of interest Computer graphics In the field of computer graphics, an anisotropic surface changes in appearance as it rotates about its normal (geometry), geometric normal, as is the case with velvet. Anisotropic ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Kinetic Energy
In physics, the kinetic energy of an object is the form of energy that it possesses due to its motion. In classical mechanics, the kinetic energy of a non-rotating object of mass ''m'' traveling at a speed ''v'' is \fracmv^2.Resnick, Robert and Halliday, David (1960) ''Physics'', Section 7-5, Wiley International Edition The kinetic energy of an object is equal to the work, or force ( F) in the direction of motion times its displacement ( s), needed to accelerate the object from rest to its given speed. The same amount of work is done by the object when decelerating from its current speed to a state of rest. The SI unit of energy is the joule, while the English unit of energy is the foot-pound. In relativistic mechanics, \fracmv^2 is a good approximation of kinetic energy only when ''v'' is much less than the speed of light. History and etymology The adjective ''kinetic'' has its roots in the Greek word κίνησις ''kinesis'', meaning "motion". The dichoto ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Sputter
In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can be an unwelcome source of wear in precision components. However, the fact that it can be made to act on extremely fine layers of material is utilised in science and industry—there, it is used to perform precise etching, carry out analytical techniques, and deposit thin film layers in the manufacture of optical coatings, semiconductor devices and nanotechnology products. It is a physical vapor deposition technique. Physics When energetic ions collide with atoms of a target material, an exchange of momentum takes place between them. These ions, known as "incident ions", set off collision cascades in the target. Such cascades can take many paths; some recoil back toward the surface of the target. If a collision cascade reaches the su ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Plasma (physics)
Plasma () is a state of matter characterized by the presence of a significant portion of charged particles in any combination of ions or electrons. It is the most abundant form of ordinary matter in the universe, mostly in stars (including the Sun), but also dominating the rarefied intracluster medium and Outer space#Intergalactic space, intergalactic medium. Plasma can be artificially generated, for example, by heating a neutral gas or subjecting it to a strong electromagnetic field. The presence of charged particles makes plasma electrically conductive, with the dynamics of individual particles and macroscopic plasma motion governed by collective electromagnetic fields and very sensitive to externally applied fields. The response of plasma to electromagnetic fields is used in many modern devices and technologies, such as plasma display, plasma televisions or plasma etching. Depending on temperature and density, a certain number of neutral particles may also be present, in wh ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Watt
The watt (symbol: W) is the unit of Power (physics), power or radiant flux in the International System of Units (SI), equal to 1 joule per second or 1 kg⋅m2⋅s−3. It is used to quantification (science), quantify the rate of Work (physics), energy transfer. The watt is named in honor of James Watt (1736–1819), an 18th-century Scottish people, Scottish inventor, mechanical engineer, and chemist who improved the Newcomen engine with his own Watt steam engine, steam engine in 1776, which became fundamental for the Industrial Revolution. Overview When an object's velocity is held constant at one meter per second against a constant opposing force of one Newton (unit), newton, the rate at which Work (physics), work is done is one watt. \mathrm. In terms of electromagnetism, one watt is the rate at which electrical work is performed when a current of one ampere (A) flows across an electrical potential difference of one volt (V), meaning the watt is equivalent to the vo ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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Megahertz
The hertz (symbol: Hz) is the unit of frequency in the International System of Units (SI), often described as being equivalent to one event (or cycle) per second. The hertz is an SI derived unit whose formal expression in terms of SI base units is 1/s or s−1, meaning that one hertz is one per second or the reciprocal of one second. It is used only in the case of periodic events. It is named after Heinrich Rudolf Hertz (1857–1894), the first person to provide conclusive proof of the existence of electromagnetic waves. For high frequencies, the unit is commonly expressed in multiples: kilohertz (kHz), megahertz (MHz), gigahertz (GHz), terahertz (THz). Some of the unit's most common uses are in the description of periodic waveforms and musical tones, particularly those used in radio- and audio-related applications. It is also used to describe the clock speeds at which computers and other electronics are driven. The units are sometimes also used as a representation o ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |
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ISM Band
The ISM radio bands are portions of the radio spectrum reserved internationally for ''industrial, scientific, and medical'' (ISM) purposes, excluding applications in telecommunications. Examples of applications for the use of radio frequency (RF) energy in these bands include RF heating, microwave ovens, and medical diathermy machines. The powerful emissions of these devices can create electromagnetic interference and disrupt radio communication using the same frequency, so these devices are limited to certain bands of frequencies. In general, communications equipment operating in ISM bands must tolerate any interference generated by ISM applications, and users have no regulatory protection from ISM device operation in these bands. Despite the intent of the original allocations, in recent years the fastest-growing use of these bands has been for short-range, low-power wireless communications systems, since these bands are often approved for such devices, which can be used w ... [...More Info...]       [...Related Items...]     OR:     [Wikipedia]   [Google]   [Baidu]   |