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Electron Beam Lithography
Electron-beam lithography (often abbreviated as e-beam lithography or EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). The electron beam changes the solubility of the resist, enabling selective removal of either the exposed or non-exposed regions of the resist by immersing it in a solvent (developing). The purpose, as with photolithography, is to create very small structures in the resist that can subsequently be transferred to the substrate material, often by etching. The primary advantage of electron-beam lithography is that it can draw custom patterns (direct-write) with sub-10  nm resolution. This form of maskless lithography has high resolution but low throughput, limiting its usage to photomask fabrication, low-volume production of semiconductor devices, and research and development. Systems Electron-beam lithography systems used in commercial application ...
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Feature Stitching Across Fields
Feature may refer to: Computing * Feature recognition, could be a hole, pocket, or notch * Feature (computer vision), could be an edge, corner or blob * Feature (machine learning), in statistics: individual measurable properties of the phenomena being observed * Software feature, a distinguishing characteristic of a software program Science and analysis * Feature data, in geographic information systems, comprise information about an entity with a geographic location * Features, in audio signal processing, an aim to capture specific aspects of audio signals in a numeric way * Feature (archaeology), any dug, built, or dumped evidence of human activity Media * Feature film, a film with a running time long enough to be considered the principal or sole film to fill a program ** Feature length, the standardized length of such films * Feature story, a piece of non-fiction writing about news * Radio documentary (feature), a radio program devoted to covering a particular topic in so ...
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Optical Aberration
In optics, aberration is a property of optical systems, such as Lens (optics), lenses and mirrors, that causes the ''image'' created by the optical system to not be a faithful reproduction of the ''object'' being observed. Aberrations cause the image formed by a lens to be blurred, distorted in shape or have color fringing or other effects not seen in the object, with the nature of the distortion depending on the type of aberration. Aberration can be defined as a departure of the performance of an optical system from the predictions of paraxial optics. In an imaging system, it occurs when light from one point of an object does not converge into (or does not diverge from) a single point after transmission through the system. Aberrations occur because the simple paraxial theory is not a completely accurate model of the effect of an optical system on light, rather than due to flaws in the optical elements. An image-forming optical system with aberration will produce an image which i ...
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Electron Travel (Monte Carlo)
The electron (, or in nuclear reactions) is a subatomic particle with a negative one elementary charge, elementary electric charge. It is a fundamental particle that comprises the ordinary matter that makes up the universe, along with up quark, up and down quark, down quarks. Electrons are extremely lightweight particles that orbit the positively charged atomic nucleus, nucleus of atoms. Their negative charge is balanced by the positive charge of protons in the nucleus, giving atoms their overall electric charge#Charge neutrality, neutral charge. Ordinary matter is composed of atoms, each consisting of a positively charged nucleus surrounded by a number of orbiting electrons equal to the number of protons. The configuration and energy levels of these orbiting electrons determine the chemical properties of an atom. Electrons are bound to the nucleus to different degrees. The outermost or valence electron, valence electrons are the least tightly bound and are responsible for th ...
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Electron Avalanche
An electron avalanche is a process in which a number of free electrons in a transmission medium are subjected to strong acceleration by an electric field and subsequently collide with other atoms of the medium, thereby ionizing them ( impact ionization). This releases additional electrons which accelerate and collide with further atoms, releasing more electrons—a chain reaction. In a gas, this causes the affected region to become an electrically conductive plasma. The avalanche effect was discovered by John Sealy Townsend in his work between 1897 and 1901, and is also known as the Townsend discharge. Electron avalanches are essential to the dielectric breakdown process within gases. The process can culminate in corona discharges, streamers, leaders, or in a spark or continuous arc that completely bridges the gap between the electrical conductors that are applying the voltage. The process extends to huge sparks — streamers in lightning discharges propagate by forma ...
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Secondary Electrons
Secondary electrons are electrons generated as ionization products. They are called 'secondary' because they are generated by other radiation In physics, radiation is the emission or transmission of energy in the form of waves or particles through space or a material medium. This includes: * ''electromagnetic radiation'' consisting of photons, such as radio waves, microwaves, infr ... (the ''primary'' radiation). This radiation can be in the form of ions, electrons, or photons with sufficiently high energy, i.e. exceeding the ionization potential. Photoelectrons can be considered an example of secondary electrons where the primary radiation are photons; in some discussions photoelectrons with higher energy (>50  eV) are still considered "primary" while the electrons freed by the photoelectrons are "secondary". Applications Secondary electrons are also the main means of viewing images in the scanning electron microscope (SEM). The range of secondary electrons de ...
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Cross Section (physics)
In physics, the cross section is a measure of the probability that a specific process will take place in a collision of two particles. For example, the Rutherford cross-section is a measure of probability that an alpha particle will be deflected by a given angle during an interaction with an atomic nucleus. Cross section is typically denoted (sigma) and is expressed in units of area, more specifically in barns. In a way, it can be thought of as the size of the object that the excitation must hit in order for the process to occur, but more exactly, it is a parameter of a stochastic process. When two discrete particles interact in classical physics, their mutual cross section is the area transverse to their relative motion within which they must meet in order to scatter from each other. If the particles are hard inelastic sphere A sphere (from Ancient Greek, Greek , ) is a surface (mathematics), surface analogous to the circle, a curve. In solid geometry, a sphere is ...
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Inelastic Scattering
In chemistry, nuclear physics, and particle physics, inelastic scattering is a process in which the internal states of a particle or a system of particles change after a collision. Often, this means the kinetic energy of the incident particle is not conserved (in contrast to elastic scattering). Additionally, relativistic collisions which involve a transition from one type of particle to another are referred to as inelastic even if the outgoing particles have the same kinetic energy as the incoming ones. Processes which are governed by elastic collisions at a microscopic level will appear to be inelastic if a macroscopic observer only has access to a subset of the degrees of freedom. In Compton scattering for instance, the two particles in the collision transfer energy causing a loss of energy in the measured particle. Electrons When an electron is the incident particle, the probability of inelastic scattering, depending on the energy of the incident electron, is usually smaller t ...
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Electron Beam Scattering
The electron (, or in nuclear reactions) is a subatomic particle with a negative one elementary charge, elementary electric charge. It is a fundamental particle that comprises the ordinary matter that makes up the universe, along with up quark, up and down quark, down quarks. Electrons are extremely lightweight particles that orbit the positively charged atomic nucleus, nucleus of atoms. Their negative charge is balanced by the positive charge of protons in the nucleus, giving atoms their overall electric charge#Charge neutrality, neutral charge. Ordinary matter is composed of atoms, each consisting of a positively charged nucleus surrounded by a number of orbiting electrons equal to the number of protons. The configuration and energy levels of these orbiting electrons determine the chemical properties of an atom. Electrons are bound to the nucleus to different degrees. The outermost or valence electron, valence electrons are the least tightly bound and are responsible for th ...
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Photolithography
Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer. The process begins with a photosensitive material, called a photoresist, being applied to the substrate. A photomask that contains the desired pattern is then placed over the photoresist. Light is shone through the photomask, exposing the photoresist in certain areas. The exposed areas undergo a chemical change, making them either soluble or insoluble in a developer solution. After development, the pattern is transferred onto the substrate through etching, chemical vapor deposition, or ion implantation processes. Ultraviolet, Ultraviolet (UV) light is typically used. Photolithography processes can be classified according to the type of light used, including ultraviolet lithography, deep ultraviolet lithography, extreme ultraviolet lithography, extreme ultraviolet lithography ...
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Parts-per Notation
In science and engineering, the parts-per notation is a set of pseudo-units to describe the small values of miscellaneous dimensionless quantities, e.g. mole fraction or mass fraction. Since these fractions are quantity-per-quantity measures, they are pure numbers with no associated units of measurement. Commonly used are * parts-per-million - ppm, * parts-per-billion - ppb, * parts-per-trillion - ppt, * parts-per-quadrillion - ppq, This notation is not part of the International System of Units - SI system and its meaning is ambiguous. Applications Parts-per notation is often used describing dilute solutions in chemistry, for instance, the relative abundance of dissolved minerals or pollutants in water. The quantity "1 ppm" can be used for a mass fraction if a water-borne pollutant is present at one-millionth of a gram per gram of sample solution. When working with aqueous solutions, it is common to assume that the density of water is 1.00 g/mL. Th ...
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Shot Noise
Shot noise or Poisson noise is a type of noise which can be modeled by a Poisson process. In electronics shot noise originates from the discrete nature of electric charge. Shot noise also occurs in photon counting in optical devices, where shot noise is associated with the particle nature of light. Origin In a statistical experiment such as tossing a fair coin and counting the occurrences of heads and tails, the numbers of heads and tails after many throws will differ by only a tiny percentage, while after only a few throws outcomes with a significant excess of heads over tails or vice versa are common; if an experiment with a few throws is repeated over and over, the outcomes will fluctuate a lot. From the law of large numbers, one can show that the relative fluctuations reduce as the reciprocal square root of the number of throws, a result valid for all statistical fluctuations, including shot noise. Shot noise exists because phenomena such as light and electric curren ...
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