semiconductor manufacturing Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuit (IC) chips such as modern computer processors, microcontrollers, and memory chips such as NAND flash and DRAM that are pres ...

, virtual metrology refers to methods to predict the properties of a

wafer A wafer is a crisp, often sweet, very thin, flat, light and dry biscuit, often used to decorate ice cream, and also used as a garnish on some sweet dishes. Wafers can also be made into cookies with cream flavoring sandwiched between them. They ...

based on machine parameters and sensor data in the production equipment, without performing the (costly) physical measurement of the wafer properties. Statistical methods such as classification and regression are used to perform such a task. Depending on the accuracy of this virtual data, it can be used in modelling for other purposes, such as predicting yield, preventative analysis, etc. This virtual data is helpful for modelling techniques that are adversely affected by missing data. Another option to handle missing data is to use imputation techniques on the dataset, but virtual metrology in many cases, can be a more accurate method. Examples of virtual metrology include: * the prediction of the silicon nitride (

Si_3 N_4

) layer thickness in the chemical vapor deposition process (CVD), using

multivariate regression The general linear model or general multivariate regression model is a compact way of simultaneously writing several multiple linear regression models. In that sense it is not a separate statistical linear model. The various multiple linear regre ...

methods; * the prediction of critical dimension in

photolithography In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protec ...

, using multi-level and

regularization Regularization may refer to: * Regularization (linguistics) * Regularization (mathematics) * Regularization (physics) * Regularization (solid modeling) * Regularization Law, an Israeli law intended to retroactively legalize settlements See also ...

approaches; * the prediction of layer width in

etching Etching is traditionally the process of using strong acid or mordant to cut into the unprotected parts of a metal surface to create a design in intaglio (incised) in the metal. In modern manufacturing, other chemicals may be used on other types ...

References

{{reflist Semiconductor device fabrication Automation Lithography (microfabrication) Metrology