Ultraviolet thermal processing or UVTP is the name given to the process of using ultraviolet light to stabilize

dielectric In electromagnetism, a dielectric (or dielectric medium) is an electrical insulator that can be polarised by an applied electric field. When a dielectric material is placed in an electric field, electric charges do not flow through the mate ...

films used to insulate semiconductors.

Description

Semiconductor A semiconductor is a material which has an electrical resistivity and conductivity, electrical conductivity value falling between that of a electrical conductor, conductor, such as copper, and an insulator (electricity), insulator, such as glas ...

films need low dielectric constants (k-values) for optimal

thermal conductivity The thermal conductivity of a material is a measure of its ability to conduct heat. It is commonly denoted by k, \lambda, or \kappa. Heat transfer occurs at a lower rate in materials of low thermal conductivity than in materials of high thermal ...

, to ensure semiconductor scaling. Newer dielectric films used to insulate modern chips can be easily damaged, causing them to lose their insulating capacity. Specialized treatments applied with ultraviolet light improve chip performance. Tungsten halogen lamps are the sources used for traditional rapid thermal processing.

References

Electronics manufacturing Packaging (microfabrication) Semiconductor device fabrication Semiconductor packages Semiconductor technology {{manufacturing-stub