Trifluorosilane (silicon trifluoride) is the

chemical compound A chemical compound is a chemical substance composed of many identical molecules (or molecular entities) containing atoms from more than one chemical element held together by chemical bonds. A molecule consisting of atoms of only one element ...

with the formula F₃ H Si. At standard temperature and pressure, trifluorosilane is a colorless gas. Note that the free radical F₃ Si is often also referred to as trifluorosilane.

Preparation

Trifluorosilane has been purified and separated by low-temperature high-vacuum distillation. One preparation method involves products of the reaction between SbF₃ and HSiCl₃. HSiCl₃ is obtained by copper catalyzed reaction between HCl and Silicon at 200-400 °C. Formation has also been reported in certain etching operations of silicon.

Properties

The electric dipole moment of trifluorosilane is 1.26

debye The debye (symbol: D) (; ) is a CGS unit (a non- SI metric unit) of electric dipole momentTwo equal and opposite charges separated by some distance constitute an electric dipole. This dipole possesses an electric dipole moment whose value is give ...

. The length of the silicon to fluorine bond is 1.555 Å, Si-H length is 1.55 Å, and ∠FSiF is 110°.

Preparation

Properties

References

Further reading