Tetrakis(trimethylsilyloxy)silane (TTMS) is an

organosilicon compound Organosilicon compounds are organometallic compounds containing carbon–silicon chemical bond, bonds. Organosilicon chemistry is the corresponding science of their preparation and properties. Most organosilicon compounds are similar to the ordin ...

with the formula Si Si(CH₃)₃sub>4. This colourless liquid is used as a reagent in

organic synthesis Organic synthesis is a special branch of chemical synthesis and is concerned with the intentional construction of organic compounds. Organic molecules are often more complex than inorganic compounds, and their synthesis has developed into one o ...

Application

TTMS can be used for thin film coating with a

nanostructure A nanostructure is a structure of intermediate size between microscopic and molecular structures. Nanostructural detail is microstructure at nanoscale. In describing nanostructures, it is necessary to differentiate between the number of dimens ...

silicon dioxide Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one ...

prepared by

plasma-enhanced chemical vapor deposition Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creati ...

(PECVD) at atmospheric pressure.

References

{{Reflist Siloxanes Trimethylsilyl compounds