A slot-waveguide is an
optical waveguide
An optical waveguide is a physical structure that guides electromagnetic waves in the optical spectrum. Common types of optical waveguides include optical fiber waveguides, transparent dielectric waveguides made of plastic and glass, liquid light ...
that guides strongly confined
light
Light or visible light is electromagnetic radiation that can be perceived by the human eye. Visible light is usually defined as having wavelengths in the range of 400–700 nanometres (nm), corresponding to frequencies of 750–420 te ...
in a sub
wavelength
In physics, the wavelength is the spatial period of a periodic wave—the distance over which the wave's shape repeats.
It is the distance between consecutive corresponding points of the same phase on the wave, such as two adjacent crests, t ...
-scale low
refractive index
In optics, the refractive index (or refraction index) of an optical medium is a dimensionless number that gives the indication of the light bending ability of that medium.
The refractive index determines how much the path of light is bent, or ...
region by
total internal reflection
Total internal reflection (TIR) is the optical phenomenon in which waves arriving at the interface (boundary) from one medium to another (e.g., from water to air) are not refracted into the second ("external") medium, but completely reflect ...
.
A slot-waveguide consists of two strips or slabs of high-refractive-index (n
H) materials separated by a subwavelength-scale low-refractive-index (n
S) slot region and surrounded by low-refractive-index (n
C) cladding materials.
Principle of operation
The principle of operation of a slot-waveguide is based on the discontinuity of the
electric field (E-field) at high-refractive-index-contrast interfaces.
Maxwell’s equations state that, to satisfy the continuity of the normal component of the
electric displacement field
In physics, the electric displacement field (denoted by D) or electric induction is a vector field that appears in Maxwell's equations. It accounts for the effects of free and bound charge within materials. "D" stands for "displacement", as in ...
D at an interface, the corresponding E-field must undergo a discontinuity with higher amplitude in the low-refractive-index side. That is, at an interface between two regions of
dielectric constants ε
S and ε
H, respectively:
:''D
SN=D
HN''
:''ε
SE
SN=ε
HE
HN''
:''n
S2E
SN=n
H2E
HN''
where the superscript N indicates the normal components of D and E vector fields. Thus, if , then E
SN>>E
HN.
Given that the slot critical dimension (distance between the high-index slabs or strips) is comparable to the
exponential decay length of the fundamental
eigenmode
In linear algebra, an eigenvector () or characteristic vector of a linear transformation is a nonzero vector that changes at most by a scalar factor when that linear transformation is applied to it. The corresponding eigenvalue, often denoted ...
of the guided-wave structure, the resulting E-field normal to the high-index-contrast interfaces is enhanced in the slot and remains high across it. The power density in the slot is much higher than that in the high-index regions. Since wave propagation is due to total internal reflection, there is no interference effect involved and the slot-structure exhibits very low wavelength sensitivity.
Invention
The slot-waveguide was born in 2003 as an unexpected outcome of theoretical studies on
metal
A metal (from Greek μέταλλον ''métallon'', "mine, quarry, metal") is a material that, when freshly prepared, polished, or fractured, shows a lustrous appearance, and conducts electricity and heat relatively well. Metals are typicall ...
-
oxide-
semiconductor
A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. ...
(MOS)
electro-optic
Electro–optics is a branch of electrical engineering, electronic engineering, materials science, and material physics involving components, electronic devices such as lasers, laser diodes, LEDs, waveguides, etc. which operate by the propag ...
modulation in high-confinement
silicon photonic
Silicon photonics is the study and application of photonic systems which use silicon as an optical medium. The silicon is usually patterned with sub-micrometre precision, into microphotonic components. These operate in the infrared, most commo ...
waveguides by Vilson Rosa de Almeida and Carlos Angulo Barrios, then a Ph.D. student and a postdoctoral associate, respectively, at
Cornell University
Cornell University is a private statutory land-grant research university based in Ithaca, New York. It is a member of the Ivy League. Founded in 1865 by Ezra Cornell and Andrew Dickson White, Cornell was founded with the intention to tea ...
. Theoretical analysis
and experimental demonstration
of the first slot-waveguide implemented in the Si/SiO
2 material system at 1.55 μm operation wavelength were reported by Cornell researchers in 2004.
Since these pioneering works, several guided-wave configurations based on the slot-waveguide concept have been proposed and demonstrated. Relevant examples are the following:
In 2005, researchers at the
Massachusetts Institute of Technology
The Massachusetts Institute of Technology (MIT) is a private land-grant research university in Cambridge, Massachusetts. Established in 1861, MIT has played a key role in the development of modern technology and science, and is one of the ...
proposed to use multiple slot regions in the same guided-wave structure (multi-slot waveguide) in order to increase the optical field in the low-refractive-index regions. The experimental demonstration of such multiple slot waveguide in a horizontal configuration was first published in 2007.
In 2006, the slot-waveguide approach was extended to the
terahertz frequency band by researchers at
RWTH Aachen University. Researchers at the
California Institute of Technology
The California Institute of Technology (branded as Caltech or CIT)The university itself only spells its short form as "Caltech"; the institution considers other spellings such a"Cal Tech" and "CalTech" incorrect. The institute is also occasional ...
also demonstrated that a slot waveguide, in combination with nonlinear
electrooptic polymers, could be used to build ring modulators with exceptionally high tunability.
Later this same principle enabled Baehr-Jones et al. to demonstrate a mach-zehnder modulator with an exceptionally low drive voltage of 0.25 V
In 2007, a non-planar implementation of the slot-waveguide principle of operation was demonstrated by researchers at the
University of Bath
(Virgil, Georgics II)
, mottoeng = Learn the culture proper to each after its kind
, established = 1886 (Merchant Venturers Technical College) 1960 (Bristol College of Science and Technology) 1966 (Bath University of Technology) 1971 (univ ...
. They showed concentration of optical energy within a subwavelength-scale air hole running down the length of a
photonic-crystal fiber
Photonic-crystal fiber (PCF) is a class of optical fiber based on the properties of photonic crystals. It was first explored in 1996 at University of Bath, UK. Because of its ability to confine light in hollow cores or with confinement charact ...
.
Recently, in 2016, it is shown that slots in a pair of waveguides if off-shifted away from each other can enhance the coupling coefficient even more than 100% if optimized properly, and thus the effective power coupling length between the waveguides can significantly be reduced. Hybrid slot (having vertical slot in one waveguide and horizontal slot in the other) assisted polarization beam splitter is also numerically demonstrated. Though, the losses are high for such slot structures, this scheme exploiting the asymmetric slots may have potential to design very compact optical directional couplers and polarization beam splitters for on-chip integrated optical devices.
The slot waveguide bend is another structure essential to the waveguide design of several Integrated micro- and nano-optics devices. One of the benefits of waveguide bends is the reduction of the footprint size of the device. There are two approaches based on the similarity of Si rails width to form the sharp bend in slot waveguide, which are the symmetric and asymmetric slot waveguides.
Fabrication
Planar slot-waveguides have been fabricated in different material systems such as Si/SiO
2 and Si
3N
4/SiO
2. Both vertical (slot plane is normal to the substrate plane) and horizontal (slot plane is parallel to the substrate plane) configurations have been implemented by using conventional micro- and nano-fabrication techniques. These processing tools include
electron beam lithography
Electron-beam lithography (often abbreviated as e-beam lithography, EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). The electron ...
,
photolithography,
chemical vapour deposition
Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films.
In typical CVD, the wafer (substra ...
sually low-pressure chemical vapour deposition (LPCVD) or plasma enhanced chemical vapour deposition (PECVD) thermal oxidation
In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react with it. The ra ...
,
reactive-ion etching
Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The pl ...
and
focused ion beam
Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a s ...
.
In vertical slot-waveguides, the slot and strips widths are defined by electron- or photo-lithography and dry etching techniques whereas in horizontal slot-waveguides the slot and strips thicknesses are defined by a thin-film deposition technique or thermal oxidation. Thin film deposition or oxidation provides better control of the layers dimensions and smoother interfaces between the high-index-contrast materials than lithography and dry etching techniques. This makes horizontal slot-waveguides less sensitive to scattering optical losses due to interface roughness than vertical configurations.
Fabrication of a non-planar (fiber-based) slot-waveguide configuration has also been demonstrated by means of conventional microstructured
optical fiber
An optical fiber, or optical fibre in Commonwealth English, is a flexible, transparent fiber made by drawing glass ( silica) or plastic to a diameter slightly thicker than that of a human hair. Optical fibers are used most often as a mea ...
technology.
Applications
A slot-waveguide produces high E-field amplitude,
optical power
In optics, optical power (also referred to as dioptric power, refractive power, focusing power, or convergence power) is the degree to which a lens, mirror, or other optical system converges or diverges light. It is equal to the reciprocal of the ...
, and optical
intensity in low-index materials at levels that cannot be achieved with conventional waveguides. This property allows highly efficient interaction between fields and active materials, which may lead to all-
optical switching An optical transistor, also known as an optical switch or a light valve, is a device that switches or amplifies optical signals. Light occurring on an optical transistor's input changes the intensity of light emitted from the transistor's output wh ...
,
optical amplification
An optical amplifier is a device that amplifies an optical signal directly, without the need to first convert it to an electrical signal. An optical amplifier may be thought of as a laser without an optical cavity, or one in which feedback from ...
and optical detection
on integrated photonics. Strong E-field confinement can be localized in a
nanometer-scale low-index region. As firstly pointed out in,
the slot waveguide can be used to greatly increase the sensitivity of compact
optical sensing devices or to enhance the efficiency of
near-field optics
Near-field optics is that branch of optics that considers configurations that depend on the passage of light to, from, through, or near an element with subwavelength features, and the coupling of that light to a second element located a subwaveleng ...
probes.
At Terahertz frequencies, slot waveguide based splitter has been designed which allows for low loss propagation of Terahertz waves. The device acts as a splitter through which maximum throughput can be achieved by adjusting the arm length ratio of the input to the output side.
[{{cite journal , last1=Pandey , first1=Shashank , last2=Kumar , first2=Gagan , last3=Nahata , first3=Ajay , title=Slot waveguide-based splitters for broadband terahertz radiation , journal=Optics Express , publisher=The Optical Society , volume=18 , issue=22 , date=2010-10-22 , pages=23466–71 , issn=1094-4087 , doi=10.1364/oe.18.023466 , pmid=21164689 , doi-access=free ]
References
Optical components
Photonics