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Scanning thermal microscopy (SThM) is a type of
scanning probe microscopy Scan may refer to: Acronyms * Schedules for Clinical Assessment in Neuropsychiatry (SCAN), a psychiatric diagnostic tool developed by WHO * Shared Check Authorization Network (SCAN), a database of bad check writers and collection agency for bad ...
that maps the local temperature and thermal conductivity of an interface. The probe in a scanning thermal microscope is sensitive to local temperatures – providing a nano-scale thermometer. Thermal measurements at the nanometer scale are of both scientific and industrial interest. The technique was invented by Clayton C. Williams and H. Kumar Wickramasinghe in 1986.


Applications

SThM allows thermal measurements at the nano-scale. These measurements can include: temperature, thermal properties of materials,
thermal conductivity The thermal conductivity of a material is a measure of its ability to conduct heat. It is commonly denoted by k, \lambda, or \kappa. Heat transfer occurs at a lower rate in materials of low thermal conductivity than in materials of high thermal ...
,
heat capacity Heat capacity or thermal capacity is a physical property of matter, defined as the amount of heat to be supplied to an object to produce a unit change in its temperature. The SI unit of heat capacity is joule per kelvin (J/K). Heat capacity i ...
,
glass transition temperature The glass–liquid transition, or glass transition, is the gradual and reversible transition in amorphous materials (or in amorphous regions within semicrystalline materials) from a hard and relatively brittle "glassy" state into a viscous or rubb ...
,
latent heat Latent heat (also known as latent energy or heat of transformation) is energy released or absorbed, by a body or a thermodynamic system, during a constant-temperature process — usually a first-order phase transition. Latent heat can be understo ...
,
enthalpy Enthalpy , a property of a thermodynamic system, is the sum of the system's internal energy and the product of its pressure and volume. It is a state function used in many measurements in chemical, biological, and physical systems at a constant ...
, etc. The applications include: *Ultra large-scale
integration Integration may refer to: Biology *Multisensory integration *Path integration * Pre-integration complex, viral genetic material used to insert a viral genome into a host genome *DNA integration, by means of site-specific recombinase technology, ...
(ULSI)
lithography Lithography () is a planographic method of printing originally based on the immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by the German a ...
research and cellular diagnostics in biochemistry. *Detecting such parameters as
phase changes In chemistry, thermodynamics, and other related fields, a phase transition (or phase change) is the physical process of transition between one state of a medium and another. Commonly the term is used to refer to changes among the basic states of ...
in polymer blends. *
Joule heating Joule heating, also known as resistive, resistance, or Ohmic heating, is the process by which the passage of an electric current through a conductor (material), conductor produces heat. Joule's first law (also just Joule's law), also known in c ...
*Measuring material variations in
semiconductor devices A semiconductor device is an electronic component that relies on the electronic properties of a semiconductor material (primarily silicon, germanium, and gallium arsenide, as well as organic semiconductors) for its function. Its conductivity li ...
*Subsurface imaging *Near-field photo thermal micro-spectroscopy *
Data storage Data storage is the recording (storing) of information (data) in a storage medium. Handwriting, phonographic recording, magnetic tape, and optical discs are all examples of storage media. Biological molecules such as RNA and DNA are conside ...
*
Calorimetry In chemistry and thermodynamics, calorimetry () is the science or act of measuring changes in ''state variables'' of a body for the purpose of deriving the heat transfer associated with changes of its state due, for example, to chemical reacti ...
applicationsLee, J-H. et al. International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2002), Madrid, Spain, October 2002, pp. 111–116. * Hot-spots in integrated circuits *
Low temperature In physics, cryogenics is the production and behaviour of materials at very low temperatures. The 13th IIR International Congress of Refrigeration (held in Washington DC in 1971) endorsed a universal definition of “cryogenics” and “cr ...
scanning thermal microscopy *Magnetic spectroscopy in combination with the ferromagnetic resonance realized in the SThM-FMR technique *Other applications


Technique

SThM requires the use of specialized probes. There are two types of thermal probes: Thermocouple probes where the probe temperature is monitored by a thermocouple junction at the probe tip and resistive or
bolometer A bolometer is a device for measuring radiant heat by means of a material having a temperature-dependent electrical resistance. It was invented in 1878 by the American astronomer Samuel Pierpont Langley. Principle of operation A bolometer ...
probes where the probe temperature is monitored by a thin-film resistor at probe tip. These probes are generally made from thin dielectric films on a silicon substrate and use a metal or semiconductor film bolometer to sense the tip temperature. Other approaches, using more involved micro machining methods, have also been reported. In a bolometer probe the resistor is used as a local heater and the fractional change in probe resistance is used to detect the temperature and/or the thermal conductance of the sample. When the tip is placed in contact with the sample, heat flows from the tip to sample. As the probe is scanned, the amount of heat flow changes. By monitoring the heat flow, one can create a thermal map of the sample, revealing spatial variations in thermal conductivity in a sample. Through a calibration process, the SThM can reveal the quantitative values of thermal conductivity. Alternately the sample may be actively heated, for example a powered circuit, to visualize the distribution of temperatures on the sample. Tip-sample heat transfer can include * Solid-solid conduction. Probe tip to sample. This is the transfer mechanism which yields the thermal scan. * Liquid-liquid conduction. When scanning in non-zero humidity, a liquid meniscus forms between the tip and sample. Conduction can occur through this liquid drop. * Gas conduction. Heat can be transferred through the edges of the probe tip to the sample.


References


External links


SThM tutorialSThM designs
{{DEFAULTSORT:Scanning Thermal Microscopy Scanning probe microscopy