A resonant-tunneling diode (RTD) is a
diode
A diode is a two-terminal electronic component that conducts current primarily in one direction (asymmetric conductance); it has low (ideally zero) resistance in one direction, and high (ideally infinite) resistance in the other.
A diode ...
with a resonant-tunneling structure in which electrons can tunnel through some
resonant
Resonance describes the phenomenon of increased amplitude that occurs when the frequency of an applied periodic force (or a Fourier component of it) is equal or close to a natural frequency of the system on which it acts. When an oscilla ...
states at certain energy levels. The
current–voltage characteristic
A current–voltage characteristic or I–V curve (current–voltage curve) is a relationship, typically represented as a chart or graph, between the electric current through a circuit, device, or material, and the corresponding voltage, or p ...
often exhibits
negative differential resistance
In electronics, negative resistance (NR) is a property of some electrical circuits and devices in which an increase in voltage across the device's terminals results in a decrease in electric current through it.
This is in contrast to an ordina ...
regions.
All types of
tunneling diodes make use of
quantum mechanical tunneling
Quantum tunnelling, also known as tunneling (American English, US) is a quantum mechanics, quantum mechanical phenomenon whereby a wavefunction can propagate through a potential barrier.
The transmission through the barrier can be finite and de ...
.
Characteristic to the current–voltage relationship of a tunneling diode is the presence of one or more negative differential resistance regions, which enables many unique applications. Tunneling diodes can be very compact and are also capable of ultra-high-speed operation because the quantum tunneling effect through the very thin layers is a very fast process. One area of active research is directed toward building
oscillators and switching devices that can operate at
terahertz frequencies.
Introduction
An RTD can be fabricated using many different types of materials (such as III–V, type IV, II–VI semiconductor) and different types of resonant tunneling structures, such as the heavily doped p–n junction in
Esaki diodes, double barrier, triple barrier,
quantum well
A quantum well is a potential well with only discrete energy values.
The classic model used to demonstrate a quantum well is to confine particles, which were initially free to move in three dimensions, to two dimensions, by forcing them to occupy ...
, or
quantum wire In mesoscopic physics, a quantum wire is an electrically conducting wire in which quantum effects influence the transport properties. Usually such effects appear in the dimension of nanometers, so they are also referred to as nanowires.
Quantum e ...
. The structure and fabrication process of Si/SiGe resonant interband tunneling diodes are suitable for integration with modern Si complementary metal–oxide–semiconductor (
CMOS
Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
) and
Si/
SiGe heterojunction bipolar technology.
One type of RTDs is formed as a single
quantum well
A quantum well is a potential well with only discrete energy values.
The classic model used to demonstrate a quantum well is to confine particles, which were initially free to move in three dimensions, to two dimensions, by forcing them to occupy ...
structure surrounded by very thin layer barriers. This structure is called a double barrier structure. Carriers such as electrons and holes can only have discrete energy values inside the quantum well. When a voltage is placed across an RTD, a
terahertz wave
Terahertz radiation – also known as submillimeter radiation, terahertz waves, tremendously high frequency
(THF), T-rays, T-waves, T-light, T-lux or THz – consists of electromagnetic waves within the International Telecommunicat ...
is emitted, which is why the energy value inside the quantum well is equal to that of the emitter side. As voltage is increased, the terahertz wave dies out because the energy value in the quantum well is outside the emitter side energy.
Another feature seen in RTD structures is the
negative resistance
In electronics, negative resistance (NR) is a property of some electrical circuits and devices in which an increase in voltage across the device's terminals results in a decrease in electric current through it.
This is in contrast to an ordina ...
on application of bias as can be seen in the image generated from
Nanohub
nanoHUB.org is a science and engineering gateway comprising community-contributed resources and geared toward education, professional networking, and interactive simulation tools for nanotechnology. Funded by the United States National Science F ...
. The forming of negative resistance will be examined in detail in operation section below.
This structure can be grown by molecular beam
heteroepitaxy
Epitaxy refers to a type of crystal growth or material deposition in which new crystalline layers are formed with one or more well-defined orientations with respect to the crystalline seed layer. The deposited crystalline film is called an epit ...
.
GaAs
Gallium arsenide (GaAs) is a III-V direct band gap semiconductor with a zinc blende crystal structure.
Gallium arsenide is used in the manufacture of devices such as microwave frequency integrated circuits, monolithic microwave integrated circui ...
and
AlAs in particular are used to form this structure. AlAs/
InGaAs
Indium gallium arsenide (InGaAs) (alternatively gallium indium arsenide, GaInAs) is a ternary alloy (chemical compound) of indium arsenide (InAs) and gallium arsenide (GaAs). Indium and gallium are ( group III) elements of the periodic table wh ...
or
InAlAs Aluminium indium arsenide, also indium aluminium arsenide or AlInAs ( Alx In1−x As), is a semiconductor material with very nearly the same lattice constant as GaInAs, but a larger bandgap. The ''x'' in the formula above is a number between 0 and 1 ...
/InGaAs can be used.
The operation of electronic circuits containing RTDs can be described by a
Liénard system Liénard is a surname. Notable people with the surname include:
* François Liénard de la Mivoye (1782–1862), French-Mauritian naturalist
* Édouard Liénard (1779–1848), French painter
*Alfred-Marie Liénard (1869–1958), French physicist an ...
of equations, which are a generalization of the
Van der Pol oscillator
In dynamical system, dynamics, the Van der Pol oscillator is a Conservative force, non-conservative oscillator with nonlinearity, non-linear Damping ratio, damping. It evolves in time according to the second-order differential equation:
:-\mu(1-x ...
equation.
Operation
The following process is also illustrated from rightside figure. Depending on the number of barriers and number of confined states inside the well, the process described below could be repeated.
Positive resistance region
For low bias, as the bias increase, 1st confined state between the potential barriers is getting closer to the source
Fermi level, so the current it carries increases.
Negative resistance region
As bias increases further, the 1st confined state becomes lower in energy and gradually goes into the energy range of bandgap, so the current it carries decreases. At this time, the 2nd confined state is still too high above in energy to conduct significant current.
2nd positive resistance region
Similar to the first region, as the 2nd confined state becomes closer and closer to source Fermi level, it carries more current, causing the total current to increase again.
Intraband resonant tunneling
In
quantum tunneling
In physics, a quantum (plural quanta) is the minimum amount of any physical entity (physical property) involved in an interaction. The fundamental notion that a physical property can be "quantized" is referred to as "the hypothesis of quantizati ...
through a single barrier, the transmission coefficient, or the tunneling probability, is always less than one (for incoming particle energy less than the potential barrier height). Considering a potential profile which contains two barriers (which are located close to each other), one can calculate the transmission coefficient (as a function of the incoming particle energy) using any of the standard methods.
Tunneling through a double barrier was first solved in the Wentzel-Kramers-Brillouin (WKB) approximation by David Bohm in 1951, who pointed out the resonances in the transmission coefficient occur at certain incident electron energies. It turns out that, for certain energies, the transmission coefficient is equal to one, i.e. the double barrier is totally transparent for particle transmission. This phenomenon is called resonant tunneling. It is interesting that while the transmission coefficient of a potential barrier is always lower than one (and decreases with increasing barrier height and width), two barriers in a row can be completely transparent for certain energies of the incident particle.
Later, in 1964, L. V. Iogansen discussed the possibility of resonant transmission of an electron through double barriers formed in semiconductor crystals. In the early 1970s,
Tsu,
Esaki, and
Chang computed the two terminal current-voltage (I-V) characteristic of a finite superlattice, and predicted that resonances could be observed not only in the transmission coefficient but also in the I-V characteristic. Resonant tunneling also occurs in potential profiles with more than two barriers. Advances in the MBE technique led to observation of negative differential conductance (NDC) at terahertz frequencies, as reported by Sollner et al. in the early 1980s. This triggered a considerable research effort to study tunneling through multi-barrier structures.
The potential profiles required for resonant tunneling can be realized
in semiconductor system using heterojunctions which utilize semiconductors
of different types to create potential barriers or wells in the conduction
band or the valence band.
III-V resonant tunneling diodes
Resonant tunneling diodes are typically realized in
III-V compound material systems, where heterojunctions made up of various III-V compound semiconductors are used to create the double or multiple potential barriers in the conduction band or valence band. Reasonably high performance III-V resonant tunneling diodes have been realized. Such devices have not entered mainstream applications yet because the processing of III-V materials is incompatible with Si CMOS technology and the cost is high.
Most of semiconductor optoelectronics use III-V semiconductors and so it is possible to combine III-V RTDs to make OptoElectronic Integrated Circuits (OEICS) that use the negative differential resistance of the RTD to provide electrical gain for optoelectronic devices. Recently, the device-to-device variability in an RTDs current–voltage characteristic has been used as a way to uniquely identify electronic devices, in what is known as a
quantum confinement physical unclonable function (QC-PUF). Spiking behaviour in RTDs is under investigation for optical
neuromorphic computing.
Si/SiGe resonant tunneling diodes
Resonant tunneling diodes can also be realized using the Si/SiGe materials system. Both hole tunneling and electron tunneling have been observed. However, the performance of Si/SiGe resonant tunneling diodes was limited due to the limited conduction band and valence band discontinuities between Si and SiGe alloys. Resonant tunneling of holes through Si/SiGe heterojunctions was attempted first because of the typically relatively larger valence band discontinuity in Si/SiGe heterojunctions than the conduction band discontinuity for (compressively) strained Si
1−xGe
x layers grown on Si substrates. Negative differential resistance was only observed at low temperatures but not at room temperature. Resonant tunneling of electrons through Si/SiGe heterojunctions was obtained later, with a limited peak-to-valley current ratio (PVCR) of 1.2 at room temperature. Subsequent developments have realized Si/SiGe RTDs (electron tunneling) with a PVCR of 2.9 with a PCD of 4.3 kA/cm
2 and a PVCR of 2.43 with a PCD of 282 kA/cm
2 at room temperature.
Interband resonant tunneling diodes
Resonant interband tunneling diodes (RITDs) combine the structures and behaviors of both ''intraband'' resonant tunneling diodes (RTDs) and conventional ''interband'' tunneling diodes, in which electronic transitions occur between the energy levels in the quantum wells in the conduction band and that in the valence band. Like resonant tunneling diodes, resonant interband tunneling diodes can be realized in both the III-V and Si/SiGe materials systems.
III-V RITDs
In the III-V materials system, InAlAs/InGaAs RITDs with peak-to-valley current ratios (PVCRs) higher than 70 and as high as 144 at room temperature and Sb-based RITDs with room temperature PVCR as high as 20 have been obtained. The main drawback of III-V RITDs is the use of III-V materials whose processing is incompatible with Si processing and is expensive.
Si/SiGe RITDs
In
Si/
SiGe materials system, Si/SiGe resonant interband tunneling diodes have also been developed which have the potential of being integrated into the mainstream Si integrated circuits technology.
Structure
The five key points to the design are:
(i) an
intrinsic
In science and engineering, an intrinsic property is a property of a specified subject that exists itself or within the subject. An extrinsic property is not essential or inherent to the subject that is being characterized. For example, mass ...
tunneling barrier,
(ii)
delta-doped injectors,
(iii) offset of the delta-doping planes from the
heterojunction A heterojunction is an interface between two layers or regions of dissimilar semiconductors. These semiconducting materials have unequal band gaps as opposed to a homojunction. It is often advantageous to engineer the electronic energy bands in many ...
interfaces,
(iv) low temperature
molecular beam epitaxial growth (LTMBE), and
(v) postgrowth
rapid thermal anneal
Rapid thermal processing (RTP) is a semiconductor manufacturing process which heats silicon wafers to temperatures exceeding 1,000°C for not more than a few seconds. During cooling wafer temperatures must be brought down slowly to prevent dislocat ...
ing (RTA) for activation of dopants and reduction of density of point defects.
[
]
Performance
A minimum PVCR of about 3 is needed for typical circuit applications. Low current density Si/SiGe RITDs are suitable for low-power memory applications, and high current density tunnel diodes are needed for high-speed digital/mixed-signal applications. Si/SiGe RITDs have been engineered to have room temperature PVCRs up to 4.0. The same structure was duplicated by another research group using a different MBE Mbe may refer to:
* Mbé, a town in the Republic of the Congo
* Mbe Mountains Community Forest, in Nigeria
* Mbe language, a language of Nigeria
* Mbe' language, language of Cameroon
* ''mbe'', ISO 639 code for the extinct Molala language
Molal ...
system, and PVCRs of up to 6.0 have been obtained. In terms of peak current density, peak current densities ranging from as low as 20 mA/cm2 and as high as 218 kA/cm2, spanning seven orders of magnitude, have been achieved. A resistive cut-off frequency of 20.2 GHz has been realized on photolithography defined SiGe RITD followed by wet etching for further reducing the diode size, which should be able to improve when even smaller RITDs are fabricated using techniques such as electron beam lithography.
Integration with Si/SiGe CMOS and heterojunction bipolar transistors
Integration of Si/SiGe RITDs with Si CMOS has been demonstrated. Vertical integration of Si/SiGe RITD and SiGe heterojunction bipolar transistors was also demonstrated, realizing a 3-terminal negative differential resistance circuit element with adjustable peak-to-valley current ratio. These results indicate that Si/SiGe RITDs is a promising candidate of being integrated with the Si integrated circuit technology.
Other Applications
Other applications of SiGe RITD have been demonstrated using breadboard circuits, including multi-state logic.
References
External links
* For information on Optoelectronic applications of RTDs see http://userweb.elec.gla.ac.uk/i/ironside/RTD/RTDOpto.html.
Resonant Tunneling Diode Simulation Tool
on Nanohub
nanoHUB.org is a science and engineering gateway comprising community-contributed resources and geared toward education, professional networking, and interactive simulation tools for nanotechnology. Funded by the United States National Science F ...
enables the simulation of resonant tunneling diodes under realistic bias conditions for realistically extended devices.
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Terahertz technology
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