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Nanochannel glass materials are an experimental
mask A mask is an object normally worn on the face, typically for protection, disguise, performance, or entertainment and often they have been employed for rituals and rights. Masks have been used since antiquity for both ceremonial and pra ...
technology that is an alternate method for fabricating
nanostructures A nanostructure is a structure of intermediate size between microscopic and molecular structures. Nanostructural detail is microstructure at nanoscale. In describing nanostructures, it is necessary to differentiate between the number of dime ...
, although optical lithography is the predominant patterning technique. * Proceedings of the NATO Advanced Research Workshop, Cambridge, U.K., April 1--3, 1994 Series: NATO Science Series E: (closed), Vol. 292 Nanochannel glass materials are complex glass structures containing large numbers of parallel hollow channels. In its simplest form, the hollow channels are arranged in geometric arrays with packing densities as great as 1011 channels/cm2. Channel dimensions are controllable from micrometers to tens of nanometers, while retaining excellent channel uniformity. Exact replicas of the channel glass can be made from a variety of materials. This is a low cost method for creating identical structures with nanoscale features in large numbers.


Characteristics

These materials have high density of uniform channels with diameters from 15 micrometres to 15 nanometers. These are rigid structures with serviceable temperatures to at least 300 °C, with potential up to 1000 °C. Furthermore, these are optically transparent photonic structures with high degree of reproducibility.


Applications

These can be used as a material for chromatographic columns, unidirectional conductors, Microchannel plate and nonlinear optical devices. Other uses are as masks for
semiconductor A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. ...
development, including ion implantation, optical lithography, and
reactive ion etching Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The pl ...
. They are also used in dental and medical X-ray sensors optically coupled or internally coated with a scintillator to increase efficiency. *


See also

*
E-beam lithography Electron-beam lithography (often abbreviated as e-beam lithography, EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). The electron b ...
* Ion beam lithography *
Maskless lithography Maskless lithography (MPL) is a photomask-less photolithography-like technology used to project or focal-spot write the image pattern onto a chemical resist-coated substrate (e.g. wafer) by means of UV radiation or electron beam. In microlithograp ...
*
Nanolithography Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials. The modern term reflects on ...
* Photolithography *
Porous glass Porous glass is glass that includes pores, usually in the nanometre- or micrometre-range, commonly prepared by one of the following processes: through metastable phase separation in borosilicate glasses (such as in their system SiO2-B2O3-Na2O), fo ...
* Vycor glass


References


Further reading

* * * {{US patent, 5,976,444 "''Nanochannel glass replica membranes''" Materials science Glass Glass engineering and science Glass applications