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The Nano and Micro Devices Center (NMDC) is a research center located at the
The center operates a Microfabrication and Nanotechnology
/ref> * Lithography: the processes under this category include the conventional UV-lithographic techniques, Electron Beam lithography, and Projection lithography. * Material Deposition processes: under this category fall the processes of Sputtering, thermal vapor deposition, and electroplating, other techniques to deposit biological molecules and bilayer membranes include the Langmuir- Blodgett technique. * Material Removal Processes: these include dry etching such as reactive ion etching, or wet etching such as anisotropic etching of silicon in a KOH bath. * Surface Analysis and Characterization: such as Atomic Force Microscopy, Scanning Electron Microscopy, Confocal Microsocopy, Ellipsometry, UV, IR, and Raman Spectroscopy, X-ray Spectroscopy, and other techniques. * Computing
University of Alabama in Huntsville
The University of Alabama in Huntsville (UAH) is a public research university in Huntsville, Alabama. The university is accredited by the Southern Association of Colleges and Schools and comprises nine colleges: arts, humanities & social science ...
. The center forms the backbone of nanotechnology research in the university. It operates a level 4 clean room
A cleanroom or clean room is an engineered space, which maintains a very low concentration of airborne particulates. It is well isolated, well-controlled from contamination, and actively cleansed. Such rooms are commonly needed for scientif ...
as well as several other lab facilities.
Objectives
The objective of the center is to effectively integrate the expertise in electrical, chemical, and materials engineering, biology, chemistry and physics towards the development and research in the fields of micro electro-mechanical systems (MEMS) and nanotechnology.Facilities
The center operates a clean room
A cleanroom or clean room is an engineered space, which maintains a very low concentration of airborne particulates. It is well isolated, well-controlled from contamination, and actively cleansed. Such rooms are commonly needed for scientif ...
that is equipped with microfabrication machines that perform thin film deposition, photolithography, dry and wet etching, and metrology measurements. It also operates a dark room for wet etching, electroplating and porous silicon fabrication. The facilities are utilized by organizations based in north Alabama
(We dare defend our rights)
, anthem = "Alabama (state song), Alabama"
, image_map = Alabama in United States.svg
, seat = Montgomery, Alabama, Montgomery
, LargestCity = Huntsville, Alabama, Huntsville
, LargestCounty = Baldwin County, Al ...
. The processes performed in such a clean room level may be classified into:/ref> * Lithography: the processes under this category include the conventional UV-lithographic techniques, Electron Beam lithography, and Projection lithography. * Material Deposition processes: under this category fall the processes of Sputtering, thermal vapor deposition, and electroplating, other techniques to deposit biological molecules and bilayer membranes include the Langmuir- Blodgett technique. * Material Removal Processes: these include dry etching such as reactive ion etching, or wet etching such as anisotropic etching of silicon in a KOH bath. * Surface Analysis and Characterization: such as Atomic Force Microscopy, Scanning Electron Microscopy, Confocal Microsocopy, Ellipsometry, UV, IR, and Raman Spectroscopy, X-ray Spectroscopy, and other techniques. * Computing
References
{{authority control University of Alabama in Huntsville Nanotechnology institutions Buildings and structures in Huntsville, Alabama