List of MEMS foundries

The list below provides a comprehensive overview of companies that develop and fabricate

MEMS Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, ...

(microelectromechanical systems) devices. These companies are usually referred to the concept of

foundries A foundry is a factory that produces metal castings. Metals are cast into shapes by melting them into a liquid, pouring the metal into a mold, and removing the mold material after the metal has solidified as it cools. The most common metals pr ...

. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication. The attribute type is either for

Integrated Device Manufacturer An integrated device manufacturer (IDM) is a semiconductor company which designs, manufactures, and sells integrated circuit (IC) products. IDM is often used to refer to a company which handles semiconductor manufacturing in-house, compared to a ...

Pure-play A pure play company focuses solely on a particular product or activity. Investing in a pure play company can be considered as investing in a particular commodity or product of a company. Pure play firms either specialize in a specific niche, or hav ...

business model. {, class="wikitable sortable" , - ! Company ! Service ! Substrate materials ! Production volume ! Wafer diameters (in inches) ! Type ! Headquartered country , - , Asia Pacific Microsystems, Inc. , MEMS Foundry , Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers , High volume production , 6 , Pure-play , , - , Atomica , MEMS, biochip, sensor and photonics manufacturing, including custom design, development, prototyping, and high-volume production , Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates , High-volume production , 6, 8 , Pure-play , , - , CEA-Leti , Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging , Silicon, SOI, glass, and CMOS-wafers. , R&D recurrent batches and pilot line , 8, 12 , Pure-play , , - , CSEM , MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments. Lithium niobate and silicon carbide processing are notable technology bricks. , Silicon, SOI, lithium niobate, silicon carbide, fused silica, quartz, glass. , Prototyping, small & medium volume production , 6 , Pure-play , , - , Hanking Electronics , Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging. , Silicon , High volume production , 8 , IDM , , - ,

IMEC Interuniversity Microelectronics Centre (IMEC) is an international research & development organization, active in the fields of nanoelectronics and digital technologies, with headquarters in Belgium. Luc Van den hove has served as President an ...

, Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping , Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch ) , Prototyping, low and medium volume production; transfer to foundry for high volume , 8, 12 , Pure-play , , - , Micronit GmbH , Customised MEMS design and manufacturing , Silicon and SOI, borosilicate glass or quartz, structured wafer , Prototyping and middle-sized batch production , 6, 8 , Pure-play , , - , LioniX International , Customized MEMS design, custom process development, prototyping and production. , Silicon, SOI, fused silica, borosilicate glasses, thermally oxidized silicon. , Proof of concept, prototyping, pilot production, small and medium volumes. , 4, 6 , Pure-play , , - , Mapper , MEMS process development and manufacturing , Silicon, SOI and various glasses, piezoelectric materials , Low volume and prototyping , 4 , Pure-play , , - , Microfluidic Foundry , BioMEMS design and manufacturing , Silicon, Glass, SU8/PDMS, Polymer , R&D, Mini volume production , , IDM , , - , nanoPHAB , Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC , III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials , Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume. , 2, 3, 4 , Pure-Play , , - , Nanoshift LLC , Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies. , Silicon, SOI, Glass, flex substrates, polymer, and other materials. , Proof of concept, process development, prototyping, low to mid volume , 2, 3, 4, and 6 , IDM , , - , NEMS and MEMS Proto Fab (NMPF) , MEMS manufacturing, microfabrication services , Silicon, Glass, Quartz, SOI wafers , Low to medium volume and prototyping , 2, 4 , Pure play , , - ,

Philips Koninklijke Philips N.V. (), commonly shortened to Philips, is a Dutch multinational conglomerate corporation that was founded in Eindhoven in 1891. Since 1997, it has been mostly headquartered in Amsterdam, though the Benelux headquarters i ...

, Customized MEMS and Micro Assembly, process design and manufacturing, certified for medical devices , Silicon, SOI, glass, quartz and CMOS-wafers. , Prototyping, low and medium volume production , 6, 8 , Pure-play , , - ,

Robert Bosch GmbH Robert Bosch GmbH (; ), commonly known as Bosch and stylized as BOSCH, is a German multinational engineering and technology company headquartered in Gerlingen, Germany. The company was founded by Robert Bosch in Stuttgart in 1886. Bosch is 9 ...

, Customized MEMS process development and manufacturing. Optional: design, assembly, test, integration , Silicon, SOI, Fused silica or glass, post-processing on 200mm-CMOS wafers , Prototyping, development, medium and high volume , 8 , IDM , , - , Safran Sensing Technologies , MEMS Manufacturing , Silicon, SOI , Medium volume production , 6 , IDM , , - , Semefab , MEMS manufacturing , , High volume production , 4, 6 , Pure-play , , - ,

Semi-Conductor Laboratory The Semi-Conductor Laboratory, Mohali (SCL) is a research institute under Ministry of Electronics and Information Technology (MeitY), Government of India (formerly under Department Of Space). Its aims include research and development in the field ...

, CMOS & MEMS design, manufacturing and packaging; microfabrication , Silicon, SOI and various glasses , From Low volume production , 6,8 , Pure-play , , - , Silex Microsystems , MEMS process development and manufacturing , Silicon, SOI, Glass , Prototyping and high volume production , 8 , Pure-play , , - , SINTEF MiNaLab , Customized MEMS, BioMEMS, piezoMEMS and Micro-optics. Modeling and design, process development, testing and characterization. , Silicon, SOI, Glass , Prototyping, low and medium volume production; transfer to foundry for high volume , 6 , Pure-play , , - , Sony Semiconductor , MEMS development and manufacturing , Silicon, SOI , Prototyping and high volume production , 6, 8 , IDM , , - ,

STMicroelectronics STMicroelectronics N.V. commonly referred as ST or STMicro is a Dutch multinational corporation and technology company of French-Italian origin headquartered in Plan-les-Ouates near Geneva, Switzerland and listed on the French stock market. ST ...

, MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones) , Silicon , High volume production , , IDM , , - ,

Teledyne DALSA Teledyne DALSA (formerly DALSA Corporation) is a Canadian company specializing in the design and manufacture of specialized electronic imaging components (image sensors, cameras, frame grabbers, imaging software) as well as specialized semiconduc ...

, MEMS design and manufacturing with integration of individual foundry processes , Silicon and polysilicon , High volume production , 6, 8 , Pure-play , , - , Teledyne Micralyne , MEMS design, manufacturing and packaging; microfabrication , Silicon, SOI and various glasses , From scale-up to high volume production , 6 , Pure-play , , - ,

Tower Semiconductor Tower Semiconductor Ltd. is an Israeli company that manufactures integrated circuits using specialty process technologies, including SiGe, BiCMOS, Silicon Photonics, SOI, mixed-signal and RFCMOS, CMOS image sensors, non-imaging sensors, power ...

, IC manufacturing , Silicon , High volume production , 6, 8 , Pure-play , , - , TDK Tronics , MEMS design and manufacturing , Silicon, SOI and glass wafer , Prototyping, low and high volume production , 6 , Pure-play , , - ,

TSMC Taiwan Semiconductor Manufacturing Company Limited (TSMC; also called Taiwan Semiconductor) is a Taiwanese multinational corporation, multinational semiconductor contract manufacturing and design company. It is the world's most valuable semicon ...

, MEMS design and manufacturing , Silicon , High volume production , 6, 8, 12 , Pure-play , , - , uFluidix , MEMS and Microfluidics manufacturing , Silicon, glass, PDMS , Low-Medium volume production , , Pure-play , , - ,

United Microelectronics Corporation United Microelectronics Corporation (UMC; ) is a Taiwanese company based in Hsinchu, Taiwan. It was founded as Taiwan's first semiconductor company in 1980 as a spin-off of the government-sponsored Industrial Technology Research Institute (ITRI) ...

, MEMS manufacturing , Silicon , High volume production , 8 , Pure-play , , - , Wunderlichips , Focus on PDMS devices, process development , Silicon, SU8\PDMS , R&D, low volume , 4, 6, 8 , Pure-play , , - ,

X-Fab The X-FAB Silicon Foundries is a group of semiconductor foundries. The group specializes in the fabrication of analog and mixed-signal integrated circuits for fabless semiconductor companies, as well as MEMS and solutions for high voltage appli ...

, MEMS design and manufacturing , Silicon and glass , High volume production , 6, 8 , Pure-play , {{GER Microelectronic and microelectromechanical systems MEMS foundries