Laser chemical vapor deposition (LCVD) is a chemical process used to produce high purity, high performance films, fibers, and mechanical hardware (MEMS). It is a form of

chemical vapor deposition Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substra ...

in which a

laser beam A laser is a device that emits light through a process of optical amplification based on the stimulated emission of electromagnetic radiation. The word "laser" is an acronym for "light amplification by stimulated emission of radiation". The fir ...

is used to locally heat the semiconductor substrate, causing the vapor deposition chemical reaction to proceed faster at that site. The process is used in the semiconductor industry for spot coating, the MEMS industry for

3-D printing 3-D, 3D, or 3d may refer to: Science, technology, and mathematics Relating to three-dimensionality * Three-dimensional space ** 3D computer graphics, computer graphics that use a three-dimensional representation of geometric data ** 3D film, a ...

of hardware such as springs and heating elements,^2,6,7,9 and the composites industry for

boron Boron is a chemical element with the symbol B and atomic number 5. In its crystalline form it is a brittle, dark, lustrous metalloid; in its amorphous form it is a brown powder. As the lightest element of the ''boron group'' it has th ...

and ceramic fibers. As with conventional CVD, one or more

gas Gas is one of the four fundamental states of matter (the others being solid, liquid, and plasma). A pure gas may be made up of individual atoms (e.g. a noble gas like neon), elemental molecules made from one type of atom (e.g. oxygen), or ...

phase precursors are thermally decomposed, and the resulting chemical species 1) deposit on a surface, or 2) react, form the desired

compound Compound may refer to: Architecture and built environments * Compound (enclosure), a cluster of buildings having a shared purpose, usually inside a fence or wall ** Compound (fortification), a version of the above fortified with defensive struct ...

, and then deposit on a surface, or a combination of (1) and (2).Maxwell, James & Boman, Mats & W Springer, Robert & Narayan, Jaikumar & Gnanavelu, Saiprasanna. (2006). “Hyperbaric Laser Chemical Vapor Deposition of Carbon Fibers from the 1-Alkenes, 1-Alkynes, and Benzene”. Journal of the American Chemical Society v 128. pp. 4405-4413.

References

Semiconductor device fabrication {{industry-stub Thin film deposition