Hans Pfeiffer is a physicist best known for his contribution to the development of
electron beam lithography
Electron-beam lithography (often abbreviated as e-beam lithography, EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). The electron b ...
.
Life
Dr. Pfeiffer received his Ph.D. from the
Technical University of Berlin
The Technical University of Berlin (official name both in English and german: link=no, Technische Universität Berlin, also known as TU Berlin and Berlin Institute of Technology) is a public research university located in Berlin, Germany. It was ...
,
Germany
Germany,, officially the Federal Republic of Germany, is a country in Central Europe. It is the second most populous country in Europe after Russia, and the most populous member state of the European Union. Germany is situated betwe ...
in 1967 and joined IBM the following year. During his career he established a world class team and led the development of several generations of IBM's electron-beam lithography systems. He is recognized for building the industry's first ''shaped beam'' lithography systems.
Dr. Pfeiffer was elected
IBM Fellow
An IBM Fellow is an appointed position at IBM made by IBM's CEO. Typically only four to nine (eleven in 2014) IBM Fellows are appointed each year, in May or June. Fellow is the highest honor a scientist, engineer, or programmer at IBM can achie ...
in 1985.
References
Biography in IBM Journal of Research and Development
Year of birth missing (living people)
Living people
IBM Fellows
Technical University of Berlin alumni
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