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Amorphous silicon (a-Si) is the non-
crystalline A crystal or crystalline solid is a solid material whose constituents (such as atoms, molecules, or ions) are arranged in a highly ordered microscopic structure, forming a crystal lattice that extends in all directions. In addition, macros ...
form of
silicon Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic ta ...
used for solar cells and
thin-film transistor A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is thin relative to the plane of the device. TFTs are grown on a supporting (but non-conducting) substrate. A common substrate is glass, becaus ...
s in LCDs. Used as
semiconductor material A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. ...
for a-Si solar cells, or thin-film silicon solar cells, it is deposited in
thin film A thin film is a layer of material ranging from fractions of a nanometer ( monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many ...
s onto a variety of flexible substrates, such as glass, metal and plastic. Amorphous silicon cells generally feature low efficiency. As a second-generation
thin-film solar cell A thin-film solar cell is a second generation solar cell that is made by depositing one or more thin layers, or thin film (TF) of photovoltaic material on a substrate, such as glass, plastic or metal. Thin-film solar cells are commercially use ...
technology, amorphous silicon was once expected to become a major contributor in the fast-growing worldwide photovoltaic market, but has since lost its significance due to strong competition from conventional
crystalline silicon Crystalline silicon or (c-Si) Is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semiconduc ...
cells and other thin-film technologies such as CdTe and CIGS. Amorphous silicon is a preferred material for the
thin film transistor A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is thin relative to the plane of the device. TFTs are grown on a supporting (but non-conducting) substrate. A common substrate is glass, becaus ...
(TFT) elements of
liquid crystal displays A liquid-crystal display (LCD) is a flat-panel display or other electronically modulated optical device that uses the light-modulating properties of liquid crystals combined with polarizers. Liquid crystals do not emit light directly but i ...
(LCDs) and for x-ray imagers. Amorphous silicon differs from other
allotropic Allotropy or allotropism () is the property of some chemical elements to exist in two or more different forms, in the same physical state, known as allotropes of the elements. Allotropes are different structural modifications of an element: th ...
variations, such as monocrystalline silicon—a single crystal, and polycrystalline silicon, that consists of small grains, also known as
crystallite A crystallite is a small or even microscopic crystal which forms, for example, during the cooling of many materials. Crystallites are also referred to as grains. Bacillite is a type of crystallite. It is rodlike with parallel longulites. Stru ...
s.


Description

Silicon is a fourfold coordinated atom that is normally tetrahedrally bonded to four neighboring silicon atoms. In crystalline silicon (c-Si) this tetrahedral structure continues over a large range, thus forming a well-ordered crystal lattice. In amorphous silicon this long range order is not present. Rather, the atoms form a continuous random network. Moreover, not all the atoms within amorphous silicon are fourfold coordinated. Due to the disordered nature of the material some atoms have a
dangling bond In chemistry, a dangling bond is an unsatisfied valence on an immobilized atom. An atom with a dangling bond is also referred to as an immobilized free radical or an immobilized radical, a reference to its structural and chemical similarity to a f ...
. Physically, these dangling bonds represent defects in the continuous random network and may cause anomalous electrical behavior. The material can be passivated by hydrogen, which bonds to the dangling bonds and can reduce the dangling bond density by several orders of magnitude. Hydrogenated amorphous silicon (a-Si:H) has a sufficiently low amount of defects to be used within devices such as solar photovoltaic cells, particularly in the
protocrystalline A protocrystalline phase is a distinct phase occurring during crystal growth which evolves into a microcrystalline form. The term is typically associated with silicon films in optical applications such as solar cells. Applications Silicon sol ...
growth regime. However, hydrogenation is associated with light-induced degradation of the material, termed the
Staebler–Wronski effect The Staebler–Wronski Effect (SWE) refers to light-induced metastable changes in the properties of hydrogenated amorphous silicon. The defect density of hydrogenated amorphous silicon (a-Si:H) increases with light exposure, causing an increase in ...
.


Amorphous silicon and carbon

Amorphous
alloy An alloy is a mixture of chemical elements of which at least one is a metal. Unlike chemical compounds with metallic bases, an alloy will retain all the properties of a metal in the resulting material, such as electrical conductivity, ductilit ...
s of silicon and carbon (amorphous silicon
carbide In chemistry, a carbide usually describes a compound composed of carbon and a metal. In metallurgy, carbiding or carburizing is the process for producing carbide coatings on a metal piece. Interstitial / Metallic carbides The carbides of th ...
, also hydrogenated, a-Si1−xCx:H) are an interesting variant. Introduction of carbon atoms adds extra degrees of freedom for control of the properties of the material. The film could also be made
transparent Transparency, transparence or transparent most often refer to: * Transparency (optics), the physical property of allowing the transmission of light through a material They may also refer to: Literal uses * Transparency (photography), a still, ...
to visible light. Increasing the concentration of carbon in the alloy widens the electronic gap between conduction and valence bands (also called "optical gap" and
bandgap In solid-state physics, a band gap, also called an energy gap, is an energy range in a solid where no electronic states can exist. In graphs of the electronic band structure of solids, the band gap generally refers to the energy difference (i ...
). This increases the light efficiency of solar cells made with amorphous silicon carbide layers. On the other hand, the electronic properties as a
semiconductor A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. ...
(mainly electron mobility), are adversely affected by the increasing content of carbon in the alloy, presumably due to the increased disorder in the atomic network. Several studies are found in the scientific literature, mainly investigating the effects of deposition parameters on electronic quality, but practical applications of amorphous silicon carbide in commercial devices are still lacking.


Properties

The density of amorphous Si has been calculated as 4.90×1022 atom/cm3 (2.285 g/cm3) at 300 K. This was done using thin (5 micron) strips of amorphous silicon. This density is 1.8±0.1% less dense than crystalline Si at 300 K. Silicon is one of the few elements that expands upon cooling and has a lower density as a solid than as a liquid.


Hydrogenated amorphous silicon

Unhydrogenated a-Si has a very high defect density which leads to undesirable semiconductor properties such as poor photoconductivity and prevents doping which is critical to engineering semiconductor properties. By introducing hydrogen during the fabrication of amorphous silicon,
photoconductivity Photoconductivity is an optical and electrical phenomenon in which a material becomes more electrically conductive due to the absorption of electromagnetic radiation such as visible light, ultraviolet light, infrared light, or gamma radiation ...
is significantly improved and doping is made possible. Hydrogenated amorphous silicon, a-Si:H, was first fabricated in 1969 by Chittick, Alexander and Sterling by deposition using a silane gas (SiH4) precursor. The resulting material showed a lower defect density and increased conductivity due to impurities. Interest in a-Si:H came when (in 1975), LeComber and
Spear A spear is a pole weapon consisting of a shaft, usually of wood, with a pointed head. The head may be simply the sharpened end of the shaft itself, as is the case with fire hardened spears, or it may be made of a more durable material fasten ...
discovered the ability for substitutional doping of a-Si:H using phosphine (n-type) or diborane (p-type). The role of hydrogen in reducing defects was verified by Paul's group at Harvard who found a hydrogen concentration of about 10 atomic % through IR vibration, which for Si-H bonds has a frequency of about 2000 cm−1. Starting in the 1970s, a-Si:H was developed in solar cells by David E. Carlson and C. R. Wronski at RCA Laboratories. Conversion efficiency steadily climbed to about 13.6% in 2015.


Deposition processes


Applications

While a-Si suffers from lower electronic performance compared to c-Si, it is much more flexible in its applications. For example, a-Si layers can be made thinner than c-Si, which may produce savings on silicon material cost. One further advantage is that a-Si can be deposited at very low temperatures, e.g., as low as 75 degrees Celsius. This allows deposition on not only glass, but
plastic Plastics are a wide range of synthetic or semi-synthetic materials that use polymers as a main ingredient. Their plasticity makes it possible for plastics to be moulded, extruded or pressed into solid objects of various shapes. This adaptab ...
as well, making it a candidate for a
roll-to-roll processing In the field of electronic devices, roll-to-roll processing, also known as web processing, reel-to-reel processing or R2R, is the process of creating electronic devices on a roll of flexible plastic, metal foil, or flexible glass. In other fields ...
technique. Once deposited, a-Si can be doped in a fashion similar to c-Si, to form p-type or n-type layers and ultimately to form electronic devices. Another advantage is that a-Si can be deposited over large areas by
PECVD Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creat ...
. The design of the PECVD system has great impact on the production cost of such panel, therefore most equipment suppliers put their focus on the design of PECVD for higher throughput, that leads to lower
manufacturing cost Manufacturing cost is the sum of costs of all resources consumed in the process of making a product. The manufacturing cost is classified into three categories: direct materials cost, direct labor cost and manufacturing overhead. It is a factor in ...
particularly when the
silane Silane is an inorganic compound with chemical formula, . It is a colourless, pyrophoric, toxic gas with a sharp, repulsive smell, somewhat similar to that of acetic acid. Silane is of practical interest as a precursor to elemental silicon. Sila ...
is recycled. Arrays of small (under 1 mm by 1 mm) a-Si photodiodes on glass are used as visible-light
image sensor An image sensor or imager is a sensor that detects and conveys information used to make an image. It does so by converting the variable attenuation of light waves (as they pass through or reflect off objects) into signals, small bursts of c ...
s in some flat panel detectors for
fluoroscopy Fluoroscopy () is an imaging technique that uses X-rays to obtain real-time moving images of the interior of an object. In its primary application of medical imaging, a fluoroscope () allows a physician to see the internal structure and function ...
and
radiography Radiography is an imaging technique using X-rays, gamma rays, or similar ionizing radiation and non-ionizing radiation to view the internal form of an object. Applications of radiography include medical radiography ("diagnostic" and "therapeu ...
.


Photovoltaics

Hydrogenated amorphous silicon (a-Si:H) has been used as a photovoltaic
solar cell A solar cell, or photovoltaic cell, is an electronic device that converts the energy of light directly into electricity by the photovoltaic effect, which is a physical and chemical phenomenon.
material for devices which require very little power, such as pocket calculators, because their lower performance compared to conventional
crystalline silicon Crystalline silicon or (c-Si) Is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semiconduc ...
(c-Si) solar cells is more than offset by their simplified and lower cost of deposition onto a substrate. Moreover, the vastly higher shunt resistance of the p-i-n device means that acceptable performance is achieved even at very low light levels. The first solar-powered calculators were already available in the late 1970s, such as the Royal ''Solar 1'', Sharp ''EL-8026'', and Teal ''Photon''. More recently, improvements in a-Si:H construction techniques have made them more attractive for large-area solar cell use as well. Here their lower inherent efficiency is made up, at least partially, by their thinness – higher efficiencies can be reached by stacking several thin-film cells on top of each other, each one tuned to work well at a specific frequency of light. This approach is not applicable to c-Si cells, which are thick as a result of its indirect band-gap and are therefore largely opaque, blocking light from reaching other layers in a stack. The source of the low efficiency of amorphous silicon photovoltaics is due largely to the low hole mobility of the material. This low hole mobility has been attributed to many physical aspects of the material, including the presence of dangling bonds (silicon with 3 bonds), floating bonds (silicon with 5 bonds), as well as bond reconfigurations. While much work has been done to control these sources of low mobility, evidence suggests that the multitude of interacting defects may lead to the mobility being inherently limited, as reducing one type of defect leads to formation others. The main advantage of a-Si:H in large scale production is not efficiency, but cost. a-Si:H cells use only a fraction of the silicon needed for typical c-Si cells, and the cost of the silicon has historically been a significant contributor to cell cost. However, the higher costs of manufacture due to the multi-layer construction have, to date, made a-Si:H unattractive except in roles where their thinness or flexibility are an advantage. Typically, amorphous silicon thin-film cells use a p-i-n structure. The placement of the p-type layer on top is also due to the lower hole mobility, allowing the holes to traverse a shorter average distance for collection to the top contact. Typical panel structure includes front side glass, TCO, thin-film silicon, back contact, polyvinyl butyral (PVB) and back side glass. Uni-Solar, a division of Energy Conversion Devices produced a version of flexible backings, used in roll-on roofing products. However, the world's largest manufacturer of amorphous silicon photovoltaics had to file for bankruptcy in 2012, as it could not compete with the rapidly declining prices of conventional solar panels.


Microcrystalline and micromorphous silicon

Microcrystalline silicon (also called nanocrystalline silicon) is amorphous silicon, but also contains small crystals. It absorbs a broader spectrum of light and is
flexible Flexible may refer to: Science and technology * Power cord, a flexible electrical cable. ** Flexible cable, an Electrical cable as used on electrical appliances * Flexible electronics * Flexible response * Flexible-fuel vehicle * Flexible rake re ...
.
Micromorph The portmanteau micromorph is a combination of the words microcrystalline and amorphous. It is used for a type of silicon based multijunction thin-film solar cell. The micromorph cell Micromorph cells are thin film solar cells based on a mult ...
ous silicon module technology combines two different types of silicon, amorphous and microcrystalline silicon, in a top and a bottom
photovoltaic cell A solar cell, or photovoltaic cell, is an electronic device that converts the energy of light directly into electricity by the photovoltaic effect, which is a physical and chemical phenomenon.
. Sharp produces cells using this system in order to more efficiently capture blue light, increasing the efficiency of the cells during the time where there is no direct sunlight falling on them.
Protocrystalline A protocrystalline phase is a distinct phase occurring during crystal growth which evolves into a microcrystalline form. The term is typically associated with silicon films in optical applications such as solar cells. Applications Silicon sol ...
silicon is often used to optimize the open circuit voltage of a-Si photovoltaics.


Large-scale production

Xunlight Corporation, which has received over $40 million of institutional investments, has completed the installation of its first 25 MW wide-web,
roll-to-roll In the field of electronic devices, roll-to-roll processing, also known as web processing, reel-to-reel processing or R2R, is the process of creating electronic devices on a roll of flexible plastic, metal foil, or flexible glass. In other fields p ...
photovoltaic manufacturing equipment for the production of thin-film silicon PV modules.
Anwell Technologies Anwell Technologies Limited was a Hong Kong multinational manufacturing company. Founded in 2000, the company initially designed machines that mass-produced optical discs, but later began manufacturing thin-film solar cells and organic light- ...
has also completed the installation of its first 40 MW a-Si thin film solar panel manufacturing facility in Henan with its in-house designed multi-substrate-multi-chamber PECVD equipment.


Photovoltaic thermal hybrid solar collectors

Photovoltaic thermal hybrid solar collectors (PVT), are systems that convert
solar radiation Solar irradiance is the power per unit area (surface power density) received from the Sun in the form of electromagnetic radiation in the wavelength range of the measuring instrument. Solar irradiance is measured in watts per square metre ( ...
into electrical energy and
thermal energy The term "thermal energy" is used loosely in various contexts in physics and engineering. It can refer to several different well-defined physical concepts. These include the internal energy or enthalpy of a body of matter and radiation; heat, de ...
. These systems combine a solar cell, which converts
electromagnetic radiation In physics, electromagnetic radiation (EMR) consists of waves of the electromagnetic (EM) field, which propagate through space and carry momentum and electromagnetic radiant energy. It includes radio waves, microwaves, infrared, (visible) li ...
(
photon A photon () is an elementary particle that is a quantum of the electromagnetic field, including electromagnetic radiation such as light and radio waves, and the force carrier for the electromagnetic force. Photons are massless, so they a ...
s) into electricity, with a
solar thermal collector A solar thermal collector collects heat by absorbing sunlight. The term "solar collector" commonly refers to a device for solar hot water heating, but may refer to large power generating installations such as solar parabolic troughs and so ...
, which captures the remaining energy and removes waste heat from the solar PV module. Solar cells suffer from a drop in efficiency with the rise in temperature due to increased resistance. Most such systems can be engineered to carry heat away from the solar cells thereby cooling the cells and thus improving their efficiency by lowering resistance. Although this is an effective method, it causes the thermal component to under-perform compared to a
solar thermal Solar thermal energy (STE) is a form of energy and a technology for harnessing solar energy to generate thermal energy for use in industry, and in the residential and commercial sectors. Solar thermal collectors are classified by the United S ...
collector. Recent research showed that a-Si:H PV with low temperature coefficients allow the PVT to be operated at high temperatures, creating a more symbiotic PVT system and improving performance of the a-Si:H PV by about 10%.


Thin-film-transistor liquid-crystal display

Amorphous silicon has become the material of choice for the active layer in
thin-film transistor A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is thin relative to the plane of the device. TFTs are grown on a supporting (but non-conducting) substrate. A common substrate is glass, becaus ...
s (TFTs), which are most widely used in large-area electronics applications, mainly for liquid-crystal displays (LCDs).
Thin-film-transistor liquid-crystal display A thin-film-transistor liquid-crystal display (TFT LCD) is a variant of a liquid-crystal display that uses thin-film-transistor technology to improve image qualities such as addressability and contrast. A TFT LCD is an active matrix LCD, in con ...
(TFT-LCD) show a similar circuit layout process to that of semiconductor products. However, rather than fabricating the transistors from silicon, that is formed into a crystalline silicon
wafer A wafer is a crisp, often sweet, very thin, flat, light and dry biscuit, often used to decorate ice cream, and also used as a garnish on some sweet dishes. Wafers can also be made into cookies with cream flavoring sandwiched between them. They ...
, they are made from a thin film of amorphous silicon that is deposited on a
glass Glass is a non-crystalline, often transparent, amorphous solid that has widespread practical, technological, and decorative use in, for example, window panes, tableware, and optics. Glass is most often formed by rapid cooling ( quenching ...
panel. The silicon layer for TFT-LCDs is typically deposited using the
PECVD Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creat ...
process. Transistors take up only a small fraction of the area of each pixel and the rest of the silicon film is etched away to allow light to easily pass through it. Polycrystalline silicon is sometimes used in displays requiring higher TFT performance. Examples include small high-resolution displays such as those found in projectors or viewfinders. Amorphous silicon-based TFTs are by far the most common, due to their lower production cost, whereas polycrystalline silicon TFTs are more costly and much more difficult to produce.


See also

* Atomic layer deposition (ALD) * Chemical-mechanical planarization (CMP) * Chemical vapor deposition (CVD) *
Crystalline silicon Crystalline silicon or (c-Si) Is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semiconduc ...
*
Ion implantation Ion implantation is a low-temperature process by which ions of one element are accelerated into a solid target, thereby changing the physical, chemical, or electrical properties of the target. Ion implantation is used in semiconductor device fa ...
*
Nanoparticle A nanoparticle or ultrafine particle is usually defined as a particle of matter that is between 1 and 100 nanometres (nm) in diameter. The term is sometimes used for larger particles, up to 500 nm, or fibers and tubes that are less than 10 ...
*
Physical vapor deposition Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polym ...
(PVD) *
Protocrystalline A protocrystalline phase is a distinct phase occurring during crystal growth which evolves into a microcrystalline form. The term is typically associated with silicon films in optical applications such as solar cells. Applications Silicon sol ...
*
Rapid thermal processing Rapid thermal processing (RTP) is a semiconductor manufacturing process which heats silicon wafers to temperatures exceeding 1,000°C for not more than a few seconds. During cooling wafer temperatures must be brought down slowly to prevent disloc ...
(RTP)


References

{{Reflist


External links


Amorphous Silicon Devices group at the University of Waterloo, Ontario, Canada
Silicon forms Silicon, Amorphous Amorphous solids Thin-film cells