The 90
nm process refers to the level of
MOSFET
The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
(
CMOS
Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
)
fabrication process
Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuit (IC) chips such as modern computer processors, microcontrollers, and memory chips such as NAND flash and DRAM that are p ...
technology that was commercialized by the 2003–2005 timeframe, by leading semiconductor companies like
Toshiba
, commonly known as Toshiba and stylized as TOSHIBA, is a Japanese multinational conglomerate corporation headquartered in Minato, Tokyo, Japan. Its diversified products and services include power, industrial and social infrastructure system ...
,
Sony
, commonly stylized as SONY, is a Japanese multinational conglomerate corporation headquartered in Minato, Tokyo, Japan. As a major technology company, it operates as one of the world's largest manufacturers of consumer and professional ...
,
Samsung
The Samsung Group (or simply Samsung) ( ko, 삼성 ) is a South Korean multinational manufacturing conglomerate headquartered in Samsung Town, Seoul, South Korea. It comprises numerous affiliated businesses, most of them united under the ...
,
IBM,
Intel
Intel Corporation is an American multinational corporation and technology company headquartered in Santa Clara, California. It is the world's largest semiconductor chip manufacturer by revenue, and is one of the developers of the x86 seri ...
,
Fujitsu
is a Japanese multinational information and communications technology equipment and services corporation, established in 1935 and headquartered in Tokyo. Fujitsu is the world's sixth-largest IT services provider by annual revenue, and the la ...
,
TSMC
Taiwan Semiconductor Manufacturing Company Limited (TSMC; also called Taiwan Semiconductor) is a Taiwanese multinational corporation, multinational semiconductor contract manufacturing and design company. It is the world's most valuable semicon ...
,
Elpida,
AMD
Advanced Micro Devices, Inc. (AMD) is an American multinational semiconductor company based in Santa Clara, California, that develops computer processors and related technologies for business and consumer markets. While it initially manufactur ...
,
Infineon
Infineon Technologies AG is a German semiconductor manufacturer founded in 1999, when the semiconductor operations of the former parent company Siemens AG were spun off. Infineon has about 50,280 employees and is one of the ten largest semicond ...
,
Texas Instruments
Texas Instruments Incorporated (TI) is an American technology company headquartered in Dallas, Texas, that designs and manufactures semiconductors and various integrated circuits, which it sells to electronics designers and manufacturers globall ...
and
Micron Technology
Micron Technology, Inc. is an American producer of computer memory and computer data storage including dynamic random-access memory, flash memory, and USB flash drives. It is headquartered in Boise, Idaho. Its consumer products, including ...
.
The origin of the 90 nm value is historical, it reflects a trend of 70% scaling every 2–3 years. The naming is formally determined by the
International Technology Roadmap for Semiconductors
The International Technology Roadmap for Semiconductors (ITRS) is a set of documents produced by a group of semiconductor industry experts. These experts are representative of the sponsoring organisations which include the Semiconductor Industry A ...
(ITRS).
The 193 nm wavelength was introduced by many (but not all) companies for
lithography
Lithography () is a planographic method of printing originally based on the immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by the German a ...
of critical layers mainly during the 90 nm node. Yield issues associated with this transition (due to the use of new
photoresist
A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronic industry.
T ...
s) were reflected in the high costs associated with this transition.
Even more significantly, the 300 mm wafer size became mainstream at the 90 nm node. The previous wafer size was 200 mm diameter.
History
A 90nm
silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
MOSFET
The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
was
fabricated by Iranian engineer
Ghavam Shahidi
Ghavam G. Shahidi (born 1959) is an Iranian-American electrical engineer and IBM Fellow. He is the director of Silicon Technology at the IBM Thomas J Watson Research Center. He is best known for his pioneering work in silicon-on-insulator (SOI) ...
(later
IBM director) with D.A. Antoniadis and H.I. Smith at
MIT
The Massachusetts Institute of Technology (MIT) is a private land-grant research university in Cambridge, Massachusetts. Established in 1861, MIT has played a key role in the development of modern technology and science, and is one of the m ...
in 1988. The device was fabricated using
X-ray lithography
X-ray lithography is a process used in semiconductor device fabrication industry to selectively remove parts of a thin film of photoresist. It uses X-rays to transfer a geometric pattern from a mask to a light-sensitive chemical photoresist, or ...
.
Toshiba, Sony and Samsung developed a 90nm process during 20012002, before being introduced in 2002 for Toshiba's
eDRAM
Embedded DRAM (eDRAM) is dynamic random-access memory (DRAM) integrated on the same die or multi-chip module (MCM) of an application-specific integrated circuit (ASIC) or microprocessor. eDRAM's cost-per-bit is higher when compared to equivalen ...
and Samsung's 2
Gb NAND flash
Flash memory is an Integrated circuit, electronic Non-volatile memory, non-volatile computer memory storage medium that can be electrically erased and reprogrammed. The two main types of flash memory, NOR flash and NAND flash, are named for t ...
memory.
IBM demonstrated a 90nm
silicon-on-insulator
In semiconductor manufacturing, silicon on insulator (SOI) technology is fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to reduce parasitic capacitance within the device, thereby improving perfo ...
(SOI)
CMOS
Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
process, with development led by
Ghavam Shahidi
Ghavam G. Shahidi (born 1959) is an Iranian-American electrical engineer and IBM Fellow. He is the director of Silicon Technology at the IBM Thomas J Watson Research Center. He is best known for his pioneering work in silicon-on-insulator (SOI) ...
, in 2002. The same year, Intel demonstrated a 90nm
strained-silicon process. Fujitsu commercially introduced its 90nm process in 2003
[65nm CMOS Process Technology](_blank)
/ref> followed by TSMC in 2004.
Gurtej Singh Sandhu of Micron Technology initiated the development of atomic layer deposition
Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. The majority of ALD reactions use two chemicals called precursors (also ...
high-k films
A film also called a movie, motion picture, moving picture, picture, photoplay or (slang) flick is a work of visual art that simulates experiences and otherwise communicates ideas, stories, perceptions, feelings, beauty, or atmosphere ...
for DRAM
Dynamic random-access memory (dynamic RAM or DRAM) is a type of random-access semiconductor memory that stores each bit of data in a memory cell, usually consisting of a tiny capacitor and a transistor, both typically based on metal-oxid ...
memory devices. This helped drive cost-effective implementation of semiconductor memory
Semiconductor memory is a digital electronic semiconductor device used for digital data storage, such as computer memory. It typically refers to devices in which data is stored within metal–oxide–semiconductor (MOS) memory cells on a sili ...
, starting with 90nm node
In general, a node is a localized swelling (a "knot") or a point of intersection (a vertex).
Node may refer to:
In mathematics
*Vertex (graph theory), a vertex in a mathematical graph
*Vertex (geometry), a point where two or more curves, lines, ...
DRAM.
Example: Elpida 90 nm DDR2 SDRAM process
Elpida Memory
Micron Memory Japan, K.K. is a Japanese subsidiary of Micron Technology. It was formerly known as established in 1999 that developed, designed, manufactured and sold dynamic random-access memory (DRAM) products. It was also a semiconductor fou ...
's 90 nm DDR2 SDRAM
Double Data Rate 2 Synchronous Dynamic Random-Access Memory (DDR2 SDRAM) is a double data rate (DDR) synchronous dynamic random-access memory (SDRAM) interface. It superseded the original DDR SDRAM specification, and was itself superseded by DDR3 ...
process.
* Use of 300 mm wafer size
* Use of KrF (248 nm) lithography with optical proximity correction
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The need for OPC is seen mainly in the making of semiconductor devices and is due to ...
* 512 Mbit
* 1.8 V operation
* Derivative of earlier 110 nm and 100 nm processes
Processors using 90 nm process technology
* Sony/Toshiba EE+ GS (PlayStation 2
The PlayStation 2 (PS2) is a home video game console developed and marketed by Sony Computer Entertainment. It was first released in Japan on 4 March 2000, in North America on 26 October 2000, in Europe on 24 November 2000, and in Australia on 3 ...
) - 2003
* Sony/Toshiba/IBM Cell Processor
Cell is a Multi-core processor, multi-core microprocessor microarchitecture that combines a general-purpose PowerPC Central processing unit, core of modest performance with streamlined coprocessor, coprocessing elements which greatly accelerate m ...
- 2005
* IBM PowerPC G5 970FX
The PowerPC 970, PowerPC 970FX, and PowerPC 970MP are 64-bit PowerPC processors from IBM introduced in 2002. When used in PowerPC-based Macintosh computers, Apple referred to them as the PowerPC G5.
The 970 family was created through a colla ...
- 2004
* IBM PowerPC G5 970MP - 2005
* IBM PowerPC G5 970GX - 2005
* IBM "Waternoose" Xbox 360 Processor - 2005
* Intel Pentium 4
Pentium 4 is a series of single-core CPUs for desktops, laptops and entry-level servers manufactured by Intel. The processors were shipped from November 20, 2000 until August 8, 2008. The production of Netburst processors was active from 2000 ...
Prescott - 2004-02
* Intel Celeron
Celeron is Intel's brand name for low-end IA-32 and x86-64 computer microprocessor models targeted at low-cost personal computers.
Celeron processors are compatible with IA-32
IA-32 (short for "Intel Architecture, 32-bit", commonly called ...
D Prescott-256 - 2004-05
* Intel Pentium M
The Pentium M is a family of mobile 32-bit single-core x86 microprocessors (with the modified Intel P6 microarchitecture) introduced in March 2003 and forming a part of the Intel Carmel notebook platform under the then new Centrino brand. The '' ...
Dothan Dothan is a place-name from the Hebrew Bible, identified with Tel Dothan. It may refer to:
* Dothan, Alabama, a city in Dale, Henry, and Houston counties in the U.S. state of Alabama
* Dani Dothan, lyricist and vocalist for the Israeli rock and ne ...
- 2004-05
* Intel Celeron
Celeron is Intel's brand name for low-end IA-32 and x86-64 computer microprocessor models targeted at low-cost personal computers.
Celeron processors are compatible with IA-32
IA-32 (short for "Intel Architecture, 32-bit", commonly called ...
M Dothan Dothan is a place-name from the Hebrew Bible, identified with Tel Dothan. It may refer to:
* Dothan, Alabama, a city in Dale, Henry, and Houston counties in the U.S. state of Alabama
* Dani Dothan, lyricist and vocalist for the Israeli rock and ne ...
-1024 - 2004-08
* Intel Xeon
Xeon ( ) is a brand of x86 microprocessors designed, manufactured, and marketed by Intel, targeted at the non-consumer workstation, server, and embedded system markets. It was introduced in June 1998. Xeon processors are based on the same arc ...
Nocona, Irwindale, Cranford, Potomac, Paxville - 2004-06
* Intel Pentium D
Pentium D is a range of desktop 64-bit x86-64 processors based on the NetBurst microarchitecture, which is the dual-core variant of the Pentium 4 manufactured by Intel. Each CPU comprised two dies, each containing a single core, residing next to ...
Smithfield - 2005-05
* AMD Athlon 64
The Athlon 64 is a ninth-generation, AMD64-architecture microprocessor produced by Advanced Micro Devices (AMD), released on September 23, 2003. It is the third processor to bear the name ''Athlon'', and the immediate successor to the Athlon XP. T ...
Winchester, Venice, San Diego, Orleans - 2004-10
* AMD Athlon 64 X2
The Athlon 64 X2 is the first native dual-core desktop central processing unit (CPU) designed by Advanced Micro Devices (AMD). It was designed from scratch as native dual-core by using an already multi-CPU enabled Athlon 64, joining it with ano ...
Manchester, Toledo, Windsor - 2005-05
* AMD Sempron
Sempron has been the marketing name used by AMD for several different budget desktop CPUs, using several different technologies and CPU socket formats. The Sempron replaced the AMD Duron processor and competed against Intel's Celeron series of pr ...
Palermo and Manila - 2004-08
* AMD Turion 64
AMD Turion is the brand name AMD applies to its x86-64 low-power consumption (''mobile'') processors codenamed ''K8L''. The Turion 64 and Turion 64 X2/Ultra processors compete with Intel's mobile processors, initially the '' Pentium M'' and the I ...
Lancaster and Richmond - 2005-03
* NVIDIA
Nvidia CorporationOfficially written as NVIDIA and stylized in its logo as VIDIA with the lowercase "n" the same height as the uppercase "VIDIA"; formerly stylized as VIDIA with a large italicized lowercase "n" on products from the mid 1990s to ...
GeForce
GeForce is a brand of graphics processing units (GPUs) designed by Nvidia. As of the GeForce 40 series, there have been eighteen iterations of the design. The first GeForce products were discrete GPUs designed for add-on graphics boards, inten ...
8800 GTS (G80) - 2006
* AMD Turion 64 X2
AMD Turion is the brand name AMD applies to its x86-64 low-power consumption (''mobile'') processors codenamed ''K8L''. The Turion 64 and Turion 64 X2/Ultra processors compete with Intel's mobile processors, initially the ''Pentium M'' and the Int ...
Taylor and Trinidad - 2006-05
* AMD Opteron
Opteron is AMD's x86 former server and workstation processor line, and was the first processor which supported the AMD64 instruction set architecture (known generically as x86-64 or AMD64). It was released on April 22, 2003, with the ''SledgeHa ...
Venus, Troy, and Athens - 2005-08
* AMD Dual-core Opteron
Opteron is AMD's x86 former server and workstation processor line, and was the first processor which supported the AMD64 instruction set architecture (known generically as x86-64 or AMD64). It was released on April 22, 2003, with the ''SledgeHa ...
Denmark, Italy, Egypt, Santa Ana, and Santa Rosa
* VIA C7
The VIA C7 is an x86 central processing unit designed by Centaur Technology and sold by VIA Technologies.
Product history
The C7 delivers a number of improvements to the older VIA C3 cores but is nearly identical to the latest VIA C3 Nehemiah ...
- 2005-05
* Loongson (Godson) 2Е STLS2E02 - 2007-04
* Loongson (Godson) 2F STLS2F02 - 2008-07
* MCST-4R
The MCST R1000 (russian: МЦСТ R1000) is a 64-bit microprocessor developed by Moscow Center of SPARC Technologies (MCST) and fabricated by TSMC.
During development this microprocessor was designated as MCST-4R.
MCST R1000 Highlights
*implement ...
- 2010-12
* Elbrus-2S+ - 2011-11
See also
*Photolithography
In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect ...
References
External links
PC World Review
Review
ITworld
International Data Group (IDG, Inc.) is a market intelligence and demand generation company focused on the technology industry. IDG, Inc.’s mission is centered around supporting the technology industry through research, data, marketing technol ...
AMD
Fujitsu
2004 introductions
*00090
American inventions
Iranian inventions
{{nano-tech-stub