The 65
nm process is an advanced
lithographic
Lithography () is a planographic method of printing originally based on the immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by the German a ...
node
In general, a node is a localized swelling (a "knot") or a point of intersection (a vertex).
Node may refer to:
In mathematics
*Vertex (graph theory), a vertex in a mathematical graph
*Vertex (geometry), a point where two or more curves, lines, ...
used in volume
CMOS
Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", ) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFE ...
(
MOSFET
The metal–oxide–semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET) is a type of field-effect transistor (FET), most commonly fabricated by the controlled oxidation of silicon. It has an insulated gate, the voltage of which d ...
)
semiconductor fabrication
Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuit (IC) chips such as modern computer processors, microcontrollers, and memory chips such as NAND flash and DRAM that are pres ...
. Printed linewidths (i.e.
transistor gate lengths) can reach as low as 25 nm on a nominally 65 nm process, while the pitch between two lines may be greater than 130 nm. For
comparison
Comparison or comparing is the act of evaluating two or more things by determining the relevant, comparable characteristics of each thing, and then determining which characteristics of each are similar to the other, which are different, and t ...
, cellular
ribosome
Ribosomes ( ) are macromolecular machines, found within all cells, that perform biological protein synthesis (mRNA translation). Ribosomes link amino acids together in the order specified by the codons of messenger RNA (mRNA) molecules to ...
s are about 20 nm end-to-end. A crystal of bulk
silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic tab ...
has a
lattice constant
A lattice constant or lattice parameter is one of the physical dimensions and angles that determine the geometry of the unit cells in a crystal lattice, and is proportional to the distance between atoms in the crystal. A simple cubic crystal has o ...
of 0.543 nm, so such transistors are on the order of 100
atom
Every atom is composed of a nucleus and one or more electrons bound to the nucleus. The nucleus is made of one or more protons and a number of neutrons. Only the most common variety of hydrogen has no neutrons.
Every solid, liquid, gas, and ...
s across.
Toshiba
, commonly known as Toshiba and stylized as TOSHIBA, is a Japanese multinational conglomerate corporation headquartered in Minato, Tokyo, Japan. Its diversified products and services include power, industrial and social infrastructure system ...
and
Sony
, commonly stylized as SONY, is a Japanese multinational conglomerate corporation headquartered in Minato, Tokyo, Japan. As a major technology company, it operates as one of the world's largest manufacturers of consumer and professional ...
announced the 65 nm process in 2002, before
Fujitsu
is a Japanese multinational information and communications technology equipment and services corporation, established in 1935 and headquartered in Tokyo. Fujitsu is the world's sixth-largest IT services provider by annual revenue, and the la ...
and Toshiba began production in 2004, and then
TSMC
Taiwan Semiconductor Manufacturing Company Limited (TSMC; also called Taiwan Semiconductor) is a Taiwanese multinational semiconductor contract manufacturing and design company. It is the world's most valuable semiconductor company, the world' ...
began production in 2005. By September 2007,
Intel
Intel Corporation is an American multinational corporation and technology company headquartered in Santa Clara, California. It is the world's largest semiconductor chip manufacturer by revenue, and is one of the developers of the x86 seri ...
,
AMD
Advanced Micro Devices, Inc. (AMD) is an American multinational semiconductor company based in Santa Clara, California, that develops computer processors and related technologies for business and consumer markets. While it initially manufactur ...
,
IBM,
UMC and
Chartered were also producing 65 nm chips.
While feature sizes may be drawn as 65 nm or less, the wavelengths of light used for
lithography
Lithography () is a planographic method of printing originally based on the immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by the German a ...
are 193 nm and 248 nm. Fabrication of sub-wavelength features requires special imaging technologies, such as
optical proximity correction
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The need for OPC is seen mainly in the making of semiconductor devices and is due to ...
and
phase-shifting masks. The cost of these techniques adds substantially to the cost of manufacturing sub-wavelength semiconductor products, with the cost increasing exponentially with each advancing technology node. Furthermore, these costs are multiplied by an increasing number of mask layers that must be printed at the minimum pitch, and the reduction in yield from printing so many layers at the cutting edge of the technology. For new integrated-circuit designs, this factors into the costs of prototyping and production.
Gate thickness, another important dimension, is reduced to as little as 1.2 nm (Intel). Only a few atoms insulate the "switch" part of the transistor, causing charge to flow through it. This undesired effect, ''
leakage'', is caused by
quantum tunneling
In physics, a quantum (plural quanta) is the minimum amount of any physical entity (physical property) involved in an interaction. The fundamental notion that a physical property can be "quantized" is referred to as "the hypothesis of quantizati ...
. The new chemistry of
high-κ gate dielectrics must be combined with existing techniques, including
substrate bias and multiple threshold voltages, to prevent leakage from prohibitively consuming power.
IEDM papers from Intel in 2002, 2004, and 2005 illustrate the industry trend that the transistor sizes can no longer scale along with the rest of the feature dimensions (gate width only changed from 220 nm to 210 nm going from 90 nm to 65 nm technologies). However, the
interconnects (metal and poly pitch) continue to shrink, thus reducing chip area and chip cost, as well as shortening the distance between transistors, leading to higher-performance devices of greater complexity when compared with earlier nodes.
Example: Fujitsu 65 nm process
* Gate length: 30 nm (high-performance) to 50 nm (low-power)
* Core voltage: 1.0 V
* 11
Cu interconnect
In semiconductor technology, copper interconnects are interconnects made of copper. They are used in silicon integrated circuits (ICs) to reduce propagation delays and power consumption. Since copper is a better conductor than aluminium, ICs usi ...
layers using nano-clustering silica as
ultralow κ dielectric (κ=2.25)
* Metal 1 pitch: 180 nm
*
Nickel silicide
Nickel silicides include several intermetallic compounds of nickel and silicon. Nickel silicides are important in microelectronics as they form at junctions of nickel and silicon. Additionally thin layers of nickel silicides may have application ...
source/drain
* Gate oxide thickness: 1.9 nm (n), 2.1 nm (p)
There are actually two versions of the process: CS200, focusing on high performance, and CS200A, focusing on low power.
Processors using 65 nm manufacturing technology
* Sony/Toshiba
EE+
GS (
PStwo
The PlayStation 2 (PS2) is a home video game console developed and marketed by Sony Computer Entertainment. It was first released in Japan on 4 March 2000, in North America on 26 October 2000, in Europe on 24 November 2000, and in Australia on 3 ...
) - 2005
*
Intel Core
Intel Core is a line of streamlined midrange consumer, workstation and enthusiast computer central processing units (CPUs) marketed by Intel Corporation. These processors displaced the existing mid- to high-end Pentium processors at the time ...
– 2006-01-05
* Intel
Pentium 4
Pentium 4 is a series of single-core CPUs for desktops, laptops and entry-level servers manufactured by Intel. The processors were shipped from November 20, 2000 until August 8, 2008. The production of Netburst processors was active from 2000 ...
(Cedar Mill) – 2006-01-16
* Intel
Pentium D
Pentium D is a range of desktop 64-bit x86-64 processors based on the NetBurst microarchitecture, which is the dual-core variant of the Pentium 4 manufactured by Intel. Each CPU comprised two dies, each containing a single core, residing next to ...
900-series – 2006-01-16
* Intel
Xeon
Xeon ( ) is a brand of x86 microprocessors designed, manufactured, and marketed by Intel, targeted at the non-consumer workstation, server, and embedded system markets. It was introduced in June 1998. Xeon processors are based on the same arc ...
(
Sossaman) – 2006-03-14
* Intel
Celeron D
Celeron is Intel's brand name for low-end IA-32 and x86-64 computer microprocessor models targeted at low-cost personal computers.
Celeron processors are compatible with IA-32 software. They typically offer less performance per clock speed comp ...
(Cedar Mill cores) – 2006-05-28
* Intel
Core 2 – 2006-07-27
* AMD
Athlon 64 series (starting from Lima) – 2007-02-20
* AMD
Turion 64 X2
AMD Turion is the brand name AMD applies to its x86-64 low-power consumption (''mobile'') processors codenamed ''K8L''. The Turion 64 and Turion 64 X2/Ultra processors compete with Intel's mobile processors, initially the ''Pentium M'' and the Int ...
series (starting from Tyler) – 2007-05-07
* Microsoft Xbox 360 "Falcon" CPU – 2007–09
*
NVIDIA
Nvidia CorporationOfficially written as NVIDIA and stylized in its logo as VIDIA with the lowercase "n" the same height as the uppercase "VIDIA"; formerly stylized as VIDIA with a large italicized lowercase "n" on products from the mid 1990s to ...
GeForce
8800GT GPU – 2007-10-29
* Sony/Toshiba/IBM
Cell
Cell most often refers to:
* Cell (biology), the functional basic unit of life
Cell may also refer to:
Locations
* Monastic cell, a small room, hut, or cave in which a religious recluse lives, alternatively the small precursor of a monastery ...
(
PlayStation 3
The PlayStation 3 (PS3) is a home video game console developed by Sony Interactive Entertainment, Sony Computer Entertainment. The successor to the PlayStation 2, it is part of the PlayStation brand of consoles. It was first released on Novemb ...
) (updated) – 2007-10-30
* Sun
UltraSPARC T2
Sun Microsystems' UltraSPARC T2 microprocessor is a multithreading, multi-core CPU. It is a member of the SPARC family, and the successor to the UltraSPARC T1. The chip is sometimes referred to by its codename, Niagara 2. Sun started selling ...
– 2007–10
* AMD
Phenom
Phenom may refer to:
* AMD Phenom, the 64-bit AMD desktop processor line based on the K10 microarchitecture
** Phenom II, a family of AMD's multi-core 45 nm processors using the AMD K10 microarchitecture
* Phenom (electron microscope), a fast elec ...
series
* IBM's
z10
* Microsoft Xbox 360 "Opus" CPU – 2008
* TI
OMAP 3
The OMAP (Open Multimedia Applications Platform) family, developed by Texas Instruments, was a series of image/video processors. They are proprietary system on chips (SoCs) for portable and mobile multimedia applications. OMAP devices generally i ...
Family – 2008-02
*
VIA Nano
The VIA Nano (formerly code-named VIA Isaiah) is a 64-bit CPU for personal computers. The VIA Nano was released by VIA Technologies in 2008 after five years of development by its CPU division, Centaur Technology. This new Isaiah 64-bit architec ...
– 2008-05
* AMD
Turion Ultra – 2008-06
* Microsoft Xbox 360 "Jasper" CPU – 2008–10
*
Loongson
Loongson () is the name of a family of general-purpose, MIPS architecture-compatible microprocessors, as well as the name of the Chinese fabless company (Loongson Technology) that develops them. The processors are alternately called Godson pro ...
– 2009
* Nikon
Expeed 2
The Nikon Expeed image/video processors (often styled ''EXPEED'') are media processors for Nikon's digital cameras. They perform a large number of tasks: Bayer filtering, demosaicing, image sensor corrections/dark-frame subtraction, image noise ...
– 2010
*
MCST
MCST (russian: МЦСТ, acronym for Moscow Center of SPARC Technologies) is a Russian microprocessor company that was set up in 1992. Different types of processors made by MCST were used in personal computers, servers and computing systems. MC ...
Elbrus 4C – 2014
* SRISA 1890VM9Ya – 2016
References
Sources
*
Engineering Sample of the "Yonah" core Pentium M IDF Spring 2005, ExtremeTech
*
{{DEFAULTSORT:65 Nanometre
*00065
Japanese inventions