PROLITH
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PROLITH
PROLITH (abbreviated from Positive Resist Optical LITHography) is a computer simulator modeling the optical and chemical aspects of photolithography. Chris Mack started developing PROLITH after he began working in the field of photolithography at the NSA in 1983. PROLITH was first developed on an IBM PC. The models implemented by the software were based on the work done by Rick Dill at IBM and Andy Neureuther at UC Berkeley, together with Chris Mack's own contributions such as the Mack model. Originally PROLITH was given away for free, while NSA was paying Chris Mack's salary.{{cite web, url = http://www.lithoguru.com/scientist/resume.html , title = Chris Mack's resume In 1990 he founded FINLE Technologies to commercialize PROLITH. The first commercial version of the software, named PROLITH/2, was released in June of that year. PROLITH was made easier to use and it grew to include many more aspects of lithography simulation. FINLE Technologies was purchased in Febru ...
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Chris Mack (scientist)
Chris Mack (born c. 1960) is an expert in photolithography. He received multiple undergraduate degrees from Rose-Hulman Institute of Technology in 1982, a master of science degree in electrical engineering from the University of Maryland, College Park in 1989, and a PhD in chemical engineering from The University of Texas in 1998. He became acquainted with lithography while working at the Microelectronics Research Laboratory of the NSA. After an assignment to Sematech, he quit his job at the NSA and founded FINLE Technologies (1990) to commercialize PROLITH, the simulator he had developed to model optical and chemical aspects of photolithography. FINLE Technologies was purchased in February 2000 by KLA-Tencor, which now markets PROLITH. In 2017, he cofoundeFractilia, Inc.to deliver MetroLER, a software product that models stochastic effects in the semiconductor manufacturing process. He currently serves as CTO of Fractilia. He is currently an adjunct faculty member at The Unive ...
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Computer Simulation
Computer simulation is the process of mathematical modelling, performed on a computer, which is designed to predict the behaviour of, or the outcome of, a real-world or physical system. The reliability of some mathematical models can be determined by comparing their results to the real-world outcomes they aim to predict. Computer simulations have become a useful tool for the mathematical modeling of many natural systems in physics (computational physics), astrophysics, climatology, chemistry, biology and manufacturing, as well as human systems in economics, psychology, social science, health care and engineering. Simulation of a system is represented as the running of the system's model. It can be used to explore and gain new insights into new technology and to estimate the performance of systems too complex for analytical solutions. Computer simulations are realized by running computer programs that can be either small, running almost instantly on small devices, or large ...
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Optical
Optics is the branch of physics that studies the behaviour and properties of light, including its interactions with matter and the construction of instruments that use or detect it. Optics usually describes the behaviour of visible, ultraviolet, and infrared light. Because light is an electromagnetic wave, other forms of electromagnetic radiation such as X-rays, microwaves, and radio waves exhibit similar properties. Most optical phenomena can be accounted for by using the classical electromagnetic description of light. Complete electromagnetic descriptions of light are, however, often difficult to apply in practice. Practical optics is usually done using simplified models. The most common of these, geometric optics, treats light as a collection of rays that travel in straight lines and bend when they pass through or reflect from surfaces. Physical optics is a more comprehensive model of light, which includes wave effects such as diffraction and interference that cannot be ac ...
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