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Immersion Lithography
Immersion lithography is a photolithography resolution enhancement technique for manufacturing integrated circuits (ICs) that replaces the usual air gap between the final lens and the wafer surface with a liquid medium that has a refractive index greater than one. The resolution is increased by a factor equal to the refractive index of the liquid. Current immersion lithography tools use highly purified water for this liquid, achieving feature sizes below 45 nanometers. ASML and Nikon are currently the only manufacturers of immersion lithography systems. History The idea for immersion lithography was patented in 1984 by Takanashi et al. It was also proposed by Taiwanese engineer Burn J. Lin and realized in the 1980s. In 2004, IBM's director of silicon technology, Ghavam Shahidi, announced that IBM planned to commercialize lithography based on light filtered through water. Immersion lithography is now being extended to sub- 20nm nodes through the use of multiple patterning. B ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Immersion Lithography Illustration
Immersion may refer to: The arts * "Immersion", a 2012 story by Aliette de Bodard * ''Immersion'', a French comic book series by Léo Quievreux * ''Immersion'' (album), the third album by Australian group Pendulum * ''Immersion'' (film), a 2021 Chilean thriller film * Immersion (series), a webseries which test the concepts of video games in real life, created by Rooster Teeth Productions * Immersion journalism, a style of journalism Science and technology * Immersion lithography or immersion microscopy, optical techniques in which liquid is between the objective and image plane in order to raise numerical aperture * Immersion (mathematics), a smooth map whose differential is everywhere injective, related to the mathematical concept of an embedding * Immersion (virtual reality), the perception of being physically present in a non-physical world, created by using VR Other uses * Immersion baptism, a type of baptism whereby the subject is immersed in water * Immersion Corporation ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Ultraviolet
Ultraviolet (UV) is a form of electromagnetic radiation with wavelength from 10 nm (with a corresponding frequency around 30 PHz) to 400 nm (750 THz), shorter than that of visible light, but longer than X-rays. UV radiation is present in sunlight, and constitutes about 10% of the total electromagnetic radiation output from the Sun. It is also produced by electric arcs and specialized lights, such as mercury-vapor lamps, tanning lamps, and black lights. Although long-wavelength ultraviolet is not considered an ionizing radiation because its photons lack the energy to ionize atoms, it can cause chemical reactions and causes many substances to glow or fluoresce. Consequently, the chemical and biological effects of UV are greater than simple heating effects, and many practical applications of UV radiation derive from its interactions with organic molecules. Short-wave ultraviolet light damages DNA and sterilizes surfaces with which it comes into contact. F ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Lithography (microfabrication)
Lithography () is a planographic method of printing originally based on the immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by the German author and actor Alois Senefelder and was initially used mostly for musical scores and maps.Meggs, Philip B. A History of Graphic Design. (1998) John Wiley & Sons, Inc. p 146 Carter, Rob, Ben Day, Philip Meggs. Typographic Design: Form and Communication, Third Edition. (2002) John Wiley & Sons, Inc. p 11 Lithography can be used to print text or images onto paper or other suitable material. A lithograph is something printed by lithography, but this term is only used for fine art prints and some other, mostly older, types of printed matter, not for those made by modern commercial lithography. Originally, the image to be printed was drawn with a greasy substance, such as oil, fat, or wax onto the surface of a smooth and flat limestone pla ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Water Immersion Objective
In light microscopy, a water immersion objective is a specially designed objective lens used to increase the resolution of the microscope. This is achieved by immersing both the lens and the specimen in water which has a higher refractive index than air, thereby increasing the numerical aperture of the objective lens. Applications Water immersion objectives are used not only at very large magnifications that require high resolving power, but also of moderate power as there are water immersion objectives as low as 4X. Objectives with high power magnification have short focal lengths, facilitating the use of water. The water is applied to the specimen (conventional microscope), and the stage is raised, immersing the objective in water. Sometimes with water dipping objectives, the objective is directly immersed in the solution of water which contains the specimens to look at. Electrophoretic preparations used in the case of comet assay can benefit from the use of water objectives. ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Oil Immersion
In light microscopy, oil immersion is a technique used to increase the resolving power of a microscope. This is achieved by immersing both the objective lens and the specimen in a transparent oil of high refractive index, thereby increasing the numerical aperture of the objective lens. Without oil, light waves reflect off the slide specimen through the glass cover slip, through the air, and into the microscope lens (see the colored figure to the right). Unless a wave comes out at a 90-degree angle, it bends when it hits a new substance, the amount of bend depending on the angle. This distorts the image. Air has a very different index of refraction from glass, making for a larger bend compared to oil, which has an index more similar to glass. Specially manufactured oil can have nearly exactly the same refractive index as glass, making an oil immersed lens nearly as effective as having entirely glass to the sample (which would be impractical). Immersion oils are transparent oils ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Pitch Splitting
Pitch may refer to: Acoustic frequency * Pitch (music), the perceived frequency of sound including "definite pitch" and "indefinite pitch" ** Absolute pitch or "perfect pitch" ** Pitch class, a set of all pitches that are a whole number of octaves apart ** Relative pitch, the ability to identify a given musical interval between two notes * Pitch accent, a form of accentuation in speech Business * Sales pitch, a line of talk that attempts to persuade someone or something ** Pitch (filmmaking), a proposal for a film ** Elevator pitch, a very short sales presentation, allegedly short enough to be made during an elevator ride Measurement Movement about the transverse axis * Pitch angle (or pitch rotation), one of the angular degrees of freedom of any stiff body (for example a vehicle), describing rotation about the side-to-side axis ** Pitch (aviation), one of the aircraft principal axes of rotation (nose-up or nose-down angle measured from horizontal axis) ** Pitch (ship motion ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Argon Fluoride Laser
The argon fluoride laser (ArF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while "exciplex" is short for "excited complex". An excimer laser typically uses a mixture of a noble gas (argon, krypton, or xenon) and a halogen gas (fluorine or chlorine), which under suitable conditions of electrical stimulation and high pressure, emits coherent stimulated radiation (laser light) in the ultraviolet range. ArF (and KrF) excimer lasers are widely used in high-resolution photolithography machines, a critical technology for microelectronic chip manufacturing. Excimer laser lithography has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to 7 nanometers in 2018. Extreme ul ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Immersion Tool Throughput
Immersion may refer to: The arts * "Immersion", a 2012 story by Aliette de Bodard * ''Immersion'', a French comic book series by Léo Quievreux * ''Immersion'' (album), the third album by Australian group Pendulum * ''Immersion'' (film), a 2021 Chilean thriller film * Immersion (series), a webseries which test the concepts of video games in real life, created by Rooster Teeth Productions * Immersion journalism, a style of journalism Science and technology * Immersion lithography or immersion microscopy, optical techniques in which liquid is between the objective and image plane in order to raise numerical aperture * Immersion (mathematics), a smooth map whose differential is everywhere injective, related to the mathematical concept of an embedding * Immersion (virtual reality), the perception of being physically present in a non-physical world, created by using VR Other uses * Immersion baptism, a type of baptism whereby the subject is immersed in water * Immersion Corporation ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Line-space
In typography, leading ( ) is the space between adjacent lines of type; the exact definition varies. In hand typesetting, leading is the thin strips of lead (or aluminium) that were inserted between lines of type in the composing stick to increase the vertical distance between them. The thickness of the strip is called leading and is equal to the difference between the size of the type and the distance from one baseline to the next. For instance, given a type size of 10 points and a distance between baselines of 12 points, the leading would be 2 points. The term is still used in modern page-layout software such as QuarkXPress, the Affinity Suite, and Adobe InDesign. Consumer-oriented word-processing software often talks of line spacing or, more accurately, interline spacing. Origins The word comes from lead strips that were put between set lines of lead type, hence the pronunciation "ledding" and not "leeding". The practice became popular in the eighteenth c ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Polarization Effect
In social psychology, group polarization refers to the tendency for a group to make decisions that are more extreme than the initial inclination of its members. These more extreme decisions are towards greater risk if individuals' initial tendencies are to be risky and towards greater caution if individuals' initial tendencies are to be cautious. The phenomenon also holds that a group's attitude toward a situation may change in the sense that the individuals' initial attitudes have strengthened and intensified after group discussion, a phenomenon known as attitude polarization. Overview Group polarization is an important phenomenon in social psychology and is observable in many social contexts. For example, a group of women who hold moderately feminist views tend to demonstrate heightened pro-feminist beliefs following group discussion. Similarly, studies have shown that after deliberating together, mock jury members often decided on punitive damage awards that were either large ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
Antireflection
An antireflective, antiglare or anti-reflection (AR) coating is a type of optical coating applied to the surface of lenses, other optical elements, and photovoltaic cells to reduce reflection. In typical imaging systems, this improves the efficiency since less light is lost due to reflection. In complex systems such as cameras, binoculars, telescopes, and microscopes the reduction in reflections also improves the contrast of the image by elimination of stray light. This is especially important in planetary astronomy. In other applications, the primary benefit is the elimination of the reflection itself, such as a coating on eyeglass lenses that makes the eyes of the wearer more visible to others, or a coating to reduce the glint from a covert viewer's binoculars or telescopic sight. Many coatings consist of transparent thin film structures with alternating layers of contrasting refractive index. Layer thicknesses are chosen to produce destructive interference in the beams r ... [...More Info...] [...Related Items...] OR: [Wikipedia] [Google] [Baidu] |
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