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FOUP
FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement. FOUPs began to appear along with the first 300mm wafer processing tools in the mid 1990s. The size of the wafers and their comparative lack of rigidity meant that SMIF was not a viable technology. FOUPs were designed with the constraints of 300mm in mind, with the removable cassette being replaced by fins in the FOUP which hold the wafers in place, and the bottom opening door being replaced by a front opening door to allow robot handling mechanisms to access the wafers directly from the FOUP. The weight of a fully loaded 25 wafer FOUP at around 9 kilograms means that automated material handling systems are essential for all but the smallest of fabrication plants. Pitch for 300mm Foup is 10mm. ...
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Semiconductor Device Fabrication
Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuit (IC) chips such as modern computer processors, microcontrollers, and memory chips such as NAND flash and DRAM that are present in everyday electrical and electronics, electronic devices. It is a multiple-step sequence of Photolithography, photolithographic and chemical processing steps (such as surface passivation, thermal oxidation, planar process, planar diffusion and p–n junction isolation, junction isolation) during which electronic circuits are gradually created on a wafer (electronics), wafer made of pure semiconducting material. Silicon is almost always used, but various compound semiconductors are used for specialized applications. The entire manufacturing process takes time, from start to packaged chips ready for shipment, at least six to eight weeks (tape-out only, not including the circuit design) and is performed in highly specialized semiconduct ...
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Wafer (electronics)
In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon Crystalline silicon or (c-Si) Is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semiconduc ... (c-Si), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The wafer serves as the substrate (materials science), substrate for microelectronic devices built in and upon the wafer. It undergoes many microfabrication processes, such as doping (semiconductor), doping, ion implantation, Etching (microfabrication), etching, thin-film deposition of various materials, and Photolithography, photolithographic patterning. Finally, the individual microcircuits are separated by wafer dicing and Integrated circuit packaging, packaged as an integrated circuit. History I ...
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Smif Interface
SMIF (Standard Mechanical Interface) is an isolation technology developed in the 1980s by a group known as the "micronauts" at Hewlett-Packard in Palo Alto. The system is used in semiconductor wafer fabrication and cleanroom environments. It is a SEMI standard. Development The core development team was led by Ulrich Kaempf as engineering manager, under the direction of Mihir Parikh. The core team that developed the technology was driven by Barclay Tullis, who held most of the patents, with Dave Thrasher, who later joined the Silicon Valley Group, and Thomas Atchison, a member of the technical staff under direction of Barclay Tullis. Mihir later provided the technology to SEMI, and then licensed a copy for himself, and spun out Asyst Technologies to provide the technology commercially. Asyst technology subsequent acquire by Brooks Automation in their Versaport. The interface is the same after being acquired Use The purpose of SMIF pods is to isolate wafers from contamination by pr ...
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Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. It is a hard, brittle crystalline solid with a blue-grey metallic luster, and is a tetravalent metalloid and semiconductor. It is a member of group 14 in the periodic table: carbon is above it; and germanium, tin, lead, and flerovium are below it. It is relatively unreactive. Because of its high chemical affinity for oxygen, it was not until 1823 that Jöns Jakob Berzelius was first able to prepare it and characterize it in pure form. Its oxides form a family of anions known as silicates. Its melting and boiling points of 1414 °C and 3265 °C, respectively, are the second highest among all the metalloids and nonmetals, being surpassed only by boron. Silicon is the eighth most common element in the universe by mass, but very rarely occurs as the pure element in the Earth's crust. It is widely distributed in space in cosmic dusts, planetoids, and planets as various forms of silicon dioxide ( ...
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Automated Material Handling System
Automation describes a wide range of technologies that reduce human intervention in processes, namely by predetermining decision criteria, subprocess relationships, and related actions, as well as embodying those predeterminations in machines. Automation has been achieved by various means including mechanical, hydraulic, pneumatic, electrical, electronic devices, and computers, usually in combination. Complicated systems, such as modern factories, airplanes, and ships typically use combinations of all of these techniques. The benefit of automation includes labor savings, reducing waste, savings in electricity costs, savings in material costs, and improvements to quality, accuracy, and precision. Automation includes the use of various equipment and control systems such as machinery, processes in factories, boilers, and heat-treating ovens, switching on telephone networks, steering, and stabilization of ships, aircraft, and other applications and vehicles with reduced human ...
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Radio Frequency
Radio frequency (RF) is the oscillation rate of an alternating electric current or voltage or of a magnetic, electric or electromagnetic field or mechanical system in the frequency range from around to around . This is roughly between the upper limit of audio frequencies and the lower limit of infrared frequencies; these are the frequencies at which energy from an oscillating current can radiate off a conductor into space as radio waves. Different sources specify different upper and lower bounds for the frequency range. Electric current Electric currents that oscillate at radio frequencies (RF currents) have special properties not shared by direct current or lower audio frequency alternating current, such as the 50 or 60 Hz current used in electrical power distribution. * Energy from RF currents in conductors can radiate into space as electromagnetic waves ( radio waves). This is the basis of radio technology. * RF current does not penetrate deeply into electrical c ...
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Front Opening Shipping Box (front Side)
Front may refer to: Arts, entertainment, and media Films * The Front (1943 film), ''The Front'' (1943 film), a 1943 Soviet drama film * ''The Front'', 1976 film Music *The Front (band), an American rock band signed to Columbia Records and active in the 1980s and early 1990s *The Front (Canadian band), a Canadian studio band from the 1980s Periodicals * Front (magazine), ''Front'' (magazine), a British men's magazine * ''Front Illustrated Paper'', a publication of the Yugoslav People's Army Television * Front TV, a Toronto broadcast design and branding firm * The Front (The Blacklist), "The Front" (''The Blacklist''), a 2014 episode of the TV series ''The Blacklist'' * The Front (The Simpsons), "The Front" (''The Simpsons''), a 1993 episode of the TV series ''The Simpsons'' Military * Front (military), a geographical area where armies are engaged in conflict * Front (military formation), roughly, an army group, especially in eastern Europe Places * Front, California, former n ...
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Entegris
Entegris, Inc. is an American provider of products and systems that purify, protect, and transport critical materials used in the semiconductor device fabrication process. Entegris operates out of its headquarters in Billerica, Massachusetts. The company has about 5,800 employees in manufacturing, service center, and research facilities in the United States, Canada, Malaysia, Singapore, Taiwan, China, Korea, Japan, Israel, Ireland, Germany, and France. The company seeks to help manufacturers increase their yields by improving contamination control in several key processes, including photolithography, wet etch and clean, chemical-mechanical planarization, thin-film deposition, bulk chemical processing, wafer and reticle handling and shipping, and testing, assembly and packaging. Approximately 80% of the company's products are used in the semiconductor industry. Products Entegris products include: filtration products that purify process gases and fluids, as well as the ambient en ...
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Marubeni
(, OSE: 8002, NSE: 8002) is a ''sōgō shōsha'' (general trading company) headquartered in Nihonbashi, Chuo, Tokyo, Japan. It is one of the largest ''sogo shosha'' and has leading market shares in cereal and paper pulp trading as well as a strong electrical and industrial plant business. Marubeni is a member of the Mizuho keiretsu. History Marubeni was founded in 1858, where the founder Chubei Itoh moved out of the family business and started a linen trading business with his uncle. It was established in 1918 as Itochu Shoten, Ltd. in a spin-off of certain sales divisions of C. Itoh & Co. (Itochu) into a separate entity. Itochu Shoten merged with Itoh Chobei Shoten in 1921 to form Marubeni Shoten, Ltd. under the leadership of Chobei Itoh IX. Marubeni started out as a textile trading firm and expanded to trade in other consumer and industrial goods during the 1920s. Marubeni was re-combined with Itochu during World War II to form Sanko Kabushiki Kaisha Ltd. (1941–44) and Dai ...
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Shin-Etsu Polymer
is the largest chemical company in Japan, ranked No. 9 in Forbes Global 2000 for chemical sector. Shin-Etsu has the largest global market share for polyvinyl chloride, semiconductor silicon, and photomask substrates. The company was named one of Thomson Reuters Top 100 Global Innovators in 2011, 2012, 2013 and 2014. “Shin-Etsu” in the company's name derives from Shin'etsu Region, where the company established the first chemical plant as Shin-Etsu Nitrogen Fertilizer in 1926, though the company today is headquartered in Tokyo and has its manufacturing locations in 14 countries worldwide. Segments Shin-Etsu splits its business into three distinct groups: ; Organic and inorganic chemicals : Main products: polyvinyl chloride (PVC), silicones, methanol, chloromethane, cellulose derivatives, polyvinyl alcohols, caustic soda, and silicon metals ; Electronics materials : Main products: semiconductor silicon, organic materials, rare earth magnets for the electronics industry ...
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Semiconductor Fabrication Equipment
A semiconductor is a material which has an electrical conductivity value falling between that of a conductor, such as copper, and an insulator, such as glass. Its resistivity falls as its temperature rises; metals behave in the opposite way. Its conducting properties may be altered in useful ways by introducing impurities (" doping") into the crystal structure. When two differently doped regions exist in the same crystal, a semiconductor junction is created. The behavior of charge carriers, which include electrons, ions, and electron holes, at these junctions is the basis of diodes, transistors, and most modern electronics. Some examples of semiconductors are silicon, germanium, gallium arsenide, and elements near the so-called "metalloid staircase" on the periodic table. After silicon, gallium arsenide is the second-most common semiconductor and is used in laser diodes, solar cells, microwave-frequency integrated circuits, and others. Silicon is a critical element for fabrica ...
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