Argon Fluoride Laser
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Argon Fluoride Laser
The argon fluoride laser (ArF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while "exciplex" is short for "excited complex". An excimer laser typically uses a mixture of a noble gas (argon, krypton, or xenon) and a halogen gas (fluorine or chlorine), which under suitable conditions of electrical stimulation and high pressure, emits coherent stimulated radiation (laser light) in the ultraviolet range. ArF (and KrF) excimer lasers are widely used in high-resolution photolithography machines, a critical technology for microelectronic chip manufacturing. Excimer laser lithography has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to 7 nanometers in 2018. Extreme ...
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Excimer Laser
An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining. Since 1960s excimer lasers are widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing. Terminology and history The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. Most excimer lasers are of the noble gas halide type, for which the term ''excimer'' is, strictly speaking, a misnomer. (Although less commonly used, the proper term for such is an exciplex laser.) Excimer laser was proposed in 1960 by Fritz Houtermans. The excimer laser development started with the observation of a nascent spectral line narrowing at 176 nm  reported in 1971 by Nikolai Basov, V. A. Danilychev and Yu. M. Popov, at the Leb ...
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Ablation
Ablation ( la, ablatio – removal) is removal or destruction of something from an object by vaporization, chipping, erosion, erosive processes or by other means. Examples of ablative materials are described below, and include spacecraft material for ascent and atmospheric reentry, ice and snow in glaciology, biological tissues in medicine and passive fire protection materials. Artificial intelligence In artificial intelligence (AI), especially machine learning, Ablation (artificial intelligence), ablation is the removal of a component of an AI system. The term is by analogy with biology: removal of components of an organism. Biology Biological ablation is the removal of a biological structure or functionality. Genetic ablation is another term for gene silencing, in which gene expression is abolished through the alteration or deletion of genetic sequence information. In cell ablation, individual cells in a population or culture are destroyed or removed. Both can be used as ...
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Nike Laser
The Nike laser at the United States Naval Research Laboratory in Washington, DC is a 56-beam, 4–5 kJ per pulse electron beam pumped krypton fluoride excimer laser which operates in the ultraviolet at 248 nm with pulsewidths of a few nanoseconds. Nike was completed in the late 1980s and is used for investigations into inertial confinement fusion. By using a KrF laser with induced spatial incoherence (ISI) optical smoothing, the modulations in the laser focal profile (beam intensity anisotropy) are only 1% in one beam and < 0.3% with a 44-beam overlap. This feature is especially important for minimizing the seeding of Rayleigh-Taylor instabilities in the imploding fusion target capsule plasma.


Background

In a gas-based laser, the en ...
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Electrolaser
An electrolaser is a type of electroshock weapon that is also a directed-energy weapon. It uses lasers to form an electrically conductive ''laser-induced plasma channel'' (LIPC). A fraction of a second later, a powerful electric current is sent down this plasma channel and delivered to the target, thus functioning overall as a large-scale, high energy, long-distance version of the Taser electroshock gun. Alternating current is sent through a series of step-up transformers, increasing the voltage and decreasing the current. The final voltage may be between 108 and 109 volts. This current is fed into the plasma channel created by the laser beam. Laser-induced plasma channel A ''laser-induced plasma channel'' (LIPC) is formed by the following process: * A laser emits a laser beam into the air. * The laser beam rapidly heats and ionizes surrounding gases to form plasma. * The plasma forms an electrically conductive plasma channel. Because a laser-induced plasma channel relies on i ...
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Krypton Fluoride Laser
A krypton fluoride laser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. An excimer laser typically contains a mixture of: a noble gas such as argon, krypton, or xenon; and a halogen gas such as fluorine or chlorine. Under suitably intense conditions of electromagnetic stimulation and pressure, the mixture emits a beam of coherent stimulated radiation as laser light in the ultraviolet range. KrF and ArF excimer lasers are widely incorporated into high-resolution photolithography machines, one of the critical tools required for microelectronic chip manufacturing in nanometer dimensions. Excimer laser lithographyJain, K. "Excimer La ...
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Excimer Lamp
An excimer lamp (or excilamp) is a source of ultraviolet light based on spontaneous emission of excimer (exciplex) molecules. Introduction Excimer lamps are quasimonochromatic light sources operating over a wide range of wavelengths in the ultraviolet (UV) and vacuum ultraviolet (VUV) spectral regions. Operation of an excimer lamp is based on the formation of excited dimers (excimers), which spontaneously transiting from the excited state to the ground state result in the emission of UV-photons. The spectral maximum of excimer lamp radiation is specified by a working excimer molecule (see table below). Excimers are diatomic molecules (dimers) or polyatomic molecules that have stable excited electronic states and an unbound or weakly bound (thermally unstable) ground state. Initially, only homonuclear diatomic molecules with a stable excited state but a repulsive ground state were called excimers (exci''ted'' dimers). The term "excimer" was later extended to refer any polyat ...
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Excimer Laser
An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining. Since 1960s excimer lasers are widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing. Terminology and history The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. Most excimer lasers are of the noble gas halide type, for which the term ''excimer'' is, strictly speaking, a misnomer. (Although less commonly used, the proper term for such is an exciplex laser.) Excimer laser was proposed in 1960 by Fritz Houtermans. The excimer laser development started with the observation of a nascent spectral line narrowing at 176 nm  reported in 1971 by Nikolai Basov, V. A. Danilychev and Yu. M. Popov, at the Leb ...
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Excimer
An excimer (originally short for excited dimer) is a short-lived dimeric or heterodimeric molecule formed from two species, at least one of which has a valence shell completely filled with electrons (for example, noble gases). In this case, formation of molecules is possible only if such atom is in an electronic excited state. Heteronuclear molecules and molecules that have more than two species are also called exciplex molecules (originally short for excited complex). Excimers are often diatomic and are composed of two atoms or molecules that would not bond if both were in the ground state. The lifetime of an excimer is very short, on the order of nanoseconds. Formation and decay Under the molecular orbital formalism, a typical ground-state molecule has electrons in the lowest possible energy levels. According to the Pauli principle, at most two electrons can occupy a given orbital, and if an orbital contains two electrons they must be in opposite spin states. The highest occu ...
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Carcinogen
A carcinogen is any substance, radionuclide, or radiation that promotes carcinogenesis (the formation of cancer). This may be due to the ability to damage the genome or to the disruption of cellular metabolic processes. Several radioactive substances are considered carcinogens, but their carcinogenic activity is attributed to the radiation, for example gamma rays and alpha particles, which they emit. Common examples of non-radioactive carcinogens are inhaled asbestos, certain dioxins, and tobacco smoke. Although the public generally associates carcinogenicity with synthetic chemicals, it is equally likely to arise from both natural and synthetic substances. Carcinogens are not necessarily immediately toxic; thus, their effect can be insidious. Carcinogens, as mentioned, are agents in the environment capable of contributing to cancer growth. Carcinogens can be categorized into two different types: activation-dependent and activation-independent, and each nature impacts their level ...
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Inertial Confinement Fusion
Inertial confinement fusion (ICF) is a fusion energy process that initiates nuclear fusion reactions by compressing and heating targets filled with thermonuclear fuel. In modern machines, the targets are small spherical pellets about the size of a pinhead typically containing a mixture of about 10 milligrams of deuterium 2H and tritium 3H. To compress and heat the fuel, energy is deposited in the outer layer of the target using high-energy beams of photons, electrons or ions, although almost all ICF devices used lasers. The beams heat the outer layer, which explodes outward. This produces a reaction force against the remainder of the target, which accelerates it inwards and compresses the fuel. This process also creates shock waves that travel inward through the target. Sufficiently powerful shock waves can compress and heat the fuel at the center such that fusion occurs. ICF is one of two major branches of fusion energy research, the other is magnetic confinement fusion. When ...
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United States Naval Research Laboratory
The United States Naval Research Laboratory (NRL) is the corporate research laboratory for the United States Navy and the United States Marine Corps. It was founded in 1923 and conducts basic scientific research, applied research, technological development and prototyping. The laboratory's specialties include plasma physics, space physics, materials science, and tactical electronic warfare. NRL is one of the first US government scientific R&D laboratories, having opened in 1923 at the instigation of Thomas Edison, and is currently under the Office of Naval Research. As of 2016, NRL was a United States Navy Working Capital Fund, Navy Working Capital Fund activity, which means it is not a line-item in the US Federal Budget. Instead of direct funding from Congress, all costs, including overhead, were recovered through sponsor-funded research projects. NRL's research expenditures were approximately $1 billion per year. Research The Naval Research Laboratory conducts a wide v ...
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Fused Quartz
Fused quartz, fused silica or quartz glass is a glass consisting of almost pure silica (silicon dioxide, SiO2) in amorphous (non-crystalline) form. This differs from all other commercial glasses in which other ingredients are added which change the glasses' optical and physical properties, such as lowering the melt temperature. Fused quartz, therefore, has high working and melting temperatures, making it less desirable for most common applications. The terms fused quartz and fused silica are used interchangeably, but can refer to different manufacturing techniques, as noted below, resulting in different trace impurities. However fused quartz, being in the glassy state, has quite different physical properties compared to crystalline quartz. Due to its physical properties it finds specialty uses in semiconductor fabrication and laboratory equipment, for instance. Compared to other common glasses, the optical transmission of pure silica extends well into the ultraviolet and infra ...
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